EP1673826A2 - MICROBATTERY WITH AT LEAST ONE ELECTRODE AND ELECTROLYTE EACH COMPRISING A COMMON GROUPING XY sb 1 /sb ,Y sb 2 /sb ,Y sb 3 / sb ,Y sb 4 /sb AND METHOD FOR THE PRODUCTION OF SAID MICRO BATTERY - Google Patents
MICROBATTERY WITH AT LEAST ONE ELECTRODE AND ELECTROLYTE EACH COMPRISING A COMMON GROUPING XY sb 1 /sb ,Y sb 2 /sb ,Y sb 3 / sb ,Y sb 4 /sb AND METHOD FOR THE PRODUCTION OF SAID MICRO BATTERYInfo
- Publication number
- EP1673826A2 EP1673826A2 EP04817211A EP04817211A EP1673826A2 EP 1673826 A2 EP1673826 A2 EP 1673826A2 EP 04817211 A EP04817211 A EP 04817211A EP 04817211 A EP04817211 A EP 04817211A EP 1673826 A2 EP1673826 A2 EP 1673826A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- electrolyte
- electrode
- microbattery
- chosen
- microbattery according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/131—Electrodes based on mixed oxides or hydroxides, or on mixtures of oxides or hydroxides, e.g. LiCoOx
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/052—Li-accumulators
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/056—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
- H01M10/0564—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of organic materials only
- H01M10/0565—Polymeric materials, e.g. gel-type or solid-type
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/134—Electrodes based on metals, Si or alloys
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/36—Selection of substances as active materials, active masses, active liquids
- H01M4/48—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides
- H01M4/485—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of mixed oxides or hydroxides for inserting or intercalating light metals, e.g. LiTi2O4 or LiTi2OxFy
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/36—Selection of substances as active materials, active masses, active liquids
- H01M4/48—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides
- H01M4/50—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of manganese
- H01M4/505—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of manganese of mixed oxides or hydroxides containing manganese for inserting or intercalating light metals, e.g. LiMn2O4 or LiMn2OxFy
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/36—Selection of substances as active materials, active masses, active liquids
- H01M4/48—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides
- H01M4/52—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of nickel, cobalt or iron
- H01M4/525—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of nickel, cobalt or iron of mixed oxides or hydroxides containing iron, cobalt or nickel for inserting or intercalating light metals, e.g. LiNiO2, LiCoO2 or LiCoOxFy
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/64—Carriers or collectors
- H01M4/66—Selection of materials
- H01M4/661—Metal or alloys, e.g. alloy coatings
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49108—Electric battery cell making
- Y10T29/49115—Electric battery cell making including coating or impregnating
Definitions
- the invention relates to a microbattery comprising, in the form of thin layers, at least first and second electrodes between which a solid electrolyte is disposed.
- the invention also relates to a method of manufacturing such a microbattery.
- microbatteries some are based on the principle of insertion and disinsertion of an alkali metal ion such as Li + in the positive electrode.
- the electrochemical behavior of such microbatteries strongly depends on the materials constituting the active elements of the microbattery, that is to say the positive and negative electrodes and the electrolyte placed between the two electrodes.
- the negative electrode also called anode generates Li + ions and it is, most often, in the form of a thin layer of metallic lithium, deposited by thermal evaporation, or in a metallic alloy based on lithium or else on a lithium insertion compound such as SiSnogON., g also called SiTON, SnN x , lnN XJ Sn0 2 .
- the positive electrode also called cathode consists of at least one material capable of inserting into its structure a certain number of Li + cations.
- materials such as LiCo0 2 , LiNi0 2) LiMn 2 0 4 , CuS, CuS 2 , WO y S z , TiO y S z , V 2 0 5 , V 3 0 8 as well as the lithiated forms of vanadium oxides and metal sulfides are known to have a high Li + ion insertion capacity and are therefore frequently used to form the positive electrode.
- thermal annealing is sometimes necessary so as to increase the crystallization of the deposited thin layer and to increase its potential for insertion of Li + ions.
- the electrolyte which must be a good ionic conductor and an electronic insulator is generally constituted by a glassy material based on boron oxide, lithium oxide or lithium salts or else based on phosphate such as Li 2 ⁇ 9 PO 3 ⁇ 3 N 0 ⁇ 46 better known as LiPON, Li 2 ⁇ gSi 0 ⁇ 45 PO 1 ⁇ 6 N 1
- Such lithium microbatteries are, however, known to have high electrical resistance.
- JB Bâtes et al. indicates that a battery comprising a positive LiCo0 2 electrode and a solid Li 3 P0 4 electrolyte has a high resistance essentially due to the electrolyte and the positive electrolyte-electrode interface.
- a lithium battery comprises a non-aqueous electrolyte which can be composed of lithium salts dissolved in a nonaqueous solvent, such as LiCI0 4 or LiBF 4 or else be in solid form such as Li 4 Si0 4 .
- the material of the positive electrode can be chosen from compounds containing lithium such as Li x Mn 2 0 4 _ LiNi ⁇ M y O .., Li x Mn 2 . y M y 0 4 , with M chosen from Na, g, Se, Y, Mn, Fe, Co, Ni, Cu, Zn, Al, Cr, Pb, Sb and B and x between 0 and 1, including between 0 and 0.9 and z between 2 and 2.3.
- the material of the negative electrode consists of composite particles comprising a first solid phase containing at least one element chosen from Sn, Si and Zn and deposited on a second solid phase, for example composed of a solid solution or an intermetallic compound.
- the composite particles preferably comprise an element in the form of traces and chosen from iron, lead and bismuth. However, this is not enough to reduce the internal electrical resistance of the battery.
- the object of the invention is to produce a microbattery having a high energy storage efficiency and a moderate electrical resistance.
- the first electrode and the electrolyte each comprise at least one common grouping of the type [XY ⁇ Y 2 Y 3 Y 4 ], where X is located in a tetrahedron whose vertices are respectively formed by the chemical elements Y 1 , Y 2 , Y 3 and Y 4 , the chemical element X being chosen from phosphorus, boron, silicon, sulfur, molybdenum, vanadium and germanium and the chemical elements Y 1 ( Y 2 , Y 3 and Y 4 being chosen from sulfur, oxygen, fluorine and chlorine.
- the electrolyte comprises an alkali metal ion A chosen from lithium and sodium.
- the first electrode comprises the alkali metal ion A, a mixture of metal ions T comprising at least one transition metal ion chosen from titanium, vanadium, chromium, cobalt, nickel, manganese, iron, copper, niobium, molybdenum and tungsten and a chemical element B chosen from sulfur, oxygen, fluorine and chlorine, so as to form, with the group [XY 1 Y 2 Y 3 Y], a compound of type A x1 T y1 [XY 1 Y 2 Y 3 Y 4 ] z1 B w1,. with x 1 and w 1 > 0 and y 1 and z 1 > 0, a chemical element E chosen from metals and carbon being dispersed in the compound.
- a chemical element E chosen from metals and carbon being dispersed in the compound.
- the second electrode comprises at least one grouping of the type [ ⁇ Y 2 Y ' 3 Y' 4 ], where X 'is located in a tetrahedron whose vertices are respectively formed by the chemical elements Y ⁇
- the chemical element X' being chosen from phosphorus, boron, silicon, sulfur, molybdenum, vanadium and molybdenum and the chemical elements Y '., , Y ' 2 , Y' 3 and Y ' 4 being chosen from sulfur, oxygen, fluorine and chlorine.
- the second electrode comprises the alkali metal ion A, a mixture of metal ions T 'comprising at least one transition metal ion chosen from titanium, vanadium, chromium, cobalt, nickel, manganese, iron, copper, niobium, molybdenum and tungsten and a chemical element B 'chosen from sulfur, oxygen, fluorine and chlorine, so as to form, with the group a compound of type A ⁇ 2 , y2 [X ⁇ , 1 Y ' 2 Y' 3 Y , 4 ] Z2 B , w2 , .with x 2 and w 2 > 0 and y 2 and z 2 > 0, a chemical element E ' chosen from metals and carbon being dispersed in the compound, so that the first and second electrodes have different intercalation potentials of the alkali metal ion A.
- a mixture of metal ions T ' comprising at least one transition metal ion chosen from titanium, vanadium,
- the invention also relates to a method of manufacturing such a microbattery which is easy to implement with, preferably, the techniques for depositing thin layers under vacuum, used in the field of microtechnology.
- this object is achieved by the fact that the method consists in depositing successively on a substrate:
- a first thin layer forming the second electrode by means of a first sputtering target comprising at least the compound of type A X2 T ' y2 [XY 1 Y 2 Y 3 Y 4 ] z2 B , w2 . ⁇ t the chemical element E ',
- a third thin layer forming the first electrode by means of a third sputtering target comprising at least the group of type A x1 T y1 [XY 1 Y 2 Y 3 Y 4 ] z1 B w1 and the chemical element E.
- FIG. 1 represents, in section, a first embodiment of a microbattery according to the invention.
- FIG. 2 represents, in section, a second embodiment of a microbattery according to the invention.
- a microbattery 1 comprises a substrate 1a on which is disposed first and second metallic collectors 2 and 6.
- the current collectors are, for example made of platinum, chromium, gold or titanium and they preferably have a thickness of between 0.1 ⁇ m and 0.3 ⁇ m.
- the first current collector 2 is completely covered by an electrode forming the cathode 3 so that the latter surrounds the first current collector 2 and a thin layer forming the electrolyte 4 is deposited so as to cover the cathode 3, the part of the substrate 1a separating the first and second current collectors 2 and 6 and part of the second collector 6.
- Another electrode forming the anode 5 is arranged so as to be in contact with the substrate 1a, the electrolyte 4 and the part free from the second current collector 6.
- the anode and the cathode each preferably have a thickness of between 0.1 ⁇ m and 15 ⁇ m.
- At least one of the two electrodes and the electrolyte 4 each comprise a common grouping of the type [XY 1 Y 2 Y 3 Y 4 ], where X is located in a tetrahedron whose vertices are respectively formed by the chemical elements Y 1; Y 2 , Y 3 and Y 4 .
- the chemical element X is chosen from phosphorus, boron, silicon, sulfur, molybdenum, vanadium and germanium and the chemical elements ⁇ ⁇ > Y 2 »Y 3 and Y 4 are chosen from sulfur, l , fluorine and chlorine.
- the elements YY 2 , Y 3 and Y 4 can be identical and at least one of these elements can form a vertex common to two tetrahedra, so as to form a condensed compound.
- the two electrodes and the electrolyte each have a common grouping makes it possible, in particular, to create a certain continuum or a certain homogeneity in the chemical composition of the superimposed thin layers.
- the interface between the electrode and the electrolyte then has low electrical resistance compared to thin layers of different chemical compositions and structures. This allows, in particular, to reduce the total electrical resistance of the microbattery and to improve its energy storage efficiency.
- the solid electrolyte 4 preferably comprises an alkali metal ion A chosen from lithium and sodium. It then comprises at least one compound of the AXY ⁇ Y ⁇ type and it preferably has a thickness of between 0.5 ⁇ m and
- the electrolyte 4 can, for example, comprise lithium phosphate (Li 3 P0 4 ).
- the electrolyte 4 can also consist of a mixture of compounds including a compound of the type AXY 1 Y 2 Y 3 Y 4 .
- the electrolyte 4 can be constituted by a mixture of Li 3 P0 4 with a compound comprising lithium such as Li 2 Si0 3 or Li 4 Si0 4 or Li 2 S or with a compound comprising silicon such as SiS 2 .
- It can also contain nitrogen, which partially replaces an element Y 1 ( Y 2 , Y 3 , or Y 4 of the group [XY-iYjjYgY, forming, for example in the case of an electrolyte as Li 3 P0 4 , Li x PO y N z , nitrogen providing the electrolyte with good ionic conductivity.
- the electrode forming the cathode 3 is preferably intended for the insertion and disinsertion of the alkali metal ion A while the electrode forming the anode 5 is preferably intended to provide the alkali metal ion.
- the anode and the cathode have different intercalation potentials of the alkali metal ion A.
- the electrode forming the anode 5 comprises the grouping of the type [XY 1 Y 2 Y 3 Y 4 ]. It also comprises the alkali metal ion A contained in the electrolyte 4, a mixture of metal ions T, a chemical element B chosen from sulfur, oxygen, fluorine and chlorine and a chemical element E.
- the mixture of metal ions T comprises at least one transition metal ion chosen from titanium, vanadium, chromium, cobalt, nickel, manganese, iron, copper, niobium, molybdenum and tungsten
- the electrode includes a compound of type A x1 T y1 [XY 1 Y 2 Y 3 Y 4 ] z1 B w1 , .with ⁇ and W j > 0 and y 1 and z ⁇ > 0, a chemical element E chosen from the metals and carbon being dispersed in the compound.
- the anode may, for example be constituted by LiFeP0 4 in which platinum is dispersed (also noted
- LiFeP0 4 , Pt The material LiFeP0 4 , Pt of the negative electrode can be advantageously replaced by LiFe 067 PO 4 , Au.
- the cathode 3 can be made up of any type of material known to be used as a cathode in this type of microbattery. It can, for example, be constituted by the alkali metal A or an alloy of the alkali metal A or by a material capable of alloying with the alkali metal A, such as silicon, carbon or tin or else it may be constituted by a mixed chalcogenide comprising a transition metal.
- the cathode also comprises the alkali metal ion A, a mixture of metal ions T 'comprising at least one transition metal ion chosen from titanium, vanadium, chromium, cobalt, nickel , manganese, iron, copper, niobium, molybdenum and tungsten and a chemical element B 'chosen from sulfur, oxygen, fluorine and chlorine.
- a transition metal ion chosen from titanium, vanadium, chromium, cobalt, nickel , manganese, iron, copper, niobium, molybdenum and tungsten
- a chemical element B 'chosen from sulfur, oxygen, fluorine and chlorine.
- the elements T and T ' can be identical as well as the elements E and E' which are intended to ensure good electronic conductivity in the electrodes.
- the elements X ', Y' 1 ( Y ' 2 , Y' 3 , Y ' 4. Can be identical to the elements X, Y 1 ( Y 2 , Y 3 , Y 4.
- the anode and the cathode always have different potentials for intercalation of the alkali metal ion A.
- the transition metals T and T ' are different and, in this first case, they have different Fermi levels, or the transition metals T and T' are identical, and, in this second case, the metal of transition is associated differently with the group [XY ⁇ YsYJ in the two materials, that is to say that y1 and y2 are different.
- the electrolyte may include groups and [XY 2 Y 3 YJ, in the case where the elements X ', Y' 1 . Y 2 »Y 3 1 Y ⁇ 4 would be respectively different from the elements X, Y 1; Y 2 , Y 3 , Y 4 .
- the anode 5 is constituted by LiFeP0 4 in which platinum is inserted (also noted
- LiFeP0 4 , Pt the cathode 3 is made of LiCoP0 4 into which platinum is inserted (also noted LiCoP0 4 , Pt), and the electrolyte 4 is made of Li 3 P0 4 .
- the anode 5 may consist of the compound LiVSi 2 0 6 the electrolyte 4 and the cathode 3 being respectively Li 4 Si0 4 -Li 3 B0 3 and
- LiCo0 2 LiCo0 2 .
- the group common to the anode 5 and to the electrolyte 4 is Si0 4 , the compound LiVSi 2 0 6 comprising in its structure groups Si0 4 .
- Such a microbattery is preferably produced by depositing successively on the substrate which can be, for example made of silicon:
- the first and second current collectors 2 and 6 are preferably deposited on the substrate 1a, by sputtering, before the deposition of the cathode 3.
- an intermediate thin layer 7 comprising the respective constituents of the cathode 3 and of the electrolyte 4 is disposed between the cathode 3 and the electrolyte 4 so as to completely cover the cathode 3.
- the concentrations of constituents of the cathode 3 and of constituents of the electrolyte 4 vary respectively from 0 to 1 and from 1 to 0, from the electrolyte to the cathode.
- the first thin layer 7 comprises first and second concentration gradients, respectively in constituents of the cathode and in constituting electrolyte, the first and second gradients being respectively decreasing and increasing from the electrolyte towards the cathode.
- the microbattery shown in FIG. 2 comprises an additional thin intermediate layer 8 comprising the respective constituents of the anode 5 and of the electrolyte. It is arranged between the anode 5 and the electrolyte 4, the concentrations of constituents of the anode and of the electrolyte varying respectively from 0 to 1 and from 1 to 0, from the electrolyte to the anode.
- the intermediate thin layer 7 comprises the compound Li 3 P0 4 and the compound LiCoP0 4
- the additional intermediate thin layer 8 comprises the compound Li 3 P0 4 and the compound LiFeP0 4 , Pt.
- an intermediate thin layer comprising the same constituents as the electrode and the electrolyte makes it possible to reduce the concentration gradient in grouping [XY 1 Y 2 Y 3 Y 4 ] for l anode and in grouping for the cathode, throughout the electrode-electrolyte-electrode stack and therefore to reduce the electrical resistance at the interfaces, which reduces the total electrical resistance of the microbattery.
- the intermediate thin layer 7 is deposited on the cathode by means of the first and second sputtering targets, before the deposition of the electrolyte.
- a spray power gradient for the two targets can be used so as to obtain a concentration gradient of constituents of the cathode and of the electrolyte in the intermediate layer or else the spray targets can be sprayed by alternating lightning very fast.
- the additional intermediate thin layer 8 is deposited on the electrolyte by means of the second and third sputtering targets, before the deposition of the first electrode.
- the latter can be rotated making it pass alternately in front of each of the targets, the residence time in front of each target varying as a function of the thickness of the thin layer to be deposited.
- a microbattery is produced by a technique of depositing thin layers under vacuum, called deposition by radiofrequency magnetron sputtering, on a silicon substrate having a surface of 1 cm 2 .
- the first platinum collector 2 is deposited on the substrate through a mask and then the cathode 3 is formed with a first sputtering target comprising 99% LiCoP0 4 and 1% platinum.
- An intermediate thin layer 7 is then deposited on the cathode, respectively by means of the first target and of a second target constituted by Li 3 P0 4 .
- the electrolyte 4 is formed by means of the second target, preferably in the presence of nitrogen gas and it has a thickness of 1 ⁇ m.
- an additional intermediate thin layer 7 is deposited on the electrolyte 4, by means of a third target comprising 99% of FeP0 4 and 1% of platinum and the second target.
- the anode 5 is then deposited on the additional intermediate thin layer 8 thanks to the third target.
- the cathode and the anode each have a thickness of 1.5 ⁇ m. Such a microbattery delivers a voltage of 1.4V.
- Such a manufacturing process not only makes it possible to obtain a microbattery having a relatively homogeneous chemical composition, but also to implement techniques for depositing thin layers used in the field of microtechnology, and in particular by sputtering.
- a microbattery can be integrated into microsystems such as smart cards or smart labels.
- Such a microbattery also has the advantage of not using a negative lithium metal electrode.
- the alkali metal is generally deposited by thermal evaporation which imposes a reversal of the substrate which could damage the microbattery.
- the total thickness of the battery can vary between 0.3 and 0.30 ⁇ m, a small thickness allowing to withstand high current densities at a low capacity while a high thickness allows a high capacity at low current.
- the invention is not limited to the embodiments described above.
- the deposits of the anode and the cathode can be reversed.
- the deposition of thin layers can also be achieved by a co-sputtering deposition technique also called "co-sputtering", by varying the power imposed on each target over time.
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- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Dispersion Chemistry (AREA)
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- Primary Cells (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0311998A FR2860925A1 (en) | 2003-10-14 | 2003-10-14 | Microbattery includes a first electrode and electrolyte comprising a material with a tetrahedral structure with a central atom of phosphorus, boron, silicon, sulfur, molybdenum, vanadium or germanium |
PCT/FR2004/002571 WO2005038965A2 (en) | 2003-10-14 | 2004-10-11 | Microbattery with at least one electrode and electrolyte each comprising a common grouping [xy1,y2,y3,y4] and method for the production of said microbattery |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1673826A2 true EP1673826A2 (en) | 2006-06-28 |
Family
ID=34355464
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP04817211A Withdrawn EP1673826A2 (en) | 2003-10-14 | 2004-10-11 | MICROBATTERY WITH AT LEAST ONE ELECTRODE AND ELECTROLYTE EACH COMPRISING A COMMON GROUPING XY sb 1 /sb ,Y sb 2 /sb ,Y sb 3 / sb ,Y sb 4 /sb AND METHOD FOR THE PRODUCTION OF SAID MICRO BATTERY |
Country Status (5)
Country | Link |
---|---|
US (1) | US20070037059A1 (en) |
EP (1) | EP1673826A2 (en) |
JP (1) | JP4795244B2 (en) |
FR (1) | FR2860925A1 (en) |
WO (1) | WO2005038965A2 (en) |
Cited By (1)
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CN112038689A (en) * | 2019-06-04 | 2020-12-04 | 北京卫蓝新能源科技有限公司 | Borate lithium solid electrolyte and application thereof |
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FR2880198B1 (en) * | 2004-12-23 | 2007-07-06 | Commissariat Energie Atomique | NANOSTRUCTURED ELECTRODE FOR MICROBATTERY |
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JP5245441B2 (en) * | 2008-02-08 | 2013-07-24 | トヨタ自動車株式会社 | Solid battery |
US8568571B2 (en) * | 2008-05-21 | 2013-10-29 | Applied Materials, Inc. | Thin film batteries and methods for manufacturing same |
JP5487577B2 (en) * | 2008-08-26 | 2014-05-07 | セイコーエプソン株式会社 | Battery and battery manufacturing method |
US20100261049A1 (en) * | 2009-04-13 | 2010-10-14 | Applied Materials, Inc. | high power, high energy and large area energy storage devices |
KR101944863B1 (en) * | 2009-09-30 | 2019-02-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | Electrochemical capacitor |
JP5590521B2 (en) * | 2009-11-06 | 2014-09-17 | 独立行政法人産業技術総合研究所 | Positive electrode active material for lithium secondary battery and method for producing the same |
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- 2004-10-11 WO PCT/FR2004/002571 patent/WO2005038965A2/en active Application Filing
- 2004-10-11 EP EP04817211A patent/EP1673826A2/en not_active Withdrawn
- 2004-10-11 JP JP2006534783A patent/JP4795244B2/en not_active Expired - Fee Related
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CN112038689A (en) * | 2019-06-04 | 2020-12-04 | 北京卫蓝新能源科技有限公司 | Borate lithium solid electrolyte and application thereof |
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JP4795244B2 (en) | 2011-10-19 |
US20070037059A1 (en) | 2007-02-15 |
JP2007508671A (en) | 2007-04-05 |
WO2005038965A2 (en) | 2005-04-28 |
WO2005038965A3 (en) | 2006-03-30 |
FR2860925A1 (en) | 2005-04-15 |
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