EP1684059A2 - Device for highly accurate generation and measurement of forces and displacements - Google Patents

Device for highly accurate generation and measurement of forces and displacements Download PDF

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Publication number
EP1684059A2
EP1684059A2 EP20060001411 EP06001411A EP1684059A2 EP 1684059 A2 EP1684059 A2 EP 1684059A2 EP 20060001411 EP20060001411 EP 20060001411 EP 06001411 A EP06001411 A EP 06001411A EP 1684059 A2 EP1684059 A2 EP 1684059A2
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EP
European Patent Office
Prior art keywords
frame
leaf springs
clamping
force
clamped
Prior art date
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Granted
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EP20060001411
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German (de)
French (fr)
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EP1684059B1 (en
EP1684059A3 (en
Inventor
Thomas Dr. Chudoba
Volker Dr. Linss
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ASMEC Advanced Surface Mechanics GmbH
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ASMEC Advanced Surface Mechanics GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/40—Investigating hardness or rebound hardness
    • G01N3/42—Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid
    • G01N3/46—Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid the indentors performing a scratching movement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/40—Investigating hardness or rebound hardness
    • G01N3/42—Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/003—Generation of the force
    • G01N2203/0032—Generation of the force using mechanical means
    • G01N2203/0035—Spring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/003—Generation of the force
    • G01N2203/005—Electromagnetic means
    • G01N2203/0051—Piezoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/026—Specifications of the specimen
    • G01N2203/0286—Miniature specimen; Testing on microregions of a specimen
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/06—Indicating or recording means; Sensing means
    • G01N2203/0617—Electrical or magnetic indicating, recording or sensing means
    • G01N2203/0623—Electrical or magnetic indicating, recording or sensing means using piezoelectric gauges
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20006—Resilient connections
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20341—Power elements as controlling elements
    • Y10T74/20354—Planar surface with orthogonal movement only
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20372—Manual controlling elements

Definitions

  • the invention relates to a device for the highly accurate generation and measurement of forces and displacements according to the preamble of claim 1.
  • the highly accurate generation and measurement of forces and displacements along an axis is commonly used in the manufacture of nanoindent and scratch or wear testers, forces and displacements in such devices are generated in the prior art in various ways, which is usually respected only in a high rigidity of the moving shaft intrusrichtug.
  • Force and / or displacement can be generated and / or measured substantially electrically (electrostatically, capacitively), magnetically, mechanically or by means of a combination of the aforementioned methods.
  • the force is generated in DE3128537.
  • a lever arm is moved by means of an eccentric.
  • the determination of the transmitted force via a strain gauge, which is attached to an elastic portion of the power transmission arm, while the distance measurement is performed by a probe on the shaft of the measuring device.
  • strain gauges have a poor signal-to-noise ratio for small signals.
  • Significantly higher accuracy is possible with capacitive measurements such as described in US5576483 and US5661235.
  • Path and force generation and measurement are performed via electrical voltages.
  • the change in the capacitance of a capacitor with variable distance of its plates or the change in the distance of the plates is used with variable applied voltage.
  • this system can also be used in more than one direction for the detection of forces and displacements.
  • the generative forces are on the order of 10mN, which is a significant disadvantage.
  • working with voltages of several 100 V which carries the risk of electrical breakdown, which would make the power generation unusable.
  • DE 42 20 510 A1 describes a device for placing a measuring tip on a substrate, wherein the measuring tip is arranged on a vertically movable support.
  • the carrier is clamped between two leaf springs, which are fastened to a base body.
  • EP 1092142 B1 a generic device is described in which the indenter is movably mounted in one degree of freedom via an indenter holder fixed to leaf springs. Even with the three solutions described above, a defined biasing force of the diaphragm springs or leaf springs is not adjustable, whereby the system has insufficient rigidity.
  • the object of the invention is to develop a device for high-precision generation and measurement of forces and displacements, which in a relatively simple structure, a high rigidity perpendicular to the axis in which the forces and displacements are generated, and a high reliability and reproducibility of generated and measured forces and shifts guaranteed. This object is achieved with the characterizing features of the first claim. Advantageous embodiments emerge from the subclaims.
  • the force transmitting shaft is fixed to at least two, biased, clamped on both sides of the first leaf springs, wherein the bias of the first leaf springs in the direction of the axis Y takes place and is adjustable via at least a first clamping element.
  • the first leaf springs are biased in a closed frame in the direction of the axis Y, and the frame is in turn movably supported by at least two opposing leaf springs on a frame.
  • the force-transmitting shaft is arranged on at least one pair of double-clamped first leaf springs, wherein the first leaf springs are deflectable in the X direction.
  • the first leaf springs are hinged in a closed frame under bias, which in turn is movably mounted in the X direction.
  • the storage of the frame takes place on two opposite double pairs of second leaf springs.
  • the frame is coupled by a connecting shaft with a moving element, which can move the frame in both the pulling and pushing direction.
  • the moving element is designed as a piezoelectric element.
  • the force-transmitting shaft is assigned a device for force measurement and / or a device for displacement measurement, it being possible to carry out the determination of the force via a displacement measurement.
  • the device for measuring force is a first LVDT and the device for measuring distance a second LVDT. It is also possible to make the force and / or distance measurement optically.
  • the force-transmitting shaft can be coupled to an acting in the axis X damping unit. This may be an oil bath in which a damping element rigidly attached to the force-transmitting shaft is inserted or an eddy current brake, wherein an aluminum or copper sheet rigidly connected to the force-transmitting shaft is positioned between two magnets.
  • the bias of the first leaf springs is preferably carried out by means of first clamping elements in a direction perpendicular to the X direction Y-direction.
  • the first clamping element has a first clamping bracket and a first clamping plate, between which one end of a first leaf spring can be clamped by means of a first clamping screw.
  • the first clamping plate can now be adjusted by means of a first clamping screw in the Y direction against the frame (biased), so that the clamped first leaf spring in its longitudinal direction (Y-direction) is biased.
  • the other end of the first leaf spring is not fixed to the frame, for example, by means of a clamping element.
  • the bias of the second leaf springs for example by means of second clamping elements in a direction perpendicular to the X direction Y-direction against the frame or against the frame.
  • the second clamping element has a second clamping bracket and a second clamping plate, between which one end of a second leaf spring is clamped by means of a second clamping screw.
  • the second clamping plate can now be adjusted (clamped) by means of a second clamping screw in the Y direction against the frame, so that the clamped second leaf spring in its longitudinal direction (Y-direction) is biased.
  • forces and displacements in one direction are reliably generated and measured by bilaterally clamped and prestressed in their longitudinal direction (Y-direction) leaf springs.
  • the invention can be designed for high-precision generation and measurement of very small but also for larger forces and displacements.
  • several devices of the invention can be combined to generate and measure forces and displacements in multiple directions. Due to the mechanical generation and measurement of the forces and displacements, the invention is not susceptible to electromagnetic interference, and the substrate holder need not be electrically insulating.
  • An essential advantage of the invention is that the device by the bias of the leaf springs, in a direction perpendicular to the generated force / displacement (here in the Y direction) is very stiff, so that acting in this vertical direction displacement does not occur or a force acting in this direction can not lead to a shift.
  • the invention will be explained in more detail below.
  • FIG. 1 In a rigid closed frame 1, at least a pair of first leaf springs 2 are fastened at their short ends and stretched in the vertical direction. These leaf springs 2 are firmly connected to a power transmitting shaft 3, in the direction (X-axis), the force or displacement generation is to happen (both pressure and train). On force-transmitting shaft 3 fixed two ferrite cores of LVDTs 4a, 4b are fixed. An LVDT 4a is used for force measurement and is connected to the closed frame 1 with a rigid support 7. The second LVDT 4b is rigidly connected to an outer reference body, which serves as a reference point for measuring the displacement of the shaft 3.
  • the frame 1 Via a connecting shaft 5, the frame 1 is connected to a piezoelectric element 6, which can move the frame 1 in the longitudinal direction along the axis X of the shaft 3 back and forth.
  • the LVDT 4b measures the position of the shaft 3 with high precision. If a force acts on the shaft 3 in its longitudinal direction, the leaf springs 2 are deflected, which leads to displacement of the shaft 3 in the X-axis relative to the LVDT 4a. This deflection is proportional to the force for enough small forces so that the signal from the LVDT 4a can be calibrated to the force.
  • FIG. 1 An embodiment of the invention can be seen in FIG.
  • the closed frame 1 is movably suspended in the direction of the axis X via preloaded second leaf springs 9 on a frame 10.
  • the LVDT 4a for force measurement is in turn fixedly attached to the frame 1 via a rigid connection 7
  • the LVDT 4b for displacement measurement along the axis X is fixed to the frame 10 via a rigid connection 8.
  • In this embodiment may be attached to the shaft 3, for example, an indenter tip, wherein the displacement in the vertical direction and the force acting on it are measured.
  • the displacement is accomplished via a piezoelectric element 6, which moves the frame 1 and with it the shaft 3 in the direction of the X-axis.
  • a wire, a fiber or similar body can be clamped for a tensile test.
  • the active piezoelectric element 6 moves the frame 1 upwards.
  • FIG. Another embodiment can be seen in FIG.
  • the frame 1 is suspended on a frame 10 via four third leaf springs 11, and the shaft 3 has its longitudinal direction in a horizontal position.
  • the first LVDT 4a for force measurement is in turn attached to the frame 1 via a rigid connection 7.
  • the second LVDT 4b for displacement measurement is attached via a rigid connection 8 to a base plate, which in turn holds the frame 10.
  • a damping element 13 is fixed to the shaft 3, which dips into a damping unit in the form of an oil bath 12 and dampens vibrations in the direction of the longitudinal axis of the shaft 3.
  • the first clamping element S with which the bias of a first leaf spring 2 in the Y direction can be generated, consists essentially of a first clamping bracket 20, a first clamping plate 21, a first clamping screw 22 and a first clamping screw 23.
  • One end of a first leaf spring. 2 is clamped between the first clamping bracket 20 and the first clamping plate 21 by means of the first clamping screw 22.
  • the clamping plate 21 is clamped against the frame 1 and thus biased when tightening the first clamping screw 23, the first leaf spring 2 in its longitudinal direction (Y-direction).
  • the first clamping plate 21 can now be fixed to the frame by means of a first locking screw 25 relative to the frame 1. To ensure the displacement of the first clamping plate 21, this has a first slot 26 through which the first locking screw 25 engages.
  • the other end of the first leaf spring 2, not shown, is fixed to the frame 1 fixed to the frame.
  • FIGs 6 and 7 an application example of a fastening of a second leaf spring 9 on the frame 10 is shown in a sectional view and in plan view.
  • the second clamping element S1 with which the bias of a second leaf spring 9 in the Y direction can be generated, similar to the aforementioned embodiment consists essentially of a second clamping bracket 20.1, a second clamping plate 21.1, a second clamping screw 22.1 and a second clamping screw 23.1.
  • One end of the second leaf spring 9 is clamped between the second clamping bracket 20.1 and the second clamping plate 21.1 by means of the second clamping screw 22.1.
  • the second clamping plate 21.1 is braced against the frame 10 and thus biased when tightening the second clamping screw 23.1, the second leaf spring 9 in its longitudinal direction (Y-direction).
  • the second clamping plate 21.1 can now be fixed to the frame by means of a second locking screw 25.1 relative to the frame 10. To ensure the displacement of the second clamping plate 21.1, this has a second slot 26.1 through which engages the second locking screw 25.1.
  • the other end of the second leaf spring is fixed to the frame 1 fixed to the frame.

Abstract

The device has a force transmitting shaft (3) fixed at two flat springs that are fixed under pre-stressing and are clamped at two sides, where springs are prestressed in the direction of Y-axis. The prestressing is adjustable by a tensioning unit, and the flat springs are moved in a x-direction. A frame is supported at the flat spring. Another set of flat springs is also moved in the X-direction. The frame is connected with a movable unit by a connecting shaft.

Description

Die Erfindung bezieht sich auf eine Vorrichtung zur hochgenauen Erzeugung und Messung von Kräften und Verschiebungen gemäß dem Oberbegriff des Anspruchs 1. Die hochgenaue Erzeugung und Messung von Kräften und Verschiebungen entlang einer Achse findet üblicherweise Anwendung bei der Herstellung von Nanoindentern und Scratch- oder Verschleißtestern, Kräfte und Verschiebungen in solchen Geräten werden nach dem Stand der Technik auf verschiedene Weisen erzeugt, wobei in der Regel nur auf eine hohe Steifigkeit des bewegten Schaftes in Bewegungsrichtug geachtet wird. Kraft und/oder Verschiebung können im Wesentlichen elektrisch (elektrostatisch, kapazitiv), magnetisch, mechanisch oder mittels einer Kombination der vorgenannten Methoden erzeugt und/oder gemessen werden. Einfache Methoden zur Ermittlung von Verschiebungen und Kräften wie das optische Ablesen der Verschiebung einer Glasskala und die Verwendung einer Kraftmesszelle, wie sie im Patent US5616857 beschrieben werden, sind nur für genügend große Wege und Kräfte geeignet. Eine andere Methode wird in DE3738106 beschrieben. Hierbei wird die Kraft durch den Stromfluss durch eine Spule erzeugt, die sich im Feld von Permanentmagneten befindet. Der elektrische Strom ist hierbei ein Maß für die erzeugte Kraft. Die Reproduzierbarkeit hängt allerdings von der Konstanz des Magnetfeldes der Permanentmagneten ab. Ein magnetisches System wird auch in DE3408554 verwendet, diesmal in Form eines Drehmagneten, der einen Hebelarm bewegt, der die Kraft auf ein Substrat überträgt. Der elektrische Strom durch den Magneten dient wiederum als Maß für die Kraft. Hierbei können allerdings die Lager die Genauigkeit und Reproduzierbarkeit der Kraftübertragung beeinflussen. Ebenfalls über einen Hebel wird die Kraft in DE3128537 erzeugt. Ein Hebelarm wird mit Hilfe eines Exzenters bewegt. Die Ermittlung der übertragenen Kraft erfolgt über einen Dehnmessstreifen, der an einem elastischen Teilstück des Kraftübertragungsarmes befestigt ist, während die Wegmessung durch eine Tastsonde am Schaft der Messeinrichtung erfolgt.The invention relates to a device for the highly accurate generation and measurement of forces and displacements according to the preamble of claim 1. The highly accurate generation and measurement of forces and displacements along an axis is commonly used in the manufacture of nanoindent and scratch or wear testers, forces and displacements in such devices are generated in the prior art in various ways, which is usually respected only in a high rigidity of the moving shaft in Bewegungsrichtug. Force and / or displacement can be generated and / or measured substantially electrically (electrostatically, capacitively), magnetically, mechanically or by means of a combination of the aforementioned methods. Simple methods for determining displacements and forces such as the optical reading of the displacement of a glass scale and the use of a load cell, as described in the US5616857 patent, are suitable only for sufficiently large ways and forces. Another method is described in DE3738106. Here, the force is generated by the current flow through a coil, which is located in the field of permanent magnets. The electric current is a measure of the force generated. However, the reproducibility depends on the constancy of the magnetic field of the permanent magnets. A magnetic system is also used in DE3408554, this time in the form of a rotary magnet which moves a lever arm which transfers the force to a substrate. The electric current through the magnet again serves as a measure of the force. However, the bearings can affect the accuracy and reproducibility of the transmission. Also via a lever, the force is generated in DE3128537. A lever arm is moved by means of an eccentric. The determination of the transmitted force via a strain gauge, which is attached to an elastic portion of the power transmission arm, while the distance measurement is performed by a probe on the shaft of the measuring device.

Dehnmessstreifen haben allerdings für kleine Signale ein schlechtes Signal/Rausch-Verhältnis. Eine bedeutend höhere Genauigkeit ist mit kapazitiven Messungen möglich, wie sie beispielsweise in US5576483 und US5661235 beschrieben sind. Weg- und Krafterzeugung und -messung erfolgen über elektrische Spannungen. Dabei wird die Änderung der Kapazität eines Kondensators bei veränderlichem Abstand seiner Platten bzw. die Veränderung des Abstandes der Platten bei veränderlicher angelegter Spannung genutzt. Dieses System kann nach US5661235 auch in mehr als einer Richtung zur Detektion von Kräften und Verschiebungen genutzt werden. Allerdings liegen die erzeugbaren Kräfte in der Größenordnung von 10mN, was einen erheblichen Nachteil darstellt. Des Weiteren wird mit Spannungen von mehreren 100 V gearbeitet, was die Gefahr des elektrischen Durchschlags birgt, wodurch die Krafterzeugung unbrauchbar werden würde. Des Weiteren muss die Aufhängung des Substrathalters elektrisch isolierend sein, damit die intern verwendete Spannung nicht nach außen gelangt. In USS067346 ist die Erzeugung und Messung von Kräften und Verschiebungen mittels einseitig eingespannter und nicht vorgespannter Blattfedern beschrieben. Nachteilig hierbei ist die geringe Steifigkeit in eine Richtung senkrecht zur erzeugten Kraft und Verschiebung.
Aus DE 37 21 525A1 ist eine Mikrohärteprüfeinrichtung bekannt, bei welcher ein kraftübertragender Schaft an zwei übereinander in einem Kraftmessgehäuse angeordneten, durchbrochenen und an ihrem Umfang gehaltenen Membranfedern befestigt und in axialer Richtung geführt bewegbar ist. Die Membranfedern sind an ihren freien Seitenkanten wellenförmig ausgebildet. In DE 42 20 510 Al wird eine Vorrichtung zum Aufsetzen einer Messspitze auf ein Substrat beschrieben, wobei die Messspitze an einem vertikal bewegbaren Träger angeordnet ist. Der Träger ist zwischen zwei Blattfedern eingespannt, die an einem Grundkörper befestigt sind. Auch in EP 1092142 B1 wird eine gattungsgemäße Vorrichtung beschrieben, bei welcher der Eindringkörper über einen an Blattfedern befestigten Eindringkörperhaltex in einem Freiheitsgrad beweglich angeordnet ist.
Auch bei den drei vorgenannt beschriebenen Lösungen ist eine definierte Vorspannkraft der Membranfedern bzw. Blattfedern nicht einstellbar, wodurch das System eine ungenügende Steifigkeit aufweist.However, strain gauges have a poor signal-to-noise ratio for small signals. Significantly higher accuracy is possible with capacitive measurements such as described in US5576483 and US5661235. Path and force generation and measurement are performed via electrical voltages. In this case, the change in the capacitance of a capacitor with variable distance of its plates or the change in the distance of the plates is used with variable applied voltage. According to US5661235, this system can also be used in more than one direction for the detection of forces and displacements. However, the generative forces are on the order of 10mN, which is a significant disadvantage. Furthermore, working with voltages of several 100 V, which carries the risk of electrical breakdown, which would make the power generation unusable. Furthermore, the suspension of the substrate holder must be electrically insulating, so that the voltage used internally does not escape to the outside. In USS067346 the generation and measurement of forces and displacements is described by means of cantilevered and unbiased leaf springs. The disadvantage here is the low stiffness in a direction perpendicular to the generated force and displacement.
From DE 37 21 525A1 a Mikrohärteprüfeinrichtung is known in which a force-transmitting shaft arranged on two superimposed in a force measuring housing, openworked and held at its periphery diaphragm springs mounted and guided in the axial direction is movable. The diaphragm springs are wave-shaped at their free side edges. DE 42 20 510 A1 describes a device for placing a measuring tip on a substrate, wherein the measuring tip is arranged on a vertically movable support. The carrier is clamped between two leaf springs, which are fastened to a base body. Also in EP 1092142 B1 a generic device is described in which the indenter is movably mounted in one degree of freedom via an indenter holder fixed to leaf springs.
Even with the three solutions described above, a defined biasing force of the diaphragm springs or leaf springs is not adjustable, whereby the system has insufficient rigidity.

Aufgabe der Erfindung ist es, eine Vorrichtung zur hochgenauen Erzeugung und Messung von Kräften und Verschiebungen zu entwickeln, die bei einem relativ einfachen Aufbau eine hohe Steifigkeit senkrecht zur Achse, in welcher die Kräfte und Verschiebungen erzeugt werden, aufweist und eine hohe Zuverlässigkeit und Reproduzierbarkeit der erzeugten und gemessenen Kräfte und Verschiebungen gewährleistet.
Diese Aufgabe wird mit den kennzeichnenden Merkmalen des ersten Patentanspruchs gelöst. Vorteilhafte Ausgestaltungen ergeben sich aus den Unteransprüchen.
Bei der erfindungsgemäßen Vorrichtung zur hochgenauen Erzeugung und Messung von Kräften und Verschiebungen in einachsiger Richtung (sowohl Druck als auch Zug) bei gleichzeitig hoher Steifigkeit in einer Achse Y senkrecht zu einer Achse X, in welcher die Kräfte und Verschiebungen unter Verwendung eines kraftübertragenden Schaftes erzeugt werden, ist der kraftübertragende Schaft an mindestens zwei, unter Vorspannung stehenden, beidseitig eingespannten ersten Blattfedern befestigt, wobei die Vorspannung der ersten Blattfedern in Richtung zur Achse Y erfolgt und über wenigstens ein erstes Spannelement einstellbar ist.
Bevorzugt sind die ersten Blattfedern in einem geschlossenen Rahmen in Richtung zur Achse Y vorgespannt, und der Rahmen ist wiederum durch wenigstens zwei sich gegenüberliegende Blattfedern an einem Gestell beweglich gelagert.
Bevorzugt wird der kraftübertragende Schaft an mindestens einem Doppelpaar beidseitig eingespannter erster Blattfedern angeordnet, wobei die ersten Blattfedern in X-Richtung auslenkbar sind. Bevorzugt sind die ersten Blattfedern in einem geschlossenen Rahmen unter Vorspannung angelenkt, welcher wiederum in X-Richtung beweglich gelagert ist. Vorzugsweise erfolgt die Lagerung des Rahmens an zwei sich gegenüberliegenden Doppelpaaren zweiter Blattfedern. Alternativ ist es möglich, den Rahmen durch vier einseitig eingespannte dritte Blattfedern in X-Richtung beweglich aufzunehmen. Zur Realisierung der Bewegung in X-Richtung ist der Rahmen durch einen Verbindungsschaft mit einem Bewegungselement gekoppelt, welches den Rahmen sowohl in Zug- als auch in Schubrichtung bewegen kann. Bevorzugt ist das Bewegungselement als ein piezoelektrisches Element ausgebildet.The object of the invention is to develop a device for high-precision generation and measurement of forces and displacements, which in a relatively simple structure, a high rigidity perpendicular to the axis in which the forces and displacements are generated, and a high reliability and reproducibility of generated and measured forces and shifts guaranteed.
This object is achieved with the characterizing features of the first claim. Advantageous embodiments emerge from the subclaims.
In the inventive device for high-precision generation and measurement of forces and displacements in uniaxial direction (both pressure and tension) with high stiffness in a Y axis perpendicular to an axis X, in which the forces and displacements are generated using a force transmitting shaft , The force transmitting shaft is fixed to at least two, biased, clamped on both sides of the first leaf springs, wherein the bias of the first leaf springs in the direction of the axis Y takes place and is adjustable via at least a first clamping element.
Preferably, the first leaf springs are biased in a closed frame in the direction of the axis Y, and the frame is in turn movably supported by at least two opposing leaf springs on a frame.
Preferably, the force-transmitting shaft is arranged on at least one pair of double-clamped first leaf springs, wherein the first leaf springs are deflectable in the X direction. Preferably, the first leaf springs are hinged in a closed frame under bias, which in turn is movably mounted in the X direction. Preferably, the storage of the frame takes place on two opposite double pairs of second leaf springs. Alternatively, it is possible to accommodate the frame by four cantilevered third leaf springs in the X direction movable. To realize the movement in the X direction, the frame is coupled by a connecting shaft with a moving element, which can move the frame in both the pulling and pushing direction. Preferably, the moving element is designed as a piezoelectric element.

In einer weiteren Ausgestaltung der Erfindung ist dem kraftübertragenden Schaft eine Einrichtung zur Kraftmessung und/oder eine Einrichtung zur Wegmessung zugeordnet, wobei es möglich ist, die Ermittlung der Kraft über eine Wegmessung vorzunehmen.
Die Einrichtung zur Kraftmessung ist dabei insbesondere ein erster LVDT und die Einrichtung zur Wegmessung ein zweiter LVDT.
Es ist ebenfalls möglich, die Kraft- und/oder Wegmessung optisch vorzunehmen.
Gemäß einer weiteren Ausführungsform der Erfindung kann der kraftübertragende Schaft mit einer in der Achse X wirkenden Dämpfungseinheit gekoppelt werden. Diese kann ein Ölbad sein, in welches ein an dem kraftübertragenden Schaft starr befestigtes Dämpfungselement eintaucht oder eine Wirbelstrombremse, wobei ein mit dem kraftübertragenden Schaft starr verbundenes Aluminium- oder Kupferblech zwischen zwei Magneten positioniert ist.
Die Vorspannung der ersten Blattfedern erfolgt vorzugsweise mittels erster Spannelemente in einer zur X-Richtung senkrecht stehenden Y-Richtung. Das erste Spannelement weist dazu einen ersten Klemmbügel und eine erste Spannplatte auf, zwischen welchen ein Ende einer ersten Blattfeder mittels einer ersten Klemmschraube festklemmbar ist. Die erste Spannplatte kann nun mittels einer ersten Spannschraube in Y-Richtung gegen den Rahmen verstellt (gespannt) werden, so dass die geklemmte erste Blattfeder in ihrer Längsrichtung (Y-Richtung) vorgespannt wird.
Das andere Ende der ersten Blattfeder wird z.B. mittels eines Klemmelementes nicht einstellbar am Rahmen befestigt.In a further embodiment of the invention, the force-transmitting shaft is assigned a device for force measurement and / or a device for displacement measurement, it being possible to carry out the determination of the force via a displacement measurement.
In particular, the device for measuring force is a first LVDT and the device for measuring distance a second LVDT.
It is also possible to make the force and / or distance measurement optically.
According to a further embodiment of the invention, the force-transmitting shaft can be coupled to an acting in the axis X damping unit. This may be an oil bath in which a damping element rigidly attached to the force-transmitting shaft is inserted or an eddy current brake, wherein an aluminum or copper sheet rigidly connected to the force-transmitting shaft is positioned between two magnets.
The bias of the first leaf springs is preferably carried out by means of first clamping elements in a direction perpendicular to the X direction Y-direction. For this purpose, the first clamping element has a first clamping bracket and a first clamping plate, between which one end of a first leaf spring can be clamped by means of a first clamping screw. The first clamping plate can now be adjusted by means of a first clamping screw in the Y direction against the frame (biased), so that the clamped first leaf spring in its longitudinal direction (Y-direction) is biased.
The other end of the first leaf spring is not fixed to the frame, for example, by means of a clamping element.

Die Vorspannung der zweiten Blattfedern erfolgt z.B. mittels zweiter Spannelemente in einer zur X-Richtung senkrecht stehenden Y-Richtung gegen das Gestell oder gegen den Rahmen. Im letzteren Fall weist das zweite Spannelement einen zweiten Klemmbügel und eine zweite Spannplatte auf, zwischen welchen ein Ende einer zweiten Blattfeder mittels einer zweiten Klemmschraube festgeklemmt wird. Die zweite Spannplatte kann nun mittels einer zweiten Spannschraube in Y-Richtung gegen das Gestell verstellt (verspannt) werden, so dass die geklemmte zweite Blattfeder in ihrer Längsrichtung (Y-Richtung) vorgespannt wird.The bias of the second leaf springs, for example by means of second clamping elements in a direction perpendicular to the X direction Y-direction against the frame or against the frame. In the latter case, the second clamping element has a second clamping bracket and a second clamping plate, between which one end of a second leaf spring is clamped by means of a second clamping screw. The second clamping plate can now be adjusted (clamped) by means of a second clamping screw in the Y direction against the frame, so that the clamped second leaf spring in its longitudinal direction (Y-direction) is biased.

Mit der vorliegenden Erfindung werden Kräfte und Verschiebungen in einer Richtung (X-Richtung) durch beidseitig eingespannte und in ihrer Längsrichtung (Y-Richtung) vorgespannte Blattfedern zuverlässig erzeugt und dabei gemessen. Die Erfindung lässt sich für die hochgenaue Erzeugung und Messung sehr kleiner aber auch für größere Kräfte und Verschiebungen auslegen. Des Weiteren können mehrere Vorrichtungen der Erfindung kombiniert und damit Kräfte und Verschiebungen in mehrere Richtungen erzeugt und gemessen werden. Durch die mechanische Erzeugung und Messung der Kräfte und Verschiebungen ist die Erfindung unanfällig gegen elektromagnetische Störungen, und die Substrathalter müssen nicht elektrisch isolierend sein. Ein wesentlicher Vorteil der Erfindung besteht darin, dass die Vorrichtung durch die Vorspannung der Blattfedern, in einer Richtung senkrecht zur erzeugten Kraft/Verschiebung (hier in Y-Richtung) sehr steif ist, so dass eine in dieser senkrechten Richtung wirkende Verschiebung nicht auftritt bzw. eine in dieser Richtung wirkende Kraft nicht zu einer Verschiebung führen kann.
Die Erfindung wird nachfolgend näher erläutert.With the present invention, forces and displacements in one direction (X-direction) are reliably generated and measured by bilaterally clamped and prestressed in their longitudinal direction (Y-direction) leaf springs. The invention can be designed for high-precision generation and measurement of very small but also for larger forces and displacements. Furthermore, several devices of the invention can be combined to generate and measure forces and displacements in multiple directions. Due to the mechanical generation and measurement of the forces and displacements, the invention is not susceptible to electromagnetic interference, and the substrate holder need not be electrically insulating. An essential advantage of the invention is that the device by the bias of the leaf springs, in a direction perpendicular to the generated force / displacement (here in the Y direction) is very stiff, so that acting in this vertical direction displacement does not occur or a force acting in this direction can not lead to a shift.
The invention will be explained in more detail below.

Es zeigen:Show it:

  • Fig. 1: Prinzipdarstellung der Erfindung mit allen wesentlichen Komponenten,1 shows a schematic diagram of the invention with all essential components,
  • Fig. 2: Anwendungsbeispiel bei Aufhängung der Erfindung zur Erzeugung / Messung vertikaler Kräfte und Verschiebungen,2 shows an example of application in the suspension of the invention for generating / measuring vertical forces and displacements,
  • Fig. 3: Anwendungsbeispiel bei Aufhängung der Erfindung zur Erzeugung / Messung horizontaler Kräfte und Verschiebungen,3 shows an example of application in the suspension of the invention for generating / measuring horizontal forces and displacements,
  • Fig. 4: Anwendungsbeispiel einer Befestigung einer ersten Blattfeder am Rahmen in Seitenansicht,4 shows an application example of a fastening of a first leaf spring on the frame in side view,
  • Fig. 5: Darstellung gem. Fig. 4 in Draufsicht,Fig. 5: representation acc. 4 in plan view,
  • Fig. 6: Schnittdarstellung der Befestigung einer zweiten Blattfeder am Gestell,6: sectional view of the attachment of a second leaf spring on the frame,
  • Fig. 7: Darstellung gem. Fig. 6 in Draufsicht.Fig. 7: representation acc. Fig. 6 in plan view.

Zunächst soll anhand von Fig. 1 das Prinzip der Erfindung erläutert werden. In einem steifen geschlossenen Rahmen 1 sind mindestens ein Doppelpaar erster Blattfedern 2 an ihren kurzen Enden befestigt und in vertikaler Richtung gespannt. Diese Blattfedern 2 sind fest mit einem kraftübertragenden Schaft 3 verbunden, in dessen Richtung (X-Achse) die Kraft- bzw. Verschiebungserzeugung geschehen soll (sowohl Druck als auch Zug). Am kraftübertragenden Schaft 3 sind fest zwei Ferritkerne von LVDTs 4a, 4b befestigt. Ein LVDT 4a dient zur Kraftmessung und ist mit einer starren Halterung 7 mit dem geschlossenen Rahmen 1 verbunden. Der zweite LVDT 4b ist starr mit einem äußeren Referenzkörper verbunden, der als Bezugspunkt für die Messung der Verschiebung des Schaftes 3 dient. Über einen Verbindungsschaft 5 ist der Rahmen 1 mit einem piezoelektrischen Element 6 verbunden, welches den Rahmen 1 in Längsrichtung entlang der Achse X des Schaftes 3 hin und her bewegen kann. Es ist offensichtlich, dass der LVDT 4b die Position des Schaftes 3 mit hoher Präzision misst. Wirkt auf den Schaft 3 in dessen Längsrichtung eine Kraft, so kommt es zur Auslenkung der Blattfedern 2, was zur Verschiebung des Schaftes 3 in der X-Achse gegenüber dem LVDT 4a führt. Diese Auslenkung ist für genügend kleine Kräfte proportional zur Kraft, so dass das Signal des LVDT 4a auf die Kraft geeicht werden kann. In Richtung der Längserstreckung der ersten Blattfedern 2, die senkrecht zur Achse X liegt, ist in einer Achse Y eine hohe Steifigkeit des Schaftes gewährleistet.
Ein Ausführungsbeispiel der Erfindung ist in Fig. 2 zu sehen. Der geschlossene Rahmen 1 ist beweglich in Richtung der Achse X über vorgespannte zweite Blattfedern 9 an einem Gestell 10 aufgehängt. Der LVDT 4a zur Kraftmessung ist wiederum über eine starre Verbindung 7 fest am Rahmen 1 befestigt, der LVDT 4b zur Verschiebungsmessung entlang der Achse X ist über eine starre Verbindung 8 am Gestell 10 fixiert. In dieser Ausführung kann am Schaft 3 beispielsweise eine Indenterspitze befestigt sein, wobei deren Verschiebung in vertikaler Richtung und die auf sie wirkende Kraft gemessen werden. Die Verschiebung wird dabei über ein piezoelektrisches Element 6 bewerkstelligt, welchen den Rahmen 1 und mit ihm den Schaft 3 in Richtung der X-Achse bewegt. Ebenso kann am Schaft 3 ein Draht, eine Faser oder ähnliche Körper für einen Zugversuch eingespannt sein. In diesem Falle bewegt das aktive piezoelektrische Element 6 den Rahmen 1 nach oben. Durch die Halterung des Schaftes 3 an den Blattfedern 2 und durch die Halterung des Rahmens an den zweiten Blattfedern 9 wird eine Verschiebung des Schaftes 3 in lateraler (Y) Richtung verhindert bzw. sehr stark eingeschränkt.First, the principle of the invention will be explained with reference to FIG. 1. In a rigid closed frame 1, at least a pair of first leaf springs 2 are fastened at their short ends and stretched in the vertical direction. These leaf springs 2 are firmly connected to a power transmitting shaft 3, in the direction (X-axis), the force or displacement generation is to happen (both pressure and train). On force-transmitting shaft 3 fixed two ferrite cores of LVDTs 4a, 4b are fixed. An LVDT 4a is used for force measurement and is connected to the closed frame 1 with a rigid support 7. The second LVDT 4b is rigidly connected to an outer reference body, which serves as a reference point for measuring the displacement of the shaft 3. Via a connecting shaft 5, the frame 1 is connected to a piezoelectric element 6, which can move the frame 1 in the longitudinal direction along the axis X of the shaft 3 back and forth. It is obvious that the LVDT 4b measures the position of the shaft 3 with high precision. If a force acts on the shaft 3 in its longitudinal direction, the leaf springs 2 are deflected, which leads to displacement of the shaft 3 in the X-axis relative to the LVDT 4a. This deflection is proportional to the force for enough small forces so that the signal from the LVDT 4a can be calibrated to the force. In the direction of the longitudinal extension of the first leaf springs 2, which is perpendicular to the axis X, a high rigidity of the shaft is ensured in an axis Y.
An embodiment of the invention can be seen in FIG. The closed frame 1 is movably suspended in the direction of the axis X via preloaded second leaf springs 9 on a frame 10. The LVDT 4a for force measurement is in turn fixedly attached to the frame 1 via a rigid connection 7, the LVDT 4b for displacement measurement along the axis X is fixed to the frame 10 via a rigid connection 8. In this embodiment may be attached to the shaft 3, for example, an indenter tip, wherein the displacement in the vertical direction and the force acting on it are measured. The displacement is accomplished via a piezoelectric element 6, which moves the frame 1 and with it the shaft 3 in the direction of the X-axis. Likewise, on the shaft 3, a wire, a fiber or similar body can be clamped for a tensile test. In this case, the active piezoelectric element 6 moves the frame 1 upwards. By the holder of the shaft 3 to the leaf springs 2 and by the holder of the frame to the second leaf springs 9, a displacement of the shaft 3 in the lateral (Y) direction is prevented or greatly restricted.

Ein weiteres Ausführungsbeispiel ist in Fig. 3 zu sehen. Hierbei erfolgt die Erzeugung und Messung der Kraft und Verschiebung in horizontaler Richtung (Achse X), wobei in Richtung der Achse Y eine hohe Steifigkeit zu verzeichnen ist. In diesem Beispiel ist der Rahmen 1 über vier dritte Blattfedern 11 an einem Gestell 10 aufgehängt, und der Schaft 3 hat seine Längsrichtung in horizontaler Lage. Der erste LVDT 4a zur Kraftmessung ist wiederum über eine starre Verbindung 7 am Rahmen 1 befestigt. Der zweite LVDT 4b zur Verschiebungsmessung ist über eine starre Verbindung 8 an einer Grundplatte angebracht, die wiederum das Gestell 10 hält. In diesem Ausführungsbeispiel ist am Schaft 3 noch ein Dämpfungselement 13 fixiert, welches in eine Dämpfungseinheit in Form eines Ölbades 12 eintaucht und Schwingungen in Richtung der Längsachse des Schaftes 3 dämpft. (Eine solche Dämpfung kann auch bei dem Beispiel nach Fig. 2 angebracht werden). Sollten diese Schwingungen beabsichtigt sein und über das aktive piezoelektrische Element 6 erzeugt werden, kann die Dämpfungseinheit entfernt werden. Der Schaft 3 kann in die Richtung seiner Längsachse sowohl hin als auch zurück bewegt werden. Ebenso können Kräfte in Druck- als auch in Zugrichtung erzeugt werden. In Richtung der Achse Y ist eine hohe Steifigkeit gewährleistet.
Figur 4 zeigt ein Anwendungsbeispiel einer Befestigung einer ersten Blattfeder am Rahmen in Seitenansicht und Fig. 5 in der Draufsicht.
Das erste Spannelement S, mit welchem die Vorspannung einer ersten Blattfeder 2 in Y-Richtung erzeugbar ist, besteht im wesentlichen aus einem ersten Klemmbügel 20, einer ersten Spannplatte 21, einer ersten Klemmschraube 22 und einer ersten Spannschraube 23. Ein Ende einer ersten Blattfeder 2 wird zwischen dem ersten Klemmbügel 20 und der ersten Spannplatte 21 mittels der ersten Klemmschraube 22 festgeklemmt. Mittels der ersten Spannschraube 23 wird die Spannplatte 21 gegen den Rahmen 1 verspannt und somit bei Anziehen der ersten Spannschraube 23 die erste Blattfeder 2 in ihrer Längsrichtung (Y-Richtung) vorgespannt. Die erste Spannplatte 21 kann nun mittels einer ersten Feststellschraube 25 gegenüber dem Rahmen 1 gestellfest positioniert werden. Zur Gewährleistung der Verschiebung der ersten Spannplatte 21 weist diese ein erstes Langloch 26 auf, durch welches die erste Feststellschraube 25 greift.Another embodiment can be seen in FIG. Here, the generation and measurement of the force and displacement in the horizontal direction (axis X), wherein in the direction of the axis Y, a high rigidity is recorded. In this example, the frame 1 is suspended on a frame 10 via four third leaf springs 11, and the shaft 3 has its longitudinal direction in a horizontal position. The first LVDT 4a for force measurement is in turn attached to the frame 1 via a rigid connection 7. The second LVDT 4b for displacement measurement is attached via a rigid connection 8 to a base plate, which in turn holds the frame 10. In this embodiment, a damping element 13 is fixed to the shaft 3, which dips into a damping unit in the form of an oil bath 12 and dampens vibrations in the direction of the longitudinal axis of the shaft 3. (Such damping can also be applied in the example of FIG. 2). Should these vibrations be intentional and generated via the active piezoelectric element 6, the damping unit can be removed. The shaft 3 can be moved in the direction of its longitudinal axis both back and forth. Likewise, forces can be generated in the compression as well as in the tension direction. In the direction of the axis Y, a high rigidity is ensured.
Figure 4 shows an application example of a fastening of a first leaf spring on the frame in side view and Fig. 5 in plan view.
The first clamping element S, with which the bias of a first leaf spring 2 in the Y direction can be generated, consists essentially of a first clamping bracket 20, a first clamping plate 21, a first clamping screw 22 and a first clamping screw 23. One end of a first leaf spring. 2 is clamped between the first clamping bracket 20 and the first clamping plate 21 by means of the first clamping screw 22. By means of the first clamping screw 23, the clamping plate 21 is clamped against the frame 1 and thus biased when tightening the first clamping screw 23, the first leaf spring 2 in its longitudinal direction (Y-direction). The first clamping plate 21 can now be fixed to the frame by means of a first locking screw 25 relative to the frame 1. To ensure the displacement of the first clamping plate 21, this has a first slot 26 through which the first locking screw 25 engages.

Das andere nicht dargestellte Ende der ersten Blattfeder 2 wird gestellfest am Rahmen 1 befestigt.The other end of the first leaf spring 2, not shown, is fixed to the frame 1 fixed to the frame.

In Figur 6 und 7 ist ein Anwendungsbeispiel einer Befestigung einer zweiten Blattfeder 9 am Gestell 10 in einer Schnittdarstellung und in der Draufsicht dargestellt.
Das zweite Spannelement S1, mit welchem die Vorspannung einer zweiten Blattfeder 9 in Y-Richtung erzeugbar ist, besteht ähnlich wie die vorgenannte Ausführung im wesentlichen aus einem zweiten Klemmbügel 20.1, einer zweiten Spannplatte 21.1, einer zweiten Klemmschraube 22.1 und einer zweiten Spannschraube 23.1. Ein Ende der zweiten Blattfeder 9 wird zwischen dem zweiten Klemmbügel 20.1 und der zweiten Spannplatte 21.1 mittels der zweiten Klemmschraube 22.1 festgeklemmt. Mittels der zweiten Spannschraube 23.1 wird die zweite Spannplatte 21.1 gegen das Gestell 10 verspannt und somit bei Anziehen der zweiten Spannschraube 23.1 die zweite Blattfeder 9 in ihrer Längsrichtung (Y-Richtung) vorgespannt. Die zweite Spannplatte 21.1 kann nun mittels einer zweiten Feststellschraube 25.1 gegenüber dem Gestell 10 gestellfest festgeschraubt werden. Zur Gewährleistung der Verschiebung der zweiten Spannplatte 21.1 weist diese ein zweites Langloch 26.1 auf, durch welches die zweite Feststellschraube 25.1 greift. Das andere nicht dargestellte Ende der zweiten Blattfeder wird gestellfest am Rahmen 1 befestigt.In Figures 6 and 7 an application example of a fastening of a second leaf spring 9 on the frame 10 is shown in a sectional view and in plan view.
The second clamping element S1, with which the bias of a second leaf spring 9 in the Y direction can be generated, similar to the aforementioned embodiment consists essentially of a second clamping bracket 20.1, a second clamping plate 21.1, a second clamping screw 22.1 and a second clamping screw 23.1. One end of the second leaf spring 9 is clamped between the second clamping bracket 20.1 and the second clamping plate 21.1 by means of the second clamping screw 22.1. By means of the second clamping screw 23.1, the second clamping plate 21.1 is braced against the frame 10 and thus biased when tightening the second clamping screw 23.1, the second leaf spring 9 in its longitudinal direction (Y-direction). The second clamping plate 21.1 can now be fixed to the frame by means of a second locking screw 25.1 relative to the frame 10. To ensure the displacement of the second clamping plate 21.1, this has a second slot 26.1 through which engages the second locking screw 25.1. The other end of the second leaf spring, not shown, is fixed to the frame 1 fixed to the frame.

Neben den beschriebenen Ausführungsbeispielen sind auch andere Anordnungen und Halterungen sowie Spannelemente denkbar, wobei das erfindungsgemäße Prinzip zur Kraft- und Verschiebungsmessung aber dasselbe ist. So kann beispielsweise die Anzahl der Blattfedern variieren oder die Aufhängung anders (z.B. Spiralfedern) erfolgen.In addition to the described embodiments, other arrangements and brackets and clamping elements are conceivable, but the principle according to the invention for force and displacement measurement is the same. For example, the number of leaf springs may vary or the suspension may be different (e.g., coil springs).

Claims (20)

Vorrichtung zur hochgenauen Erzeugung und Messung von Kräften und Verschiebungen in einachsiger Richtung (sowohl Druck als auch Zug) bei gleichzeitig hoher Steifigkeit in einer Achse (Y) senkrecht zu einer Achse (X), in welcher die Kräfte, und Verschiebungen unter Verwendung eines kraftübertragenden Schaftes (3) erzeugt werden, wobei der kraftübertragende Schaft (3) an mindestens zwei, unter Vorspannung stehenden, beidseitig eingespannten ersten Blattfedern (2) befestigt ist und die Vorspannung der ersten Blattfedern (2) in Richtung zur Achse (Y) erfolgt und über wenigstens ein Spannelement (S) einstellbar ist.Device for high-precision generation and measurement of forces and displacements in uniaxial direction (both pressure and tension) with simultaneously high rigidity in an axis (Y) perpendicular to an axis (X) in which the forces, and displacements using a force-transmitting shaft (3) are produced, wherein the force-transmitting shaft (3) is attached to at least two prestressed, clamped on both sides first leaf springs (2) and the bias of the first leaf springs (2) in the direction of the axis (Y) and at least over a clamping element (S) is adjustable. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass die ersten Blattfedern (2) in einem geschlossenen Rahmen (1) gespannt sind, welcher wiederum durch wenigstens zwei sich gegenüberliegende Blattfedern an einem Gestell (10) beweglich gelagert ist.Apparatus according to claim 1, characterized in that the first leaf springs (2) in a closed frame (1) are stretched, which in turn is movably supported by at least two opposing leaf springs on a frame (10). Vorrichtung nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass der kraftübertragende Schaft (3) an einem Doppelpaar beidseitig eingespannter erster Blattfedern (2) befestigt ist.Apparatus according to claim 1 or 2, characterized in that the force-transmitting shaft (3) on a double pair of both sides clamped first leaf springs (2) is attached. Vorrichtung nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass die ersten Blattfedern (2) in X-Richtung auslenkbar sind.Device according to one of claims 1 to 3, characterized in that the first leaf springs (2) are deflectable in the X direction. Vorrichtung nach Anspruch 4, dadurch gekennzeichnet, dass der Rahmen (1) durch wenigstens zwei sich gegenüberliegende beidseitig eingespannte zweite Blattfedern (9) an dem Gestell (10) gelagert ist.Device according to Claim 4, characterized in that the frame (1) is mounted on the frame (10) by at least two opposing second leaf springs (9) clamped on both sides. Vorrichtung nach einem der Ansprüche 2 bis 5, dadurch gekennzeichnet, dass der Rahmen (1) an zwei Doppelpaaren zweiter Blattfedern (9) gelagert ist.Device according to one of claims 2 to 5, characterized in that the frame (1) on two double pairs of second leaf springs (9) is mounted. Vorrichtung nach einem der Ansprüche 2 bis 6, dadurch gekennzeichnet, dass die zweiten Blattfedern (9) in X-Richtung auslenkbar sind.Device according to one of claims 2 to 6, characterized in that the second leaf springs (9) are deflectable in the X direction. Vorrichtung nach einem der Ansprüche 2 bis 7, dadurch gekennzeichnet, dass der Rahmen (1) durch vier einseitig eingespannte dritte Blattfedern (11) gelagert ist.Device according to one of claims 2 to 7, characterized in that the frame (1) by four cantilevered third leaf springs (11) is mounted. Vorrichtung nach Anspruch 8, dadurch gekennzeichnet, dass die dritten Blattfedern (11) in X-Richtung auslenkbar sind.Apparatus according to claim 8, characterized in that the third leaf springs (11) are deflectable in the X direction. Vorrichtung nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, dass der Rahmen (1) durch einen Verbindungsschaft (5) mit einem Bewegungselement verbunden ist, welches den Rahmen (1) in Richtung der Achse (X) sowohl in Zugals auch in Schubrichtung bewegen kann.Device according to one of claims 1 to 9, characterized in that the frame (1) is connected by a connecting shaft (5) with a moving element, which move the frame (1) in the direction of the axis (X) both in tensile and in thrust direction can. Vorrichtung nach Anspruch 10, dadurch gekennzeichnet, dass das Bewegungselement ein piezoelektrisches Element (6) ist.Apparatus according to claim 10, characterized in that the moving element is a piezoelectric element (6). Vorrichtung nach einem der Ansprüche 1 bis 11, dadurch gekennzeichnet, dass dem kraftübertragenden Schaft (3) eine Einrichtung zur Kraftmessung und/oder eine Einrichtung zur Wegmessung zugeordnet ist.Device according to one of claims 1 to 11, characterized in that the force-transmitting shaft (3) is associated with a device for measuring force and / or a device for measuring distance. Vorrichtung nach einem der Ansprüche 1 bis 12, dadurch gekennzeichnet, dass die Ermittlung der Kraft über eine Wegmessung erfolgt.Device according to one of claims 1 to 12, characterized in that the determination of the force takes place via a distance measurement. Vorrichtung nach Anspruch 12 oder 13 dadurch gekennzeichnet, dass die Einrichtung zur Kraftmessung ein erster LVDT (4a) und die Einrichtung zur Wegmessung ein zweiter LVDT (4b) ist.Device according to claim 12 or 13, characterized in that the force measuring device is a first LVDT (4a) and the distance measuring device is a second LVDT (4b). Vorrichtung nach Anspruch 11 oder13, dadurch gekennzeichnet, dass die Kraft-und/oder Wegmessung optisch erfolgt.Apparatus according to claim 11 or 13, characterized in that the force and / or displacement measurement takes place optically. Vorrichtung nach einem der Ansprüche 1 bis 15, dadurch gekennzeichnet, dass das erste Spannelement (S1) einen ersten Klemmbügel (20) und eine erste Spannplatte (21) aufweist, zwischen welchen ein Ende einer ersten Blattfeder (2) mittels einer ersten Klemmschraube (22) klemmbar ist und dass die erste Spannplatte (21) mittels einer ersten Spannschraube (23) in Y-Richtung gegen den Rahmen (1) verstellbar ist derart, dass die geklemmte erste Blattfeder (2) in ihrer Längsrichtung (Y-Richtung) vorgespannt wird.Device according to one of claims 1 to 15, characterized in that the first clamping element (S1) comprises a first clamping bracket (20) and a first clamping plate (21), between which one end of a first leaf spring (2) by means of a first clamping screw (22 ) is clamped and that the first clamping plate (21) by means of a first clamping screw (23) in the Y direction against the frame (1) is adjustable such that the clamped first leaf spring (2) in its longitudinal direction (Y-direction) is biased , Vorrichtung nach Anspruch 15 oder 16, dadurch gekennzeichnet, dass das andere Ende einer ersten Blattfeder (2) mit Klemmelementen am Rahmen (1) befestigt ist.Apparatus according to claim 15 or 16, characterized in that the other end of a first leaf spring (2) is fastened with clamping elements on the frame (1). Vorrichtung nach einem der Ansprüche 1 bis 17, dadurch gekennzeichnet, dass die Vorspannung der zweiten Blattfedern (9) mittels zweiter Spannelemente (S1) in einer zur X-Richtung senkrecht stehenden Y-Richtung einstellbar ist.Device according to one of claims 1 to 17, characterized in that the bias of the second leaf springs (9) by means of second clamping elements (S1) is adjustable in a direction perpendicular to the X direction Y-direction. Vorrichtung nach Anspruch 18, dadurch gekennzeichnet, dass das zweite Spannelement (S1) einen zweiten Klemmbügel (20.1) und eine zweite Spannplatte (21.1) aufweist, zwischen welchen ein Ende einer zweiten Blattfeder (9) mittels einer zweiten Klemmschraube (22.1) klemmbar ist und dass die zweite Spannplatte (21.1) mittels einer zweiten Spannschraube (23.1) in Y-Richtung gegen das Gestell (10) verstellbar ist derart, dass die geklemmte zweite Blattfeder (9) in ihrer Längsrichtung (Y-Richtung) vorgespannt wird.Apparatus according to claim 18, characterized in that the second clamping element (S1) has a second clamping bracket (20.1) and a second clamping plate (21.1), between which one end of a second leaf spring (9) by means of a second clamping screw (22.1) is clamped and in that the second clamping plate (21.1) is adjustable in the Y direction against the frame (10) by means of a second clamping screw (23.1) in such a way that the clamped second leaf spring (9) is prestressed in its longitudinal direction (Y direction). Vorrichtung nach Anspruch 18 oder 19, dadurch gekennzeichnet, dass das andere Ende einer zweiten Blattfeder (9) mittels zweiter Klemmelemente am Rahmen (1) befestigt ist.Apparatus according to claim 18 or 19, characterized in that the other end of a second leaf spring (9) by means of second clamping elements on the frame (1) is fixed.
EP06001411.5A 2005-01-25 2006-01-24 Device for highly accurate generation and measurement of forces and displacements Not-in-force EP1684059B1 (en)

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DE102005003830A DE102005003830B4 (en) 2005-01-25 2005-01-25 Device for highly accurate generation and measurement of forces and displacements

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EP1684059A3 EP1684059A3 (en) 2006-11-08
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Also Published As

Publication number Publication date
EP1684059B1 (en) 2015-06-24
US20060243079A1 (en) 2006-11-02
DE102005003830A1 (en) 2006-08-03
DE102005003830B4 (en) 2013-02-14
US7543519B2 (en) 2009-06-09
EP1684059A3 (en) 2006-11-08

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