EP1320889A1 - Connecting device - Google Patents

Connecting device

Info

Publication number
EP1320889A1
EP1320889A1 EP01971698A EP01971698A EP1320889A1 EP 1320889 A1 EP1320889 A1 EP 1320889A1 EP 01971698 A EP01971698 A EP 01971698A EP 01971698 A EP01971698 A EP 01971698A EP 1320889 A1 EP1320889 A1 EP 1320889A1
Authority
EP
European Patent Office
Prior art keywords
area
connection
circuit unit
contact device
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01971698A
Other languages
German (de)
French (fr)
Inventor
Robert Bergmann
Joost Larik
Ralf Otremba
Xaver Schloegel
Juergen Schredl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies AG
Original Assignee
Infineon Technologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10124141A external-priority patent/DE10124141B4/en
Application filed by Infineon Technologies AG filed Critical Infineon Technologies AG
Publication of EP1320889A1 publication Critical patent/EP1320889A1/en
Withdrawn legal-status Critical Current

Links

Classifications

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    • H01L24/42Wire connectors; Manufacturing methods related thereto
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    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49503Lead-frames or other flat leads characterised by the die pad
    • H01L23/49513Lead-frames or other flat leads characterised by the die pad having bonding material between chip and die pad
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Definitions

  • the connecting device according to the invention is characterized in that the connecting device is essentially designed as a - preferably prefabricated - metallic or alloy area at least partially in the area of the circuit unit and / or in the area of the contact device while largely avoiding adhesive elements and solder elements.
  • connecting device it is therefore a basic idea of the connecting device according to the invention to provide a metallic or alloy area instead of gluing or soldering.
  • this measure avoids adhesive yards or soldering yards, and space is thus saved according to the invention.
  • metallic or alloy areas are particularly suitable for absorbing thermomechanical tensions between a circuit unit and a contact device to be contacted, because favorable thermomechanical or thermal expansion properties can be achieved through an appropriately selected composition - especially in the context of a prefabrication process.
  • a metallization or alloying process is easier to integrate in terms of production technology than gluing or soldering.
  • At least one buffer area in particular in the form of a layer, is provided. This is designed so that the thermomechanical tensions between the circuit unit and the contact device can be absorbed during operation. Thus, a thermo-mechanical decoupling, and discharge is generated between the circuit unit and the contacts in the circuit arrangement ⁇ direction realized by the vorgese ⁇ Henen buffer area.
  • Layer e.g. the buffer, through which both the buffer property and the connection function are then realized.
  • connection area is advantageously formed at least with a surface area thereof as an essentially integral component, in particular as a layer, in an area of the existing structure of the contact device and / or the circuit unit.
  • the integration into an existing structure also enables automated production, preferably in a prefabrication step, with regard to the design of the connection area.
  • connection device can be designed such that the buffer area is connected to the circuit unit and the connection area is connected to the contact device.
  • the connection area faces the circuit unit and is connected to it, and on the other hand the buffer area is in contact with the contact device.
  • the buffer area and the connection area can be directly connected to at least one further surface area thereof during operation, so that the buffer area and the connection area are in contact without an additional intermediate layer and are fastened to one another.
  • an additional intermediate area is provided, in particular in the form of an intermediate layer, in order to indirectly mechanically and / or electrically connect the buffer area and the connecting area to one another during operation. It can thereby be achieved that the circuit unit and the contact device as well as the buffer area and the connection area are further decoupled from one another thermomechanically, ot ) t P 1 P> o c ⁇ o C ⁇ o UI tr P- ⁇ «SD SD ⁇ td tr tr o C ⁇ 3> d ⁇ Tl> ⁇ o C ⁇ cn P ⁇ 13 n Cd C ⁇
  • P 3 P- 3 SS to SD 3 3 ⁇ P P P- N O ⁇ Hi " ⁇ tr ⁇ d EP vQ ⁇ ⁇ td ⁇ P" N ⁇ 3 N ⁇ ⁇ ⁇ P- ⁇ o Cd rt P ⁇ ! P- P- 3 ⁇
  • thermomechanical tensions between a chip and, for example, a lead frame have been compensated for by gluing or soldering.
  • the connecting device By means of the connecting device according to the invention and in particular by means of the buffer or buffer area, the stresses that occur due to different coefficients of thermal expansion of, for example, silicon and copper can be absorbed depending on the dimensioning.
  • the assembly-related maximum chip areas of the individual housing types are significantly increased. This means that larger chip areas are available for each type of housing, which would be restricted in the conventional method by gluing or soldering using the appropriate gluing or soldering furnaces.
  • the buffer layer also favors the alloying process. Usually the thin alloy layers - from e.g. l ⁇ m - only applicable for small chip areas.
  • the buffer layer also allows large chip areas according to the invention, as can also be achieved with gluing or soldering.
  • the alloying process is also considerably easier to implement than the gluing process or the soldering process. Overall, this leads to a significant reduction in process costs.
  • Another advantage lies in the far better reliability of the alloy connection compared to other die bonding processes.
  • the decoupling between the buffer layer and the connection layer is also decisive for the advantages of the connection device according to the invention described above.
  • the buffer is moved to another existing structure, namely the structure of the circuit unit or the structure of the contact device.
  • connection layer in the connection area, in particular in a first area thereof, from gold and tin or from tin alone.
  • the connection area as a whole and in particular the first area thereof, which at least contains tin, is advantageously realized as thin as possible and is thereby arranged between two areas or layers made of the same material - namely either between two silver layers or between two copper layers.
  • a detail X of the connecting device 10 provided with a buffer layer 12, an intermediate layer 14 and a connecting layer 16 is shown in a partially sectioned side view in FIG. 2.
  • the circuit arrangement 2 which consists of a silicon chip
  • a buffer layer 12 made of aluminum.
  • An intermediate layer 14 follows in the transition to the connecting layer 16, the intermediate layer 14 having a region 14-2 made of titanium and subsequently another region 14-1 made of silver, both of which have a layer thickness of approximately 0.5 ⁇ m.
  • the titanium layer 14-2 lies against the aluminum buffer layer 12, while the silver layer 14-1 is connected to the subsequent layer 16-2 of the connection region 16.
  • connection region 16 in this embodiment likewise consists of two layers, namely a layer 16-2 of gold and tin connected to the intermediate layer 14 with a thickness of 1 ⁇ m and subsequently another layer 16-1, which consists of silver and which Surface area 16b is connected to the copper of the lead frame or the contact device 4.
  • FIG. 3 shows a partially sectioned side view of an embodiment of a circuit arrangement 30 from the prior art.
  • contact devices 34 and 35 are also embedded in a housing 36 made of a potting compound.
  • the circuit unit 32 of the conventional circuit arrangement 30 is connected to the contact device 34 via an adhesive or soldering 31.
  • P- P SD ⁇ ⁇ rt ex ⁇ P * l P ⁇ P CL ⁇ CO P- 3 SD C ⁇ P- ⁇ d C ⁇ tr P 3 3 P ex ⁇ ⁇ SD ⁇ P- vQ ⁇ P 4-> ⁇ C ⁇ 1 P 1 3
  • this first area 16-1 of the connection area 16 is formed as an integral part of the leadframe 4, namely of its surface.
  • the second region 16-2 of the connecting layer 16 consists exclusively of tin and thus contains no mixed crystals as in the embodiment in FIG. 2.

Abstract

The aim of the invention is to take up the smallest amount of space possible while effecting the thermomechanical release in tension at the junction between a circuit unit (2) and contact device (4) of a circuit (1), said junction being provided by means of the connecting device (10). To this end, the connecting device (10) is essentially provided as a prefabricated metallic or alloy region in the area of the circuit unit (2) and in the area of the contact device (4) while avoiding, to the greatest possible extent, the use of adhesive elements and solder elements.

Description

cυ cυ M [-υ P1 P1 cυ cυ M [-υ P 1 P 1
Cπ o cπ o Lπ o cπCπ o cπ o Lπ o cπ
Cd r+ ^ P Φ CΛ α 3 < N α α Φ ω <: Vi 3 rt Cd Cd d <! Cd P1 O ö <: CdCd r + ^ P Φ CΛ α 3 <N α α Φ ω <: Vi 3 rt Cd Cd d <! Cd P 1 O ö <: Cd
Φ Φ P- P- Ω Φ Φ Φ 33 φ Φ P- Φ Φ Ω Φ Ω Φ SD φ φ 3 φ φ 3 N3 tr P- Φ Φ r P Φ Ω 3 3' 3 Ω P P- 3 rt 3 P 3 t P 3" Ω K p- P- P P- cn Φ Φ P ωΦ Φ P- P- Ω Φ Φ Φ 33 φ Φ P- Φ Φ Ω Φ Ω Φ SD φ φ 3 φ φ 3 N3 tr P- Φ Φ r P Φ Ω 3 3 '3 Ω P P- 3 rt 3 P 3 t P 3 "Ω K p- P- P P- cn Φ Φ P ω
P ω σ " φ Φ 3- tr ω Φ φ Φ ω P- tr rt ω ω \ ω 3 13 ω P tr ΩP ω σ "φ Φ 3- tr ω Φ φ Φ ω P- tr rt ω ω \ ω 3 13 ω P tr Ω
P- o Φ rt 3 3 ? SU P- Ω 3 Φ P- 3 13 Φ SD Φ 13 13 o Ω P o tr td P- 3'P- o Φ rt 3 3? SU P- Ω 3 Φ P- 3 13 Φ SD Φ 13 13 o Ω P o tr td P- 3 '
Φ 3" tr d o 3 3 3J rt φ o 3 3 SD 3 P- P- P- " > d s: Φ P 3 P tr P- Φ 3 ω φ 3 P- α Φ ω P Ω rt Cd 3 P- 3 φ φ φ p- d Ω P- iQ Po α ΦΦ 3 "tr do 3 3 3 J rt φ o 3 3 SD 3 P- P- P-"> ds: Φ P 3 P tr P- Φ 3 ω φ 3 P- α Φ ω P Ω rt Cd 3 P- 3 φ φ φ p- d Ω P- iQ Po α Φ
Φ P ιQ O P- 3 Cfl d 3 13 α 3" ω m SD 3 P- ω P " P φ Po 3" φ P p- d P- rt Φ iQ 3 rt Ω 3 P Φ SD 13 P- d d Ω Ω P- α tr ω P- 3 3 trΦ P ιQ O P- 3 Cfl d 3 13 α 3 "ω m SD 3 P- ω P" P φ Po 3 "φ P p- d P- rt Φ iQ 3 rt Ω 3 P Φ SD 13 P- dd Ω Ω P- α tr ω P- 3 3 tr
Φ P- SD φ Φ Φ - uq Φ 3 P1 P 3 Φ 3 31 tr Ω <! P φ Φ SD φ Hi α ^ dΦ P- SD φ Φ Φ - uq Φ 3 P 1 P 3 Φ 3 3 1 tr Ω <! P φ Φ SD φ Hi α ^ d
P- P- Ω 3 3 3 3 Φ CΛ Φ Ω rt Φ o* sQ Φ Φ tr O : 3 d P1 P- Hi d CΛ 3P- P- Ω 3 3 3 3 Φ CΛ Φ Ω rt Φ o * sQ Φ Φ tr O: 3 d P 1 P- Hi d CΛ 3
P1 o 3- SD 3 φ 3 * ?r d Ω P1 Φ Φ P 3 rt 3 P φ SD co 3 3 Φ sQ s: tr Φ 3 N p- Φ SD 3 3J P- 3 3 d V P <! • Φ α iQ P-P 1 o 3- SD 3 φ 3 * ? Rd Ω P 1 Φ Φ P 3 rt 3 P φ SD co 3 3 Φ sQ s: tr Φ 3 N p- Φ SD 3 3 J P- 3 3 d VP <! • Φ α iQ P-
Φ φ 3 d to to 3 CΛ 3 3 ιQ Φ Ω φ ≤3 td 3 O α rt rt o Φ 3Φ φ 3 d to to 3 CΛ 3 3 ιQ Φ Ω φ ≤3 td 3 O α rt rt o Φ 3
P- 3 o 3 rt φ Φ P Ω 3 ω 3 ? 3 C SD: P- ιQ tr P- P P- 3 CΛ ω tr P ω α Φ ? P- P" P- 3J • Φ rt Φ P ιQ Φ P- Φ P- sQ Ω Φ P- φ > Φ ! _ 3 o SD Ω SD X P- φ SD Φ P 3 Φ 3 13 ω Φ CΛ 3" rt ΩP- 3 o 3 rt φ Φ P Ω 3 ω 3? 3 C SD: P- ιQ tr P- P P- 3 CΛ ω tr P ω α Φ? P- P "P- 3 J • Φ rt Φ P ιQ Φ P- Φ P- sQ Ω Φ P- φ> Φ! _ 3 o SD Ω SD X P- φ SD Φ P 3 Φ 3 13 ω Φ CΛ 3 "rt Ω
0 P> O 3 ffi CΛ 3" P1 d 3 3 d Φ 3 CΛ « Ω Ω SD 3 P 3"0 P> O 3 ffi CΛ 3 " P 1 d 3 3 d Φ 3 CΛ« Ω Ω SD 3 P 3 "
JD co 3 t"1 rt SD rt rt rt P P Hl O α SD ω N O 3J s tr ω P- rt d i→ rt Φ a> d d d P- ω P- d Ω d o 3 φ SD SD rt 13 Hi d ω Φ o-. SD SU \ er 3 3 3 ro Ω Ω φ φ ω tr • rt 3 rt d P Po 3JD co 3 t " 1 rt SD rt rt rt PP Hl O α SD ω NO 3 J s tr ω P- rt di → rt Φ a> ddd P- ω P- d Ω do 3 φ SD SD rt 13 Hi d ω Φ o-. SD SU \ er 3 3 3 ro Ω Ω φ φ ω tr • rt 3 rt d P Po 3
LQ 3" rt ^T rt _- ιQ iQ £! 3 3J 3J P- P SD Φ SD Φ rt 3 d rt iQLQ 3 "rt ^ T rt _- ιQ iQ £! 3 3 J 3 J P- P SD Φ SD Φ rt 3 d rt iQ
Φ 3 d rt Po P- Φ Φ Φ ω rt SD Φ co Hi > P Ϊ ^ P d ιQ Ω ιQ X 3 1 P Φ P- 3 3 φ σ d PJ α Ω " rt d rt o P- 3 ω 3J ΦΦ 3 d rt Po P- Φ Φ Φ ω rt SD Φ co Hi> P Ϊ ^ P d ιQ Ω ιQ X 3 1 P Φ P- 3 3 φ σ d P J α Ω " rt d rt o P- 3 ω 3 J Φ
P iQ SD P rt p- Φ 3 rt Φ - 3 Φ Po P- 3 !D iQ 0) o P-P iQ SD P rt p- Φ 3 rt Φ - 3 Φ Po P- 3! D iQ 0 ) o P-
P- ιQ Φ O 3 Φ Φ N < 3 P- tQ d Φ P SD d 3 IQ Φ φ rt P* ω 3 3P- ιQ Φ O 3 Φ Φ N <3 P- tQ d Φ P SD d 3 IQ Φ φ rt P * ω 3 3
Ω Φ 3 α φ 3 P d o * 3 P ιQ P1 3 " P P P SD P- SD O ΦΩ Φ 3 α φ 3 P do * 3 P ιQ P 1 3 "PPP SD P-SD O Φ
3^ 3 φ 3 3 P Φ σ 3 ιQ P1 P" rt d iQ d f Φ 3 P3 ^ 3 φ 3 3 P Φ σ 3 ιQ P 1 P "rt d iQ df Φ 3 P
Φ < P o Φ o P- iQ P- Φ d co CD: φ d ω P- 3 3 rt 3 O α <Φ <P o Φ o P- iQ P- Φ d co CD: φ d ω P- 3 3 rt 3 O α <
3 σ O α 3 3 Φ rt ? P SD ω P- 3 3 Φ tQ P 3 Φ3 σ O α 3 3 Φ rt? P SD ω P- 3 3 Φ tQ P 3 Φ
P d Φ CΛ Φ SD 3 ω Ω ιQ O ω P- N 3 d Φ P s: P- Q Φ P O Φ φ 3 3 3 O P1 tr ω Φ tr Ω <i d P- 3 3 P trP d Φ CΛ Φ SD 3 ω Ω ιQ O ω P- N 3 d Φ P s: P- Q Φ PO Φ φ 3 3 3 OP 1 tr ω Φ tr Ω <id P- 3 3 P tr
Φ Φ P Φ CΛ 1 3 P- P P- φ φ Hl φ Φ * o rt d ιQ Φ P-Φ Φ P Φ CΛ 1 3 P- P P- φ φ Hl φ Φ * o rt d ιQ Φ P-
P rt 0) d: Φ Φ 3 rt Φ d rt rt Ω 3 P- Hi ω P Φ 3 er Φ 3 3 3 ty Φ 3* P- P 3 3 Φ 3 * 3 P- O 3 P P- iQ ιQ α tr P 3 N N ^ 3 P1 d ?T SD tr N 3 d "> CΛ P- 3 Φ Φ < dP rt 0) d: Φ Φ 3 rt Φ d rt rt Ω 3 P- Hi ω P Φ 3 er Φ 3 3 3 ty Φ 3 * P- P 3 3 Φ 3 * 3 P- O 3 P P- iQ ιQ α tr P 3 NN ^ 3 P 1 d? T SD tr N 3 d "> CΛ P- 3 Φ Φ <d
3 P Φ d Φ N d d P- 3 Φ d Φ P- α 3 Ω 3 SD 3 3 Φ 33 P Φ d Φ N d d P- 3 Φ d Φ P- α 3 Ω 3 SD 3 3 Φ 3
3 3 3 P d 3 3 CΛ 3 iQ p- Po P- Φ φ rr 3 tr ιQ 3 SD: P Q3 3 3 P d 3 3 CΛ 3 iQ p- Po P- Φ φ rr 3 tr ιQ 3 SD: P Q
; r P- ιQ d Φ Ω P- Φ rt r rt 3 P Φ p- SD Φ P- &> s: CΛ; r P- ιQ d Φ Ω P- Φ rt r rt 3 P Φ p- SD Φ P- &> s: CΛ
O: ω ω SD tr to t-3 P 3 i-T rt 3 P rt φ P rt l-1 3 Φ Ui Φ φO: ω ω SD tr to t-3 P 3 iT rt 3 P rt φ P rt l- 1 3 Φ Ui Φ φ
3 Ω CΛ 3 Φ Φ Φ Ω SD P- d Φ tr Φ Cfl rt • P rt 3 P-3 Ω CΛ 3 Φ Φ Φ Ω SD P- d Φ tr Φ Cfl rt • P rt 3 P-
3 31 d rt Hl p- P- tr _^ φ Po 3 rt P- 3 SD Ω Φ d Φ 33 3 1 d rt Hl p- P- tr _ ^ φ Po 3 rt P- 3 SD Ω Φ d Φ 3
Φ φ P Φ Φ Φ CΛ O rt P = Φ ^ d 3J 3 3 σ P- Φ 3 d PΦ φ P Φ Φ Φ CΛ O rt P = Φ ^ d 3 J 3 3 σ P- Φ 3 d P
3 3 Ω P1 P CΛ 13 s: 3 d rt 3" 3 Po P- rt tQ p-3 3 Ω P 1 P CΛ 13 s: 3 d rt 3 "3 Po P- rt tQ p-
• 3 ω 3 P-• 3 ω 3 P-
3J P1 Φ rt P- SD Φ rt 3 Φ P *«« Φ K ιQ Φ ω ω Φ O sQ Ω3 J P 1 Φ rt P- SD Φ rt 3 Φ P * «« Φ K ιQ Φ ω ω Φ O sQ Ω
Cd Φ 3 P- Φ d P1 SD U3 P rt P- 3 O: P α 13 φ ω 3 O σ trCd Φ 3 P- Φ d P 1 SD U3 P rt P- 3 O: P α 13 φ ω 3 O σ tr
Φ s: 3 iQ Hi Ω ? ω Φ s: α 3 d P P- φ Hl Φ IQ rtΦ s: 3 iQ Hi Ω? ω Φ s: α 3 d P P- φ Hl Φ IQ rt
H Φ D Φ iQ 3- rt SD ^3 d SD Φ 3 3 P- Φ 3 rt Ω rt P Φ dH Φ D Φ iQ 3- rt SD ^ 3 d SD Φ 3 3 P- Φ 3 rt Ω rt P Φ d
SD H Φ P- 3 ≤ Φ Φ Φ 3 3 t-ι ω 3 Φ Ω Ω tr P tr trSD H Φ P- 3 ≤ Φ Φ Φ 3 3 t-ι ω 3 Φ Ω Ω tr P tr tr
CΛ 3 3CΛ 3 3
Ω 3 φ α Φ Hi P- O SD: Φ 3 3" 3' Φ P- SD 3 Φ SD: iQ r 3* rt tr Φ P SD 3 P Ω σ N Φ Φ Φ P- Hi 3 O ιQ P d Φ CΛ o 3 3 P- P 3" s: Φ d P- P- 3 3 3 rt Po P- rt P ιQΩ 3 φ α Φ Hi P- O SD: Φ 3 3 "3 'Φ P- SD 3 Φ SD: iQ r 3 * rt tr Φ P SD 3 P Ω σ N Φ Φ Φ P- Hi 3 O ιQ P d Φ CΛ o 3 3 P- P 3 " s: Φ d P- P- 3 3 3 rt Po P- rt P ιQ
3 13 3 Φ IQ Φ P- 3 Φ 0 3 Φ 3 rt φ rt ω ≤ P- Φ iQ P O 3 Φ Ω d ω 3 K φ rt Φ 3 Ω Po 3 33 13 3 Φ IQ Φ P- 3 Φ 0 3 Φ 3 rt φ rt ω ≤ P- Φ iQ P O 3 Φ Ω d ω 3 K φ rt Φ 3 Ω Po 3 3
Φ P- Φ Φ 3- 3 rr ^ 3 < d α SD rt Cd P r 3 N 3* 3 Hi ω SD:Φ P- Φ Φ 3- 3 rr ^ 3 <d α SD rt Cd P r 3 N 3 * 3 Hi ω SD:
3 Φ Ω P- P- N 3" rt vQ Φ P SD Ω P φ 1 Φ d φ α 13 CD " 3 13 S. s: Φ d Φ P Ω d " O rt P ^ N 3 3 P- P3 Φ Ω P- P- N 3 "rt vQ Φ P SD Ω P φ 1 Φ d φ α 13 CD" 3 13 S. s: Φ d Φ P Ω d "O rt P ^ N 3 3 P- P
P- d Φ 1 P- Φ P 3 3 3* Φ rt 3 P 3 O d s Φ d αP- d Φ 1 P- Φ P 3 3 3 * Φ rt 3 P 3 O ds Φ d α
3 3 3 d 1 P 3 U3 φ P Φ P- P- o 3 3 •^ ω Ω φ 1 3 1 O Φ 3 P- 1 Φ 1 1 α 3J 1 3 1 1 er 3 3 3 3 d 1 P 3 U3 φ P Φ P- P- o 3 3 • ^ ω Ω φ 1 3 1 O Φ 3 P- 1 Φ 1 1 α 3 J 1 3 1 1 er 3
co o bo t P1 P1 cπ o Cπ o cπ o Cπco o bo t P 1 P 1 cπ o Cπ o cπ o Cπ
φ N rt CΛ rt σ SD Po P σ t-d Φ < Φ o 3 ___-< vQ φ tr vQ SD I . T3 P tr σφ N rt CΛ rt σ SD Po P σ t-d Φ <Φ o 3 ___- <vQ φ tr vQ SD I. T3 P tr σ
H- d d φ Ω Φ d P- Cπ d φ tr P- Φ P- P- P1 P- Φ P- φ SD (D p- Φ P1 d P φ P P-H- dd φ Ω Φ d P- Cπ d φ tr P- Φ P- P- P 1 P- Φ P- φ SD (D p- Φ P 1 d P φ P P-
3 3 P - P 3 Φ 3 P tr 3 CΛ Ω Φ SD: 3 P 3 P E P) Φ 3 1 Φ Ω Φ O 3 P- Φ3 3 P - P 3 Φ 3 P tr 3 CΛ Ω Φ SD: 3 P 3 PEP ) Φ 3 1 Φ Ω Φ O 3 P- Φ
P < vQ SD iQ vQ tr VQ SD: α * Ω 3" CΛ P α P- Φ P- tr tr 3 ωP <vQ SD iQ vQ tr VQ SD: α * Ω 3 "CΛ P α P- Φ P- tr tr 3 ω
P- Φ Λ P1 cn vQ N cn φ 3 d > rt > tr Φ 13 P- td Po Ω P tr Ω 1 d ^ vQ φP- Φ Λ P 1 cn vQ N cn φ 3 d>rt> tr Φ 13 P- td Po Ω P tr Ω 1 d ^ vQ φ
Ω P Ω rt φ SD SD s: IQ P vQ 3 3 d d φ P- SD Ω P P 3^ N 3' ;v Φ ΦΩ P Ω rt φ SD SD s: IQ P vQ 3 3 d d φ P- SD Ω P P 3 ^ N 3 '; v Φ Φ
3* tr Φ 3" d P- 3 rt Φ Po P- vQ CΛ 3 Po 3 rt 3 3* Hl SD Φ cn ss fl Φ o rt P 3 < rt p- P SD 3 Ω O rt 3 P- vQ CΛ 13 vQ vQ SD 3 rt P- 3 3 Ω • S. P- P- rt o d 3 H vQ tr P d l_v pj: 3 Φ iQ P SD d d d d 3 φ * 3^ Φ 3 Φ o P- Φ P3 * tr Φ 3 "d P- 3 rt Φ Po P- vQ CΛ 3 Po 3 rt 3 3 * Hl SD Φ cn ss fl Φ o rt P 3 <rt p- P SD 3 Ω O rt 3 P- vQ CΛ 13 vQ vQ SD 3 rt P- 3 3 Ω • S. P- P- rt od 3 H vQ tr P d l_v pj: 3 Φ iQ P SD dddd 3 φ * 3 ^ Φ 3 Φ o P- Φ P
3 Λ rt CΛ φ 3 σ> cP 3 Φ d Φ r P 3 3 3 p SD 1^ P- Φ P 3 vQ P- vQ Q Φ Ω d Φ 3 3 vQ Φ d 3 Ω P Φ s: D. vQ vQ d o SD P1 o CΛ P CΛ d 3 Φ3 Λ rt CΛ φ 3 σ> cP 3 Φ d Φ r P 3 3 3 p SD 1 ^ P- Φ P 3 vQ P- vQ Q Φ Ω d Φ 3 3 vQ Φ d 3 Ω P Φ s: D. vQ vQ do SD P 1 o CΛ P CΛ d 3 Φ
3 3" 3 P- d cn 3 α SD: 3" Po SD Φ 3 d rt rt Φ tr1 CΛ 3 Φ 3" rt SD vQ 3 3 vQ CΛ vQ 3 EP CΛ P- ≤ 3 Φ 3 SD iQ Φ Po d - o Ω vQ P Φ " d H cn tr P- vQ Φ Ω cn rt Φ 3 p- α P- 3 P 3 O: vQ Φ rt 3* cn 33 3 "3 P- d cn 3 α SD: 3" Po SD Φ 3 d rt rt Φ tr 1 CΛ 3 Φ 3 "rt SD vQ 3 3 vQ CΛ vQ 3 EP CΛ P- ≤ 3 Φ 3 SD iQ Φ Po d - o Ω vQ P Φ "d H cn tr P- vQ Φ Ω cn rt Φ 3 p- α P- 3 P 3 O: vQ Φ rt 3 * cn 3
Φ 3 rt SD Φ CΛ 3 * vQ Φ 3 P1 P 3 SD N H Φ vQ Hl P P cn P CΛ ? CΛΦ 3 rt SD Φ CΛ 3 * vQ Φ 3 P 1 P 3 SD NH Φ vQ Hl PP cn P CΛ? CΛ
P d 3 P- rt SD: SD Φ P d SD Φ 3 d P- P- CΛ Φ O vQ rt P- Ω P1 s:P d 3 P- rt SD: SD Φ P d SD Φ 3 d P- P- CΛ Φ O vQ rt P- Ω P 1 s:
3 3 O rt P- i£P P* 3 SD < vQ 3 d P vQ φ Φ 3 Φ cP O rt tr φ Φ3 3 O rt P- i £ P P * 3 SD <vQ 3 d P vQ φ Φ 3 Φ cP O rt tr φ Φ
O α vQ P SD 3 Φ rt SD: 3 φ φ vQ tr Po Φ Φ vQ P Φ P- < Φ Φ Po rt P tr P-O α vQ P SD 3 Φ rt SD: 3 φ φ vQ tr Po Φ Φ vQ P Φ P- <Φ Φ Po rt P tr P-
3 (D CΛ α d CΛ d EP cn P P1 CΛ Φ Q XI P- tr rt vQ 3 3 Φ 3 P- Po P- d CΛ3 (D CΛ α d CΛ d EP cn PP 1 CΛ Φ Q XI P- tr rt vQ 3 3 Φ 3 P- Po P- d CΛ
Φ tr SD 3 P- CΛ tr < 3 Φ 13 tr O: vQ p- φ o 3 Φ P1 tr P Ω Φ rt 3 ΦΦ tr SD 3 P- CΛ tr <3 Φ 13 tr O: vQ p- φ o 3 Φ P 1 tr P Ω Φ rt 3 Φ
Ω Φ 3 d 3 vQ Φ Φ vQ 3 P P- CΛ Φ Hi 3 Φ 3 φ ^ φ vQ ^d 3' SD rt vQ tr P- O 3 IΛ Φ CΛ P cn d: 3 rt 3 Φ SD r+ P " P- P- o P- P cn P Φ P-Ω Φ 3 d 3 vQ Φ Φ vQ 3 P P- CΛ Φ Hi 3 Φ 3 φ ^ φ vQ ^ d 3 'SD rt vQ tr P- O 3 IΛ Φ CΛ P cn d: 3 rt 3 Φ SD r + P " P- P- o P- P cn P Φ P-
SD P vQ tr r o tr SD < Ω • SD: P- 3 J φ Ω 3 rt O: SD: s: Φ cn 3 o CΛSD P vQ tr r o tr SD <Ω • SD: P- 3 J φ Ω 3 rt O: SD: s: Φ cn 3 o CΛ
3 α Φ P- 3 P- 3 Φ tr d P 3 VQ J cn 3 3J rt "^ E Ω φ 3 rt rt3 α Φ P- 3 P- 3 Φ tr d P 3 VQ J cn 3 3 J rt " ^ E Ω φ 3 rt rt
P- P- 3 3 CΛ P1 3 O P Φ 3 < Φ Φ rt P P- > Φ (D Φ - P- Φ P Φ Λ Φ d P- o Φ α P tr • v 0 3 P 3 Φ Φ rt d 3 ? N P Φ Λ g Φ P P-P- P- 3 3 CΛ P 1 3 OP Φ 3 <Φ Φ rt P P-> Φ (D Φ - P- Φ P Φ Λ Φ d P- o Φ α P tr • v 0 3 P 3 Φ Φ rt d 3? NP Φ Λ g Φ P P-
Ω 3 rt 3 Φ P d α P- CΛ P P- P- 3 Po ^ rt d 3 Φ SD P-" 3Ω 3 rt 3 Φ P d α P- CΛ P P- P- 3 Po ^ rt d 3 Φ SD P- "3
3" CΛ vQ α rt Φ 3 3 3 td Φ rt rt vQ ≤ 3 N ≤ iQ tr 3 CΛ Ω rt SD tr1 ω3 " CΛ vQ α rt Φ 3 3 3 td Φ rt rt vQ ≤ 3 N ≤ iQ tr 3 CΛ Ω rt SD tr 1 ω
Ω 3 Φ ^ vQ d P- P- Φ SD Φ P Hi Φ SD Φ Φ iQ O ;v 3* • rt O: OΩ 3 Φ ^ vQ d P- P- Φ SD Φ P Hi Φ SD Φ Φ iQ O; v 3 * • rt O: O
P- 3- 3 P- P Po cn 3 d 3 3 P- rt P P- P* XX Po P Cd d vQ P1 rt P- rt PoP- 3- 3 P- P Po cn 3 d 3 3 P- rt P P- P * XX Po P Cd d vQ P 1 rt P- rt Po
3 SD φ 3 Φ P- d= Φ vQ 3 Φ P P1 φ rt Ω SD: Ω Φ Po φ φ SD Φ Φ Φ ^ < d φ ts>3 SD φ 3 Φ P- d = Φ vQ 3 Φ PP 1 φ rt Ω SD: Ω Φ Po φ φ SD Φ Φ Φ ^ <d φ ts>
P1 Ω α 3 P P- vQ P- 3" 3 d Φ " Ω 3" Φ P- P- n 3 P- P- Φ 3 PP 1 Ω α 3 P P- vQ P- 3 "3 d Φ" Ω 3 " Φ P- P- n 3 P- P- Φ 3 P
≤ rt 3' Φ Φ 3 CΛ cn Φ Ω SD 3 3 rt 3* Φ N i*r Ω CΛ P- SD 3 P1 P SD vQ 3 φ d SD CΛ P- Cd Φ P P- Φ P 3" Pi ? vQ d Φ P d rt tr 13 3 φ -> 3 d Λ 3 3 rt 3 Φ P- P- 3 P- Po rt rt Φ cn ? 3 vQ P- P- 3 3 Φ Hi Φ 3≤ rt 3 'Φ Φ 3 CΛ cn Φ Ω SD 3 3 rt 3 * Φ N i * r Ω CΛ P- SD 3 P 1 P SD vQ 3 φ d SD CΛ P- Cd Φ P P- Φ P 3 "Pi ? vQ d Φ P d rt tr 13 3 φ -> 3 d Λ 3 3 rt 3 Φ P- P- 3 P- Po rt rt Φ cn? 3 vQ P- P- 3 3 Φ Hi Φ 3
Φ vQ P- Φ φ rt 3 Ω α 3 P- d Φ 3 vQ O: v N P Φ P- rt - P S P- SDΦ vQ P- Φ φ rt 3 Ω α 3 P- d Φ 3 vQ O: v N P Φ P- rt - P S P- SD
3 cn CΛ 3 3 P 3* P 3 3 3 Φ 3 ≤ P- d N φ Φ S SD Φ 3 Ω rt Φ Ω CΛ P- ffi rt o P- α vQ S! N 3 3 tr P- Φ 3 σ d Φ cn tr 3 Φ 3* 3 cn CΛ 3 3 P 3 * P 3 3 3 Φ 3 ≤ P- d N φ Φ S SD Φ 3 Ω rt Φ Ω CΛ P- ffi rt o P- α vQ S! N 3 3 tr P- Φ 3 σ d Φ cn tr 3 Φ 3 *
P- tr O Φ SD d Φ Ω d Φ Φ SD: Φ Φ CΛ φ 3 Φ φ m 3 cn SD 3 rtP- tr O Φ SD d Φ Ω d Φ Φ SD: Φ Φ CΛ φ 3 Φ φ m 3 cn SD 3 rt
P- 3 φ * tr 3 vQ 3" 3 CΛ P- P- EP 3 P- Ω rt φ 3 P- 3 O: vQ tr P- ΦP- 3 φ * tr 3 vQ 3 "3 CΛ P- P- EP 3 P- Ω rt φ 3 P- 3 O: vQ tr P- Φ
Ω 3- d P- P- tr vQ φ rt vQ P- rt Ω Φ • 3- 3" "^ O: Cd 3 P- Hi Φ CΛ Φ vQ P- P-Ω 3- d P- P- tr vQ φ rt vQ P- rt Ω Φ • 3- 3 "" ^ O: Cd 3 P- Hi Φ CΛ Φ vQ P- P-
3* Φ 3 3 13 3 3 d CΛ 3 Φ 3- 3 3 Φ Φ rt φ Φ vQ Φ p- 3 φ 33 * Φ 3 3 13 3 3 d CΛ 3 Φ 3- 3 3 Φ Φ rt φ Φ vQ Φ p- 3 φ 3
Φ P- Φ P- Φ Po CΛ 3 vQ P 3 O: 3 P φ P- P- 3 Φ SD φ 3 P-Φ P- Φ P- Φ Po CΛ 3 vQ P 3 O: 3 P φ P- P- 3 Φ SD φ 3 P-
3 rt \ P O 3 P- d: rt vQ Φ tr Φ vQ 3 P- vQ CΛ tr d φ < vQ o α rt H tu 3 Q P- 3 Φ H Φ o 3 rt 13 O ^ P- Po tr 3 d Φ *3 rt \ PO 3 P- d: rt vQ Φ tr Φ vQ 3 P- vQ CΛ tr d φ <vQ o α rt H tu 3 Q P- 3 Φ H Φ o 3 rt 13 O ^ P- Po tr 3 d Φ *
N d !*! Φ Φ Φ 3 d SD: Φ α P P- P- 3 φ p- 3^ P" 1 Φ rt 3 P d 3 Φ O P CΛ P Φ α 3 EP vQ Φ σ Ω 3 φ ≤ φ p- SD: α Φ P- cn vQ SD α P 3 rt 3 P- Φ Φ d 3 p- - Φ Ω < P- 13 Ω Φ P- 3 13 P1 φ rt L Φ O 3 α 3 3 3 CΛ P tr φ P tr 3 3 P N Φ ωN d! *! Φ Φ Φ 3 d SD: Φ α P P- P- 3 φ p- 3 ^ P " 1 Φ rt 3 P d 3 Φ OP CΛ P Φ α 3 EP vQ Φ σ Ω 3 φ ≤ φ p- SD: α Φ P- cn vQ SD α P 3 rt 3 P- Φ Φ d 3 p- - Φ Ω <P- 13 Ω Φ P- 3 13 P 1 φ rt L Φ O 3 α 3 3 3 CΛ P tr φ P tr 3 3 PN Φ ω
3 Φ SD Φ 3 Φ φ Φ <_ CΛ vQ s P- rt SD P φ O Φ • Φ Φ d P- rt P- P1 P Λ d P P- Φ rt Φ φ d CΛ 3 tr "^ p- P d Ω ω Ω3 Φ SD Φ 3 Φ φ Φ <_ CΛ vQ s P- rt SD P φ O Φ • Φ Φ d P- rt P- P 1 P Λ d P P- Φ rt Φ φ d CΛ 3 tr " ^ p- P d Ω ω Ω
? Φ Φ rt vQ CΛ 3 P SD 3 P 3 vQ Ω P- P- 3 Φ α Hi 3" SD: " SD o r Φ Φ Ω > φ ≤. 3 rT iQ Φ 3- Λ 3 P- Φ P P- <! tr Φ rt cn? Φ Φ rt vQ CΛ 3 P SD 3 P 3 vQ Ω P- P- 3 Φ α Hi 3 " SD: " SD or Φ Φ Ω> φ ≤. 3 rT iQ Φ 3- Λ 3 P- Φ P P- <! t Φ rt cn
13 XI rt P- φ P- o 3J 3 Φ 3 cn P SD Ω α 3 3 P- Φ Φ P 3 N N13 XI rt P- φ P- o 3 J 3 Φ 3 cn P SD Ω α 3 3 P- Φ Φ P 3 NN
13 o P 3 P- 3 SD CΛ φ 3 Φ SD Φ P- 1 tr Φ cn P p- H d13 o P 3 P- 3 SD CΛ φ 3 Φ SD Φ P- 1 tr Φ cn P p- H d
Φ 3 P- P Ω Φ Φ 13 P P P- 3 rt Φ 3 α= Φ Φ 1 3 φ P- d rt CΛ P- tr P 1 P Po d Φ Φ 3 vQ d 3 vQ tr P <! vQ Ω SD HlΦ 3 P- P Ω Φ Φ 13 P P P- 3 rt Φ 3 α = Φ Φ 1 3 φ P- d rt CΛ P- tr P 1 P Po d Φ Φ 3 vQ d 3 vQ tr P <! vQ Ω SD St.
3 !D Ω Ω φ : P- 3 P Φ 3 1 Φ 3 CΛ Φ 1 o XI φ 3* 3 1 •* 3' 3* 3 Ω 3 vΩ P 3 vQ 1 P 3 3 Φ α rt 1 " tr 1 1 cn ( Φ 3 Φ 1 φ 1 1 1 3! D Ω Ω φ: P- 3 P Φ 3 1 Φ 3 CΛ Φ 1 o XI φ 3 * 3 1 • * 3 '3 * 3 Ω 3 vΩ P 3 vQ 1 P 3 3 Φ α rt 1 "tr 1 1 cn (Φ 3 Φ 1 φ 1 1 1
und zu entlasten oder von thermomechanischen Belastungen zu entkoppeln.and to relieve or decouple from thermomechanical loads.
Die erfindungsgemäße Verbindungseinrichtung ist dadurch ge- kennzeichnet, dass die Verbindungseinrichtung im wesentlichen als - vorzugsweise vorgefertigter - metallischer oder Legierungsbereich zumindest teilweise im Bereich der Schaltungseinheit und/oder im Bereich der Kontakteinrichtung unter wei- testgehender Vermeidung von Klebeelementen und Lotelementen ausgebildet ist.The connecting device according to the invention is characterized in that the connecting device is essentially designed as a - preferably prefabricated - metallic or alloy area at least partially in the area of the circuit unit and / or in the area of the contact device while largely avoiding adhesive elements and solder elements.
Es ist somit eine grundlegende Idee der erfindungsgemäßen Verbindungseinrichtung, anstelle einer Klebung oder Lötung einen metallischen oder Legierungsbereich vorzusehen. Durch diese Maßnahme werden im Gegensatz zum Stand der Technik Klebehöfe oder Lothöfe vermieden, und es wird erfindungsgemäß somit Platz eingespart. Des Weiteren sind metallische oder Legierungsbereiche besonders geeignet, thermomechanische Verspannungen zwischen einer Schaltungseinheit und einer zu kon- taktierenden Kontakteinrichtung aufzufangen, weil durch eine entsprechend gewählte Zusammensetzung - insbesondere im Rahmen eines Vorfertigungsprozesses - günstige thermomechanische oder Wärmeausdehnungseigenschaften erreicht werden können. Des Weiteren ist ein Metallisierungs- oder Legierungsvorgang produktionstechnisch einfacher integrierbar als eine Klebung oder Lötung.It is therefore a basic idea of the connecting device according to the invention to provide a metallic or alloy area instead of gluing or soldering. In contrast to the prior art, this measure avoids adhesive yards or soldering yards, and space is thus saved according to the invention. Furthermore, metallic or alloy areas are particularly suitable for absorbing thermomechanical tensions between a circuit unit and a contact device to be contacted, because favorable thermomechanical or thermal expansion properties can be achieved through an appropriately selected composition - especially in the context of a prefabrication process. Furthermore, a metallization or alloying process is easier to integrate in terms of production technology than gluing or soldering.
Bei einer bevorzugten Ausgestaltungsform der erfindungsgemäßen Verbindungseinrichtung ist mindestens ein Pufferbereich, insbesondere in Form einer Schicht, vorgesehen. Dieser ist so ausgebildet, dass im Betrieb die thermomechanischen Verspannungen zwischen der Schaltungseinheit und der Kontakteinrichtung aufgefangen werden können. Somit wird durch den vorgese¬ henen Pufferbereich eine thermomechanische Entkopplung und Entlastung zwischen der Schaltungseinheit und der Kontaktein¬ richtung der Schaltungsanordnung realisiert. co o to N> P1 P1 cπ o cπ O cπ o CπIn a preferred embodiment of the connecting device according to the invention, at least one buffer area, in particular in the form of a layer, is provided. This is designed so that the thermomechanical tensions between the circuit unit and the contact device can be absorbed during operation. Thus, a thermo-mechanical decoupling, and discharge is generated between the circuit unit and the contacts in the circuit arrangement ¬ direction realized by the vorgese ¬ Henen buffer area. co o to N> P 1 P 1 cπ o cπ O cπ o Cπ
φ Q rt tr o tr N SD tr SD H tr d CΛ O (Λ φ P- tr Cd N P α s: Φ N s: 3" P- ω rt tdφ Q rt tr o tr N SD tr SD H tr d CΛ O (Λ φ P- tr Cd N P α s: Φ N s: 3 "P- ω rt td
P- P d φ o Φ d Φ d 3 Φ 3 Ω Φ Ω P- 3 P- Φ Φ P- Φ pj: P- s: P- Φ 3 φ P CΛP- P d φ o Φ d Φ d 3 Φ 3 Ω Φ Ω P- 3 P- Φ Φ P- Φ pj: P- s: P- Φ 3 φ P CΛ
3 d 3 Φ Φ P tr P1 Po P- Ω cn P- 3* P 3" 3 3 P- cn Ω CΛ 3- 3 P- P P- 3 P- p 3 vQ 3 P tr Φ 3 vQ 3' tr rt ^ φ SD φ ^d CΛ tr P Φ CΛ Q, rt Φ rt Φ P-3 d 3 Φ Φ P tr P 1 Po P- Ω cn P- 3 * P 3 " 3 3 P- cn Ω CΛ 3- 3 P- P P- 3 P- p 3 vQ 3 P tr Φ 3 vQ 3 ' tr rt ^ φ SD φ ^ d CΛ tr P Φ CΛ Q, rt Φ rt Φ P-
P- P- Φ P Φ Φ o 3 < P1 o d Φ rt *υ -1 P Ω P- tr cnP- P- Φ P Φ Φ o 3 <P 1 or * rt * υ - 1 P Ω P- tr cn
Ω CΛ C= CΛ 3 ^d 3 d 3 cn Φ Φ rt 3 P 3 P- α d d Φ cn tr φ d 3 P- rt tr SD: tr Ω 3 Φ O P- Φ Cd P d φ 3 vQ 3 d 3 Po P- Φ Φ P- 3 φ Ω N et rt Φ 3' d Φ Cd CΛ 3 3 P Φ tr 3 Ω CΛ Φ P vQ Po cn P- 3 3 sα 3 3- d s: d N P P- 3 φ Φ Hl P- vQ tr φ φ P Ω Φ rt rt \ Φ 3 ΦΩ CΛ C = CΛ 3 ^ d 3 d 3 cn Φ Φ rt 3 P 3 P- α dd Φ cn tr φ d 3 P- rt tr SD: tr Ω 3 Φ O P- Φ Cd P d φ 3 vQ 3 d 3 Po P- Φ Φ P- 3 φ Ω N et rt Φ 3 'd Φ Cd CΛ 3 3 P Φ tr 3 Ω CΛ Φ P vQ Po cn P- 3 3 sα 3 3- ds: d NP P- 3 φ Φ Hl P- vQ tr φ φ P Ω Φ rt rt \ Φ 3 Φ
3 vQ Ω vQ P- P- P < Φ P Φ Φ 3 cn SD P- P- 3^ P- P Φ cn tr o co 3 p- P- Q P- SD 3" ω σ Φ Φ Φ φ P cn P1 CΛ Φ 3 3 3 ≤ vQ 3 tr rt Φ Φ α Φ 3 rt3 vQ Ω vQ P- P- P <Φ P Φ Φ 3 cn SD P- P- 3 ^ P- P Φ cn tr o co 3 p- P- Q P- SD 3 "ω σ Φ Φ Φ φ P cn P 1 CΛ Φ 3 3 3 ≤ vQ 3 tr rt Φ Φ α Φ 3 rt
Ω 3 rt φ P- cn P P- P Φ Φ Φ rt d P- P- φ P φ Φ Φ • d P cn Φ P P- α ΦΩ 3 rt φ P- cn P P- P Φ Φ Φ rt d P- P- φ P φ Φ Φ • d P cn Φ P P- α Φ
SD 3' vQ Φ P- H φ Ω tr P- ? P- 3 3 CΛ P P- P- Po φ P 3 o P φ 3 Φ P d 3 3 P- 3" P- rf rt vQ vQ 3- Ω Ω rt d= P- Φ α Λ 3 P- rt ω 3- cn P- N P et Cd SD Φ 3 d cn P Φ ω Φ ^ CΛ tr Φ tr 3 P- Φ Ω i Ω Φ rt P- cn s: CΛ P- SD: Φ 3 P P- 3 tr P- φ Ω et P P φ Ω cn 3" Φ Φ 3- vQ 3SD 3 'vQ Φ P- H φ Ω tr P-? P- 3 3 CΛ P P- P- Po φ P 3 o P φ 3 Φ P d 3 3 P- 3 "P- rf rt vQ vQ 3- Ω Ω rt d = P- Φ α Λ 3 P- rt ω 3- cn P- NP et Cd SD Φ 3 d cn P Φ ω Φ ^ CΛ tr Φ tr 3 P- Φ Ω i Ω Φ rt P- cn s: CΛ P- SD: Φ 3 P P- 3 tr P- φ Ω et PP φ Ω cn 3 "Φ Φ 3- vQ 3
Φ et P- Ω Ω et P 3 d d Ω d ω CΛ Φ rt 3" d Φ rt 3 tr φ SD P P P 3Φ et P- Ω Ω et P 3 d d Ω d ω CΛ Φ rt 3 "d Φ rt 3 tr φ SD P P P 3
P- CΛ 3" 3" φ 3 3 3" 3 Ω P d P- 3 3 CΛ P cn SD p- <1P- CΛ 3 "3" φ 3 3 3 "3 Ω P d P- 3 3 CΛ P cn SD p- <1
3 Φ Ω SD rt tr P- vQ α iQ α 3* d Φ d 3 Ω vQ ≤ N Φ rt ^ Φ 1 rt O φ CΛ 3 Hl d Φ Ω Φ CΛ Φ 3 P- 3 tr φ d P- P- < d o P Φ P3 Φ Ω SD rt tr P- vQ α iQ α 3 * d Φ d 3 Ω vQ ≤ N Φ rt ^ Φ 1 rt O φ CΛ 3 Hl d Φ Ω Φ CΛ Φ 3 P- 3 tr φ d P- P- <do P Φ P
3 Φ Po 3 P- tr ω P- tr SD Q- 3 Ω ^^ rt P- d P P 3 rt φ 3 d= 3 P Φ rt3 Φ Po 3 P- tr ω P- tr SD Q- 3 Ω ^ ^ rt P- d PP 3 rt φ 3 d = 3 P Φ rt
SD 3 rt vQ φ rt 3" Φ cn Φ \ 3- o ^ CΛ cn Φ P vQ 3 rt tr P- ΦSD 3 rt vQ φ rt 3 "Φ cn Φ \ 3- o ^ CΛ cn Φ P vQ 3 rt tr P- Φ
Φ tr α Φ P P P < o α rt Po φ P tr ω 3 SD A) CO 3 P-Φ tr α Φ P P P <o α rt Po φ P tr ω 3 SD A) CO 3 P-
P- Φ CΛ 3 Φ Φ tr P- Φ Φ < Φ α d= φ Φ <l d= 3 d P- Φ P- φ φ P cn Φ Φ P1 P- Φ CΛ 3 Φ Φ tr P- Φ Φ <Φ α d = φ Φ <ld = 3 d P- Φ P- φ φ P cn Φ Φ P 1
3 P Ω P- P P p- vQ 3 P- o ?^ P Φ tr P P o Φ 3- • rt Φ 3 3 P- P rt rt CΛ 3 t3 P Ω P- P P p- vQ 3 P- o? ^ P Φ tr P P o Φ 3- • rt Φ 3 3 P- P rt rt CΛ 3 t
N 3' et vQ Φ Ω P O tr P Φ P P- P o 3 Φ Φ rt SD p- SD SD 3" P- > P T! 3" cn 3 P- P t Φ vQ 3 d 3 tΛ T d 3" P- - SD O Hl vQ d P1 P- tr d Φ rt d cn Φ rt 3 m 3 o P1 Φ 3 SD Ω SD 3 Φ P- 3 φ 3 σ rt φ Ω rr 3 et CΛ 3 Φ 3 tr !D SD P- 3 Φ CΛ < vQ rt t 3 vQ P- 3 P 3 ω P- SD α Φ *N 3 ' et vQ Φ Ω PO tr P Φ P P- P o 3 Φ Φ rt SD p- SD SD 3 "P-> PT! 3" cn 3 P- P t Φ vQ 3 d 3 tΛ T d 3 " P- - SD O Hl vQ d P 1 P- tr d Φ rt d cn Φ rt 3 m 3 o P 1 Φ 3 SD Ω SD 3 Φ P- 3 φ 3 σ rt φ Ω rr 3 et CΛ 3 Φ 3 tr ! D SD P- 3 Φ CΛ <vQ rt t 3 vQ P- 3 P 3 ω P- SD α Φ *
3 tr d • vQ Q. 3 . S. Φ ? d 9 rt ; r φ Φ 3 cn rt 3 P- α rt P3 tr d • vQ Q. 3. S. Φ? d 9 rt; r φ Φ 3 cn rt 3 P- α rt P
3 Φ Φ Φ et p- 3 rt 3 rt 3 SD rt tr P Hl o P1 Φ P- Ω Φ Φ Hl ≤ ^3 Φ Φ Φ et p- 3 rt 3 rt 3 SD rt tr P Hl o P 1 Φ P- Ω Φ Φ Hl ≤ ^
S α vQ P- td ω 3 S P- P Φ vQ φ rt rT P φ tr o 3 rt Φ P- O vQ 3* 3 P- ΦS α vQ P- td ω 3 S P- P Φ vQ φ rt rT P φ tr o 3 rt Φ P- O vQ 3 * 3 P- Φ
SD Φ ω 3 P- rt SD O CΛ P- P rt p- 3 P- P d P- 3 Φ rt -> SD: 3 rt 3 φ Φ 3 SD s tr 3 O 3 N 3 Φ CΛ •^ 3 3 vQ 3 3 P Φ P d CΛ •** Ω 3SD Φ ω 3 P- rt SD O CΛ P- P rt p- 3 P- P d P- 3 Φ rt -> SD: 3 rt 3 φ Φ 3 SD s tr 3 O 3 N 3 Φ CΛ • ^ 3 3 vQ 3 3 P Φ P d CΛ • * * Ω 3
Φ r P- 3 Φ P" SD P1 Φ Φ ≤ P SS CΛ P- P- Ω Φ vQ Φ P- P 3 rt 3J Φ r P- 3 Φ P "SD P 1 Φ Φ ≤ P SS CΛ P- P- Ω Φ vQ Φ P- P 3 rt 3 J
P tr 3 rt et 3 3 P- O P- P- φ 3 tr ( d Φ CΛ Ω d vQ P P- ΦP tr 3 rt et 3 3 P- O P- P- φ 3 tr (d Φ CΛ Ω d vQ P P- Φ
P- SD tr rt d Φ O: 3 - Ω cn CΛ P Φ d 3 Φ P- Φ Φ tr Q- 3 d 3 3 φP- SD tr rt d Φ O: 3 - Ω cn CΛ P Φ d 3 Φ P- Φ Φ tr Q- 3 d 3 3 φ
SD P Φ tr tr 3 P vQ Φ φ H 3" Ω o ffl P- P vQ P vQ P- 3 rt Φ SD rT CΛ tr PSD P Φ tr tr 3 P vQ Φ φ H 3 "Ω o f fl P- P vQ P vQ P- 3 rt Φ SD rT CΛ tr P
H •^ P- φ Po vQ P- P rt 3" s: d Ω < Ω CΛ 3 3 rt d P ^^ d rt tr Φ tr rt P o SD P- P Cd α d Φ P- 3 tr Φ 3- tr Φ Φ 3" cn 3 o CΛ d Φ P TJH • ^ P- φ Po vQ P- P rt 3 "s: d Ω <Ω CΛ 3 3 rt d P ^^ d rt tr Φ tr rt P o SD P- P Cd α d Φ P- 3 tr Φ 3 - tr Φ Φ 3 "cn 3 o CΛ d Φ P TJ
Φ 3 P" P" Ω Φ 3 Φ 3 3 φ ? et P Φ P rt Φ 13 vQ xt vQ P cn Φ dΦ 3 P "P" Ω Φ 3 Φ 3 3 φ? et P Φ P rt Φ 13 vQ xt vQ P cn Φ d
P SD d 0 vQ Φ P- 3" P- rt cn vQ rt d tr ≤ P Po Φ P- P o Φ Φ o P- HiP SD d 0 vQ Φ P- 3 "P- rt cn vQ rt d tr ≤ P Po Φ P- P o Φ Φ o P- Hi
Φ CΛ 3 3 Φ P Φ ?r Ω ? Q. P- 3 p- Φ Φ P- 3 rt Φ SD 3 P tr α 3 Ω PoΦ CΛ 3 3 Φ P Φ? R Ω? Q. P- 3 p- Φ Φ P- 3 rt Φ SD 3 P tr α 3 Ω Po
P- cn Φ 3 φ t O T) SD Φ Φ o vQ 3 P- 3 Ω 3 rt P- φ α 3' φP- cn Φ 3 φ t O T) SD Φ Φ o vQ 3 P- 3 Ω 3 rt P- φ α 3 'φ
Ω Ω 3 Φ P- rt 13 d 3 P P 3 rt " Ω Ω < σ ^ α SD cn P Φ PΩ Ω 3 Φ P- rt 13 d 3 P P 3 rt "Ω Ω <σ ^ α SD cn P Φ P
3" α X< 3" φ P Φ 13 Hl α SD d 3' " d O N Φ φ ?T rt P C tr3 "α X <3" φ P Φ 13 Hl α SD d 3 '"d O N Φ φ? T rt P C tr
P- O SD 3" Po P- Φ P1 Hi Φ (Λ 3 d 3 Φ ~> 3 P ≤ 3 P rt P) Φ CΛ Φ SD ΦP- O SD 3 " Po P- Φ P 1 Hi Φ (Λ 3 d 3 Φ ~> 3 P ≤ 3 P rt P) Φ CΛ Φ SD Φ
O Φ 3 3 P P- 3 3 S. d φ P Ω Φ Φ cn vQ 3 vQ Po • α φ Φ tr rt Ω <1 P rt P- Φ 3 Φ O 3 P Φ 3" Ω CΛ tr P- cn Φ Φ P P- P- 3* SD o ΦO Φ 3 3 P P- 3 3 S. d φ P Ω Φ Φ cn vQ 3 vQ Po • α φ Φ tr rt Ω <1 P rt P- Φ 3 Φ O 3 P Φ 3 "Ω CΛ tr P- cn Φ Φ P P- P- 3 * SD o Φ
Φ < SD CΛ P α Po 0- vQ tr P SD 3* P- N P- 3 vQ P ^ cn 3 P1 P- SD P< 3 P-Φ <SD CΛ P α Po 0- vQ tr P SD 3 * P- N P- 3 vQ P ^ cn 3 P 1 P- SD P <3 P-
P Φ ? Ω Φ d tr d: d Φ ω SD 3 P1 s: 3 CΛ φ rt O Φ P φ CΛ cn ΩP Φ? Ω Φ d tr d: d Φ ω SD 3 P 1 s: 3 CΛ φ rt O Φ P φ CΛ cn Ω
P rt tr P 3 Φ P P Q- P Φ rt 3 Φ P- tr 3 P- 3 3 P- P- P rt rt SD trP rt tr P 3 Φ P P Q- P Φ rt 3 Φ P- tr 3 P- 3 3 P- P- P rt rt SD tr
Φ tr Φ vQ cn Ω P- Φ P- d P- Ω σ CΛ Cd Φ SD: vQ rt rt rt Ω • d CΛ P1 Φ tr Φ vQ cn Ω P- Φ P- d P- Ω σ CΛ Cd Φ SD: vQ rt rt rt Ω • d CΛ P 1
P- P- P- rT Cd cn o 3" Φ P- r+ 3 CΛ 3" SD Ω Φ cn EP d SD Φ cn tr « 3 Ω Cn P-P- P- P- rT Cd cn o 3 "Φ P- r + 3 CΛ 3 " SD Ω Φ cn EP d SD Φ cn tr «3 Ω Cn P-
3 3 3 o φ vQ 3 P- cn Ω cn vQ Ω SD P 3* rt o Φ 3 rT vQ rt o D vQ - 33 3 3 o φ vQ 3 P- cn Ω cn vQ Ω SD P 3 * rt o Φ 3 rT vQ rt o D vQ - 3
Φ P 3 P Φ α φ cn Φ - • CΛ 3" 3 Φ P 3 3 vQ rt P vQ d 3 SD ω P- P-Φ P 3 P Φ α φ cn Φ - • CΛ 3 " 3 Φ P 3 3 vQ rt P vQ d 3 SD ω P- P-
P d P- 13 Φ 3 Φ p- P cn Φ Φ P- P- 3 P- CΛ Φ SD Φ 3 rt α φ Ω 3 CdP d P- 13 Φ 3 Φ p- P cn Φ Φ P- P- 3 P- CΛ Φ SD Φ 3 rt α φ Ω 3 Cd
3 Ω SD P- SD: P φ Ω P- 3 1 CΛ Φ Φ < 13 P- r 1 vQ !D d P- 3- φ vQ - rt Ω EP cn P- 3' SD 3 rt tr P φ P 3 P- *- P 3 rt ≤ 1 cn 1 P- 3 Φ 3 P> 1 Φ Φ P O 1 O rt Ω 1 ^ Φ 1 1 Φ 3 1 CΛ P I 1 3 tr 1 3 Ω SD P- SD: P φ Ω P- 3 1 CΛ Φ Φ <13 P- r 1 vQ! D d P- 3- φ vQ - rt Ω EP cn P- 3 'SD 3 rt tr P φ P 3 P- * - P 3 rt ≤ 1 cn 1 P- 3 Φ 3 P > 1 Φ Φ PO 1 O rt Ω 1 ^ Φ 1 1 Φ 3 1 CΛ PI 1 3 tr 1
Schicht z.B. dem Puffer, besteht, durch welchen dann sowohl die Puffereigenschaft als auch die Verbindungsfunktion realisiert werden.Layer e.g. the buffer, through which both the buffer property and the connection function are then realized.
Vorteilhafterweise ist der Verbindungsbereich im Betrieb zumindest mit einem Oberflächenbereich davon als im wesentlichen integraler Bestandteil, insbesondere als Schicht, in einem Bereich der bestehenden Struktur der Kontakteinrichtung und/oder der Schaltungseinheit ausgebildet. Die Integration in eine bestehende Struktur ermöglicht auch im Hinblick auf die Ausgestaltung des Verbindungsbereichs eine automatisierte Fertigung, vorzugsweise in einem Vorfertigungsschritt.In operation, the connection area is advantageously formed at least with a surface area thereof as an essentially integral component, in particular as a layer, in an area of the existing structure of the contact device and / or the circuit unit. The integration into an existing structure also enables automated production, preferably in a prefabrication step, with regard to the design of the connection area.
Die Verbindungseinrichtung kann so ausgebildet sein, dass der Pufferbereich mit der Schaltungseinheit und der Verbindungsbereich mit der Kontakteinrichtung verbunden ist. Es bietet sich aber auch die umgekehrte Vorgehensweise an, bei welcher der Verbindungsbereich der Schaltungseinheit zugewandt und mit dieser verbunden ist und andererseits der Pufferbereich mit der Kontakteinrichtung in Kontakt steht.The connection device can be designed such that the buffer area is connected to the circuit unit and the connection area is connected to the contact device. However, there is also the reverse procedure, in which the connection area faces the circuit unit and is connected to it, and on the other hand the buffer area is in contact with the contact device.
Dabei können der Pufferbereich und der Verbindungsbereich im Betrieb zumindest mit jeweils einem weiteren Oberflächenbereich davon direkt verbunden sein, so dass der Pufferbereich und der Verbindungsbereich ohne eine zusätzliche Zwischenschicht in Kontakt stehen und aneinander befestigt sind.The buffer area and the connection area can be directly connected to at least one further surface area thereof during operation, so that the buffer area and the connection area are in contact without an additional intermediate layer and are fastened to one another.
Bei einer anderen vorteilhaften Ausführungsform der erfindungsgemäßen Verbindungseinrichtung ist aber gerade ein zu- sätzlicher Zwischenbereich, insbesondere in Form einer Zwischenschicht vorgesehen, um den Pufferbereich und den Verbindungsbereich im Betrieb miteinander indirekt mechanisch und/oder elektrisch zu verbinden. Dadurch kann erreicht werden, dass sowohl die Schaltungseinheit und die Kontaktein- richtung als auch der Pufferbereich und der Verbindungsbereich thermomechanisch weiter voneinander entkoppelt werden, o t ) t P1 P> o cπ o Cπ o UI tr P- ≤ « SD SD ≤ td tr tr o CΛ 3 > d ω Tl > ω o CΛ cn P < φ 13 n Cd CΛIn another advantageous embodiment of the connecting device according to the invention, an additional intermediate area is provided, in particular in the form of an intermediate layer, in order to indirectly mechanically and / or electrically connect the buffer area and the connecting area to one another during operation. It can thereby be achieved that the circuit unit and the contact device as well as the buffer area and the connection area are further decoupled from one another thermomechanically, ot ) t P 1 P> o cπ o Cπ o UI tr P- ≤ «SD SD ≤ td tr tr o CΛ 3> d ω Tl> ω o CΛ cn P <φ 13 n Cd CΛ
Φ 3 Φ o d d φ φ SD: P- Φ φ Ω d 3 Ω d= d φ Φ φ Ω φ o P SD Φ φ OΦ 3 Φ o d d φ φ SD: P- Φ φ Ω d 3 Ω d = d φ Φ φ Ω φ o P SD Φ φ O
P P- 3 ω Po P- rt P1 3 P 3 tr 3 d tr P Po 3 P φ P- tr P- P P rt 3 PP P- 3 ω Po P- rt P 1 3 P 3 tr 3 d tr P Po 3 P φ P- tr P- PP rt 3 P
Φ CΛ rr •^ rt P rt SD: Φ vQ 3 φ SD tr rt P rt P- Ω rt φ P- Φ αΦ CΛ rr • ^ rt P rt SD: Φ vQ 3 φ SD tr rt P rt P- Ω rt φ P- Φ α
P- P- Φ SD vQ Φ P- d Φ EP 3 Φ P- 3 P1 a SD CΛ CΛ Ω tr Φ P- tr P- SDP- P- Φ SD vQ Φ P- d Φ EP 3 Φ P- 3 P 1 a SD CΛ CΛ Ω tr Φ P- tr P- SD
Ω P φ sC P Φ O 3 P 3 3 rr rt Φ d P- Ω 1 tr P- Ω P- s: Ω CΛ tr Φ P- et tr φ Φ tr vQ Po Φ td P- tr d 3 Ω tr cn φ rt d 3* o tr CΛ f 3 Φ P- H 3 Φ CΛ P- P- P- SD d SD: 3 <l tr SD Ω P- SD 3 tr Φ P- α Φ rt P- H Ω P tr 3 3 vQ d 3 P1 iQ T5 O φ P- tr 3 P SD 3 rt d SDΩ P φ sC P Φ O 3 P 3 3 rr rt Φ d P- Ω 1 tr P- Ω P- s: Ω CΛ tr Φ P- et tr φ Φ tr vQ Po Φ td P- tr d 3 Ω tr cn φ rt d 3 * o tr CΛ f 3 Φ P- H 3 Φ CΛ P- P- P- SD d SD: 3 <l tr SD Ω P- SD 3 tr Φ P- α Φ rt P- H Ω P tr 3 3 vQ d 3 P 1 iQ T5 O φ P- tr 3 P SD 3 rt d SD
> Φ < 3 tr s: P- Φ Φ Φ Hl rt CΛ d P 3 rt P- Φ rt ^^ Po SD: P P- d> Φ <3 tr s: P- Φ Φ Φ Hl rt CΛ d P 3 rt P- Φ rt ^^ Po SD: P P- d
3 P φ P Φ φ Φ P P- P d P 3 vQ tr φ Hl d Ω P- o rt rt Ω 3 Ω3 P φ P Φ φ Φ P P- P d P 3 vQ tr φ Hl d Ω P- o rt rt Ω 3 Ω
CΛ P P- et P P- Φ 3 Φ 3 CΛ P SD o P- Hi P- CΛ 3 tr S vQ Q. Φ SD: tr tr et < tr Ω cn P- vQ ≤ Ω d rt 3 Φ Φ Ω vQ rt Φ Φ P EP N trCΛ P P- et P P- Φ 3 Φ 3 CΛ P SD o P- Hi P- CΛ 3 tr S vQ Q. Φ SD: tr tr et <tr Ω cn P- vQ ≤ Ω d rt 3 Φ Φ Ω vQ rt Φ Φ P EP N tr
Φ φ P- tr P- Q et et ≤ Ω CΛ Φ tr 3 Φ tr P vQ tr cn φ tr SD P SS rt ≤ cn Φ a.Φ φ P- tr P- Q et et ≤ Ω CΛ Φ tr 3 Φ tr P vQ tr cn φ tr SD P SS rt ≤ cn Φ a.
P 3 et cn o Φ tr vQ P- SD tr P Φ tr rt P- Φ 3 P d φ • P- p- N P- tr C rt 3 cn Φ rt Po P- P- Φ Ω P- N cn P- CΛ Ω d ΦP 3 et cn o Φ tr vQ P- SD tr P Φ tr rt P- Φ 3 P d φ • P- p- N P- tr C rt 3 cn Φ rt Po P- P- Φ Ω P- N cn P - CΛ Ω d Φ
Φ P- d 3 φ P- Φ φ 3 Φ rt 3 P- rt P tr 3 PJ SD iQ Φ ω Ω tr vQΦ P- d 3 φ P- Φ φ 3 Φ rt 3 P- rt P tr 3 PJ SD iQ Φ ω Ω tr vQ
3 3 vQ d P rt 3 p- SD: P Φ Φ CΛ 3 Φ et - d tr φ P φ tr rt3 3 vQ d P rt 3 p- SD: P Φ Φ CΛ 3 Φ et - d tr φ P φ tr rt
<! v 3 d rt 3 EP Φ 3 P P- P- P- SD Φ Po tr φ Φ SD tr o d SD 3 < φ Φ 3 Ω 3 Ω P P- s: P- < cn 3 P- d φ<! v 3 d rt 3 EP Φ 3 P P- P- P- SD Φ Po tr φ Φ SD tr o d SD 3 <φ Φ 3 Ω 3 Ω P P- s: P- <cn 3 P- d φ
3 3 3 tr φ Φ P- 3 3 tr Φ tr φ tr rt rt Φ 3 P1 Φ P- 3 Po P vQ P- vQ ≤ P P Ω tr Φ P- et Λ Ü; P- P- Φ P 3 CΛ φ φ 33 3 3 tr φ Φ P- 3 3 tr Φ tr φ tr rt rt Φ 3 P 1 Φ P- 3 Po P vQ P- vQ ≤ PP Ω tr Φ P- et Λ Ü; P- P- Φ P 3 CΛ φ φ 3
N et φ φ tSI tr tr Φ < φ CΛ vQ P1 Φ SD ≤ vQ N CΛ rt Φ tr α. O P- ON et φ φ tSI tr tr Φ <φ CΛ vQ P 1 Φ SD ≤ vQ N CΛ rt Φ tr α. O P- O
P- 3 s P- P- X φ P Φ Λ o φ p- 3 P4 P- Φ d Φ !D rt P- tr tr 3 3P- 3 s P- P- X φ P Φ Λ o φ p- 3 P 4 P- Φ d Φ! D rt P- tr tr 3 3
3 P- SD Ω 3 3 O 3 CΛ P o 3 3 Ω rt tr P P P 3 3 SD Φ SD Φ3 P- SD Ω 3 3 O 3 CΛ P o 3 3 Ω rt tr P P P 3 3 SD Φ SD Φ
3 rt φ 3 tr 3 3 rt tr 3 φ tr P1 α * P1 Φ P1 CΛ 3 Ω3 rt φ 3 tr 3 3 rt tr 3 φ tr P 1 α * P 1 Φ P 1 CΛ 3 Ω
P Φ d rt Φ P- φ 3 P- Φ O X! P- σ d P rt o trP Φ d rt Φ P- φ 3 P- Φ O X! P- σ d P rt o tr
/T Φ et P Φ 3 SD SD 3 3 Φ P Ω p- tr O CΛ cn SD 3 d 3 Φ SD/ T Φ et P Φ 3 SD SD 3 3 Φ P Ω p- tr O CΛ cn SD 3 d 3 Φ SD
SD P- CΛ Φ 3 vQ ?? P P φ 3 Φ tr rt Φ φ 3 o Ω tr VQ πj 3 P_ P 3SD P- CΛ Φ 3 vQ ?? P P φ 3 Φ tr rt Φ φ 3 o Ω tr VQ πj 3 P_ P 3
3 3 Ω 3 P- et cn et SD Cd d CΛ Φ P φ φ <! P rt tr Φ ω d vQ φ P-3 3 Ω 3 P- et cn et SD Cd d CΛ Φ P φ φ <! P rt tr Φ ω d vQ φ P-
3 Φ tr 3 tr tr Φ d Φ 3 < o 3 P O !D α Φ P- tr Po CΛ P 3 CΛ CΛ3 Φ tr 3 tr tr Φ d Φ 3 <o 3 P O! D α Φ P- tr Po CΛ P 3 CΛ CΛ
3 SD CΛ SD: Φ P- CΛ P vQ tr o tr > tr P CΛ _V SD P Φ Po φ CΛ O: Ω3 SD CΛ SD: Φ P- CΛ P vQ tr o tr> tr P CΛ _V SD P Φ Po φ CΛ O: Ω
SD P1 Φ D3 P> P 3 Φ CΛ Φ P SD d SD Φ N Ω rt CΛ ?r P φ P- vQ tr d N rt P- φ rt Φ P vQ P- φ <! (ϊ- 3 Hi d P d tr Φ ω d 0: Φ P 3 tr H φSD P 1 Φ D3 P > P 3 Φ CΛ Φ P SD d SD Φ N Ω rt CΛ? R P φ P- vQ tr d N rt P- φ rt Φ P vQ P- φ <! (ϊ- 3 Hi d P d tr Φ ω d 0: Φ P 3 tr H φ
Ω ≤ d rt rt P- P- Φ Ω P- o φ P- 3 CΛ Φ vQ P- P- 3 3 P- tr tr o P- tr P- 3 Φ P O Ω Ω tr tr 3 P P- CΛ SD P- et Ω 3 P- 3 Ω Φ Φ tr Ω <Ω ≤ d rt rt P- P- Φ Ω P- o φ P- 3 CΛ Φ vQ P- P- 3 3 P- tr tr o P- tr P- 3 Φ PO Ω Ω tr tr 3 P P- CΛ SD P- et Ω 3 P- 3 Ω Φ Φ tr Ω <
CΛ vQ P- tr tr P- P N P1 Ω tr ! Ω tr P 3 \ φ tr P P- Φ tr ΦCΛ vQ P- tr tr P- PNP 1 Ω tr! Ω tr P 3 \ φ tr P P- Φ tr Φ
N Ω CΛ SD Φ φ rt SD P- d φ tr 3 tr 1 et P- o 3 Φ rt CΛ PN Ω CΛ SD Φ φ rt SD P- d φ tr 3 tr 1 et P- o 3 Φ rt CΛ P
P- tr φ 3 tr P Φ d d Ω vQ • Φ φ d Po Ω ro cn P- et rt CΛP- tr φ 3 tr P Φ d d Ω vQ • Φ φ d Po Ω ro cn P- et rt CΛ
3 Φ P- vQ p- 3 Φ Hi tr rt 3 3 1 P- O: tr φ Φ Ω Ω d tr 133 Φ P- vQ p- 3 Φ Hi tr rt 3 3 1 P- O: tr φ Φ Ω Ω d tr 13
3 3 Φ SD P- 3 vQ et rt Φ 3 P- 3 P rt rt P P- tr tr 3 Φ vQ SD tr tr O d 3 φ d 3 d Φ 3 cn 3 d P φ p- P Φ 33 3 Φ SD P- 3 vQ et rt Φ 3 P- 3 P rt rt P P- tr tr 3 Φ vQ SD tr tr O d 3 φ d 3 d Φ 3 cn 3 d P φ p- P Φ 3
< Φ φ P Hl 3 <! P- s: 3 3 Ω P- SD tr P- 3 P- Ir" cn Ω 3 P 3<Φ φ P Hl 3 <! P- s: 3 3 Ω P- SD tr P- 3 P- Ir "cn Ω 3 P 3
Φ P P- fl ≤ Φ CΛ Φ vQ tr d CΛ φ vQ vQ Φ φ φ tr XI o P- dΦ P P- fl ≤ Φ CΛ Φ vQ tr d CΛ φ vQ vQ Φ φ φ tr XI o P- d
P Φ rt 3 φ Φ N P et d SD 3 CΛ CΛ Φ tr vQ et Φ o 3 3 3P Φ rt 3 φ Φ N P et d SD 3 CΛ CΛ Φ tr vQ et Φ o 3 3 3
≤ P- *» Φ P- cn ≤ tr Ω ≤ CΛ rt 3 O P tr P- CΛ Hi P 3 φ vQ vQ φ Ω rt 3 Φ Φ d d 3 Φ Hl tr P- vQ 3 P- P- Φ Ω O: rt Ω≤ P- * »Φ P- cn ≤ tr Ω ≤ CΛ rt 3 OP tr P- CΛ Hi P 3 φ vQ vQ φ Ω rt 3 Φ Φ dd 3 Φ Hl tr P- vQ 3 P- P- Φ Ω O: rt Ω
3 tr vQ φ 3 P- 3 3 Φ P- d: Φ CΛ Φ P- < 3 3 P tr P N SD tr vQ α3 tr vQ φ 3 P- 3 3 Φ P- d: Φ CΛ Φ P- <3 3 P tr P N SD tr vQ α
Φ P- P rt rt α P CΛ tr P Ω Hl φ Φ Φ d P- 3 s. K SD Φ P-Φ P- P rt rt α P CΛ tr P Ω Hl φ Φ Φ d P- 3 s. K SD Φ P-
Φ o vQ ω Φ Φ rt P 3 tr Φ CΛ P P φ α= 3 Ω P- P- et 3 3" φ rt Φ rt <! P- 3 3 ≤ CΛ d o Φ P Φ Φ 1 P- tr vQ tr vQ CΛ Φ P- SD CΛΦ o vQ ω Φ Φ rt P 3 tr Φ CΛ PP φ α = 3 Ω P- P- et 3 3 " φ rt Φ rt <! P- 3 3 ≤ CΛ do Φ P Φ Φ 1 P- tr vQ tr vQ CΛ Φ P- SD CΛ
Φ tr "* O Ω φ P- 3 3 P rt P SD 3 Φ cn et Ω P- CΛ φΦ tr "* O Ω φ P- 3 3 P rt P SD 3 Φ cn et Ω P- CΛ φ
≤ P Φ 3 tr Cd P- H φ vQ Φ P- tr d P tr φ o tr 3 Ω rt P≤ P Φ 3 tr Cd P- H φ vQ Φ P- tr d P tr φ o tr 3 Ω rt P
Φ 3 <1 Φ Φ cn Ω tr P CΛ Ω < vQ Φ Po P- vQ φ 3 P- Φ P tr ΦΦ 3 <1 Φ Φ cn Ω tr P CΛ Ω <vQ Φ Po P- vQ φ 3 P- Φ P tr Φ
P •n φ O 3 P rt tr Φ Hi 3" Φ rt P- 3 SD P Φ 3 P- φ 3 tr α d 3 P Φ Φ • Φ P < o PJ P d o 3 φ P- P tr Ω ΦP • n φ O 3 P rt tr Φ Hi 3 "Φ rt P- 3 SD P Φ 3 P- φ 3 tr α d 3 P Φ Φ • Φ P <o PJ P d o 3 φ P- P tr Ω Φ
Φ Po Po N P P- P φ P 3 CΛ P- 3 Φ s. vQ P- tr Φ tr ^i ≤ P-Φ Po Po N P P- P φ P 3 CΛ P- 3 Φ s. vQ P- tr Φ tr ^ i ≤ P-
3 Po SD d SD Ω ö Φ P 3 P- 13 CΛ p- P- φ φ Ω P 1 rt o Φ3 Po SD d SD Ω ö Φ P 3 P- 13 CΛ p- P- φ φ Ω P 1 rt o Φ
• Φ P1 vQ P tr Φ P- 3 1 1 SD rt 3 3 P 1 <! 3* Φ d cn 3 P Φ• Φ P 1 vQ P tr Φ P- 3 1 1 SD rt 3 3 P 1 <! 3 * Φ d cn 3 P Φ
P P1 cn 1 3 rt 3 " P- Φ o Φ P 3 1 1 3 1 1 1 1 1 P 3 1 vQ PP 1 cn 1 3 rt 3 "P- Φ o Φ P 3 1 1 3 1 1 1 1 1 P 3 1 vQ
co co M to P1 P1 cπ o Cπ o π o cπco co M to P 1 P 1 cπ o Cπ o π o cπ
Öd P- P- tr SD < Cd ω φ Cd P P < P CΛ SD SD P α Q T) ω N ^ sS ω > 3 S d Φ CΛ cn Φ d o φ Φ P- d φ φ φ φ P- rt d φ H Φ d Φ d φ SS Φ Φ P- Φ d P- ΦÖd P- P- tr SD <Cd ω φ Cd PP <P CΛ SD SD P α QT) ω N ^ sS ω> 3 S d Φ CΛ cn Φ do φ Φ P- d φ φ φ φ P- rt d φ H Φ d Φ d φ SS Φ Φ P- Φ d P- Φ
3 P- rt rt P- Hl 3 et 3 3 3 P- P- ?? P Ω Φ Pi P- cn P- 3 3 Hl 3 Φ P H M P cn CΛ P- Q • CΛ SS P rt φ vQ Ω et tr tr tr cn Ω vQ SD: Hi rt P- 3 Ω tr Hl Ω rt ω Φ d 13 Φ < P- P1 3 cn φ tr Φ P- et rt rt s: 3^ cn EP Φ H rt Φ tr φ N d: tr Φ Q P- 3 P- P- o Φ P- vQ P- • P 3 d ≤ φ vQ P P- Φ P φ P sS tr φ P3 P- rt rt P- Hl 3 et 3 3 3 P- P- ?? P Ω Φ Pi P- cn P- 3 3 Hl 3 Φ PHMP cn CΛ P- Q • CΛ SS P rt φ vQ Ω et tr tr tr cn Ω vQ SD: Hi rt P- 3 Ω tr Hl Ω rt ω Φ d 13 Φ <P- P 1 3 cn φ tr Φ P- et rt rt s: 3 ^ cn EP Φ H rt Φ tr φ N d: tr Φ Q P- 3 P- P- o Φ P- vQ P- • P 3 d ≤ φ vQ P P- Φ P φ P sS tr φ P
Φ 3 φ CΛ P tr Ω Φ φ 3 3 d φ cn Φ Φ Φ σ Ω 3 P p- P 3 ΦΦ 3 φ CΛ P tr Ω Φ φ 3 3 d φ cn Φ Φ Φ σ Ω 3 P p- P 3 Φ
3 Φ P1 rt rt tr P 3 φ > < d vQ 3 P1 φ Φ tr 3 P- Φ tr P- φ CΛ d3 Φ P 1 rt rt tr P 3 φ><d vQ 3 P 1 φ Φ tr 3 P- Φ tr P- φ CΛ d
SD: P ••* Φ 3 Φ cn SD: P 3 Φ 3 o P 3 φ SD: 3 P Φ Cd cn P- 3 Ω 3 < <SD: P •• * Φ 3 Φ cn SD: P 3 Φ 3 o P 3 φ SD: 3 P Φ Cd cn P- 3 Ω 3 <<
EP Φ 1 P- P- 3 rt EP CΛ P vQ SD tr rt 3 EP Φ Φ 3 Φ rt 3 rt tr vQ φ OEP Φ 1 P- P- 3 rt EP CΛ P vQ SD tr rt 3 EP Φ Φ 3 Φ rt 3 rt tr vQ φ O
Φ ss s: P1 rt Φ Φ S rt tr tr s: Φ < Hl Φ P P- P tr Φ CΛ P PΦ ss s: P 1 rt Φ Φ S rt tr tr s: Φ <Hl Φ P P- P tr Φ CΛ PP
3 Φ Ω H Φ α 3 3 φ φ p- 3 vQ Φ P φ P- (D 3 Ω a. Φ Φ öd SD: 3 Hl ω rt3 Φ Ω H Φ α 3 3 φ φ p- 3 vQ Φ P φ P- (D 3 Ω a. Φ Φ öd SD: 3 Hl ω rt
P- tr P- SD P- 3 P- φ P Ω P1 SD tr SD P- cn φ tr o 13 ΦP- tr P- SD P- 3 P- φ P Ω P 1 SD tr SD P- cn φ tr o 13 Φ
< rt Φ rt Ω ≤ Φ P Cd <! rt rt z O SD σ tr < 3 P Ω rt rt Φ P SD P-<rt Φ rt Ω ≤ Φ P Cd <! rt rt z O SD σ tr <3 P Ω rt rt Φ P SD P-
Φ Φ P SD tr φ 3 SD Φ φ Φ φ d SD tr tr P- Φ cn Φ α < SD - < P P 3 3 HΦ Φ P SD tr φ 3 SD Φ φ Φ φ d SD tr tr P- Φ cn Φ α <SD - <P P 3 3 H
P P 3 Φ 3 d P P P 3 3 Φ Φ 3 P P Φ Φ d O P- O Φ 3 Φ tr Φ P- P 3 < cn Φ σ Φ < vQ Φ α P P Φ tr P P cn SD 3 Φ P- P- dP P 3 Φ 3 d P P P 3 3 Φ Φ 3 P P Φ Φ d O P- O Φ 3 Φ tr Φ P- P 3 <cn Φ σ Φ <vQ Φ α P P Φ tr P P cn SD 3 Φ P- P- d
P- 3 3 Φ Φ p- P- 3 o P rt d co P- P- φ tr d tr Φ Ω Φ 3 trP- 3 3 Φ Φ p- P- 3 o P rt d co P- P- φ tr d tr Φ Ω Φ 3 tr
3 3 1 P vQ Ω 3 3 3 φ P- ≤ 3 Φ 3 3 3 d vQ Po < P tr P vQ P- tr Cd et Φ tr Φ tr p tr p- CΛ 3 3 Φ vQ cn Φ SO, 3 Φ SS O 3 Φ 3 d φ Φ ≤ P P- tr d Φ tSl rt o ω cn rt 3 d <! tr Φ P P- P- Φ φ 3 cn3 3 1 P vQ Ω 3 3 3 φ P- ≤ 3 Φ 3 3 3 d vQ Po <P tr P vQ P- tr Cd et Φ tr Φ tr p tr p- CΛ 3 3 Φ vQ cn Φ SO, 3 Φ SS O 3 Φ 3 d φ Φ ≤ P P- tr d Φ tSl rt o ω cn rt 3 d <! tr Φ P P- P- Φ φ 3 cn
3 <! rt SD: P- 3 P- SD 3 <! P- tr CΛ Cd φ tr SD 3 o Φ P- P- rt rt 3 P- P P- Q o P ~> φ SSI P> d vQ o 3 Φ SD Φ φ 3 Φ 3 Φ vQ P 3 P4 cn Φ 3 Po Φ Ω cn P P- et ≤ d Po cn P 3 P- P1 P- rt rt P P cn rt rt P- sS Φ P- P tr3 <! rt SD: P- 3 P- SD 3 <! P- tr CΛ Cd φ tr SD 3 o Φ P- P- rt rt 3 P- P P- Q o P ~> φ SSI P> d vQ o 3 Φ SD Φ φ 3 Φ 3 Φ vQ P 3 P 4 cn Φ 3 Po Φ Ω cn P P- et ≤ d Po cn P 3 P- P 1 P- rt rt PP cn rt rt P- sS Φ P- P tr
Φ N φ tr p- 3 Φ •*« φ N 3 rt rt P H φ rt cn φ Φ P- Φ • Φ Φ 3 3 vQ etΦ N φ tr p- 3 Φ • * «φ N 3 rt rt P H φ rt cn φ Φ P- Φ • Φ Φ 3 3 vQ et
P- d tr O Φ CΛ vQ rt P- d T Φ d Φ P- P- P- Φ rt P- P- cn rt "* 3 CΛ α Φ P1 P- d tr O Φ CΛ vQ rt P- d T Φ d Φ P- P- P- Φ rt P- P- cn rt "* 3 CΛ α Φ P 1
3 vQ P- Ω CΛ ≤ 3 vQ SD 3 3 Φ Ω Ω P- Φ 3 1 rt sS φ Φ d tr P-3 vQ P- Ω CΛ ≤ 3 vQ SD 3 3 Φ Ω Ω P- Φ 3 1 rt sS φ Φ d tr P-
P rt 3 Φ tr tr P- Φ P et 3 vQ SD tr tr tr \-> 3 P tr • P- Φ sS < 3 P 3 Φ ΩP rt 3 Φ tr tr P- Φ P et 3 vQ SD tr tr tr \ -> 3 P tr • P- Φ sS <3 P 3 Φ Ω
P- Φ P- P Φ Φ CΛ P- Φ 3 N CΛ 3 p- SD cn 1 Φ φ rt CΛ vQ 3 trP- Φ P- P Φ Φ CΛ P- Φ 3 N CΛ 3 p- SD cn 1 Φ φ rt CΛ vQ 3 tr
Ω 3 rr Φ 3 P et Ω Ω 3 ≤ Φ vQ SD o Φ < Cd Ω Po rt Ω 3 P P1 rt ω tr P- 3 tr Φ • tr tr SD P- P- Φ d α tr O Φ 3" rt tr 3 tr P- Φ vQ cn rt > 3 Φ P- φ rt d ω 3 O Hl Φ Φ P P rt Φ d φ P- Ω 3 φ P- Φ d d Φ o P Ω α P d d Ω Ω tr P P 3 vQ Φ d 3 3 P α 3 tr 3 Ω cnΩ 3 rr Φ 3 P et Ω Ω 3 ≤ Φ vQ SD o Φ <Cd Ω Po rt Ω 3 PP 1 rt ω tr P- 3 tr Φ • tr tr SD P- P- Φ d α tr O Φ 3 "rt tr 3 tr P- Φ vQ cn rt> 3 Φ P- φ rt d ω 3 O Hl Φ Φ PP rt Φ d φ P- Ω 3 φ P- Φ dd Φ o P Ω α P dd Ω Ω tr PP 3 vQ Φ d 3 3 P α 3 tr 3 Ω cn
3 cn 3 s. tr Φ tr P- 3 CΛ tr tr Φ Φ Po Φ P- 3 φ φ Cd SD: 3- vQ Po Φ Φ P- Φ X vQ Po Φ P- 3 P- SD P> cn Ω vQ > ι-3 P d 3 Φ cP ** d: f CΛ 3 Ω < cn d d: tsi 3 rt Φ 3 d Φ tr d sS P- 3 P φ d p- 3" d Φ tr Φ Φ U ≤ tr P- tr rt Φ CΛ P1 tr sS cn φ rt tsi vQ α Φ 3 sS ω cn P Hl 3 vQ P P Hl Φ P 3 Φ P CΛ cn φ SD Φ Hl H SD S CΛ SD P- Φ vQ et d Hl et φ Φ tr Φ P- d ?r P vQ P- o 3 d P- d: Ω 3 P- tr P Ω < 3 P1 3 cn 3 s. tr Φ tr P- 3 CΛ tr tr Φ Φ Po Φ P- 3 φ φ Cd SD: 3- vQ Po Φ Φ P- Φ X vQ Po Φ P- 3 P- SD P> cn Ω vQ> ι-3 P d 3 Φ cP * * d: f CΛ 3 Ω <cn dd: tsi 3 rt Φ 3 d Φ tr d sS P- 3 P φ d p- 3 "d Φ tr Φ Φ U ≤ tr P- tr rt Φ CΛ P 1 tr sS cn φ rt tsi vQ α Φ 3 sS ω cn P Hl 3 vQ PP Hl Φ P 3 Φ P CΛ cn φ SD Φ Hl H SD S CΛ SD P- Φ vQ et d Hl et φ Φ tr Φ P - d? r P vQ P- o 3 d P- d: Ω 3 P- tr P Ω <3 P 1
3 φ P1 3 P- d Φ P ω 3 Φ Φ CΛ <! tr φ Po cn tr tr CΛ Φ SD tr Φ 3 φ3 φ P 1 3 P- d Φ P ω 3 Φ Φ CΛ <! tr φ Po cn tr tr CΛ Φ SD tr Φ 3 φ
Φ vQ P P- SD 3 3 P rt vQ <! P- vQ rt o P" P- P- rt P φ Φ Ω P d P P- cn cn tr Ω 3 φ cn φ CΛ Φ Ω Φ ^* 3 p- 3 cn d P 3 tr Φ CΛ SD tr vQ ΩΦ vQ P P- SD 3 3 P rt vQ <! P- vQ rt o P "P- P- rt P φ Φ Ω P d P P- cn cn tr Ω 3 φ cn φ CΛ Φ Ω Φ ^ * 3 p- 3 cn d P 3 tr Φ CΛ SD tr vQ Ω
Po Φ tr 3 3 Φ rt 3 Hi P tr σ Φ Φ et ≤ 3 rt φ P- d P- Φ trPo Φ tr 3 3 Φ rt 3 Hi P tr σ Φ Φ et ≤ 3 rt φ P- d P- Φ tr
< O P Φ rt 3 Φ et Φ o ss φ < E 3 . o Φ vQ P- tr 3 Ω vQ Po 3 3 cn<O P Φ rt 3 Φ et Φ o ss φ <E 3. o Φ vQ P- tr 3 Ω vQ Po 3 3 cn
O P Φ 3 Φ N • tr P P Φ o 3 O Φ tr P cn 3 P): tr tr φ sS f SD:OP Φ 3 Φ N • tr PP Φ o 3 O Φ tr P cn 3 P ) : tr tr φ sS f SD:
P 3 P- 3 SS to SD: 3 3 Φ P P P- N O Φ Hi " φ tr Φ d EP vQ Ω φ td Φ P" N Φ 3 N Ω ≤ Φ P- < o Cd rt P <! P- P- 3 φP 3 P- 3 SS to SD: 3 3 Φ P P P- N O Φ Hi "φ tr Φ d EP vQ Ω φ td Φ P" N Φ 3 N Ω ≤ Φ P- <o Cd rt P <! P- P- 3 φ
Φ α tr SD > P- CΛ P rt s: Φ P Po d tr Φ cn Φ P φ Φ φ P" cn »Q Φ P cn Φ P d et Φ P- φ rt SD vQ 0 P- SD P 3 rt o P- P α rt ω P- φ P < SD ω Φ P- P- o CΛ P Tl CΛ 3 SD rt Sl tr tr P α Ω tr Φ ^ Φ 3 et tr Φ Hl 3 CΛ Ω 0, Ω s: d H s: rt d Φ Φ Φ P- α P- tr d rt p- Φ trΦ α tr SD> P- CΛ P rt s: Φ P Po d tr Φ cn Φ P φ Φ φ P "cn» Q Φ P cn Φ P d et Φ P- φ rt SD vQ 0 P- SD P 3 rt o P- P α rt ω P- φ P <SD ω Φ P- P- o CΛ P Tl CΛ 3 SD rt Sl tr tr P α Ω tr Φ ^ Φ 3 et tr Φ Hl 3 CΛ Ω 0, Ω s: d H s: rt d Φ Φ Φ P- α P- tr d rt p- Φ tr
Φ Φ P CΛ d: et tr Φ tr Φ Φ Hl CΛ Φ SD CΛ 3 P- P 3 φ Φ P 3 sS 3 P ΦΦ Φ P CΛ d: et tr Φ tr Φ Φ Hl CΛ Φ SD CΛ 3 P- P 3 φ Φ P 3 sS 3 P Φ
3 P tr 3" co P Φ P P Pl P- rT rt *« P tr φ α P-3 P tr 3 "co P Φ P P Pl P- rT rt *« P tr φ α P-
" Φ P P"Φ P P
Po d vQ P Φ Po P- 3 Po ( φ P- CΛ et t i tu Φ ^ d P- P- Φ CΛ _- P- 3Po d vQ P Φ Po P- 3 Po (φ P- CΛ et ti tu Φ ^ d P- P- Φ CΛ _- P- 3
P- 3 φ d P Φ CΛ P- tr P- Φ P 3 Φ Φ P- Φ P d 3 φ 3 3 3 3 rt Ω Ω Φ oP- 3 φ d P Φ CΛ P- tr P- Φ P 3 Φ Φ P- Φ P d 3 φ 3 3 3 3 rt Ω Ω Φ o
3 tr 3 Φ P rt 3 Φ 3 3 tr P- 3 P Φ 15 vQ P p- Φ tr tr P- 33 tr 3 Φ P rt 3 Φ 3 3 tr P- 3 P Φ 15 vQ P p- Φ tr tr P- 3
SD 1 Φ P- vQ P- 3 P 1 • Φ P- 3 3 Φ 3 Ho ω Hi rt sS 3 P- d Φ et rt Φ cn 3 1 CΛ O Φ P- S. Φ 1 P- 3 1 P- Φ tr P- Φ CΛ 3 P d Φ Ω cn α 1 tr P 3 φ P- 1 tr Ω P Φ 3 1 rt sa 3 tr Φ 1 Ω φ tr 1 1 Φ vQ Φ rt tr 1 3 3 SD 1 Φ P- vQ P- 3 P 1 • Φ P- 3 3 Φ 3 Ho ω Hi rt sS 3 P- d Φ et rt Φ cn 3 1 CΛ O Φ P- S. Φ 1 P- 3 1 P- Φ tr P- Φ CΛ 3 P d Φ Ω cn α 1 tr P 3 φ P- 1 tr Ω P Φ 3 1 rt sa 3 tr Φ 1 Ω φ tr 1 1 Φ vQ Φ rt tr 1 3 3
co ω l\3 ro P1 π o Cπ o cπ o Cπco ω l \ 3 ro P 1 π o Cπ o cπ o Cπ
Q (X CΛ cn td rt P CΛ SD tr φ et tπ σ 3 P- d φ s α d tr ω =s SD N tr Q_ vQ ^ l_J. N p P- o P- p- d P- Ω 3 φ P- d SD P- Φ 3 3 P- P- P- 3 P- φ Φ d d P- Φ o Φ dQ (X CΛ cn td rt P CΛ SD tr φ et tπ σ 3 P- d φ s α d tr ω = s SD N tr Q_ vQ ^ l_J. N p P- o P- p- d P- Ω 3 φ P- d SD P- Φ 3 3 P- P- P- 3 P- φ Φ dd P- Φ o Φ d
Φ Φ Ω 3 3 Ω tr O P- 3 3 H Φ P CΛ (X 3 P Φ 3 P1 P- Po cn 3 rt Φ 3 sS 3Φ Φ Ω 3 3 Ω tr O P- 3 3 H Φ P CΛ (X 3 P Φ 3 P 1 P- Po cn 3 rt Φ 3 sS 3
3 sS tr P- vQ tr Φ P rt Φ vQ tr tr \ Φ α P. tr -1 Φ α P- rt φ P-3 sS tr P- vQ tr Φ P rt Φ vQ tr tr \ Φ α P. tr - 1 Φ α P- rt φ P-
N > P- vQ et 3 CΛ Φ *_ Φ O 3 o iX d cn tr d P- Ω SD P- 3N> P- vQ et 3 CΛ Φ * _ Φ O 3 o iX d cn tr d P- Ω SD P- 3
Hl d P N Φ <! d 3 !D Xi Φ Φ P O CΛ tr tr P- 3 rt Φ φ 3 cn tr ?Hl d P N Φ <! d 3! D Xi Φ Φ P O CΛ tr tr P- 3 rt Φ φ 3 cn tr?
Po d o 3 < d d o P- P- Hl 3 O Φ tc Φ Φ Φ vQ SD P 3 vQ rt Φ rt P- ΦPo d o 3 <d d o P- P- Hl 3 O Φ tc Φ Φ Φ vQ SD P 3 vQ rt Φ rt P- Φ
(D: 3 CΛ sS P vQ Φ 3 Hl 3 3 rr P- rt 3 P SD < 3 cn O 3 P. cn • 3 Φ vQ CΛ(D: 3 CΛ sS P vQ Φ 3 Hl 3 3 rr P- rt 3 P SD <3 cn O 3 P. cn • 3 Φ vQ CΛ
Ω SD <! SD Φ vQ P vQ et tr Φ 3 !D H o tc tr tr 3 o φ tr ** P- Φ rt tr tr o 3 P- Φ 3 tr SD Φ P ? Φ Φ tr P tr Φ Φ 3 tr Φ H 3Ω SD <! SD Φ vQ P vQ et tr Φ 3! D H o tc tr tr 3 o φ tr ** P- Φ rt tr tr o 3 P- Φ 3 tr SD Φ P? Φ Φ tr P tr Φ Φ 3 tr Φ H 3
Φ 3 P J3 rt cn P- P- P. o ?V P- 3 d rt P 1 P1 N Φ P P Φ 3 P- CΛ P 3 d P Φ φΦ 3 P J3 rt cn P- P- P. o? V P- 3 d rt P 1 P 1 N Φ PP Φ 3 P- CΛ P 3 d P Φ φ
Φ vQ Φ Φ Φ 3 3 SD φ rt rt o 3 Φ Φ Φ Φ d cn cn φ SD: 13 Ω Φ cn 3 P- P P-Φ vQ Φ Φ Φ 3 3 SD φ rt rt o 3 Φ Φ Φ Φ d cn cn φ SD: 13 Ω Φ cn 3 P- P P-
N Φ 3 P tr P Φ vQ P- Ϊ P- vQ Ω rt P- sS 3 P tr P- tr (x Ω CΛ 3N Φ 3 P tr P Φ vQ P- Ϊ P- vQ Ω rt P- sS 3 P tr P- tr (x Ω CΛ 3
$. CΛ Hl Φ Φ Φ d d φ P- d cn 3 Φ rt rt rt 3" Φ Ω Φ d= P- Ω φ ^ tr rt$. CΛ Hl Φ Φ Φ d d φ P- d cn 3 Φ rt rt rt 3 "Φ Ω Φ d = P- Ω φ ^ tr rt
P- O Ω SD 3 cn 3 P 3 3 P- vQ P P- P φ P -> tr P- P- Ω Ω tr cn o et Φ Pl co 3 tr CΛ rt vQ Ω 3 P 3 Φ P- 3 P- P P- P- P1 cn rt Ω ? tr cn o P. d φP- O Ω SD 3 cn 3 P 3 3 P- vQ P P- P φ P - > tr P- P- Ω Ω tr cn o et Φ Pl co 3 tr CΛ rt vQ Ω 3 P 3 Φ P- 3 P - P P- P- P 1 cn rt Ω? tr cn o P. d φ
Ω cn cn P- Φ tr N P- ω SD 3 Ω Φ Cn 3 3 φ d Φ tr CΛ rt 3 φ 3 CO P- tr et SD Φ 13 CΛ 3 " Φ Ω tr d SD: tr cn Ω o tr 3 <l P Φ SD (X P vQ Φ φ tr vQ 3 Φ rt cn Φ P- 3" φ cn EP rt tr φ Φ vQ φ Φ vQ p- o d Φ PΩ cn cn P- Φ tr N P- ω SD 3 Ω Φ Cn 3 3 φ d Φ tr CΛ rt 3 φ 3 CO P- tr et SD Φ 13 CΛ 3 "Φ Ω tr d SD: tr cn Ω o tr 3 <l P Φ SD (XP vQ Φ φ tr vQ 3 Φ rt cn Φ P- 3 "φ cn EP rt tr φ Φ vQ φ Φ vQ p- or Φ P
3 Φ Φ (X ? • P P Ω rt CΛ vQ Φ d O Φ d P- 3 P Φ rt cn P (D Φ Q.3 Φ Φ (X? • P P Ω rt CΛ vQ Φ d O Φ d P- 3 P Φ rt cn P (D Φ Q.
P 3 et φ SD tr d o φ 3 3' 3 1 3 Φ 3 sS < P φ φ Φ P- P- φ φ 3 *% sS Φ P- CΛ cn 3 3 3 tr CΛ vQ P- Φ SD Φ O SD P « CΛ 3 Ω CΛP 3 et φ SD tr do φ 3 3 '3 1 3 Φ 3 sS <P φ φ Φ P- P- φ φ 3 *% sS Φ P- CΛ cn 3 3 3 tr CΛ vQ P- Φ SD Φ O SD P «CΛ 3 Ω CΛ
P- O P- 3 Ω CΛ Φ vQ P. P- Ω 13 < o P Φ EP 3 P α 3 d :- CΛ trP- O P- 3 Ω CΛ Φ vQ P. P- Ω 13 <o P Φ EP 3 P α 3 d: - CΛ tr
3 3 Φ Φ P- Φ tr rt Φ tr < cn φ ςx P iQ α tr φ o co 13 J P- tr < φ Φ P- Φ SD N N P P. SD Φ P Φ ω Hl Φ Φ Φ Ω φ Hl 3 3 Φ φ3 3 Φ Φ P- Φ tr rt Φ tr <cn φ ςx P iQ α tr φ o co 13 J P- tr <φ Φ P- Φ SD NNP P. SD Φ P Φ ω Hl Φ Φ Φ Ω φ Hl 3 3 Φ φ
P Ω 3 Po P Φ P1 d P- d Φ φ P" P O tr P Ω P- tr rt tr tr cn Φ 3 rt CΛ SD PP Ω 3 Po P Φ P 1 d P- d Φ φ P "PO tr P Ω P- tr rt tr tr cn Φ 3 rt CΛ SD P
3" Φ o P rt P cn P et et sS P P- tr 3 SD P- Ω P Φ o < er3 "Φ o P rt P cn P et et sS P P- tr 3 SD P- Ω P Φ o <er
CΛ SD 3 P1 <! Hi d et Φ d Φ Φ 3 SD P. P- sS 3 Φ PJ tr vQ 3 o P-CΛ SD 3 P 1 <! Hi d et Φ d Φ Φ 3 SD P. P- sS 3 Φ PJ tr vQ 3 o P-
Ω 3 vQ o P- 3 3 Xi P- d 3 3 P 0, Φ _- d Ω Φ d P- tr sS P 3 3 tr p- f-ö rt P 3 iQ φ P o 3 3 vQ P d P r+ 3 tr P P1 Xi Hl Ω Φ φ SD » P.Ω 3 vQ o P- 3 3 Xi P- d 3 3 P 0, Φ _- d Ω Φ d P- tr sS P 3 3 tr p- f -ö rt P 3 iQ φ P o 3 3 vQ P d P r + 3 tr PP 1 Xi Hl Ω Φ φ SD »P.
SD cn d P cn Ω P- 3 Φ P. CΛ Φ P. 3 vQ d vQ P. d d tr cn 3 P d 00SD cn d P cn Ω P- 3 Φ P. CΛ Φ P. 3 vQ d vQ P. d d tr cn 3 P d 00
P1 Ω Po P- d Φ tr Φ rt 3 SD rt Φ vQ P1 3 cn < Φ 3 13 rt rt 3 Φ Φ SD 3 rt tr Hl Φ 3 P- SD SD sS 3 • P Φ vQ vQ Φ 3 vQ Hl Φ d Φ P P1 vQ d φ Φ vQ iQ 3 3 Φ ? O Φ O vQ Φ P- cn Φ P φ P 3 tr P Φ CΛ CΛP 1 Ω Po P- d Φ tr Φ rt 3 SD rt Φ vQ P 1 3 cn <Φ 3 13 rt rt 3 Φ Φ SD 3 rt tr Hl Φ 3 P- SD SD sS 3 • P Φ vQ vQ Φ 3 vQ Hl Φ d Φ PP 1 vQ d φ Φ vQ iQ 3 3 Φ? O Φ O vQ Φ P- cn Φ P φ P 3 tr P Φ CΛ CΛ
3 3 P Φ cn tr p- P rt tr P- P P- Ω SD 3 Φ ?r SD P vQ rt Φ CO P- tr vQ 3 vQ φ CΛ Po P- P- ω P. Φ 3 tr 3 SD: P- SD o o ** P Φ 3 Φ cn < o α Φ P- Ω P- Φ 13 rt 3 P- Φ Φ o EP 3 3 cn σ tr SD CΛ φ φ P φ φ Φ 3 rt tr 3 P d Ω P 3 P Φ Hl 3 Φ Φ d 3 Φ rt CΛ P- Φ3 3 P Φ cn tr p- P rt tr P- P P- Ω SD 3 Φ? R SD P vQ rt Φ CO P- tr vQ 3 vQ φ CΛ Po P- P- ω P. Φ 3 tr 3 SD: P- SD oo * * P Φ 3 Φ cn <o α Φ P- Ω P- Φ 13 rt 3 P- Φ Φ o EP 3 3 cn σ tr SD CΛ φ φ P φ φ Φ 3 rt tr 3 P d Ω P 3 P Φ Hl 3 Φ Φ d 3 Φ rt CΛ P- Φ
(_.. P Φ 3 SD: Φ P. d o 3 3 tr *>» SD » φ P P cn d P SD P" P-(_ .. P Φ 3 SD: Φ P. d o 3 3 tr *> »SD» φ P P cn d P SD P "P-
3 cn P EP 3 3 d 3 α P- vQ φ CΛ 3 < Ω P Hi Po vQ So cn 3 i→ Ω tr 13 td P- 3 vQ Φ 3 3 Ω N d Φ tr sS cn P1 φ rt φ o tr φ SD iχ) P < rr d vQ P P- tr d 3 P rt O rt SD: SD: tr ;v Φ rt SD cn3 cn P EP 3 3 d 3 α P- vQ φ CΛ 3 <Ω P Hi Po vQ So cn 3 i → Ω tr 13 td P- 3 vQ Φ 3 3 Ω N d Φ tr sS cn P 1 φ rt φ o tr φ SD i χ) P <rr d vQ P P- tr d 3 P rt O rt SD: SD: tr; v Φ rt SD cn
P- 3 d Hl Φ 3 cn CX Φ cn 3 (D P vQ tr (X Φ Ω Ω P- Φ Φ P. Φ rt 3 Po P- P vQ Φ α cn et P- -" ** P- sS d P tr tr P- CO P- Po PP- 3 d Hl Φ 3 cn CX Φ cn 3 (DP vQ tr (X Φ Ω Ω P- Φ Φ P. Φ rt 3 Po P- P vQ Φ α cn et P- - "* * P- sS d P tr tr P- CO P- Po P
** d Hl 3 σ φ \ Φ P Φ rt rt et 3 3 Φ P Φ φ α 3 Φ P P-* * d Hl 3 σ φ \ Φ P Φ rt rt et 3 3 Φ P Φ φ α 3 Φ P P-
3 Φ (X P- P o 3 P Φ P- d φ P- P. P Ω Cd Φ Φ P SD co 33 Φ (X P- P o 3 P Φ P- d φ P- P. P Ω Cd Φ Φ P SD co 3
3 vQ P d 3 p. SD: CΛ vQ 3 3 3 3 Ω 3 d P. tr Φ C rt Φ 3 Φ cn3 vQ P d 3 p. SD: CΛ vQ 3 3 3 3 Ω 3 d P. tr Φ C rt Φ 3 Φ cn
SD: Φ tr 3 P^ Φ EP Ω P1 cn cn P- vQ tr cn 3 φ P φ Φ φ P- SD φ CΛ trSD: Φ tr 3 P ^ Φ EP Ω P 1 cn cn P- vQ tr cn 3 φ P φ Φ φ P- SD φ CΛ tr
3 3 Φ vQ d o P Φ tr Φ tr 3 cn SD tr vQ 3 P. Φ cn CΛ sS Ω <! CΛ rt Φ3 3 Φ vQ d o P Φ tr Φ tr 3 cn SD tr vQ 3 P. Φ cn CΛ sS Ω <! CΛ rt Φ
H P 3 3 SD P- φ φ P. φ 3 φ cn • Φ P- Φ 13 tr o SD cnH P 3 3 SD P- φ φ P. φ 3 φ cn • Φ P- Φ 13 tr o SD cn
P- SD Φ Φ iQ rt Φ CΛ P1 Ω p- cn Φ P- P- cn Φ P Ω tr1 tr* P P1 3 o 3 oP- SD Φ Φ iQ rt Φ CΛ P 1 Ω p- cn Φ P- P- cn Φ P Ω tr 1 tr * PP 1 3 o 3 o
Ω 3 P- P cn SD P1 Ω rt tr 3 O cn 3 cn o P- tr Φ φ P. P- P 3 tr Ω vQ Φ T Φ tr d φ Φ 3 rt tr Ω 3 3 SD SD φ N φ (D Φ rt tr Φ P- rt rt SD 3 3 α Φ φ tr P d ςx 3 P- cn d P φ ΦΩ 3 P- P cn SD P 1 Ω rt tr 3 O cn 3 cn o P- tr Φ φ P. P- P 3 tr Ω vQ Φ T Φ tr d φ Φ 3 rt tr Ω 3 3 SD SD φ N φ (D Φ rt tr Φ P- rt rt SD 3 3 α Φ φ tr P d ςx 3 P- cn d P φ Φ
SD φ tr 3 Φ et P1 vQ CΛ φ 3 P- φ φ P- Pi Φ Po Po rt CΛ P- PSD φ tr 3 Φ et P 1 vQ CΛ φ 3 P- φ φ P- Pi Φ Po Po rt CΛ P- P
3 P Hl φ P p- P rt CΛ Ω P cn rt 3 P Ω tr cn P P < vQ P. 1 Φ d: 3 P- 3 P- d φ ω tr φ Φ tr SD SD SD sS <! Φ Φ φ3 P Hl φ P p- P rt CΛ Ω P cn rt 3 P Ω tr cn PP <vQ P. 1 Φ d: 3 P- 3 P- d φ ω tr φ Φ tr SD SD SD sS <! Φ Φ φ
Φ P Ω 1 1 3 P- o SD Φ et d < 3 3 Φ 0 P σ PΦ P Ω 1 1 3 P- o SD Φ et d <3 3 Φ 0 P σ P
P- tr vQ 3 sS SD P- P- d Φ φ P. P 1 P- 1 1 1 cn 1 P- 1 P1 1 3 3 P CΛ cn Φ 1 P1 P PP- tr vQ 3 sS SD P- P- d Φ φ P. P 1 P- 1 1 1 cn 1 P- 1 P 1 1 3 3 P CΛ cn Φ 1 P 1 PP
1 φ cn vQ 1 P 1 1 φ cn vQ 1 P 1
ner Chiprückseite und einem Diebond aufzubauen. Bisher wurden diese thermomechanischen Verspannungen zwischen einem Chip und zum Beispiel einem Leadframe durch eine Klebung oder Lötung ausgeglichen.to build a chip back and a die bond. So far, these thermomechanical tensions between a chip and, for example, a lead frame have been compensated for by gluing or soldering.
Durch die erfindungsgemäße Verbindungseinrichtung und insbesondere durch den Puffer oder Pufferbereich können die auftretenden Verspannungen aufgrund unterschiedlicher Wärmeausdehnungskoeffizienten von zum Beispiel Silizium und Kupfer je nach Dimensionierung aufgefangen werden. Durch die Verwendung eines Pufferbereichs oder Puffers werden die montagebedingten maximalen Chipflächen der einzelnen Gehäusetypen deutlich erhöht. So stehen für jeden Gehäusetyp insgesamt größere Chipflächen zur Verfügung, die beim herkömmlichen Verfahren durch Klebung oder Lötung durch die entsprechenden Klebe- oder Löthöfe eingeschränkt wären.By means of the connecting device according to the invention and in particular by means of the buffer or buffer area, the stresses that occur due to different coefficients of thermal expansion of, for example, silicon and copper can be absorbed depending on the dimensioning. By using a buffer area or buffer, the assembly-related maximum chip areas of the individual housing types are significantly increased. This means that larger chip areas are available for each type of housing, which would be restricted in the conventional method by gluing or soldering using the appropriate gluing or soldering furnaces.
Des weiteren begünstigt die Pufferschicht den Legierungspro- zess. Gewöhnlich sind die dünnen Legierungsschichten - von z.B. lμm - nur bei kleinen Chipflächen anwendbar. Durch die Pufferschicht werden erfindungsgemäß auch große Chipflächen möglich, wie sie auch beim Kleben oder Löten erreichbar sind.The buffer layer also favors the alloying process. Usually the thin alloy layers - from e.g. lμm - only applicable for small chip areas. The buffer layer also allows large chip areas according to the invention, as can also be achieved with gluing or soldering.
Ferner ist auch der Legierprozess erheblich einfacher zu rea- lisieren als der Klebeprozess oder der Lötprozess. Dies führt insgesamt zu einer deutlichen Prozessverbilligung.Furthermore, the alloying process is also considerably easier to implement than the gluing process or the soldering process. Overall, this leads to a significant reduction in process costs.
Ein weiterer Vorteil liegt in der weitaus besseren Zuverlässigkeit der Legierverbindung gegenüber anderen Diebondprozes- sen.Another advantage lies in the far better reliability of the alloy connection compared to other die bonding processes.
Maßgeblich für die oben beschriebenen Vorteile der erfindungsgemäßen Verbindungseinrichtung ist auch die Entkopplung zwischen Pufferschicht und Verbindungsschicht. Dabei wird der Puffer in eine andere bereits bestehende Struktur, nämlich der Struktur der Schaltungseinheit oder der Struktur der Kontakteinrichtung, integriert.The decoupling between the buffer layer and the connection layer is also decisive for the advantages of the connection device according to the invention described above. The buffer is moved to another existing structure, namely the structure of the circuit unit or the structure of the contact device.
Durch die Verwendung eines Pufferbereichs mit den oben angegebenen Eigenschaften würde die maximale diebondbare Chipfläche in einem Gehäuse gegebener Dimension deutlich erhöht, weil die Verbindungsschicht sich bereits auf der Chiprückseite oder auf dem Leadframe befindet und somit nicht beim Die- bondprozess selbst aufgebracht werden muss.The use of a buffer area with the properties specified above would significantly increase the maximum die-bondable chip area in a housing of a given dimension, because the connection layer is already on the back of the chip or on the lead frame and therefore does not have to be applied during the die-bonding process itself.
Die so frei werdende Fläche auf der Kontakteinrichtung, welche bisher von Klebehöfen oder Lothöfen benetzt wurde, steht nunmehr dann als mögliche zusätzliche Chipfläche nutzbar zur Verfügung.The area thus freed up on the contact device, which was previously wetted by adhesive ovens or solder ovens, is now available as a possible additional chip area.
Weitere Aspekte und Vorteile der vorliegenden Erfindung ergeben sich aus den nachfolgenden Darstellungen:Further aspects and advantages of the present invention result from the following illustrations:
Wie oben bereits erwähnt wurde, wird vorgeschlagen, eine Ver- bindungsschicht im Verbindungsbereich, insbesondere in einem ersten Bereich davon, aus Gold und Zinn oder aus Zinn allein auszubilden. Der Verbindungsbereich insgesamt und insbesondere der erste Bereich davon, welcher Zinn zumindest enthält, wird vorteilhafterweise möglichst dünn realisiert und dabei zwischen zwei Bereichen oder Schichten aus demselben Material - nämlich entweder zwischen zwei Silberschichten oder zwischen zwei Kupferschichten - angeordnet.As already mentioned above, it is proposed to form a connection layer in the connection area, in particular in a first area thereof, from gold and tin or from tin alone. The connection area as a whole and in particular the first area thereof, which at least contains tin, is advantageously realized as thin as possible and is thereby arranged between two areas or layers made of the same material - namely either between two silver layers or between two copper layers.
Durch dieses Vorgehen bildet sich durch Wechselwirkung der Materialien der Zwischenschicht und der Verbindungsschicht im Rahmen eines Legierungsaustausches eine neue Legierungsverbindung zwischen Zinn Sn und Silber Ag bzw. Kupfer Cu im Bereich der ersten und zweiten Bereiche des Verbindungsbereichs und des ersten Bereichs des Zwischenbereichs aus. co co ro N) P1 P1 cπ o Cπ O cπ o CπAs a result of this procedure, a new alloy connection between tin Sn and silver Ag or copper Cu is formed in the area of the first and second areas of the connection area and the first area of the intermediate area through the interaction of the materials of the intermediate layer and the connection layer as part of an alloy exchange. co co ro N) P 1 P 1 cπ o Cπ O cπ o Cπ
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Ω P- et tr φ Ω rt SD: cn 3 P P sS p- Φ P 3 rt CΛ P- d Ω P- P CΛ tr 3 P φ rt cx tr • P P1 rt Φ cn vQ Φ CΛ CΛ P- Φ 3 Φ 3 13 tr P d P- et SD: P Φ CΛ SD: rt Φ < et Φ P- Ω CΛ ω P1 P 3 S Φ Po P- φ 3 H d SD vQ ω Λ cn D d "> 3 m o SD sS Ω φ tr P- o P- φ 3 o 3 Φ Ω rt vQ trΩ P- et tr φ Ω rt SD: cn 3 PP sS p- Φ P 3 rt CΛ P- d Ω P- P CΛ tr 3 P φ rt cx tr • PP 1 rt Φ cn vQ Φ CΛ CΛ P- Φ 3 Φ 3 13 tr P d P- et SD: P Φ CΛ SD: rt Φ <et Φ P- Ω CΛ ω P 1 P 3 S Φ Po P- φ 3 H d SD vQ ω Λ cn D d " > 3 mo SD sS Ω φ tr P- o P- φ 3 o 3 Φ Ω rt vQ tr
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P- Ω P φ SD 3 Φ 3 P o 3 o • 3 ω P- vQ P P φ φ rt P 13P- Ω P φ SD 3 Φ 3 P o 3 o • 3 ω P- vQ P P φ φ rt P 13
13 3 o td tr SD rt P sS cn φ P" rt tr rt 3 Φ d cn SD SD P tr et CΛ tr ω Φ H P- N Φ td 3 tr P- < tr SD Φ Ω 3 cn 3 Ω d Φ N13 3 o td tr SD rt P sS cn φ P "rt tr rt 3 Φ d cn SD SD P tr et CΛ tr ω Φ H P- N Φ td 3 tr P- <tr SD Φ Ω 3 cn 3 Ω d Φ N
P o Φ 3 Φ Φ S P" Φ P P cn SD: 13 o Φ P CL P tr vQ Φ SD 3 tr Cn Ω sSP o Φ 3 Φ Φ S P "Φ P P cn SD: 13 o Φ P CL P tr vQ Φ SD 3 tr Cn Ω sS
SD: Cd P Pt P ex P Φ Ω P- Po et P" CΛ 3 P- P Φ P Φ cn d rt tr tr • vQ P- φ Po SD o SD ' et P- tr vQ p- cx pj: rt ex d P Φ 3 SD Hl J P- φSD: Cd P Pt P ex P Φ Ω P- Po et P "CΛ 3 P- P Φ P Φ cn d rt tr tr • vQ P- φ Po SD o SD ' et P- tr vQ p- cx pj: rt ex d P Φ 3 SD Hl J P- φ
Φ CΛ CΛ P1 3 tr Cd CΛ Φ rt Φ φ 3 φ 3 s tr O Φ 3 P- CX d CX vQ d sS 1 3 ΆΦ CΛ CΛ P 1 3 tr Cd CΛ Φ rt Φ φ 3 φ 3 s tr O Φ 3 P- CX d CX vQ d sS 1 3 Ά
P rt et SD: 3 P- Φ cn P Φ P 3 CX cn P φ tr 3 vQ rt Ω Φ Po Φ Φ Hl Φ cx cx dP rt et SD: 3 P- Φ cn P Φ P 3 CX cn P φ tr 3 vQ rt Ω Φ Po Φ Φ Hl Φ cx cx d
CΛ Φ Ω 13 cn 3 et d P- SD P P- O tr P tr P φ 13CΛ Φ Ω 13 cn 3 et d P- SD P P- O tr P tr P φ 13
Φ tr tr cn rt rt cx ^ p . P" 3 S vQ P" • 13 CΛ tr 3 et S α P P P 3 3 Po o P- et φ P- P J φ o Cd d P- vQ o Φ CΛ et φ φ cn O Φ N SD Φ φ vQ φ tr 3 3 Ω SD: 3 P P Φ 13 Ω 3 σ P P- 3 rt sS 3 3 d Ω 3 3 n PΦ tr tr cn rt rt cx ^ p. P "3 S vQ P" • 13 CΛ tr 3 et S α PPP 3 3 Po o P- et φ P- PJ φ o Cd d P- vQ o Φ CΛ et φ φ cn O Φ N SD Φ φ vQ φ tr 3 3 Ω SD: 3 PP Φ 13 Ω 3 σ P P- 3 rt sS 3 3 d Ω 3 3 n P
CΛ Φ CX tr tr vQ CX 3 P Ho tr sS rt d 3 SD SD: rt O: P P- rt 3* • P tr CΛ o Φ φ Φ et φ Φ Φ φ P- SD 3 O: cn vQ Φ rt d P (D cn <1 rt O Φ P- ΩCΛ Φ CX tr tr vQ CX 3 P Ho tr sS rt d 3 SD SD: rt O: P P- rt 3 * • P tr CΛ o Φ φ Φ et φ Φ Φ φ P- SD 3 O: cn vQ Φ rt d P (D cn <1 rt O Φ P- Ω
P1 o P P cx P Φ P <! P- P 3 P vQ P vQ Φ 3 P- Pt P vQ tr φ 3" o P 13 trP 1 o PP cx P Φ P <! P- P 3 P vQ P vQ Φ 3 P- Pt P vQ tr φ 3 "o P 13 tr
Φ tr φ SD ω P- cn o Ω CX Φ H ! P vQ et • Φ P- P sS P- P- CΛ P- rt Φ n P- tr P1 et P tr o < <i 3 P- d P- r P- rt 13 tr φ 13 φ tsi ΩΦ tr φ SD ω P- cn o Ω CX Φ H! P vQ et • Φ P- P sS P- P- CΛ P- rt Φ n P- tr P 1 et P tr o <<i 3 P- d P- r P- rt 13 tr φ 13 φ tsi Ω
• P tr Ω Φ o Φ ex Φ CX O O: Ω cn * 3 Φ <! O rt P- P rt P- P- tr• P tr Ω Φ o Φ ex Φ CX OO: Ω cn * 3 Φ <! O rt P- P rt P- P- tr
Hl P- tr P- CX 1 cx Φ P SD P vQ tr Φ 3 Φ 3 P 3 CX P N 3 3 etHl P- tr P- CX 1 cx Φ P SD P vQ tr Φ 3 Φ 3 P 3 CX P N 3 3 et
H 13 φ Cd φ sS P tr P vQ P1 cn Φ P W 3 cn SD: P φ SD: sS 3 etH 13 φ Cd φ sS P tr P vQ P 1 cn Φ PW 3 cn SD: P φ SD: sS 3 et
[D: rt ex N P N Φ 3 Φ P- P- SD P- et vQ Φ S et vQ φ 3 vQ φ Cn Φ SD[D: rt ex N P N Φ 3 Φ P- P- SD P- et vQ Φ S et vQ φ 3 vQ φ Cn Φ SD
Ω P Φ • • P l-J vQ 3 3 3 Ω Φ d N Φ O Φ Φ 3 • Φ P- Ω vQ tr SD: cn Cd cx td Φ s. Ω Φ cx vQ tr P 3 3 d et Φ r-1 P P. P rt tr P cnΩ P Φ • • P l- J vQ 3 3 3 Ω Φ d N Φ O Φ Φ 3 • Φ P- Ω vQ tr SD: cn Cd cx td Φ s. Ω Φ cx vQ tr P 3 3 d et Φ r- 1 P P. P rt tr P cn
Φ vQ φ • P- o X vQ d vQ cn cn d: CX vQ SD P Φ α Φ P- P-Φ vQ φ • P- o X vQ d vQ cn cn d: CX vQ SD P Φ α Φ P- P-
3 Φ cn Ω 3 Φ φ 3 Φ • rt 3 CL P" Φ SD SD SD Ω Φ tr P d SD tr rt P tr vQ cn 3 Φ < SD P1 P- 1 3 tr tr P3 Φ cn Ω 3 Φ φ 3 Φ • rt 3 CL P "Φ SD SD SD Ω Φ tr P d SD tr rt P tr vQ cn 3 Φ <SD P 1 P- 1 3 tr tr P
Φ 3 P" Φ cn Φ Φ P o d Φ rt 1 Φ rt rtΦ 3 P "Φ cn Φ Φ P o d Φ rt 1 Φ rt rt
1 cn 1 1 1 3 3 Hl 1 P- 1 cn 1 1 1 3 3 Hl 1 P-
o O too O to
Cπ O π o Cπ CπCπ O π o Cπ Cπ
Ein Detail X der mit einer Pufferschicht 12, einer Zwischenschicht 14 und einer Verbindungsschicht 16 versehenen Verbindungseinrichtung 10 ist in einer teilweise geschnittenen Seitenansicht in der Fig...2 dargestellt.A detail X of the connecting device 10 provided with a buffer layer 12, an intermediate layer 14 and a connecting layer 16 is shown in a partially sectioned side view in FIG. 2.
Dort ist gezeigt, dass im oberen Bereich von der Schaltungsanordnung 2, welche aus einem Siliziumchip besteht, ausgehend, sich eine aus Aluminium gefertigte Pufferschicht 12 anschließt. Es folgt eine Zwischenschicht 14 im Übergang zur Verbindungsschicht 16, wobei die Zwischenschicht 14 einen Bereich 14-2 aus Titan und nachfolgend einen anderen Bereich 14-1 aus Silber aufweist, welche beide in etwa eine Schichtstärke von 0,5 μm aufweisen. Die Titanschicht 14-2 liegt an der Aluminiumpufferschicht 12 an, während die Silberschicht 14-1 mit der nachfolgenden Schicht 16-2 des Verbindungsbereichs 16 verbunden ist.It is shown there that, starting from the circuit arrangement 2, which consists of a silicon chip, there is a buffer layer 12 made of aluminum. An intermediate layer 14 follows in the transition to the connecting layer 16, the intermediate layer 14 having a region 14-2 made of titanium and subsequently another region 14-1 made of silver, both of which have a layer thickness of approximately 0.5 μm. The titanium layer 14-2 lies against the aluminum buffer layer 12, while the silver layer 14-1 is connected to the subsequent layer 16-2 of the connection region 16.
Der Verbindungsbereich 16 bei dieser Ausführungsform besteht ebenfalls aus zwei Schichten nämlich einer mit der Zwischen- Schicht 14 verbundenen Schicht 16-2 aus Gold und Zinn mit einer Stärke von 1 μm sowie nachfolgend einer anderen Schicht 16-1, welche aus Silber besteht und welche im Oberflächenbereich 16b mit dem Kupfer des Leadframes oder der Kontakteinrichtung 4 verbunden ist.The connection region 16 in this embodiment likewise consists of two layers, namely a layer 16-2 of gold and tin connected to the intermediate layer 14 with a thickness of 1 μm and subsequently another layer 16-1, which consists of silver and which Surface area 16b is connected to the copper of the lead frame or the contact device 4.
Fig. 3 zeigt in teilweise geschnittener Seitenansicht eine Ausführungsform einer Schaltungsanordnung 30 aus dem Stand der Technik.FIG. 3 shows a partially sectioned side view of an embodiment of a circuit arrangement 30 from the prior art.
Bei dieser sind ebenfalls in einem Gehäuse 36 aus einer Vergussmasse Kontakteinrichtungen 34 und 35 eingelassen. Die Schaltungseinheit 32 der herkömmlichen Schaltungsanordnung 30 ist über eine Klebung oder Lötung 31 mit der Kontakteinrichtung 34 verbunden. O CO t to P1 P1 cπ o cπ o cπ O cπ tr Hl H rt P tr 3 ^d sS rr sS !X tc O vQ rt CL ω Cn > O t-J CL P <! vQ P rt rt P H d: 3 Φ d φ P- φ Φ d Φ O: tr φ Φ P- 13 P- d tr SD d φ Po O Φ P- d SD P- 3In this case, contact devices 34 and 35 are also embedded in a housing 36 made of a potting compound. The circuit unit 32 of the conventional circuit arrangement 30 is connected to the contact device 34 via an adhesive or soldering 31. O CO t to P 1 P 1 cπ o cπ o cπ O cπ tr Hl H rt P tr 3 ^ d sS rr sS! X tc O vQ rt CL ω Cn> O t- J CL P <! vQ P rt rt PH d: 3 Φ d φ P- φ Φ d Φ O: tr φ Φ P- 13 P- d tr SD d φ Po O Φ P- d SD P- 3
P tr 3 3 3 P ιQ P 3 3 H <1 Po P- 3 Φ SD Ω CΛ d P P Po 3 3 Ω 3 P1 ΩP tr 3 3 3 P ιQ P 3 3 H <1 Po P- 3 Φ SD Ω CΛ d PP Po 3 3 Ω 3 P 1 Ω
Φ P Q SD vQ Φ • tr 3 vQ Ω O Φ 13 o P tr vQ P Hl Ω SD tr vQ P1 tr cnΦ PQ SD vQ Φ • tr 3 vQ Ω O Φ 13 o P tr vQ P Hl Ω SD tr vQ P 1 tr cn
P- d Φ 3 CΛ 3 IS1 P- tr 3 P SD: P d Φ Po Φ tr CΛ Pt CL 3 rt CΛ P- et φP- d Φ 3 CΛ 3 IS1 P- tr 3 P SD: P d Φ Po Φ tr CΛ Pt CL 3 rt CΛ P- et φ
Ω 3 vQ CΛ Hl sS 3 3 O CO co d 3 P1 3 N tr 3 Ω et Φ 3 d Φ cn d vQ tr vQ Φ P- O < P- CL SD 4i» P1 P1 t 3 vQ φ vQ d SD: ex tr P- P rt 3 P- P- 3 φ cn CΛ 3 Ω P Φ CΛ N d 3 P- ^ SD L Φ σ 3 3 Ω α P- SD <! Φ vQ 3 φ vQ 3Ω 3 vQ CΛ Hl sS 3 3 O CO co d 3 P 1 3 N tr 3 Ω et Φ 3 d Φ cn d vQ tr vQ Φ P- O <P- CL SD 4i »P 1 P 1 t 3 vQ φ vQ d SD: ex tr P- P rt 3 P- P- 3 φ cn CΛ 3 Ω P Φ CΛ N d 3 P- ^ SD L Φ σ 3 3 Ω α P- SD <! Φ vQ 3 φ vQ 3
P CΛ tr 3 P Ω φ 3 < 3 CTi <! Hi d < P, tr Φ P- CΛ tr P CΛP CΛ tr 3 P Ω φ 3 <3 CTi <! Hi d <P, tr Φ P- CΛ tr P CΛ
P> O SD et tr tr P- vQ < O d o H ^ 3 O w φ P rt Φ Ω tc CO φ d SDP> O SD et tr tr P- vQ <O d o H ^ 3 O w φ P rt Φ Ω tc CO φ d SD
4- P rt cx P- φ vQ CΛ 0 3 < g 3 P SD: vQ 3 φ < P d P- tr O: P- 3 o rt4- P rt cx P- φ vQ CΛ 0 3 <g 3 P SD: vQ 3 φ <P d P- tr O: P- 3 o rt
3 N P- φ 3 3 et φ 3 Φ 3 ex SD Ω II P- O ex t-1 SD 3 3 SD Po rt vQ N3 N P- φ 3 3 et φ 3 Φ 3 ex SD Ω II P- O ex t- 1 SD 3 3 SD Po rt vQ N
SD 3 P ex CΛ P- co P d tr o Φ cn 3 Φ O: 3 vQ vQ Φ tr cn SD d CX N d Ω ex 3 CX tr Φ O cn Φ ex rt 13 P rt rt cn Φ rt φ t 1 d N cn Φ d SD td 3 tr SD P Φ σi SD: μ. P1 cn ^ Φ sS P- CΛ d Φ φ 3 d CO P- CΛ dSD 3 P ex CΛ P- co P d tr o Φ cn 3 Φ O: 3 vQ vQ Φ tr cn SD d CX N d Ω ex 3 CX tr Φ O cn Φ ex rt 13 P rt rt cn Φ rt φ t 1 d N cn Φ d SD td 3 tr SD P Φ σi SD: μ. P 1 cn ^ Φ sS P- CΛ d Φ φ 3 d CO P- CΛ d
P P 3 P vQ P- CΛ P- P P1 3 tr φ Po vr> P SD φ rt P^ 3 3 p- O 3 P» N o P t SD Hl cn Ω Ω rt φ et d: P1 SD o vQ P1 3 g vQ (D CL d CL φ d Tl > P1 P- Φ tr α tr P 3 3 tsi P j3 tx co 3 3 SD: tr § CΛ φ φ P- M 3 P- d O 3 P- rt Φ et p P- ^d P et § o- o φ CX rt O 3 φ Φ φ d P Po P 3 PPP 3 P vQ P- CΛ P- PP 1 3 tr φ Po vr> P SD φ rt P ^ 3 3 p- O 3 P »N o P t SD Hl cn Ω Ω rt φ et d: P 1 SD o vQ P 1 3 g vQ (D CL d CL φ d Tl> P 1 P- Φ tr α tr P 3 3 tsi P j3 tx co 3 3 SD: tr § CΛ φ φ P- M 3 P- d O 3 P- rt Φ et p P- ^ d P et § o- o φ CX rt O 3 φ Φ φ d P Po P 3 P
Hl vQ cn vQ P 3 rt d Φ to CΛ P1 vQ • ex et P- SD 3 o φ Po d P P> SD 3 o\o ex vQ p- 3 P- φ Po Φ tr SD: μ. P- CL dHl vQ cn vQ P 3 rt d Φ to CΛ P 1 vQ • ex et P- SD 3 o φ Po d P P> SD 3 o \ o ex vQ p- 3 P- φ Po Φ tr SD: μ. P-CL d
Φ 3 CX t φ Φ rt Φ 3 cx tr P- IX P P-Φ 3 CX t φ Φ rt Φ 3 cx tr P- IX P P-
P d: P 3 P- -» P- vQ d N Ω tr O φ 3 •^ Φ Φ rt P tr φ vQ φ 3 *> 3* vQ Ω P" 3 P-P d: P 3 P- - »P- vQ d N Ω tr O φ 3 • ^ Φ Φ rt P tr φ vQ φ 3 *> 3 * vQ Ω P" 3 P-
3 d tr rtd Po vQ P Φ ^< o < 1 φ co P Φ vQ CΛ cx Q P -3 tr d d: vQ P φ P Xi P- sS Φ P- XI ro p- P1 Pt 3 P- Ω d3 d tr rtd Po vQ P Φ ^ <o <1 φ co P Φ vQ CΛ cx QP -3 tr dd: vQ P φ P Xi P- sS Φ P- XI ro p- P 1 Pt 3 P- Ω d
Φ d Φ P- rt 3 X tr Φ 3 CΛ Ω 3 N φ P i-a 3 SD: rt tr O: Φ tr 3 tr Φ 3 P- 3 d CL φ O t cx P- tr φ P- d 3 Hl Φ P φ sS tr Ω g < P P- vQΦ d Φ P- rt 3 X tr Φ 3 CΛ Ω 3 N φ P ia 3 SD: rt tr O: Φ tr 3 tr Φ 3 P- 3 d CL φ O t cx P- tr φ P- d 3 Hl Φ P φ sS tr Ω g <P P- vQ
P- P vQ CΛ 3 CL P cx ^d P1 P- Ω tr Φ vQ 3 p- Ω P- tr Φ tr co SD Φ d Ω • ω Φ Φ vQ Φ φ vQ φ P1 D: Φ Pi tr ex d P P 3 tr Ω ω Φ to d p- P 3 trP- P vQ CΛ 3 CL P cx ^ d P 1 P- Ω tr Φ vQ 3 p- Ω P- tr Φ tr co SD Φ d Ω • ω Φ Φ vQ Φ φ vQ φ P 1 D: Φ Pi tr ex d PP 3 tr Ω ω Φ to d p- P 3 tr
P Hi P- P- SP Hi P- P- S
P φ P tr Hl -< 3 rt d 3 CL 3 tr 3 Ω rt Po P- 3 iQ et tr φ P O sS 3 P1 3 tr ΩP φ P tr Hl - <3 rt d 3 CL 3 tr 3 Ω rt Po P- 3 iQ et tr φ PO sS 3 P 1 3 tr Ω
3 rt tr1 tr Φ φ 3 vQ 3 J d p- et v tr P- 3 CU O SD CΛ cn et CΛ P P- Φ o Φ Po P CL P- P 3 3 Pt d g P- d tr vQ ω rt P-3 rt tr 1 tr Φ φ 3 vQ 3 J d p- et v tr P- 3 CU O SD CΛ cn et CΛ P P- Φ o Φ Po P CL P- P 3 3 Pt dg P- d tr vQ ω rt P-
• 01 rt 3 φ P P P- • O: P1 φ SD Φ o cn Φ iQ 3 § Ω Po sS Φ Ω P• 01 rt 3 φ PP P- • O: P 1 φ SD Φ o cn Φ iQ 3 § Ω Po sS Φ Ω P
Φ vQ rt et SD: 3 cn P P rt Φ cn sQ vQ PJ cn rt tr φ 3 tr d sS σ ex tr rt Φ < d φ Ω N cn Hl Φ P- vQ Φ P1 P- et CL sS p- Pt ΦΦ vQ rt et SD: 3 cn PP rt Φ cn sQ vQ PJ cn rt tr φ 3 tr d sS σ ex tr rt Φ <d φ Ω N cn Hl Φ P- vQ Φ P 1 P- et CL sS p- Pt Φ
SD Cd φ Φ Φ 3 Φ Φ 3 tr P- P vQ 3 Φ 3 o CΛ Ω sS Φ Ω CΛ Φ Ω et P1 SD Cd φ Φ Φ 3 Φ Φ 3 tr P- P vQ 3 Φ 3 o CΛ Ω sS Φ Ω CΛ Φ Ω et P 1
CΛ Φ P P- P- SD: P P- vQ φ <! tr 3 cn rt Φ 3 SD: 4l> O tr μ. CX P tr Ω P- tr d ΩCΛ Φ P P- P- SD: P P- vQ φ <! tr 3 cn rt Φ 3 SD: 4l> O tr μ. CX P tr Ω P- tr d Ω
P EP tr 3 o Φ P tr« O ^ SD: EP P d tr CΛ rt P tr cn Φ •^d ^3 s P- Φ N SD 3 P- d O: Po to EP Φ ex ex CL P ! SD rt ΦP EP tr 3 o Φ P tr «O ^ SD: EP P d tr CΛ rt P tr cn Φ • ^ d ^ 3 s P- Φ N SD 3 P- d O: Po to EP Φ ex ex CL P! SD rt Φ
P- P- P- Φ Φ 3 P d d 3 et φ sS Φ CL P d d Ω O ex P1 ex tr PP- P- P- Φ Φ 3 P dd 3 et φ sS Φ CL P dd Ω O ex P 1 ex tr P
Φ Ω vQ vQ P- P-Φ Ω vQ vQ P- P-
• cx P Hl P> Φ vQ d P Φ 3 Φ Φ vQ P P tr 3 SD rt CL φ φ• cx P Hl P> Φ vQ d P Φ 3 Φ Φ vQ P P tr 3 SD rt CL φ φ
P- tr . cn 3 d o P- cn 3 3 P" Φ P P P- Ω Ω cn rt N d P- 3 CΛ cxP- tr. cn 3 d o P- cn 3 3 P "Φ P P P- Ω Ω cn rt N d P- 3 CΛ cx
Ω Φ Φ 3 d CL o 3 vQ vQ Ω rt tr tr tr tr O CL SD d 3 φ rt P- tr P> tv> t P vQ Po P vQ φ Cπ Φ Φ 3 tr N SD rt 3 P- t vQ Xi Φ φ 4-» • vQ CΛ Pi Po P P φ d PJ 3 • L < SD trΩ Φ Φ 3 d CL o 3 vQ vQ Ω rt tr tr tr tr O CL SD d 3 φ rt P- tr P>tv> t P vQ Po P vQ φ Cπ Φ Φ 3 tr N SD rt 3 P- t vQ Xi Φ φ 4- »• vQ CΛ Pi Po PP φ d P J 3 • L <SD tr
1 P- Φ SD CΛ Φ P- <! 3 d SD ex CL et Hl ω1 P- Φ SD CΛ Φ P- <! 3 d SD ex CL and Hl ω
3 SD: 33 SD: 3
P1 cn cn 3 Ω P 3 O 3 3 rt O P- SD Φ Φ d: SD φ 3 et < vQ t g O EP CL CL iQ Φ P φ cn P W P- tr 3 P rtP 1 cn cn 3 Ω P 3 O 3 3 rt O P- SD Φ Φ d: SD φ 3 et <vQ tg O EP CL CL iQ Φ P φ cn PW P- tr 3 P rt
P- et Ω CX tr CΛ CL 3 o t tr Φ Φ d cn 3 P 3 SD 3 P o er Φ PP- et Ω CX tr CΛ CL 3 o t tr Φ Φ d cn 3 P 3 SD 3 P o er Φ P
H α - Φ P- Ω d 3 P- 3 SD P- P Ho Φ 3 o tc > 3 P φ P P- 3 sS tr rt tr 3 P Ω tr 3 et P 13 d 3 Ω P1 d O: d <! r P- 3 CL 3 Φ P-H α - Φ P- Ω d 3 P- 3 SD P- P Ho Φ 3 o tc> 3 P φ P P- 3 sS tr rt tr 3 P Ω tr 3 et P 13 d 3 Ω P 1 d O: d <! r P- 3 CL 3 Φ P-
CΛ P- Φ tr P- vQ o SD Φ Pt 33 Ω Φ tr SD: •n 3 Hl cn P- Φ Ω 3 CX CL P- 3CΛ P- Φ tr P- vQ o SD Φ Pt 33 Ω Φ tr SD: • n 3 Hl cn P- Φ Ω 3 CX CL P- 3
Po P- rt 3 et Ω CΛ t SD Φ tr Ω P1 vQ Φ Φ Φ o\° 3 tr d d Φ Ω CX d: tsi rt tr vQ et 3 vQ P 3* SD: P- P1 P1 et CL 3 3 P tr dPo P- rt 3 et Ω CΛ t SD Φ tr Ω P 1 vQ Φ Φ Φ o \ ° 3 tr dd Φ Ω CX d: tsi rt tr vQ et 3 vQ P 3 * SD: P- P 1 P 1 et CL 3 3 P tr d
P sS cx Φ et Φ Φ rt Hl Po Φ P- φ Ω CO SD 3 pj φ 3 et 3 SD: d SD vQ vQ 3P sS cx Φ et Φ Φ rt Hl Po Φ P- φ Ω CO SD 3 p j φ 3 et 3 SD: d SD vQ vQ 3
P- d C 3 P- Φ SD d: Ω 3 tr O d SD φ 3 3 EP cn CΛP- d C 3 P- Φ SD d: Ω 3 tr O d SD φ 3 3 EP cn CΛ
P- vQP- vQ
P CΛ P Φ cn P> SD: 3 P- φ Po 3 tr φ 3 P1 P tr Φ ex vQ vQ CO Φ Ω SD CΛP CΛ P Φ cn P> SD: 3 P- φ Po 3 tr φ 3 P 1 P tr Φ ex vQ vQ CO Φ Ω SD CΛ
Φ Ω 3 Hl <! t EP P Φ rt d 3 Φ o P- tr φΦ Ω 3 Hl <! t EP P Φ rt d 3 Φ o P- tr φ
3 tr > d: φ Φ Hl CX P Φ cx3 tr> d: φ Φ Hl CX P Φ cx
P- P SD: Φ Ω rt ex Φ P*l P Φ P CL Φ CO P- 3 SD CΛ P- φ d CΛ tr P 3 3 P ex φ Ω SD Ω P- vQ Φ P 4-> φ CΛ 1 P1 3P- P SD: Φ Ω rt ex Φ P * l P Φ P CL Φ CO P- 3 SD CΛ P- φ d CΛ tr P 3 3 P ex φ Ω SD Ω P- vQ Φ P 4-> φ CΛ 1 P 1 3
3 cn Φ I CΛ φ 3" "^ rt vQ φ 3 Pt 3 tr 3 P- P 1 0 1 !_§ 13 cn Φ I CΛ φ 3 "" ^ rt vQ φ 3 Pt 3 tr 3 P- P 1 0 1! _§ 1
1 1 P- φ P- 1 Φ P P- 1 1 tr 1 φ I 1 1 1 rt 1 1 1 P- φ P- 1 Φ P P- 1 1 tr 1 φ I 1 1 1 rt 1
ersten Bereich 16-1 des Verbindungsbereichs 16. Zusätzlich ist dieser erste Bereich 16-1 der Verbindungschicht 16 als integraler Bestandteil des Leadframes 4, nämlich von dessen Oberfläche, ausgebildet. Des Weiteren besteht der zweite Bereich 16-2 der Verbindungsschicht 16 ausschließlich aus Zinn und enthält somit keine Mischkristalle wie bei der Ausführungsform der Fig. 2. first area 16-1 of the connection area 16. In addition, this first area 16-1 of the connection layer 16 is formed as an integral part of the leadframe 4, namely of its surface. Furthermore, the second region 16-2 of the connecting layer 16 consists exclusively of tin and thus contains no mixed crystals as in the embodiment in FIG. 2.

Claims

Patentansprüche claims
1. Verbindungseinrichtung für eine Schaltungsanordnung, insbesondere für ein Halbleitermodul oder dergleichen, welche ausgebildet ist, im Betrieb mindestens eine Schaltungseinheit (2) , insbesondere einen Chip oder dergleichen, der Schaltungsanordnung (1) mit mindestens einer Kontakteinrichtung (4) der Schaltungsanordnung (1) mechanisch und/oder elektrisch zu verbinden und dabei die Schaltungseinheit (2) und die Kontakteinrichtung (4) thermomechanisch im wesentlichen zu entkoppeln, d a d u r c h g e k e n n z e i c h n e t , dass die Verbindungseinrichtung (10) im wesentlichen als - vorzugsweise vorgefertigter - metallischer oder Legierungs- bereich zumindest teilweise im Bereich der Schaltungseinheit (2) und/oder im Bereich der Kontakteinrichtung (4) unter wei- testgehender Vermeidung von Klebeelementen und Lotelementen ausgebildet ist.1. Connection device for a circuit arrangement, in particular for a semiconductor module or the like, which is designed to operate at least one circuit unit (2), in particular a chip or the like, of the circuit arrangement (1) with at least one contact device (4) of the circuit arrangement (1) to connect mechanically and / or electrically and to essentially decouple the circuit unit (2) and the contact device (4) thermomechanically, characterized in that the connecting device (10) essentially as a - preferably prefabricated - metallic or alloy area at least partially in the area the circuit unit (2) and / or in the area of the contact device (4) while largely avoiding adhesive elements and solder elements.
2. Verbindungseinrichtung nach Anspruch 1, d a d u r c h g e k e n n z e i c h n e t , dass mindestens ein Pufferbereich (12) , insbesondere in Form einer Schicht, vorgesehen ist, durch welchen im Betrieb thermomechanische Verspannungen zwischen der Schaltungseinheit (2) und der Kontakteinrichtung (4) auffangbar und somit die Schaltungseinheit (2) und die Kontakteinrichtung (4) thermomechanisch entkoppelbar sind.2. Connection device according to claim 1, characterized in that at least one buffer area (12), in particular in the form of a layer, is provided, through which thermomechanical tension between the circuit unit (2) and the contact device (4) can be absorbed during operation and thus the circuit unit ( 2) and the contact device (4) can be decoupled thermomechanically.
3. Verbindungseinrichtung nach Anspruch 2, d a d u r c h g e k e n n z e i c h n e t , dass der Pufferbereich (12) im Betrieb zumindest mit einem Oberflächenbereich (12a) davon als im wesentlichen integraler Bestandteil, insbesondere als Schicht, in einem Bereich der bestehenden Struktur der Schaltungseinheit (2) und/oder der Kontakteinrichtung (4) ausbildbar ist. 3. Connection device according to claim 2, characterized in that the buffer area (12) in operation at least with a surface area (12a) thereof as an essentially integral component, in particular as a layer, in an area of the existing structure of the circuit unit (2) and / or Contact device (4) can be formed.
4. Verbindungseinrichtung nach einem der vorangehenden Ansprüche, d a d u r c h g e k e n n z e i c h n e t , dass mindestens ein Verbindungsbereich (16) , insbesondere in Form einer Schicht, vorgesehen ist, durch welchen im Betrieb eine mechanische und/oder elektrische Verbindung im wesentlichen zwischen der Schaltungseinheit (2) und der Kontakteinrichtung (4) ausbildbar ist.4. Connection device according to one of the preceding claims, characterized in that at least one connection area (16), in particular in the form of a layer, is provided, through which in operation a mechanical and / or electrical connection essentially between the circuit unit (2) and the contact device (4) can be trained.
5. Verbindungseinrichtung nach Anspruch 4, d a d u r c h g e k e n n z e i c h n e t , dass der Verbindungsbereich (16) im Betrieb zumindest mit einem Oberflächenbereich (16b) davon als im wesentlichen integraler Bestandteil, insbesondere als Schicht, in einem Be- reich der bestehenden Struktur der Kontakteinrichtung (4) und/oder der Schaltungseinheit (2) ausgebildet ist.5. Connection device according to claim 4, characterized in that the connection area (16) in operation with at least one surface area (16b) thereof as an essentially integral component, in particular as a layer, in an area of the existing structure of the contact device (4) and / or the circuit unit (2) is formed.
6. Verbindungseinrichtung nach einem der Ansprüche 2 bis 5, d a d u r c h g e k e n n z e i c h n e t , dass der Pufferbereich (12) und der Verbindungsbereich (16) im Betrieb zumindest mit jeweils einem weiteren Oberflächenbereich (12b, 16a) davon direkt verbunden sind.6. Connecting device according to one of claims 2 to 5, so that the buffer area (12) and the connecting area (16) are directly connected to at least one further surface area (12b, 16a) thereof during operation.
7. Verbindungseinrichtung nach einem der Ansprüche 2 bis 5, d a d u r c h g e k e n n z e i c h n e t , dass der Pufferbereich (12) und der Verbindungsbereich (16) im Betrieb über einen vorgesehenen Zwischenbereich (14), insbesondere über eine Zwischenschicht, miteinander mechanisch und/oder elektrisch verbunden sind.7. Connection device according to one of claims 2 to 5, so that the buffer area (12) and the connection area (16) are mechanically and / or electrically connected to one another during operation via an intended intermediate area (14), in particular via an intermediate layer.
8. Verbindungseinrichtung nach einem der Ansprüche 2 bis 7, d a d u r c h g e k e n n z e i c h n e t , dass der Pufferbereich (12) , der Zwischenbereich (14) und/oder der Verbindungsbereich (16) schichtförmig ausgebil- det sind und/oder eine Mehrzahl metallischer und/oder Legie¬ rungsschichten aufweisen, so dass im Betrieb im Übergang von der Schaltungseinheit (2) zur Kontakteinrichtung (4) hin ein im wesentlichen schichtförmiger Verlauf vorliegt.8. Connecting device according to one of claims 2 to 7, characterized in that the buffer area (12), the intermediate portion (14) and / or the connecting portion (16) det layered trained and / or a plurality of metallic and / or ¬ approximately layers Legie have, so that in operation in the transition from the circuit unit (2) towards the contact device (4) has an essentially layered shape.
9. Verbindungseinrichtung nach einem der Ansprüche 2 bis 8, d a d u r c h g e k e n n z e i c h n e t , dass der Pufferbereich (12) Aluminium aufweist oder im wesentlichen daraus gebildet ist.9. Connecting device according to one of claims 2 to 8, that the buffer region (12) has aluminum or is essentially formed therefrom.
10. Verbindungseinrichtung nach einem der Ansprüche 2 bis 9, d a d u r c h g e k e n n z e i c h n e t ,10. Connecting device according to one of claims 2 to 9, d a d u r c h g e k e n n z e i c h n e t,
- dass der Verbindungsbereich (16) einen ersten Bereich (16- 1) aufweist, welcher Silber enthält oder im wesentlichen daraus gebildet ist und welcher im Betrieb direkt mit der Kontakteinrichtung (4) verbunden ist, und - dass der Verbindungsbereich (16) einen zweiten Bereich- That the connection area (16) has a first area (16-1), which contains silver or is essentially formed therefrom and which is directly connected to the contact device (4) during operation, and - that the connection area (16) has a second one Area
(16-2) aufweist, welcher Gold und Zinn enthält oder im wesentlichen daraus gebildet ist und welcher im Betrieb auf einer von der Kontakteinrichtung (4) abgewandten Seite angeordnet ist, vorzugsweise in Verbindung mit der Schal- tungseinheit (2) , gegebenenfalls in direkter Verbindung mit einem Zwischenbereich (14) oder Pufferbereich (12).(16-2) which contains gold and tin or is essentially formed therefrom and which, in operation, is arranged on a side facing away from the contact device (4), preferably in connection with the circuit unit (2), if appropriate in a direct manner Connection with an intermediate area (14) or buffer area (12).
11. Verbindungseinrichtung nach einem der Ansprüche 7 bis 10, d a d u r c h g e k e n n z e i c h n e t , - dass der Zwischenbereich (14) einen ersten Bereich (14-1) aufweist, welcher Silber enthält oder im wesentlichen daraus gebildet ist und welcher im Betrieb mit dem Verbindungsbereich (16) verbunden ist, und11. Connecting device according to one of claims 7 to 10, characterized in that - the intermediate region (14) has a first region (14-1) which contains silver or is essentially formed therefrom and which is connected to the connecting region (16) during operation is and
- dass der Zwischenbereich (14) einen zweiten Bereich (14-2) aufweist, welcher Titan enthält oder im wesentlichen daraus gebildet ist und welcher im Betrieb mit dem Pufferbereich (12) verbunden ist.- That the intermediate region (14) has a second region (14-2) which contains titanium or is essentially formed therefrom and which is connected to the buffer region (12) during operation.
12. Verbindungseinrichtung nach einem der Ansprüche 2 bis 9, d a d u r c h g e k e n n z e i c h n e t , - dass der Verbindungsbereich (16) einen ersten Bereich (16- 1) aufweist, welcher Kupfer enthält oder im wesentlichen daraus gebildet ist und welcher im Betrieb direkt mit der Kontakteinrichtung £.4) verbunden ist, und - dass der Verbindungsbereich (16) einen zweiten Bereich12. Connecting device according to one of claims 2 to 9, characterized in - That the connection area (16) has a first area (16-1) which contains copper or is essentially formed therefrom and which in operation is directly connected to the contact device £ .4), and - that the connection area (16) one second area
(16-2) aufweist, welcher Zinn enthält oder im wesentlichen daraus gebildet ist und welcher im Betrieb auf einer von der Kontakteinrichtung (4) abgewandten Seite angeordnet ist, vorzugsweise in Verbindung mit der Schaltungseinheit (2), gegebenenfalls in direkter Verbindung mit einem Zwischenbereich (14) oder Pufferbereich (12) .(16-2), which contains or is essentially formed from tin and which, in operation, is arranged on a side facing away from the contact device (4), preferably in connection with the circuit unit (2), possibly in direct connection with an intermediate area (14) or buffer area (12).
13. Verbindungseinrichtung nach einem der Ansprüche 7 bis 9 oder 12, d a d u r c h g e k e n n z e i c h n e t ,13. Connecting device according to one of claims 7 to 9 or 12, d a d u r c h g e k e n n z e i c h n e t,
- dass der Zwischenbereich (14) einen ersten Bereich (14-1) aufweist, welcher Kupfer enthält oder im wesentlichen daraus gebildet ist und welcher im Betrieb mit dem Verbindungsbereich (16) verbunden ist, und - dass der Zwischenbereich (14) einen zweiten Bereich (14-2) aufweist, welcher Titan enthält oder im wesentlichen daraus gebildet ist und welcher im Betrieb mit dem Pufferbereich (12) verbunden ist.- That the intermediate region (14) has a first region (14-1) which contains copper or is essentially formed therefrom and which is connected to the connecting region (16) during operation, and - that the intermediate region (14) has a second region (14-2) which contains or is essentially formed from titanium and which is connected to the buffer area (12) during operation.
14. Verbindungseinrichtung nach einem der vorangehenden Ansprüche, d a d u r c h g e k e n n z e i c h n e t , dass zumindest ein Teil des Verbindungsbereichs (16) , insbesondere der erste Bereich (16-1) davon, als Teil der Kontakt- einrichtung (4), insbesondere des Leadframes, und/oder als integraler Bestandteil davon ausgebildet ist.14. Connection device according to one of the preceding claims, characterized in that at least a part of the connection area (16), in particular the first area (16-1) thereof, as part of the contact device (4), in particular the lead frame, and / or as is an integral part of it.
15. Verwendung einer Verbindungseinrichtung nach einem der Ansprüche 1 bis 14 in einer Schaltungsanordnung, insbesondere in einem Halbleitermodul oder dergleichen, zur mechanischen und/oder elektrischen Verbindung einer Schaltungseinheit (2) , insbesondere eines Chips oder dergleichen mit mindestens einer Kontakteinrichtung (4) .15. Use of a connecting device according to one of claims 1 to 14 in a circuit arrangement, in particular in a semiconductor module or the like, for the mechanical and / or electrical connection of a circuit unit (2), in particular a chip or the like with at least one contact device (4).
16. Schaltungsanordnung, insbesondere Halbleitermodul oder dergleichen, mit mindestens einer Schaltungseinheit (2), insbesondere einem Chip oder dergleichen, und mit mindestens einer Kontakteinrichtung (4) zur Kontaktierung der Schaltungseinheit (2) , d a d u r c h g e k e n n z e i c h n e t , dass zur mechanischen und/oder elektrischen Verbindung der16.Circuit arrangement, in particular semiconductor module or the like, with at least one circuit unit (2), in particular a chip or the like, and with at least one contact device (4) for contacting the circuit unit (2), so that the mechanical and / or electrical connection of the
Schaltungseinheit (2) mit der Kontakteinrichtung (4) mindestens eine Verbindungseinrichtung (10) nach einem der Ansprüche 1 bis 14 vorgesehen ist. Circuit unit (2) with the contact device (4) at least one connecting device (10) according to one of claims 1 to 14 is provided.
EP01971698A 2000-09-29 2001-09-10 Connecting device Withdrawn EP1320889A1 (en)

Applications Claiming Priority (5)

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DE10048426 2000-09-29
DE10048426 2000-09-29
DE10124141 2001-05-17
DE10124141A DE10124141B4 (en) 2000-09-29 2001-05-17 Connecting device for an electronic circuit arrangement and circuit arrangement
PCT/DE2001/003439 WO2002027789A1 (en) 2000-09-29 2001-09-10 Connecting device

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DE102005024430B4 (en) * 2005-05-24 2009-08-06 Infineon Technologies Ag Process for coating a silicon wafer or silicon chip
US8211752B2 (en) 2007-11-26 2012-07-03 Infineon Technologies Ag Device and method including a soldering process
US9490193B2 (en) * 2011-12-01 2016-11-08 Infineon Technologies Ag Electronic device with multi-layer contact

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