EP1782510A4 - Auf faserverstärkung basierte lichtquelle zur prüfung von halbleitern - Google Patents
Auf faserverstärkung basierte lichtquelle zur prüfung von halbleiternInfo
- Publication number
- EP1782510A4 EP1782510A4 EP05813080A EP05813080A EP1782510A4 EP 1782510 A4 EP1782510 A4 EP 1782510A4 EP 05813080 A EP05813080 A EP 05813080A EP 05813080 A EP05813080 A EP 05813080A EP 1782510 A4 EP1782510 A4 EP 1782510A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- light source
- based light
- semiconductor inspection
- amplified based
- fiber amplified
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2383—Parallel arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06754—Fibre amplifiers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02295—Microstructured optical fibre
- G02B6/02314—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
- G02B6/02342—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes characterised by cladding features, i.e. light confining region
- G02B6/02347—Longitudinal structures arranged to form a regular periodic lattice, e.g. triangular, square, honeycomb unit cell repeated throughout cladding
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02295—Microstructured optical fibre
- G02B6/02314—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
- G02B6/02342—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes characterised by cladding features, i.e. light confining region
- G02B6/02366—Single ring of structures, e.g. "air clad"
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0057—Temporal shaping, e.g. pulse compression, frequency chirping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
- H01S3/06729—Peculiar transverse fibre profile
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
- H01S3/06729—Peculiar transverse fibre profile
- H01S3/06741—Photonic crystal fibre, i.e. the fibre having a photonic bandgap
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
- H01S3/06745—Tapering of the fibre, core or active region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06791—Fibre ring lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/094003—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light the pumped medium being a fibre
- H01S3/094007—Cladding pumping, i.e. pump light propagating in a clad surrounding the active core
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/094003—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light the pumped medium being a fibre
- H01S3/094019—Side pumped fibre, whereby pump light is coupled laterally into the fibre via an optical component like a prism, or a grating, or via V-groove coupling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
- H01S3/09415—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1106—Mode locking
- H01S3/1112—Passive mode locking
- H01S3/1115—Passive mode locking using intracavity saturable absorbers
- H01S3/1118—Semiconductor saturable absorbers, e.g. semiconductor saturable absorber mirrors [SESAMs]; Solid-state saturable absorbers, e.g. carbon nanotube [CNT] based
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Lasers (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP11001760.5A EP2369695B1 (de) | 2004-08-25 | 2005-08-16 | Faserverstärker-Lichtquelle zur Prüfung von Halbleitern |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US60454004P | 2004-08-25 | 2004-08-25 | |
US11/056,855 US7924892B2 (en) | 2004-08-25 | 2005-02-11 | Fiber amplifier based light source for semiconductor inspection |
PCT/US2005/028993 WO2006023448A2 (en) | 2004-08-25 | 2005-08-16 | Fiber amplified based light source for semiconductor inspection |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1782510A2 EP1782510A2 (de) | 2007-05-09 |
EP1782510A4 true EP1782510A4 (de) | 2010-04-07 |
Family
ID=35968096
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP11001760.5A Active EP2369695B1 (de) | 2004-08-25 | 2005-08-16 | Faserverstärker-Lichtquelle zur Prüfung von Halbleitern |
EP05813080A Withdrawn EP1782510A4 (de) | 2004-08-25 | 2005-08-16 | Auf faserverstärkung basierte lichtquelle zur prüfung von halbleitern |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP11001760.5A Active EP2369695B1 (de) | 2004-08-25 | 2005-08-16 | Faserverstärker-Lichtquelle zur Prüfung von Halbleitern |
Country Status (3)
Country | Link |
---|---|
EP (2) | EP2369695B1 (de) |
JP (1) | JP5255838B2 (de) |
WO (1) | WO2006023448A2 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7443903B2 (en) * | 2006-04-19 | 2008-10-28 | Mobius Photonics, Inc. | Laser apparatus having multiple synchronous amplifiers tied to one master oscillator |
US8199398B2 (en) * | 2008-02-07 | 2012-06-12 | Imra America, Inc. | High power parallel fiber arrays |
WO2009133734A1 (ja) * | 2008-05-02 | 2009-11-05 | オリンパス株式会社 | 光学的検査装置、電磁波検出方法、電磁波検出装置、生態観察方法、顕微鏡、および、内視鏡並びに光断層画像生成装置 |
JP5538072B2 (ja) * | 2010-06-03 | 2014-07-02 | 株式会社日立ハイテクノロジーズ | 欠陥検査方法およびその装置 |
US9793673B2 (en) * | 2011-06-13 | 2017-10-17 | Kla-Tencor Corporation | Semiconductor inspection and metrology system using laser pulse multiplier |
WO2013160770A2 (en) * | 2012-04-27 | 2013-10-31 | Biolitec Pharma Marketing Ltd. | Fiber laser system for medical applications |
CA2935860A1 (en) | 2014-01-07 | 2015-07-16 | Thorlabs, Inc. | Adjustable mid-infrared super-continuum generator using a tunable femtosecond oscillator |
JP6190318B2 (ja) * | 2014-05-19 | 2017-08-30 | 日本電信電話株式会社 | レーザー発振器 |
JP6190317B2 (ja) * | 2014-05-19 | 2017-08-30 | 日本電信電話株式会社 | レーザー発振器 |
EP3234665B1 (de) * | 2014-12-18 | 2024-08-21 | NKT Photonics A/S | Photonische kristallfaser, verfahren zur herstellung und superkontinuum-lichtquelle |
US9362714B1 (en) * | 2015-03-12 | 2016-06-07 | Northrop Grumman Systems Corporation | Architecture for all-fiber delivery of coherently combined laser power |
CN106644391B (zh) * | 2016-09-19 | 2019-03-29 | 核工业理化工程研究院 | 一种激光振放链故障专家诊断系统及诊断方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6014249A (en) * | 1997-01-28 | 2000-01-11 | Imra America, Inc. | Apparatus and method for the generation of high-power femtosecond pulses from a fiber amplifier |
US20030008448A1 (en) * | 1999-05-27 | 2003-01-09 | Kafka James D. | Remote UV laser system and methods of use |
JP2003008115A (ja) * | 2001-06-26 | 2003-01-10 | Mitsubishi Cable Ind Ltd | 光増幅装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3646462A (en) * | 1969-11-14 | 1972-02-29 | American Optical Corp | Fiber for distortion-free propagation |
JP2656972B2 (ja) * | 1989-02-22 | 1997-09-24 | 日立電線株式会社 | 多波長ガラス導波路レーザーアレイ |
EP0435217B1 (de) * | 1989-12-26 | 1996-03-27 | United Technologies Corporation | Gepumpte Laser mit eingebetteter Bragg-Gitterstruktur |
JPH04267578A (ja) * | 1991-02-22 | 1992-09-24 | Toshiba Corp | パルスレーザ装置 |
JP3657694B2 (ja) * | 1995-03-31 | 2005-06-08 | リンテック株式会社 | 照明装置 |
US5694408A (en) * | 1995-06-07 | 1997-12-02 | Mcdonnell Douglas Corporation | Fiber optic laser system and associated lasing method |
US5867305A (en) * | 1996-01-19 | 1999-02-02 | Sdl, Inc. | Optical amplifier with high energy levels systems providing high peak powers |
US5832006A (en) * | 1997-02-13 | 1998-11-03 | Mcdonnell Douglas Corporation | Phased array Raman laser amplifier and operating method therefor |
JP4232130B2 (ja) * | 1998-03-11 | 2009-03-04 | 株式会社ニコン | レーザ装置並びにこのレーザ装置を用いた光照射装置および露光方法 |
US6061170A (en) * | 1998-03-16 | 2000-05-09 | Mcdonnell Douglas Corporation | Dual frequency laser amplifier array and operating method therefor |
CA2334554A1 (en) * | 1998-06-09 | 1999-12-16 | Crystal Fibre A/S | A photonic band gap fibre |
WO2001002904A1 (fr) * | 1999-06-30 | 2001-01-11 | The Furukawa Electric Co., Ltd. | Fibre optique |
JP4132581B2 (ja) * | 2000-06-07 | 2008-08-13 | ルーセント テクノロジーズ インコーポレーテッド | マルチモード光ファイバを含む装置 |
US6567605B1 (en) * | 2000-08-25 | 2003-05-20 | The Boeing Company | Fiber optic projection device |
FR2822243B1 (fr) * | 2001-03-16 | 2003-06-20 | Cit Alcatel | Fibre optique photonique a double gaine |
EP1586146A4 (de) * | 2002-12-20 | 2006-02-01 | Alnaire Laboratoires Corp | Optische pulslaser |
-
2005
- 2005-08-16 JP JP2007529941A patent/JP5255838B2/ja not_active Expired - Fee Related
- 2005-08-16 EP EP11001760.5A patent/EP2369695B1/de active Active
- 2005-08-16 EP EP05813080A patent/EP1782510A4/de not_active Withdrawn
- 2005-08-16 WO PCT/US2005/028993 patent/WO2006023448A2/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6014249A (en) * | 1997-01-28 | 2000-01-11 | Imra America, Inc. | Apparatus and method for the generation of high-power femtosecond pulses from a fiber amplifier |
US20030008448A1 (en) * | 1999-05-27 | 2003-01-09 | Kafka James D. | Remote UV laser system and methods of use |
JP2003008115A (ja) * | 2001-06-26 | 2003-01-10 | Mitsubishi Cable Ind Ltd | 光増幅装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2006023448A3 (en) | 2006-10-19 |
EP1782510A2 (de) | 2007-05-09 |
EP2369695B1 (de) | 2013-11-13 |
WO2006023448A2 (en) | 2006-03-02 |
JP2008511177A (ja) | 2008-04-10 |
EP2369695A2 (de) | 2011-09-28 |
EP2369695A3 (de) | 2012-02-08 |
JP5255838B2 (ja) | 2013-08-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
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