EP1613203A4 - Digital micromirror device having a window transparent to ultraviolet (uv) light - Google Patents

Digital micromirror device having a window transparent to ultraviolet (uv) light

Info

Publication number
EP1613203A4
EP1613203A4 EP04758020A EP04758020A EP1613203A4 EP 1613203 A4 EP1613203 A4 EP 1613203A4 EP 04758020 A EP04758020 A EP 04758020A EP 04758020 A EP04758020 A EP 04758020A EP 1613203 A4 EP1613203 A4 EP 1613203A4
Authority
EP
European Patent Office
Prior art keywords
ultraviolet
light
micromirror device
digital micromirror
window transparent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04758020A
Other languages
German (de)
French (fr)
Other versions
EP1613203A2 (en
Inventor
Roy E Williams
Brian M Callies
David E Thomas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Memphis Eye & Cataract Associates Ambulatory Surgery Center (Dba Meca Laser And Surgery Center)
Memphis Eye & Cataract Associa
Original Assignee
Memphis Eye & Cataract Associates Ambulatory Surgery Center (Dba Meca Laser And Surgery Center)
Memphis Eye & Cataract Associa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/395,662 external-priority patent/US6859311B2/en
Priority claimed from US10/395,660 external-priority patent/US7023605B2/en
Priority claimed from US10/395,661 external-priority patent/US7161727B2/en
Application filed by Memphis Eye & Cataract Associates Ambulatory Surgery Center (Dba Meca Laser And Surgery Center), Memphis Eye & Cataract Associa filed Critical Memphis Eye & Cataract Associates Ambulatory Surgery Center (Dba Meca Laser And Surgery Center)
Publication of EP1613203A2 publication Critical patent/EP1613203A2/en
Publication of EP1613203A4 publication Critical patent/EP1613203A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0067—Packages or encapsulation for controlling the passage of optical signals through the package
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
EP04758020A 2003-03-24 2004-03-23 Digital micromirror device having a window transparent to ultraviolet (uv) light Withdrawn EP1613203A4 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US10/395,662 US6859311B2 (en) 2003-03-24 2003-03-24 Digital micromirror device having a window transparent to ultraviolet (UV) light
US10/395,660 US7023605B2 (en) 2003-03-24 2003-03-24 Digital micromirror device having a window transparent to ultraviolet (UV) light
US10/395,661 US7161727B2 (en) 2003-03-24 2003-03-24 Digital micromirror device having a window transparent to ultraviolet (UV) light
PCT/US2004/008735 WO2004084710A2 (en) 2003-03-24 2004-03-23 Digital micromirror device having a window transparent to ultraviolet (uv) light

Publications (2)

Publication Number Publication Date
EP1613203A2 EP1613203A2 (en) 2006-01-11
EP1613203A4 true EP1613203A4 (en) 2009-12-09

Family

ID=33102138

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04758020A Withdrawn EP1613203A4 (en) 2003-03-24 2004-03-23 Digital micromirror device having a window transparent to ultraviolet (uv) light

Country Status (4)

Country Link
EP (1) EP1613203A4 (en)
JP (1) JP2006521580A (en)
CA (1) CA2520104A1 (en)
WO (1) WO2004084710A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004030803A1 (en) 2004-06-25 2006-01-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Highly reflective coated micromechanical mirror, process for its preparation and its use
JP2009519494A (en) * 2005-12-15 2009-05-14 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ MEMS scanner system and method
NL2003534A (en) * 2008-10-24 2010-04-27 Asml Holding Nv Anti-reflective coating for optical elements.
US8421995B2 (en) 2008-10-24 2013-04-16 Asml Holding N.V. Anti-reflective coating for optical elements
CN110200574B (en) * 2019-06-27 2022-02-18 京东方科技集团股份有限公司 Endoscopic imaging device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000048046A1 (en) * 1999-02-12 2000-08-17 Corning Incorporated Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass
WO2001067977A1 (en) * 2000-03-13 2001-09-20 Memphis Eye & Cataract Associates Ambulatory Surgery Center (D.B.A.) Meca Laser And Surgery Center Laser eye surgery system using wavefront sensor analysis to control digital micromirror device (dmd) mirror patterns
US20020056560A1 (en) * 2000-11-16 2002-05-16 Liu Jwei Wien MEMS enclosure
US20020146200A1 (en) * 2001-03-16 2002-10-10 Kudrle Thomas David Electrostatically actuated micro-electro-mechanical devices and method of manufacture
WO2002100795A1 (en) * 2001-06-13 2002-12-19 Raytheon Company Lid with window hermetically sealed to frame, and a method of making it

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6745449B2 (en) * 2001-11-06 2004-06-08 Raytheon Company Method and apparatus for making a lid with an optically transmissive window
US6639313B1 (en) * 2002-03-20 2003-10-28 Analog Devices, Inc. Hermetic seals for large optical packages and the like

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000048046A1 (en) * 1999-02-12 2000-08-17 Corning Incorporated Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass
WO2001067977A1 (en) * 2000-03-13 2001-09-20 Memphis Eye & Cataract Associates Ambulatory Surgery Center (D.B.A.) Meca Laser And Surgery Center Laser eye surgery system using wavefront sensor analysis to control digital micromirror device (dmd) mirror patterns
US20020056560A1 (en) * 2000-11-16 2002-05-16 Liu Jwei Wien MEMS enclosure
US20020146200A1 (en) * 2001-03-16 2002-10-10 Kudrle Thomas David Electrostatically actuated micro-electro-mechanical devices and method of manufacture
WO2002100795A1 (en) * 2001-06-13 2002-12-19 Raytheon Company Lid with window hermetically sealed to frame, and a method of making it

Also Published As

Publication number Publication date
JP2006521580A (en) 2006-09-21
WO2004084710A3 (en) 2006-03-23
EP1613203A2 (en) 2006-01-11
CA2520104A1 (en) 2004-10-07
WO2004084710A2 (en) 2004-10-07

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