EP2646838A4 - Method and apparatus of using peak force tapping mode to measure physical properties of a sample - Google Patents

Method and apparatus of using peak force tapping mode to measure physical properties of a sample

Info

Publication number
EP2646838A4
EP2646838A4 EP11846886.7A EP11846886A EP2646838A4 EP 2646838 A4 EP2646838 A4 EP 2646838A4 EP 11846886 A EP11846886 A EP 11846886A EP 2646838 A4 EP2646838 A4 EP 2646838A4
Authority
EP
European Patent Office
Prior art keywords
sample
physical properties
peak force
tapping mode
measure physical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11846886.7A
Other languages
German (de)
French (fr)
Other versions
EP2646838B1 (en
EP2646838A2 (en
Inventor
Jian Shi
Yan Hu
Shuiqing Hu
Ji Ma
Chanmin Su
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bruker Nano Inc
Original Assignee
Bruker Nano Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bruker Nano Inc filed Critical Bruker Nano Inc
Publication of EP2646838A2 publication Critical patent/EP2646838A2/en
Publication of EP2646838A4 publication Critical patent/EP2646838A4/en
Application granted granted Critical
Publication of EP2646838B1 publication Critical patent/EP2646838B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Power Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
EP11846886.7A 2010-11-29 2011-11-29 Method of using peak force tapping mode to measure physical properties of a sample Active EP2646838B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US41783710P 2010-11-29 2010-11-29
PCT/US2011/062467 WO2012078415A2 (en) 2010-11-29 2011-11-29 Method and apparatus of using peak force tapping mode to measure physical properties of a sample

Publications (3)

Publication Number Publication Date
EP2646838A2 EP2646838A2 (en) 2013-10-09
EP2646838A4 true EP2646838A4 (en) 2014-04-23
EP2646838B1 EP2646838B1 (en) 2019-11-27

Family

ID=46207652

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11846886.7A Active EP2646838B1 (en) 2010-11-29 2011-11-29 Method of using peak force tapping mode to measure physical properties of a sample

Country Status (5)

Country Link
EP (1) EP2646838B1 (en)
JP (2) JP6010040B2 (en)
CN (2) CN105319396B (en)
RU (1) RU2571446C2 (en)
WO (1) WO2012078415A2 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013012941A1 (en) * 2013-07-31 2015-02-05 Johannes Kindt Long-range multi-axis scanner in microscope objective format
US9739799B2 (en) * 2014-02-28 2017-08-22 Bruker Nano, Inc. Method and apparatus to compensate for deflection artifacts in an atomic force microscope
FR3071627B1 (en) * 2017-09-25 2022-02-25 Concept Scient Instruments CONTROL METHOD OF A PROBE
EP3495827A1 (en) * 2017-12-05 2019-06-12 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Atomic force microscopy system
EP3743732A4 (en) * 2018-01-22 2021-09-15 Lehigh University System and method for a non-tapping mode scattering-type scanning near-field optical microscopy
US11029330B2 (en) * 2018-08-06 2021-06-08 Bruker Nano, Inc. Nanoscale dynamic mechanical analysis via atomic force microscopy (AFM-nDMA)
CN109765406A (en) * 2019-01-28 2019-05-17 清华大学 A method of the microcosmic elasticity modulus of measurement gel particle
CN109884347A (en) * 2019-02-25 2019-06-14 燕山大学 The method for delaying probe tip to wear under AFM tapping-mode
CN110763873B (en) * 2019-11-18 2021-04-13 中国科学院沈阳自动化研究所 Peak force tapping and torsional resonance compounding method based on atomic force microscope technology
CN111398283A (en) * 2020-04-28 2020-07-10 中北大学 System for automatically adjusting laser reflection light path
CN111965391B (en) * 2020-08-17 2023-07-14 中国科学院宁波材料技术与工程研究所 Method for representing stability of nano material
CN113092825B (en) * 2021-03-05 2022-12-30 中山大学 Atomic force microscope system and current detection method thereof
CA3211423A1 (en) * 2021-03-15 2022-09-22 Arindam Phani Transitional tapping atomic force microscopy for high-resolution imaging
US11721519B2 (en) 2021-08-05 2023-08-08 Synchrotron Research, Inc. Sparse sampling using a programmatically randomized signal modulating a carrier signal

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010057052A2 (en) * 2008-11-13 2010-05-20 Veeco Instruments Inc. Method and apparatus of operating a scanning probe microscope

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US6095679A (en) * 1996-04-22 2000-08-01 Ta Instruments Method and apparatus for performing localized thermal analysis and sub-surface imaging by scanning thermal microscopy
US7550963B1 (en) * 1996-09-20 2009-06-23 The Regents Of The University Of California Analytical scanning evanescent microwave microscope and control stage
JP3278046B2 (en) * 1997-07-29 2002-04-30 セイコーインスツルメンツ株式会社 3D scanning probe microscope
JPH11160333A (en) * 1997-11-25 1999-06-18 Jeol Ltd Scanning probe microscope
JPH11183414A (en) * 1997-12-19 1999-07-09 Nikon Corp Scanning heat transfer distribution measuring device
JPH11352135A (en) * 1998-06-04 1999-12-24 Seiko Instruments Inc Interatomic force microscope
US6189374B1 (en) * 1999-03-29 2001-02-20 Nanodevices, Inc. Active probe for an atomic force microscope and method of use thereof
JP3536973B2 (en) * 2000-04-20 2004-06-14 日本電気株式会社 Coaxial probe and scanning microwave microscope using the coaxial probe
US20020021139A1 (en) * 2000-06-16 2002-02-21 The Penn State Research Foundation Molecular probe station
US20070082459A1 (en) * 2001-09-12 2007-04-12 Faris Sadeg M Probes, methods of making probes and applications of probes
JP2003227788A (en) * 2002-02-05 2003-08-15 Inst Of Physical & Chemical Res Scanning probe microscope and measuring method of surface structure of sample
JP2004170281A (en) * 2002-11-21 2004-06-17 Hitachi Ltd Scanning type local electric current measuring instrument, and thin film device manufacturing apparatus provided with the same
US7448798B1 (en) * 2003-06-18 2008-11-11 Veeco Instruments Inc. Scanning thermal probe microscope
EP1644937A1 (en) * 2003-07-15 2006-04-12 University Of Bristol Probe for an atomic force microscope
JP4452278B2 (en) * 2004-06-25 2010-04-21 独立行政法人科学技術振興機構 Probe device
JP2006258429A (en) * 2005-03-15 2006-09-28 Sii Nanotechnology Inc Scanning probe microscope
US20060260388A1 (en) * 2005-04-26 2006-11-23 Chanmin Su Probe and method for a scanning probe microscope
KR100869046B1 (en) * 2007-02-09 2008-11-18 한국기계연구원 Afm probe
US8402819B2 (en) * 2007-05-15 2013-03-26 Anasys Instruments, Inc. High frequency deflection measurement of IR absorption
US7845215B2 (en) * 2007-05-31 2010-12-07 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Resonant difference-frequency atomic force ultrasonic microscope
US7770231B2 (en) * 2007-08-02 2010-08-03 Veeco Instruments, Inc. Fast-scanning SPM and method of operating same
US7977636B2 (en) * 2008-08-12 2011-07-12 Anasys Instruments, Inc. Infrared imaging using thermal radiation from a scanning probe tip
JP5270280B2 (en) * 2008-09-19 2013-08-21 独立行政法人科学技術振興機構 Signal light measurement system for near-field optical microscope

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
WO2010057052A2 (en) * 2008-11-13 2010-05-20 Veeco Instruments Inc. Method and apparatus of operating a scanning probe microscope

Also Published As

Publication number Publication date
RU2571446C2 (en) 2015-12-20
EP2646838B1 (en) 2019-11-27
JP2013544368A (en) 2013-12-12
JP2016224070A (en) 2016-12-28
CN103328984A (en) 2013-09-25
JP6374461B2 (en) 2018-08-15
CN103328984B (en) 2015-11-25
RU2013128377A (en) 2015-01-10
WO2012078415A3 (en) 2013-04-04
EP2646838A2 (en) 2013-10-09
JP6010040B2 (en) 2016-10-19
CN105319396A (en) 2016-02-10
WO2012078415A2 (en) 2012-06-14
CN105319396B (en) 2019-06-04

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