EP2506018A4 - Capteur d'accélération - Google Patents
Capteur d'accélérationInfo
- Publication number
- EP2506018A4 EP2506018A4 EP10832714.9A EP10832714A EP2506018A4 EP 2506018 A4 EP2506018 A4 EP 2506018A4 EP 10832714 A EP10832714 A EP 10832714A EP 2506018 A4 EP2506018 A4 EP 2506018A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- acceleration sensor
- acceleration
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009266585A JP2011112392A (ja) | 2009-11-24 | 2009-11-24 | 加速度センサ |
JP2009266583A JP2011112390A (ja) | 2009-11-24 | 2009-11-24 | 加速度センサ |
JP2009266581A JP5716149B2 (ja) | 2009-11-24 | 2009-11-24 | 加速度センサ |
JP2009266582A JP2011112389A (ja) | 2009-11-24 | 2009-11-24 | 加速度センサ |
PCT/IB2010/002975 WO2011064642A2 (fr) | 2009-11-24 | 2010-11-23 | Capteur d'accélération |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2506018A2 EP2506018A2 (fr) | 2012-10-03 |
EP2506018A4 true EP2506018A4 (fr) | 2013-06-19 |
Family
ID=44066998
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10832714.9A Withdrawn EP2506018A4 (fr) | 2009-11-24 | 2010-11-23 | Capteur d'accélération |
Country Status (4)
Country | Link |
---|---|
US (4) | US9261530B2 (fr) |
EP (1) | EP2506018A4 (fr) |
CN (1) | CN102667497B (fr) |
WO (1) | WO2011064642A2 (fr) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011064642A2 (fr) | 2009-11-24 | 2011-06-03 | パナソニック電工株式会社 | Capteur d'accélération |
KR102016898B1 (ko) | 2012-01-12 | 2019-09-02 | 무라타 일렉트로닉스 오와이 | 가속기 센서 구조체 및 그 사용 |
JP5979344B2 (ja) * | 2012-01-30 | 2016-08-24 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
JP5943192B2 (ja) * | 2012-04-10 | 2016-06-29 | セイコーエプソン株式会社 | 物理量センサーおよびその製造方法、並びに電子機器 |
JP6155832B2 (ja) * | 2013-05-16 | 2017-07-05 | セイコーエプソン株式会社 | センサー素子、電子機器、および移動体 |
DE102014202816B4 (de) * | 2014-02-17 | 2022-06-30 | Robert Bosch Gmbh | Wippeneinrichtung für einen mikromechanischen Z-Sensor |
US10252905B2 (en) * | 2015-02-24 | 2019-04-09 | Mitsubishi Electric Corporation | Semiconductor device and method of manufacturing the same |
JP6631108B2 (ja) * | 2015-09-15 | 2020-01-15 | セイコーエプソン株式会社 | 物理量センサー、センサーデバイス、電子機器および移動体 |
JP6468167B2 (ja) * | 2015-11-03 | 2019-02-13 | 株式会社デンソー | 力学量センサ |
WO2019009396A1 (fr) * | 2017-07-06 | 2019-01-10 | 浜松ホトニクス株式会社 | Dispositif optique |
JP7112876B2 (ja) | 2017-07-06 | 2022-08-04 | 浜松ホトニクス株式会社 | 光学デバイス |
EP3650911B1 (fr) | 2017-07-06 | 2023-08-30 | Hamamatsu Photonics K.K. | Dispositif optique |
CN110832379B (zh) | 2017-07-06 | 2022-02-11 | 浜松光子学株式会社 | 光学装置 |
JP6503150B1 (ja) | 2017-07-06 | 2019-04-17 | 浜松ホトニクス株式会社 | 光学デバイス |
US10759656B2 (en) * | 2017-09-29 | 2020-09-01 | Apple Inc. | MEMS sensor with dual pendulous proof masses |
CN115657296A (zh) | 2017-11-15 | 2023-01-31 | 浜松光子学株式会社 | 光学器件的制造方法 |
DE102017221891B4 (de) * | 2017-12-05 | 2020-03-19 | Bayerische Motoren Werke Aktiengesellschaft | Verfahren zum Bestimmen eines Schadens, der bei einem Unfall zwischen einem Fahrzeug und einem Stoßpartner an dem Fahrzeug auftritt |
KR102520722B1 (ko) * | 2018-04-05 | 2023-04-11 | 삼성디스플레이 주식회사 | 압력 센서 |
DE102018211547A1 (de) | 2018-07-11 | 2020-01-16 | Robert Bosch Gmbh | Mikromechanischer Sensor |
DE102018219546B3 (de) | 2018-11-15 | 2019-09-12 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
EP4116718A1 (fr) * | 2021-07-05 | 2023-01-11 | Murata Manufacturing Co., Ltd. | Accéléromètre à bascule |
EP4249923A1 (fr) | 2022-03-25 | 2023-09-27 | Murata Manufacturing Co., Ltd. | Élément accéléromètre amélioré pour la détection d'accélérations hors plan |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6459161A (en) * | 1987-08-31 | 1989-03-06 | Fujikura Ltd | Semiconductor acceleration sensor and manufacture thereof |
US20060021436A1 (en) * | 2002-06-11 | 2006-02-02 | Konrad Kapser | Multiaxial monolithic acceleration sensor |
WO2006134232A1 (fr) * | 2005-06-17 | 2006-12-21 | Vti Technologies Oy | Capteur d’accélération capacitif et son procédé de fabrication |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2617607B1 (fr) * | 1987-06-30 | 1989-12-01 | Applic Gles Electrici Meca | Accelerometre pendulaire a reequilibrage et procede de fabrication d'un tel accelerometre |
JP2804196B2 (ja) * | 1991-10-18 | 1998-09-24 | 株式会社日立製作所 | マイクロセンサ及びそれを用いた制御システム |
CA2149933A1 (fr) | 1994-06-29 | 1995-12-30 | Robert M. Boysel | Accelerometres micromecaniques munis de circuits de detection ameliores |
JPH1114658A (ja) | 1997-06-25 | 1999-01-22 | Mitsubishi Electric Corp | 静電容量式加速度センサ |
US6065341A (en) | 1998-02-18 | 2000-05-23 | Denso Corporation | Semiconductor physical quantity sensor with stopper portion |
JPH11230986A (ja) | 1998-02-18 | 1999-08-27 | Denso Corp | 半導体力学量センサ |
JP2000019198A (ja) | 1998-06-29 | 2000-01-21 | Zexel Corp | 加速度センサ |
AU3730700A (en) | 1999-03-17 | 2000-10-04 | Input/Output, Inc. | Hydrophone assembly |
US6871544B1 (en) | 1999-03-17 | 2005-03-29 | Input/Output, Inc. | Sensor design and process |
US6230566B1 (en) * | 1999-10-01 | 2001-05-15 | The Regents Of The University Of California | Micromachined low frequency rocking accelerometer with capacitive pickoff |
FI119527B (fi) | 2003-03-05 | 2008-12-15 | Vti Technologies Oy | Kapasitiivinen kiihtyvyysanturi |
US7367232B2 (en) * | 2004-01-24 | 2008-05-06 | Vladimir Vaganov | System and method for a three-axis MEMS accelerometer |
US7640807B2 (en) | 2004-07-21 | 2010-01-05 | Hokuriku Electric Industry Co., Ltd. | Semiconductor Sensor |
JP4561348B2 (ja) | 2004-12-17 | 2010-10-13 | 富士通株式会社 | 磁気記録媒体、磁気記録装置及び磁気記録媒体の製造方法 |
JP3906233B2 (ja) | 2005-10-11 | 2007-04-18 | 株式会社ルネサステクノロジ | 半導体装置 |
JP2006133245A (ja) * | 2006-02-16 | 2006-05-25 | Mitsubishi Electric Corp | 容量式加速度センサ |
US8176782B2 (en) | 2006-04-28 | 2012-05-15 | Panasonic Electric Works Co., Ltd. | Capacitive sensor |
JP2007298405A (ja) * | 2006-04-28 | 2007-11-15 | Matsushita Electric Works Ltd | 静電容量式センサ |
JP4605087B2 (ja) * | 2006-04-28 | 2011-01-05 | パナソニック電工株式会社 | 静電容量式センサ |
JP5070778B2 (ja) | 2006-09-20 | 2012-11-14 | 株式会社デンソー | 力学量センサ |
US7506791B2 (en) | 2006-09-29 | 2009-03-24 | Ethicon Endo-Surgery, Inc. | Surgical stapling instrument with mechanical mechanism for limiting maximum tissue compression |
US7578190B2 (en) | 2007-08-03 | 2009-08-25 | Freescale Semiconductor, Inc. | Symmetrical differential capacitive sensor and method of making same |
US8850889B2 (en) | 2008-11-25 | 2014-10-07 | Panasonic Corporation | Acceleration sensor |
WO2011064642A2 (fr) * | 2009-11-24 | 2011-06-03 | パナソニック電工株式会社 | Capteur d'accélération |
-
2010
- 2010-11-23 WO PCT/IB2010/002975 patent/WO2011064642A2/fr active Application Filing
- 2010-11-23 EP EP10832714.9A patent/EP2506018A4/fr not_active Withdrawn
- 2010-11-23 CN CN201080052810.1A patent/CN102667497B/zh not_active Expired - Fee Related
- 2010-11-23 US US13/511,178 patent/US9261530B2/en active Active
-
2015
- 2015-05-21 US US14/718,493 patent/US9244094B2/en not_active Expired - Fee Related
- 2015-10-05 US US14/874,845 patent/US9702895B2/en not_active Expired - Fee Related
-
2017
- 2017-06-08 US US15/617,777 patent/US10126322B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6459161A (en) * | 1987-08-31 | 1989-03-06 | Fujikura Ltd | Semiconductor acceleration sensor and manufacture thereof |
US20060021436A1 (en) * | 2002-06-11 | 2006-02-02 | Konrad Kapser | Multiaxial monolithic acceleration sensor |
WO2006134232A1 (fr) * | 2005-06-17 | 2006-12-21 | Vti Technologies Oy | Capteur d’accélération capacitif et son procédé de fabrication |
Non-Patent Citations (1)
Title |
---|
See also references of WO2011064642A2 * |
Also Published As
Publication number | Publication date |
---|---|
US20170276696A1 (en) | 2017-09-28 |
CN102667497A (zh) | 2012-09-12 |
WO2011064642A2 (fr) | 2011-06-03 |
US20160025768A1 (en) | 2016-01-28 |
US9244094B2 (en) | 2016-01-26 |
WO2011064642A3 (fr) | 2011-07-21 |
US9261530B2 (en) | 2016-02-16 |
US20150253350A1 (en) | 2015-09-10 |
US10126322B2 (en) | 2018-11-13 |
CN102667497B (zh) | 2014-06-18 |
US20120227494A1 (en) | 2012-09-13 |
EP2506018A2 (fr) | 2012-10-03 |
US9702895B2 (en) | 2017-07-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20120518 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
DAX | Request for extension of the european patent (deleted) | ||
A4 | Supplementary search report drawn up and despatched |
Effective date: 20130523 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 29/84 20060101ALI20130516BHEP Ipc: G01P 15/18 20130101ALI20130516BHEP Ipc: G01P 15/125 20060101AFI20130516BHEP Ipc: G01P 15/08 20060101ALI20130516BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
|
18W | Application withdrawn |
Effective date: 20131128 |