EP1504515A1 - Electromagnetic linear drive unit - Google Patents

Electromagnetic linear drive unit

Info

Publication number
EP1504515A1
EP1504515A1 EP03737896A EP03737896A EP1504515A1 EP 1504515 A1 EP1504515 A1 EP 1504515A1 EP 03737896 A EP03737896 A EP 03737896A EP 03737896 A EP03737896 A EP 03737896A EP 1504515 A1 EP1504515 A1 EP 1504515A1
Authority
EP
European Patent Office
Prior art keywords
longitudinal
motor
linear drive
stator
drive according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03737896A
Other languages
German (de)
French (fr)
Inventor
Sebastian Aigner
Mohammad Mehdianpour
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP1504515A1 publication Critical patent/EP1504515A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/03Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22Feeding members carrying tools or work
    • B23Q5/28Electric drives
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K11/00Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21Devices for sensing speed or position, or actuated thereby
    • H02K11/22Optical devices
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • H05K13/0404Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0406Drive mechanisms for pick-and-place heads, e.g. details relating to power transmission, motors or vibration damping
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K2201/00Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18Machines moving with multiple degrees of freedom

Definitions

  • the invention relates to an electromagnetic linear drive with a stator and at least one motor which can be moved along a longitudinal guide, the stator and the motor being alternately provided with electromagnetic longitudinal drive elements.
  • Such a linear drive is such. B. known from WO 0016468 A.
  • the stator is then covered with permanent magnets that are lined up linearly.
  • the motor (rotor) which can be moved over it, has electromagnetically activated coil elements that interact with the stationary longitudinal drive elements and is guided on the stator by means of two linear guides using ball-ring technology. These linear bearings absorb the one-sided magnetic forces.
  • the invention has for its object to reduce the management effort.
  • the electromagnetic lateral guidance makes it possible to move the motor exactly parallel to the longitudinal marking.
  • the z. B. air-bearing motor does not require any mechanical connection to the stator. However, it is also possible to use double-acting linear motors in which the magnetic forces cancel each other out, so that a floating effect can also be achieved here.
  • the longitudinal marking can e.g. B. with little additional effort on a longitudinal scale on which the markings are shown photolithographically.
  • the optical position sensor continuously records the relative position of the motor to the longitudinal marking.
  • the guide elements are formed by a type of transverse drive elements which correct the deviations of the motor in the transverse direction depending on the sensor values. They are similar in design and function to the longitudinal drive elements and can be combined with them in an integrated structure with relatively little additional effort.
  • the linear drive can be used for different tasks without the need for special adjustments. It is particularly suitable for positioning tasks in which essentially only acceleration and braking forces occur in the longitudinal direction.
  • z. B when transporting a workpiece from a pick-up area to an assembly site, accurate guidance is only required when picking up and assembling. A large part of the transport route can thus be accelerated without precise control.
  • the centering effect of the longitudinal drive elements makes it possible to dispense with the guide elements of the stator.
  • the optical guide means Due to the small lateral deflection, it is possible to arrange the optical guide means outside of the electromagnetic drive area. When the air pressure in the air bearing ceases to exist, the motor is pulled against the stator with high force by the permanent magnets. By arranging the optics outside of this area, it is possible to maintain a sufficient safety distance between the measuring and sensor surfaces, which prevents damage.
  • two directly adjacent linear drives can be formed, with which the assembly performance can be increased considerably.
  • the two motors can be guided close to each other and thus, B. can be positioned simultaneously over a circuit board in order to simultaneously set up two components. Due to the lateral deflectability of the motors, it is possible to mount the components at the same time even if the transverse distance does not correspond to the central distance of the transverse drives.
  • the two stators are combined in a common structure, which reduces the manufacturing effort and increases the accuracy of the mutual assignment.
  • workpiece carriers or placement heads can be operated in a rotating, performance-enhancing manner and positioned individually without the need for a delicate mechanical deflection.
  • the motors can be introduced into the new line in each case without mechanical running-in means and stops.
  • FIG. 1 shows a top view of the underside of a linear drive
  • Figure 2 is an end view of the linear drive of Figure 1 with a placement head.
  • the linear drive according to FIGS. 1 and 2 consists of a stator 1 and a motor 2 which can be moved on it.
  • a sensor head 3 fastened to the motor 2 is directed to a scale 4 fastened to the stator 1.
  • the stator 1 and the motor 2 are alternately with in a longitudinal direction lined up, transverse longitudinal drive elements 5 z. B. in the form of permanent magnets 6 of the stator 1 and coil segments 7 of the motor 2.
  • longitudinal electromagnetic guide elements 8 are arranged on the stator 1 and on the motor 2, which are used for the frictional lateral guidance of the motor 2.
  • the scale 4 is provided with a measuring scale 9 formed from transverse markings and with longitudinal markings 10 which extend parallel to the row direction of the longitudinal drive elements 5.
  • a position sensor 11 of the sensor head 3 detects the position of the longitudinal markings relative to the motor.
  • a measuring Sensor 12 of the sensor head 3 is used to determine the position of the motor 2 on the basis of the measuring scale 9 in the longitudinal direction.
  • the longitudinal drive elements 5 enable the motor 2 to be advanced in the row direction by appropriate energization of the coil segments 7.
  • the motor 2 can also be deflected out of a central track by energizing the guide elements 8 assigned to the motor, the dash-dotted contours of the motor 2 being the same indicate maximum deflection.
  • the degree of the respective deflection can be recognized and controlled by the position sensor 11.
  • the measuring head 3 and the scale 4 are outside the electromagnetic drive range. When the motor 2 is placed on the stator 1, a minimum distance can be maintained between the measuring head 3 and the scale 4, which prevents mutual damage.
  • the guide elements 8 are exactly aligned in the longitudinal direction and counteract a rotation of the motor 2 to secure the position. If the requirements for the angular position are very high, it is also possible to provide two of the position sensors at a distance from one another. On the motor, two of the guide elements are arranged one behind the other in the longitudinal direction in each row, which enable a correction of the angular position by different energization.
  • a placement head 13 On the underside of the motor 2, a placement head 13 is attached, which is provided with suction pads 14 for electronic components 15. These are displaceable perpendicular to the plane of the stator 1 and can thus remove the components 15 from one
  • a second placement head 13 with an additional linear drive is indicated by dash-dotted lines, in which the stator 1 is widened accordingly and in which the drive and guide elements are doubled to form a second path.

Abstract

Disclosed is an electromagnetic linear drive unit comprising a stator (1) and a linearly movable motor (2). The stator (1) and the motor (2) alternately support longitudinally driving electromagnetic elements (5) and perpendicularly directing electromagnetic elements (8) which maintain the motor (2) within a predefined guideway by means of a longitudinal optical mark (10) and a position sensor (11), whereby complex mechanical guiding elements can be dispensed with.

Description

Beschreibungdescription
Elektromagnetischer LinearantriebElectromagnetic linear actuator
Die Erfindung bezieht sich auf einen elektromagnetischen Linearantrieb mit einem Stator und zumindest einem entlang einer Längsführung verfahrbaren Motor, wobei der Stator und der Motor wechselweise mit elektromagnetischen Längsantriebselementen versehen sind.The invention relates to an electromagnetic linear drive with a stator and at least one motor which can be moved along a longitudinal guide, the stator and the motor being alternately provided with electromagnetic longitudinal drive elements.
Ein derartiger Linearantrieb ist z. B. durch die WO 0016468 A bekannt geworden. Danach ist der Stator mit linear aneinander gereihten Permanentmagneten belegt. Der darüber verfahrbare Motor (Läufer) weist elektromagnetisch aktivierbare mit den stationären Längsantriebselementen wechselwirkende Spulenelemente auf und ist am Stator mittels zweier Linearführungen in Kugel -Umlauftechnik geführt. Diese Linearlager nehmen die einseitig wirkenden Magnetkräfte auf.Such a linear drive is such. B. known from WO 0016468 A. The stator is then covered with permanent magnets that are lined up linearly. The motor (rotor), which can be moved over it, has electromagnetically activated coil elements that interact with the stationary longitudinal drive elements and is guided on the stator by means of two linear guides using ball-ring technology. These linear bearings absorb the one-sided magnetic forces.
Es sind aber auch z. B. durch die US 6150740 Luftlager bekannt, die die Magnetkräfte abfangen und durch gewinkelte Anordnung der Lagerflächen eine Seitenführung ermöglichen, wobei die Führungselemente eine genaue Zuordnung und entsprechend aufwendige Montage erfordern.But there are also z. B. known from US 6150740 air bearings that intercept the magnetic forces and allow lateral guidance by angled arrangement of the bearing surfaces, the guide elements requiring precise assignment and correspondingly complex assembly.
Der Erfindung liegt die Aufgabe zugrunde, den Führungsaufwand zu verringern.The invention has for its object to reduce the management effort.
Diese Aufgabe wird durch die Erfindung gemäß Anspruch 1 ge- löst. Durch die elektromagnetische seitliche Führung ist es möglich, den Motor genau parallel zu der Längsmarkierung zu verfahren. Der z. B. luftgelagerte Motor benötigt keinerlei mechanische Verbindung zum Stator. Es ist aber auch möglich, doppelseitig wirkende Linearmotoren zu verwenden, bei denen sich die Magnetkräfte gegenseitig aufheben, so dass auch hierbei ein Schwebeeffekt erzielt werden kann. Die Längsmarkierung kann z. B. mit geringem Mehraufwand auf einem Längs- maßstab angebracht werden, auf dem die Markierungen fotoli- thografisch gezeigt werden. Der optische Positionssensor er- fasst fortlaufend die relative Lage des Motors zur Längsmarkierung. Die Führungselemente sind durch eine Art von Queran- triebselementen gebildet, die die Abweichungen des Motors in der Querrichtung in Abhängigkeit von den Sensorwerten korrigieren. In ihrer Bauart und Funktion gleichen sie den Längs- antriebselementen und können mit diesen in einer integrierten Struktur mit relativ geringem Mehraufwand zusammengefasst werden.This object is achieved by the invention according to claim 1. The electromagnetic lateral guidance makes it possible to move the motor exactly parallel to the longitudinal marking. The z. B. air-bearing motor does not require any mechanical connection to the stator. However, it is also possible to use double-acting linear motors in which the magnetic forces cancel each other out, so that a floating effect can also be achieved here. The longitudinal marking can e.g. B. with little additional effort on a longitudinal scale on which the markings are shown photolithographically. The optical position sensor continuously records the relative position of the motor to the longitudinal marking. The guide elements are formed by a type of transverse drive elements which correct the deviations of the motor in the transverse direction depending on the sensor values. They are similar in design and function to the longitudinal drive elements and can be combined with them in an integrated structure with relatively little additional effort.
Durch die vollständige mechanische Entkopplung zwischen dem Stator und dem Motor kann der Linearantrieb für unterschiedliche Aufgaben eingesetzt werden, ohne dass dafür besondere Anpassungen erforderlich sind. Er eignet sich insbesondere für Positionieraufgaben, bei denen im Wesentlichen nur Beschleunigungs- und Bremskräfte in der Längsrichtung auftreten. Dabei ist z. B. beim Transport eines Werkstücks von einem Abholbereich zu einem Montageplatz eine genaue Führung lediglich beim Abholen und beim Zusammenfügen erforderlich. Ein großer Teil der Transportstrecke kann somit ohne genaue Steuerung beschleunigt durchlaufen werden. In diesem Abschnitt ist es durch die Zentrierwirkung der Längsantriebs- elemente möglich, auf die Führungselemente des Stators zu verzichten.Due to the complete mechanical decoupling between the stator and the motor, the linear drive can be used for different tasks without the need for special adjustments. It is particularly suitable for positioning tasks in which essentially only acceleration and braking forces occur in the longitudinal direction. Here is z. B. when transporting a workpiece from a pick-up area to an assembly site, accurate guidance is only required when picking up and assembling. A large part of the transport route can thus be accelerated without precise control. In this section, the centering effect of the longitudinal drive elements makes it possible to dispense with the guide elements of the stator.
Vorteilhafte Weiterbildungen der Erfindung sind in den Ansprüchen 2 bis 10 gekennzeichnet:Advantageous developments of the invention are characterized in claims 2 to 10:
Durch die Weiterbildung nach Anspruch 2 ist es möglich, den Motor seitlich feinzupositionieren, so dass seine Lage z. B. der Lage von Abholplätzen der Werkstücke genau angepasst werden kann, wodurch die aufwendige Nachjustierung dieser Abhol- plätze entfallen kann. Das Gleiche gilt für die Montageposi- tionen z. B. von Bauelementen auf einer Leiterplatte. Diese kann z. B. quer zur Längsrichtung grob positioniert werden. Die Bauteile können nun innerhalb eines schmalen Streifens aufgesetzt werden, ohne dass bei jedem einzelnen der Bauelemente die Leiterplatte nachgeführt werden muss.Through the development according to claim 2, it is possible to fine-position the motor laterally, so that its position z. B. the position of the pick-up locations of the workpieces can be adjusted exactly, which means that the time-consuming readjustment of these pick-up locations can be omitted. The same applies to the assembly positions e.g. B. of components on a circuit board. This can e.g. B. roughly positioned transversely to the longitudinal direction. The components can now be within a narrow strip be placed without the circuit board having to be tracked for each individual component.
Durch die Weiterbildung nach Anspruch 3 ist es möglich, den Positionssensor und den Mess-Sensor sowie die Mess-Skala und die Längsmarkierung in gemeinsamen Strukturen von hoher Genauigkeit und geringem Mehraufwand zusammenzufassen.Through the development according to claim 3, it is possible to combine the position sensor and the measuring sensor as well as the measuring scale and the longitudinal marking in common structures of high accuracy and little additional effort.
Durch die geringe seitliche Auslenkung ist es möglich, die optischen Führungsmittel nach Anspruch 4 außerhalb des elektromagnetischen Antriebsbereiches anzuordnen. Beim Wegfall des Luftdrucks im Luftlager nach Anspruch 5 wird der Motor durch die Permanentmagneten mit hoher Kraft gegen den Stator gezogen. Durch die Anordnung der Optik außerhalb dieses Bereiches ist es möglich, zwischen den Mess- und Sensorflächen einen hinreichenden Sicherheitsabstand einzuhalten, der eine Beschädigung ausschließt.Due to the small lateral deflection, it is possible to arrange the optical guide means outside of the electromagnetic drive area. When the air pressure in the air bearing ceases to exist, the motor is pulled against the stator with high force by the permanent magnets. By arranging the optics outside of this area, it is possible to maintain a sufficient safety distance between the measuring and sensor surfaces, which prevents damage.
Durch die Weiterbildung nach Anspruch 6 ist es z.B. möglich, elektrische Bauelemente mittels zwei Motoren aus zwei entgegengesetzten Richtungen der Leiterplatte zuzuführen und gleichzeitig auf die Leiterplatte an unterschiedlichen Stellen aufzusetzen.Through the training according to claim 6, it is e.g. possible to supply electrical components by means of two motors from two opposite directions to the circuit board and at the same time to place them on the circuit board at different locations.
Mit den beiden Statoren nach Anspruch 7 lassen sich zwei unmittelbar benachbarte Linearantriebe bilden, mit denen sich die Montageleistung erheblich steigern lässt. Durch den Wegfall der mechanischen oder pneumatischen Führungen können die beiden Motoren in engem Abstand aneinander vorbeigeführt wer- den und so z. B. gleichzeitig über einer Leiterplatte positioniert werden, um gleichzeitig zwei Bauelemente aufzusetzen. Durch die seitliche Auslenkbarkeit der Motoren ist es möglich, die Bauelemente auch dann gleichzeitig aufzusetzen, wenn der Querabstand nicht dem Mittelabstand der Querantriebe entspricht. Durch die Weiterbildung nach Anspruch 8 werden die beiden Statoren in einer gemeinsamen Struktur zusammengefasst , was den Herstellungsaufwand verringert und die Genauigkeit der wechselseitigen Zuordnung erhöht.With the two stators according to claim 7, two directly adjacent linear drives can be formed, with which the assembly performance can be increased considerably. By eliminating the mechanical or pneumatic guides, the two motors can be guided close to each other and thus, B. can be positioned simultaneously over a circuit board in order to simultaneously set up two components. Due to the lateral deflectability of the motors, it is possible to mount the components at the same time even if the transverse distance does not correspond to the central distance of the transverse drives. Through the development according to claim 8, the two stators are combined in a common structure, which reduces the manufacturing effort and increases the accuracy of the mutual assignment.
Durch die Weiterbildung nach Anspruch 9 können z. B. Werkstückträger oder Bestückköpfe leistungssteigernd umlaufend betrieben und individuell positioniert werden, ohne dass dazu eine heikle mechanische Umlenkung erforderlich ist. Das Ein- schleusen der Motoren in die jeweils neue Strecke kann ohne mechanische Einlaufmittel und Anschläge erfolgen.Through the training according to claim 9 z. B. workpiece carriers or placement heads can be operated in a rotating, performance-enhancing manner and positioned individually without the need for a delicate mechanical deflection. The motors can be introduced into the new line in each case without mechanical running-in means and stops.
Im Folgenden wird die Erfindung anhand eines in der Zeichnung dargestellten Ausführungsbeispieles näher erläutert.The invention is explained in more detail below on the basis of an exemplary embodiment shown in the drawing.
Figur 1 zeigt eine Draufsicht auf die Unterseite eines Linearantriebs,FIG. 1 shows a top view of the underside of a linear drive,
Figur 2 eine Stirnansicht des Linearantriebs nach Figur 1 mit einem Bestückkopf .Figure 2 is an end view of the linear drive of Figure 1 with a placement head.
Der Linearantrieb nach den Figuren 1 und 2 besteht aus einem Stator 1 und einem an diesem verfahrbaren Motor 2. Ein am Motor 2 befestigter Sensorkopf 3 ist auf einen am Stator 1 befestigten Maßstab 4 gerichtet. Der Stator 1 und der Motor 2 sind wechselweise mit in einer Längsrichtung aneinandergereihten, querstehenden Längsantriebselementen 5 z. B. in Form von Permanentmagneten 6 des Stators 1 und Spulensegmenten 7 des Motors 2 versehen. Neben diesem sind längsstehende elektromagnetische Führungselemente 8 am Stator 1 und am Motor 2 angeordnet, die der kraftschlüssigen seitlichen Führung des Motors 2 dienen.The linear drive according to FIGS. 1 and 2 consists of a stator 1 and a motor 2 which can be moved on it. A sensor head 3 fastened to the motor 2 is directed to a scale 4 fastened to the stator 1. The stator 1 and the motor 2 are alternately with in a longitudinal direction lined up, transverse longitudinal drive elements 5 z. B. in the form of permanent magnets 6 of the stator 1 and coil segments 7 of the motor 2. In addition to this, longitudinal electromagnetic guide elements 8 are arranged on the stator 1 and on the motor 2, which are used for the frictional lateral guidance of the motor 2.
Der Maßstab 4 ist mit einer aus Quermarkierungen gebildeten Mess-Skala 9 und mit Längsmarkierungen 10 versehen, die sich parallel zur Reihenrichtung der Längsantriebselemente 5 erstrecken. Ein Positionssensor 11 des Sensorkopfs 3 erfasst die Lage der Längsmarkierungen relativ zum Motor. Ein Mess- Sensor 12 des Sensorkopfs 3 dient der Lagebestimmung des Motors 2 anhand der Mess-Skala 9 in der Längsrichtung.The scale 4 is provided with a measuring scale 9 formed from transverse markings and with longitudinal markings 10 which extend parallel to the row direction of the longitudinal drive elements 5. A position sensor 11 of the sensor head 3 detects the position of the longitudinal markings relative to the motor. A measuring Sensor 12 of the sensor head 3 is used to determine the position of the motor 2 on the basis of the measuring scale 9 in the longitudinal direction.
Die Längsantriebselemente 5 ermöglichen den Vorschub des Mo- tors 2 in der Reihenrichtung durch entsprechende Bestromung der Spulensegmente 7. Der Motor 2 kann außerdem aus einer mittleren Spur heraus durch Bestromung der dem Motor zugeordneten Führungselemente 8 ausgelenkt werden, wobei die strichpunktierten Konturen des Motors 2 dessen maximale Auslenkung andeuten. Durch den Positionssensor 11 kann das Maß der jeweiligen Auslenkung erkannt und gesteuert werden. Der Messkopf 3 und der Maßstab 4 befinden sich außerhalb des elektromagnetischen Antriebsbereichs. Beim Aufsetzen des Motors 2 auf den Stator 1 kann es zwischen dem Messkopf 3 und dem Maß- stab 4 ein Mindestabstand eingehalten werden, der eine wechselseitige Beschädigung verhindert.The longitudinal drive elements 5 enable the motor 2 to be advanced in the row direction by appropriate energization of the coil segments 7. The motor 2 can also be deflected out of a central track by energizing the guide elements 8 assigned to the motor, the dash-dotted contours of the motor 2 being the same indicate maximum deflection. The degree of the respective deflection can be recognized and controlled by the position sensor 11. The measuring head 3 and the scale 4 are outside the electromagnetic drive range. When the motor 2 is placed on the stator 1, a minimum distance can be maintained between the measuring head 3 and the scale 4, which prevents mutual damage.
Die Führungslemente 8 sind in der Längsrichtung genau fluchtend angeordnet und wirken einer Verdrehung des Motors 2 la- gesichernd entgegen. Bei sehr hohen Anforderungen an die Winkellage ist es auch möglich, zwei der Positionssensoren mit Abstand hintereinander vorzusehen. Am Motor sind in der Längsrichtung in jeder Reihe zwei der Führungselemente hintereinander angeordnet, die durch unterschiedliche Bestromung eine Korrektor der Winkellage ermöglichen.The guide elements 8 are exactly aligned in the longitudinal direction and counteract a rotation of the motor 2 to secure the position. If the requirements for the angular position are very high, it is also possible to provide two of the position sensors at a distance from one another. On the motor, two of the guide elements are arranged one behind the other in the longitudinal direction in each row, which enable a correction of the angular position by different energization.
Auf der Unterseite des Motors 2 ist ein Bestückkopf 13 angebracht, der mit Sauggreifern 14 für elektronische Bauelemente 15 versehen ist. Diese sind senkrecht zur Ebene des Stators 1 verschiebbar und können somit die Bauelemente 15 aus einerOn the underside of the motor 2, a placement head 13 is attached, which is provided with suction pads 14 for electronic components 15. These are displaceable perpendicular to the plane of the stator 1 and can thus remove the components 15 from one
Abholposition abholen und nach dem Längsvorschub des Motors 2 auf eine quer zur Längsrichtung des Stators 1 verschiebbare Leiterplatte 16 aufsetzen.Pick up the pick-up position and, after the longitudinal advance of the motor 2, place it on a printed circuit board 16 which can be moved transversely to the longitudinal direction of the stator 1.
In der linken Bildhälfte der Figur 2 ist ein zweiter Bestückkopf 13 mit einem zusätzlichen Linearantrieb strichpunktiert angedeutet, bei dem der Stator 1 entsprechend verbreitert ist und bei dem die Antriebs- und Führungselemente zu einer zweiten Bahn verdoppelt sind. In the left half of FIG. 2, a second placement head 13 with an additional linear drive is indicated by dash-dotted lines, in which the stator 1 is widened accordingly and in which the drive and guide elements are doubled to form a second path.
BezugszeichenlisteLIST OF REFERENCE NUMBERS
1 Stator1 stator
2 Motor 3 Sensorkopf2 motor 3 sensor head
4 Maßstab4 scale
5 Längsantriebselement5 longitudinal drive element
6 Permanentmagnet6 permanent magnet
7 Spulensegment 8 Führungselement7 coil segment 8 guide element
9 Mess-Skala9 measuring scale
10 Längsmarkierung10 longitudinal marking
11 Positionssensor11 position sensor
12 Mess-Sensor 13 Bestückkopf12 measuring sensor 13 placement head
14 Sauggreifer14 suction pads
15 Bauelement15 component
16 Leiterplatte 16 circuit board

Claims

Patentansprüche claims
1. Elektromagnetischer Linearantrieb mit einem Stator (1) und mindestens einem entlang einer Längsführung verfahrbaren Motor (2) , wobei der Stator (1) und der Motor (2) wechselweise mit elektromagnetischen Längsantriebselementen (4) versehen sind, dadurch gekennzeichnet, • dass der Stator (1) und der Motor (2) wechselweise angeordnete elektromagnetische Führungselemente (8) aufweisen,1. Electromagnetic linear drive with a stator (1) and at least one motor (2) which can be moved along a longitudinal guide, the stator (1) and the motor (2) being alternately provided with electromagnetic longitudinal drive elements (4), characterized in that • the The stator (1) and the motor (2) have alternately arranged electromagnetic guide elements (8),
• dass der Stator (1) zumindest eine sich in der Längsrichtung erstreckende Längsmarkierung (10) aufweist,• that the stator (1) has at least one longitudinal marking (10) extending in the longitudinal direction,
• dass der Motor zumindest einen die Längsmarkierung (10) erfassenden Positionssensor (11) trägt,• that the motor carries at least one position sensor (11) that detects the longitudinal marking (10),
• dass die Führungselemente (8) , die Längsmarkierung (10) und der Positionssensor (11) die Längsführung bilden und• that the guide elements (8), the longitudinal marking (10) and the position sensor (11) form the longitudinal guide and
• dass in der Querrichtung die relative Lage der Führungselemente (8) zueinander in Abhängigkeit von den Sensorwer- ten korrigierbar ist.• that the relative position of the guide elements (8) to one another can be corrected in the transverse direction as a function of the sensor values.
2. Linearantrieb nach Anspruch 1 , dadurch gekennzeichnet, dass die Führungselemente (8) , der Positionssensor (11) und die Längsmarkierung (10) derart gestaltet sind, dass der Motor (2) innerhalb eines schmalen Bereichs in der Querrichtung auslenkbar und positionierbar ist.2. Linear drive according to claim 1, characterized in that the guide elements (8), the position sensor (11) and the longitudinal marking (10) are designed such that the motor (2) can be deflected and positioned within a narrow range in the transverse direction.
3. Linearantrieb nach Anspruch 1 oder 2, dadurch gekennzeichnet,3. Linear drive according to claim 1 or 2, characterized in
• dass der Stator (1) mit einer sich in der Längsrichtung erstreckenden Mess-Skala (8) versehen ist,• that the stator (1) is provided with a measuring scale (8) extending in the longitudinal direction,
• dass der Motor (2) einen auf die Mess-Skala (8) gerichteten Mess-Sensor (12) aufweist und • dass sich die Mess-Skala (8) und der Mess-Sensor (12) in der Querrichtung über den gesamten Bereich der Querauslenkung überlappen. • that the motor (2) has a measuring sensor (12) directed at the measuring scale (8) and • that the measuring scale (8) and the measuring sensor (12) are in the transverse direction over the entire range of the transverse deflection overlap.
4. Linearantrieb nach Anspruch 1, 2 oder 3, dadurch gekennzeichnet, dass die Mess-Skala (8) der Mess-Sensor (12) , die Längsmar- kierungen (10) und der Positionssensor (11) außerhalb des Bereichs der Längsantriebselemente (5) und der Führungselemente (8) angeordnet sind.4. Linear drive according to claim 1, 2 or 3, characterized in that the measuring scale (8) of the measuring sensor (12), the longitudinal markings (10) and the position sensor (11) outside the area of the longitudinal drive elements (5th ) and the guide elements (8) are arranged.
5. Linearantrieb nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Linearantrieb einseitig wirkend ausgebildet ist und dass sich der Motor (2) am Stator (1) mittels eines Luftlagers abstützt.5. Linear drive according to one of the preceding claims, characterized in that the linear drive is designed to act on one side and that the motor (2) is supported on the stator (1) by means of an air bearing.
6 . Linearantrieb nach einem der vorhergehenden Ansprüche , d a d u r c h g e k e n n z e i c h n e t , dass der Stator (1) mit mehreren der unabhängig voneinander verfahrbaren Motoren (2) versehen ist.6. Linear drive according to one of the preceding claims, d a d u r c h g e k e n n z e i c h n e t that the stator (1) is provided with several of the independently movable motors (2).
7. Linearantrieb nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet,7. Linear drive according to one of the preceding claims, characterized in
• dass zumindest zwei der Statoren (1) parallel zueinander an einem gemeinsamen Träger verankert sind und• that at least two of the stators (1) are anchored parallel to one another on a common support and
• dass zumindest einer der beiden Statoren (1) die Längsmar- kierungen (10) und die Führungselemente (8) aufweist.• that at least one of the two stators (1) has the longitudinal markings (10) and the guide elements (8).
8. Linearantrieb nach Anspruch 7, dadurch gekennzeichnet, dass die beiden Statoren (1) zu einer Baueinheit zusammenge- fasst sind, in der die Längsantriebselemente (5) und die Führungselemente (8) an einer gemeinsamen Plattform in zwei getrennten zueinander parallelen Bahnen für die Motoren (2) zu- sammengefasst sind.8. Linear drive according to claim 7, characterized in that the two stators (1) are combined to form a structural unit in which the longitudinal drive elements (5) and the guide elements (8) on a common platform in two mutually parallel paths for the Motors (2) are summarized.
9. Linearantrieb nach Anspruch 8, dadurch gekennzeichnet, • dass die beiden Bahnen Teil einer Umlaufstrecke für den Motor (2) sind und9. Linear drive according to claim 8, characterized in • that the two tracks are part of a circuit for the motor (2) and
• dass die beiden Bahnen durch zusätzliche der quer zur Längsführung aneinandergereihten stationären Führungsele- mente (8) verbunden sind.• that the two tracks are connected by additional stationary guide elements (8) lined up transversely to the longitudinal guide.
10. Linearantrieb nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Motor (1) einen Bestückkopf (13) für elektrische Bauelemente (15) trägt. 10. Linear drive according to one of the preceding claims, characterized in that the motor (1) carries a placement head (13) for electrical components (15).
EP03737896A 2002-05-15 2003-05-15 Electromagnetic linear drive unit Withdrawn EP1504515A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10221658 2002-05-15
DE10221658 2002-05-15
PCT/DE2003/001576 WO2003098782A1 (en) 2002-05-15 2003-05-15 Electromagnetic linear drive unit

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EP1504515A1 true EP1504515A1 (en) 2005-02-09

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EP03737896A Withdrawn EP1504515A1 (en) 2002-05-15 2003-05-15 Electromagnetic linear drive unit

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EP (1) EP1504515A1 (en)
AU (1) AU2003245836A1 (en)
WO (1) WO2003098782A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10345538A1 (en) * 2003-09-30 2005-05-12 Siemens Ag Placement head with a gripper unit for equipping substrates with electrical components
DE102005011830A1 (en) * 2005-03-15 2006-09-21 Pasim Direktantriebe Gmbh Linear axle, has magnetic guiding pieces connected with north and south poles of permanent magnet in even surfaces by magnetic attractive force, where one piece has tooth surrounded by tooth gap and air gap exists between rotor and stator
JP4669021B2 (en) * 2008-03-28 2011-04-13 ヤマハ発動機株式会社 Linear motor unit and electronic component transfer apparatus including the linear motor unit

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Publication number Priority date Publication date Assignee Title
CA968019A (en) * 1971-09-08 1975-05-20 Walter E. Hinds Positioning system using synchronous motor
JPS5619199B2 (en) * 1972-03-28 1981-05-06
US5334892A (en) * 1992-12-22 1994-08-02 Anorad Corporation Positioning device for planar positioning
DE19842384A1 (en) * 1998-09-16 2000-03-23 Schaeffler Waelzlager Ohg Linear guide with guide housing operating as section carrier, has attached guide rail and drive for longitudinal movement of guide and running carriages

Non-Patent Citations (1)

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Title
See references of WO03098782A1 *

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