EP2089229A1 - Inkjet nozzle assembly having thermal bend actuator with an active beam defining substantial part of nozzle chamber roof - Google Patents
Inkjet nozzle assembly having thermal bend actuator with an active beam defining substantial part of nozzle chamber roofInfo
- Publication number
- EP2089229A1 EP2089229A1 EP06827989A EP06827989A EP2089229A1 EP 2089229 A1 EP2089229 A1 EP 2089229A1 EP 06827989 A EP06827989 A EP 06827989A EP 06827989 A EP06827989 A EP 06827989A EP 2089229 A1 EP2089229 A1 EP 2089229A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- nozzle assembly
- actuator
- inkjet nozzle
- optionally
- roof
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011148 porous material Substances 0.000 claims description 37
- 229910052782 aluminium Inorganic materials 0.000 claims description 33
- 229910000838 Al alloy Inorganic materials 0.000 claims description 26
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 26
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 21
- 239000004411 aluminium Substances 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 17
- 239000000377 silicon dioxide Substances 0.000 claims description 17
- 238000005452 bending Methods 0.000 claims description 16
- 238000009413 insulation Methods 0.000 claims description 16
- 235000012239 silicon dioxide Nutrition 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 229910052720 vanadium Inorganic materials 0.000 claims description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 14
- 229910045601 alloy Inorganic materials 0.000 claims description 13
- 239000000956 alloy Substances 0.000 claims description 13
- 229910021426 porous silicon Inorganic materials 0.000 claims description 13
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 13
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 8
- 239000010936 titanium Substances 0.000 claims description 8
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 7
- 229910052804 chromium Inorganic materials 0.000 claims description 7
- 239000011651 chromium Substances 0.000 claims description 7
- 229910017052 cobalt Inorganic materials 0.000 claims description 7
- 239000010941 cobalt Substances 0.000 claims description 7
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 7
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims description 7
- 229910052759 nickel Inorganic materials 0.000 claims description 7
- 229910017083 AlN Inorganic materials 0.000 claims description 6
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 230000008901 benefit Effects 0.000 description 11
- 239000000758 substrate Substances 0.000 description 10
- 238000013461 design Methods 0.000 description 9
- 230000000712 assembly Effects 0.000 description 8
- 238000000429 assembly Methods 0.000 description 8
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910000756 V alloy Inorganic materials 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000006872 improvement Effects 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000005499 meniscus Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 230000000717 retained effect Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- PTXMVOUNAHFTFC-UHFFFAOYSA-N alumane;vanadium Chemical compound [AlH3].[V] PTXMVOUNAHFTFC-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 description 1
- 229910020968 MoSi2 Inorganic materials 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- 229910033181 TiB2 Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- HIMLGVIQSDVUJQ-UHFFFAOYSA-N aluminum vanadium Chemical compound [Al].[V] HIMLGVIQSDVUJQ-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 230000003534 oscillatory effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical group [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000004936 stimulating effect Effects 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/05—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers produced by the application of heat
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
- B41J2002/14435—Moving nozzle made of thermal bend detached actuator
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/15—Moving nozzle or nozzle plate
Definitions
- the first beam is comprised of an aluminium alloy.
- said porous material is porous silicon dioxide.
- the second beam is comprised of a porous material.
- said aluminium alloy comprises aluminium and at least one other metal having a Young's modulus of more than 100 GPa.
- Figure 3 is a perspective view of the nozzle assembly shown in Figure 2(A);
- Figure 4 is a perspective view of part of a printhead integrated circuit comprising an array of nozzle assemblies, as shown in Figures 2(A) and 3;
- the nozzle assembly 3QO is constructed (by way of MEMS technology) on a substrate 301 defining an ink supply aperture 302 opening through a hexagonal inlet 303 (which could be of any other suitable configuration) into a chamber 304.
- the chamber is defined by a floor portion 305, roof portion 306 and peripheral sidewalls 307 and 308 which overlap in a telescopic manner.
- the sidewalls 307, depending downwardly from roof portion 306, are sized to be able to move upwardly and downwardly within sidewalls 308 which depend upwardly from floor portion 305.
- the nozzle assembly 500 shown in Figures 13 to 15 is similar to the nozzle assembly 400 insofar as a thermal bend actuator 510, having an upper active beam 511 and a lower passive beam 512, defines a 5 moving portion of a roof 504 of the nozzle chamber 501.
- the nozzle assembly 500 achieves the same advantages, in terms of increased power, as the nozzle assembly 400.
Abstract
Description
Claims
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PL06827989T PL2089229T3 (en) | 2006-12-04 | 2006-12-04 | Inkjet nozzle assembly having thermal bend actuator with an active beam defining substantial part of nozzle chamber roof |
| SI200631460T SI2089229T1 (en) | 2006-12-04 | 2006-12-04 | Inkjet nozzle assembly having thermal bend actuator with an active beam defining substantial part of nozzle chamber roof |
| CY20121101049T CY1113795T1 (en) | 2006-12-04 | 2012-11-01 | INK PROJECTION INJECTION INCREASING A THERMAL BENEFIT INTEGRATED WITH AN INTERFACE BASE SPECIFIED BY A SUBSTANTIAL PART OF THIS |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/AU2006/001831 WO2008067581A1 (en) | 2006-12-04 | 2006-12-04 | Inkjet nozzle assembly having thermal bend actuator with an active beam defining substantial part of nozzle chamber roof |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP2089229A1 true EP2089229A1 (en) | 2009-08-19 |
| EP2089229A4 EP2089229A4 (en) | 2011-03-16 |
| EP2089229B1 EP2089229B1 (en) | 2012-08-15 |
Family
ID=39491550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP06827989A Active EP2089229B1 (en) | 2006-12-04 | 2006-12-04 | Inkjet nozzle assembly having thermal bend actuator with an active beam defining substantial part of nozzle chamber roof |
Country Status (11)
| Country | Link |
|---|---|
| EP (1) | EP2089229B1 (en) |
| JP (1) | JP4933629B2 (en) |
| KR (1) | KR101030152B1 (en) |
| CY (1) | CY1113795T1 (en) |
| DK (1) | DK2089229T3 (en) |
| ES (1) | ES2393305T3 (en) |
| PL (1) | PL2089229T3 (en) |
| PT (1) | PT2089229E (en) |
| SI (1) | SI2089229T1 (en) |
| TW (1) | TWI468301B (en) |
| WO (1) | WO2008067581A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101240001B1 (en) * | 2008-09-29 | 2013-03-06 | 실버브룩 리서치 피티와이 리미티드 | Efficient inkjet nozzle assembly |
| KR101399304B1 (en) | 2009-10-08 | 2014-05-28 | 엘지디스플레이 주식회사 | Liquid crystal display device and method of driving the same |
| KR102549376B1 (en) | 2021-02-26 | 2023-06-30 | 한국과학기술원 | Printing Ink Dispensing Apparatus with Heatable Cantilever Structured Fluid Channel and Manufacturing Method of the Same |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1473204A (en) | 1922-10-09 | 1923-11-06 | Blades Robert | Meat hanger and apparatus for applying the same |
| JP3321488B2 (en) * | 1994-03-31 | 2002-09-03 | シャープ株式会社 | Ink jet recording device |
| US6255156B1 (en) | 1997-02-07 | 2001-07-03 | Micron Technology, Inc. | Method for forming porous silicon dioxide insulators and related structures |
| US6260953B1 (en) | 1997-07-15 | 2001-07-17 | Silverbrook Research Pty Ltd | Surface bend actuator vented ink supply ink jet printing mechanism |
| US6682174B2 (en) * | 1998-03-25 | 2004-01-27 | Silverbrook Research Pty Ltd | Ink jet nozzle arrangement configuration |
| US6447099B2 (en) * | 1997-07-15 | 2002-09-10 | Silverbrook Research Pty Ltd | Ink jet mechanism with thermoelastic bend actuator having conductive and resistive beams |
| US6416167B1 (en) | 1997-07-15 | 2002-07-09 | Silverbrook Research Pty Ltd | Thermally actuated ink jet printing mechanism having a series of thermal actuator units |
| JP4160250B2 (en) * | 1997-07-15 | 2008-10-01 | シルバーブルック リサーチ プロプライエタリイ、リミテッド | Thermally operated inkjet |
| US6540332B2 (en) * | 1997-07-15 | 2003-04-01 | Silverbrook Research Pty Ltd | Motion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead |
| US6623108B2 (en) * | 1998-10-16 | 2003-09-23 | Silverbrook Research Pty Ltd | Ink jet printhead having thermal bend actuator heating element electrically isolated from nozzle chamber ink |
| ATE344214T1 (en) * | 1999-02-15 | 2006-11-15 | Silverbrook Res Pty Ltd | THERMAL BENDING ACTUATOR AND BLADE STRUCTURE FOR INKJET NOZZLE |
| AUPP993099A0 (en) * | 1999-04-22 | 1999-05-20 | Silverbrook Research Pty Ltd | A micromechancial device and method(ij46p2b) |
| AUPP993199A0 (en) * | 1999-04-22 | 1999-05-20 | Silverbrook Research Pty Ltd | A micromechanical device and method (ij46p2a) |
| AUPQ130999A0 (en) * | 1999-06-30 | 1999-07-22 | Silverbrook Research Pty Ltd | A method and apparatus (IJ47V11) |
| US6412908B2 (en) * | 2000-05-23 | 2002-07-02 | Silverbrook Research Pty Ltd | Inkjet collimator |
| US6428133B1 (en) | 2000-05-23 | 2002-08-06 | Silverbrook Research Pty Ltd. | Ink jet printhead having a moving nozzle with an externally arranged actuator |
| CN100480047C (en) * | 2000-05-24 | 2009-04-22 | 西尔弗布鲁克研究有限公司 | Ink-jetting printing head with nozzle assembly array |
| CN100335278C (en) * | 2000-06-30 | 2007-09-05 | 西尔弗布鲁克研究有限公司 | Buckle resistant thermal bend actuators |
| US6623101B1 (en) | 2000-10-20 | 2003-09-23 | Silverbrook Research Pty Ltd | Moving nozzle ink jet |
| AUPR224000A0 (en) * | 2000-12-21 | 2001-01-25 | Silverbrook Research Pty. Ltd. | An apparatus (mj28) |
| US6631979B2 (en) * | 2002-01-17 | 2003-10-14 | Eastman Kodak Company | Thermal actuator with optimized heater length |
| US6536874B1 (en) | 2002-04-12 | 2003-03-25 | Silverbrook Research Pty Ltd | Symmetrically actuated ink ejection components for an ink jet printhead chip |
| US6721020B1 (en) * | 2002-11-13 | 2004-04-13 | Eastman Kodak Company | Thermal actuator with spatial thermal pattern |
| US6755509B2 (en) * | 2002-11-23 | 2004-06-29 | Silverbrook Research Pty Ltd | Thermal ink jet printhead with suspended beam heater |
| US7025443B2 (en) * | 2003-06-27 | 2006-04-11 | Eastman Kodak Company | Liquid drop emitter with split thermo-mechanical actuator |
| KR100580654B1 (en) * | 2004-10-29 | 2006-05-16 | 삼성전자주식회사 | Nozzle plate, inkjet printhead having the same and manufacturing method of nozzle plate |
-
2006
- 2006-12-04 JP JP2009538549A patent/JP4933629B2/en active Active
- 2006-12-04 KR KR1020097009462A patent/KR101030152B1/en active IP Right Grant
- 2006-12-04 SI SI200631460T patent/SI2089229T1/en unknown
- 2006-12-04 PL PL06827989T patent/PL2089229T3/en unknown
- 2006-12-04 WO PCT/AU2006/001831 patent/WO2008067581A1/en active Application Filing
- 2006-12-04 PT PT06827989T patent/PT2089229E/en unknown
- 2006-12-04 DK DK06827989.2T patent/DK2089229T3/en active
- 2006-12-04 EP EP06827989A patent/EP2089229B1/en active Active
- 2006-12-04 ES ES06827989T patent/ES2393305T3/en active Active
-
2007
- 2007-03-05 TW TW96107555A patent/TWI468301B/en active
-
2012
- 2012-11-01 CY CY20121101049T patent/CY1113795T1/en unknown
Non-Patent Citations (2)
| Title |
|---|
| No further relevant documents disclosed * |
| See also references of WO2008067581A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| PL2089229T3 (en) | 2013-06-28 |
| TWI468301B (en) | 2015-01-11 |
| KR101030152B1 (en) | 2011-04-18 |
| ES2393305T3 (en) | 2012-12-20 |
| EP2089229B1 (en) | 2012-08-15 |
| TW200824914A (en) | 2008-06-16 |
| EP2089229A4 (en) | 2011-03-16 |
| CY1113795T1 (en) | 2016-07-27 |
| JP4933629B2 (en) | 2012-05-16 |
| WO2008067581A1 (en) | 2008-06-12 |
| SI2089229T1 (en) | 2012-12-31 |
| PT2089229E (en) | 2012-11-20 |
| JP2010511527A (en) | 2010-04-15 |
| DK2089229T3 (en) | 2012-12-17 |
| KR20090095562A (en) | 2009-09-09 |
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