EP1202376A1 - Elektrischer Resonator - Google Patents

Elektrischer Resonator Download PDF

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Publication number
EP1202376A1
EP1202376A1 EP01420209A EP01420209A EP1202376A1 EP 1202376 A1 EP1202376 A1 EP 1202376A1 EP 01420209 A EP01420209 A EP 01420209A EP 01420209 A EP01420209 A EP 01420209A EP 1202376 A1 EP1202376 A1 EP 1202376A1
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EP
European Patent Office
Prior art keywords
elementary
loop
segments
forming
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01420209A
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English (en)
French (fr)
Inventor
Bertrand Guillon
Pierre Blondy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Memscap SA
Original Assignee
Memscap SA
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Filing date
Publication date
Application filed by Memscap SA filed Critical Memscap SA
Publication of EP1202376A1 publication Critical patent/EP1202376A1/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P7/00—Resonators of the waveguide type
    • H01P7/08—Strip line resonators
    • H01P7/082—Microstripline resonators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/20—Frequency-selective devices, e.g. filters
    • H01P1/201—Filters for transverse electromagnetic waves
    • H01P1/203—Strip line filters

Definitions

  • the invention relates to the field of microelectronics, and more specifically in the manufacturing sector of microcomponents, in particular intended for use in radio or hyper frequency applications. It relates more precisely to electrical resonators which can be incorporated into analog filters, and which allow the adjustment of the various parameters of such filters.
  • electronic circuits used for applications radio frequency or microwave include filters including oscillating or resonator circuits.
  • Such resonators are generally formed by the association of an inductance and a capacity.
  • variable capacities based on materials semiconductors.
  • the variation in capacity works on the principle of transfers of charge in semiconductor materials.
  • the disadvantages of these devices are a high level of losses, as well as poor resistance to strong signals electric.
  • this kind of distributed resonator has multiple disadvantages. Indeed, its tuning frequency is directly determined by its geometry, which means that beyond certain frequencies of the order of GigaHertz, such a resonator has dimensions incompatible with the production of circuits integrated.
  • a first problem which the invention proposes to solve is that of the possibility of adjusting the various parameters of a resonator, and in particular its tuning frequency or its bandwidth over a relatively wide range, all remaining compatible with the space requirements of the components used in microelectronics.
  • Another problem which the invention proposes to solve is that of the possibility of varying the parameters of analog filters incorporating such resonators.
  • the elementary resonator according to the invention comprises a inductor tape, and a conductive bridge that spans part of inductance, so as to form a variable capacitance. Combining this ability and of the inductance forms a resonator whose tuning frequency can be adapted by the variation in the value of this capacity.
  • the conductive tape and the conductive bridge can be made of different materials, namely metallic materials or even semiconductor materials.
  • the flat loop and the driver bridge do not require the presence of a ground for any signal propagation, so that such components can be made very easily, directly on layers of quartz or silicon or other types of substrate.
  • These resonators can be integrated into microcomponents specific to filtering functions, or even be implemented over an integrated circuit providing other functionalities.
  • the conductive bridge forming the variable capacity can be deformed by the application of various forces, used in commonly known technologies under the abbreviation "MEMS" meaning in English “microelectromechanical systems".
  • MEMS microelectromechanical systems
  • the conductive bridge can be deformed under the action of an electrostatic force thanks to a continuous tension applied between the arch and the conductive tape.
  • Strength which generates the deformation of the arch can also originate from a thermal or magnetic phenomenon.
  • the driver bridge can be associated with at least one additional conductive bridge, arranged in parallel, and actuated by a signal different control, so as to vary the variable capacity over a range expanded. This therefore amounts to dividing the total area forming the capacity, and to independently vary the basic capacity of each bridge.
  • the resonator is associated with a capacitance additional, forming a decoupling capacity.
  • This filter has an electrical behavior corresponding to an equivalent scheme comprising in series a capacitor and a parallel LC dipole.
  • the input impedance of the filter is adjusted, while the setting of the first variable capacitance allows the frequency of filter resonance.
  • the structure of the elementary resonator (including or not the capacity of decoupling as described above) can be used to build filters several poles, by coupling the different elementary resonators together. It is thus possible to form filters of high order, or comprising zeros of transmission.
  • the coupling of the elementary resonators can be obtained by a conductive bridge forming variable capacity, which spans two segments forming the end of a loop of a resonator, these two segments belonging to two different resonators.
  • two resonators each including a loop and a conductive bridge are coupled by one end of their loop, thanks to a bridge forming a variable capacity.
  • the association of these two resonators is equivalent to a coupling of two elementary resonators described above by a capacity of shared decoupling.
  • each loop has a fraction of its length arranged side by side with a fraction of the other loop, so that by magnetic coupling, the two resonators are coupled.
  • This coupling can be made variable thanks to the fact that the zones facing one of the other can be spanned by an additional conductive bridge forming capacity variable, and which therefore allows adjustment of the intensity of the coupling between the two elementary resonators.
  • a particular example of a resonator according to the invention may include two elementary resonators including a loop and a bridge forming variable capacitance, and an additional conductive bridge forming an additional variable capacity, which spans one of the segments forming the end of the loop of each resonator elementary.
  • they are two resonators coupled at the level of ends of their loop by a shared decoupling capacity.
  • such a resonator can be integrated into a filter which comprises in in addition to two additional tracks each arranged opposite a loop of each elementary resonator, each additional track being thus coupled to the zone of the loop opposite, the ends of the two additional tracks forming the terminals of filter connection.
  • the coupling between the additional tracks and the loops of the resonators elementary can be achieved by two additional conductive bridges forming variable capacity, each spanning an additional track and the loop area of the elementary resonator located opposite. So by varying the coupling between the tracks forming the input and the output of the filter, and the intermediate resonators, there it is possible to vary certain characteristics of the filter such as impedances input and output, bandwidth, and center frequency.
  • the invention is not limited to filters including two resonators, but covers the variants in which the number of resonators is chosen according to the desired transfer function. It is thus possible to multiply the number of resonators, the total number can thus be greater than ten.
  • the invention relates to an electric resonator which can be incorporated in a wide variety of analog filters.
  • Such a resonator (1) essentially consists of a conductive loop (2) and a bridge (6) driver. More specifically, the loop (2) is formed of a conductive tape, that is to say metallic or semiconductor, the geometry of which can take a square shape as illustrated in Figure 1. However, the invention is not limited to this alone embodiment, but also covers loops of different geometry, rectangular, polygonal, circular or others.
  • the loop (2) illustrated in Figure 1 has two end segments (3, 4) which form the ends. Both segments (3, 4) are arranged parallel to each other so that they can be closed the loop.
  • the area of the loop (2) substantially defines the value of the inductance equivalent of the resonator loop.
  • the ribbon forming the loop (2) can be obtained using different technologies, depending on the type of microcomponent that integrates it. So in a technology using an electrolytic production process, the ribbon can be metallic, and obtained by electrolytic deposition of copper in grooves etched in an insulating substrate such as silica. However, other technologies can also be used such than those using several levels of semiconductor materials, separated by sacrificial layers.
  • the resonator (1) comprises a bridge (6) in a conductive, metallic or semiconductor material, which spans both segments (3, 4) which form the ends of the loop (2).
  • This bridge (6) is illustrated in the Figure 2. It has a segment (7) parallel to the plane of the substrate, and two pillars (8, 9) which connect the horizontal segment (7) to the substrate (11).
  • the value of this capacity is essentially regulated by the distance separating the segment (7) from the bridge (6) and the segments (3, 4) of the loop.
  • the bridge (6) is deformable under the action of a force adjustable, so that the distance between the horizontal segment (7) and the segments (3, 4) of the loop, can be adjusted.
  • the bridge (6) can be obtained using different technologies.
  • this arch (6) consists of a copper deposit which can be produced above a sacrificial layer deposited on the substrate (11), then subsequently eliminated.
  • other technologies in which the arch is not made of copper but of another metallic material or even a semiconductor material can be used.
  • the deformation of the bridge (6) can be obtained by applying a force electrostatic, which results from the application of a direct voltage between the bridge (6) and the segments (3, 4) of the loop.
  • the bridge (6) is extended by a track (12) up to a connection pad (13) through which the DC voltage is applied.
  • the force causing the deformation of the bridge can be of another origin than electrostatic and for example result from a phenomenon of dilation or the application of a magnetic field.
  • the loop (16) can have a number of turns greater than one, so as to increase the value of the inductance and therefore its quality coefficient.
  • the portion (18) of the loop connecting the center (17) of winding and the segment (3) forming the end of the loop constitutes a layer located above or below the rest of the winding (16).
  • the segments (3, 4) of the loop can be spanned by several bridges (21, 22, 23), arranged in parallel, and controlled each by a separate signal, at three different connection pads (24, 25, 26).
  • bridges spanning the segments (3, 4) allows on the one hand, increase the surface area of the overall capacitor formed by all of the bridges (21, 22, 23) and the segments (3, 4), and secondly, to allow a separate control of each of these bridges. This makes it easier to cover a wider range of capacity value, and with greater precision.
  • the elementary resonator illustrated in Figure 1 can be integrated into filters more complex, as illustrated in Figures 4, 6, 9 and 11.
  • the filter illustrated in FIG. 4 comprises an elementary resonator including a loop (32) and a bridge (36) spanning the segments (33, 34) of the loop (32).
  • the loop (32) may include multiple towers, and the bridge (36) can be broken down into a plurality of bridges elementary.
  • This filter (30) has an additional track (31), arranged parallel to the segment (34).
  • This track (31) produced in the same way as the loop (32) is spanned by a bridge (37) which also spans the segment (34) of the loop (32).
  • This bridge (37) forms a variable capacity with the segment (34) of the loop (32) and the track (31).
  • This variable capacity is ordered using the same method as the bridge (36). It can in particular consist of a plurality of elementary bridges in parallel.
  • the equivalent diagram of the filter of figure 4 is illustrated in figure 5.
  • the inductance of the loop (32) corresponds substantially to the inductance L of FIG. 5.
  • the variable capacity of the bridge (36) corresponds to the capacity C in FIG. 5.
  • the capacity formed by the bridge (37) corresponds to the variable capacity C1 of FIG. 5, so that between terminals 38 and 39, the filter of figure 4 corresponds to a parallel LC circuit in series with capacity C1.
  • the variation of the height of the bridge (36) makes it possible to make vary the capacitance C, and therefore the tuning frequency of the LC resonator.
  • the variation of capacity C1 makes it possible to adapt the impedance of the filter.
  • Figures 6, 7, 8 correspond to a second filter whose configuration is illustrated in figure 6.
  • This filter includes two filters corresponding to figure 4, and in which the loops are coupled by facing zones.
  • this filter (40) comprises two elementary resonators each comprising a loop (41, 42) each loop comprises two segments in end (43, 44, 45, 46). These end segments (43, 44; 45, 46) are spanned two by two by varying capacities (47, 48). Each of these resonators also includes an additional spanned track (49, 50), with one of the segments (44, 46), by an additional bridge (51, 52).
  • the zones (57, 58) of the loops (41, 42) are arranged parallel, opposite one from the other. These two areas (57, 58) are close enough that the field magnetic generated by the current flowing through the area (57) induces a current in the area (58) of the other loop, and vice versa. In this way, the inductances formed by the loops (41, 42) are magnetically coupled.
  • the zones (57, 58) can be spanned by a additional conductive bridge ensuring capacitive coupling between the loops (41, 42).
  • FIG. 7 The equivalent diagram of this filter, between the input (53, 54) and output terminals (55, 56) is illustrated in FIG. 7 in which the capacities C1 and C2 are observed corresponding to the main bridges (47, 48), determining the frequency of tuning of each of the elementary resonators.
  • Capacities C3 and C4 correspond to decoupling capacities formed by the bridges (51, 52).
  • Mutual inductance M corresponds to the coupling present between the zones (57, 58) of the loops (41, 42).
  • FIG. 8 four curves illustrating the transfer functions of the filter of the Figure 6, for different values of different capacities.
  • the curves (60, 61) in solid lines correspond respectively to the reflection (or S 11 ) and transmission (S 12 ) parameters of the filter.
  • This type of filter can be used in particular as a preselector filter for mobile telephony, by adapting to several standards, and more generally to multi-band, multi-standard radio receivers.
  • Figures 9, 10 and 11 relate to another filter made from resonators elementary.
  • such a filter (70) comprises two loops (71, 72) each having end segments (73, 74, 75, 76), the segments (73, 74) of the loop (71) are spanned by a bridge (77). The segments (75, 76) of the loop (72) are spanned by a bridge forming variable capacity (78).
  • segment (74) of the loop (71) and the segment (75) of the loop (72) are spanned by an additional conductive bridge (79).
  • This additional bridge (79) therefore ensures capacitive coupling between the resonators formed from the loops (71, 72).
  • loops (71, 72) each have a zone (81, 82) coming to the each look at an additional track (83, 84).
  • Tracks (83,81) and (82, 84) are close enough to be magnetically coupled.
  • the filter (70) has input terminals (85, 86, 87, 88) located at the respective ends of the tracks (83, 84).
  • FIG. 11 illustrates another filter produced in accordance with the invention and which incorporates four elementary resonators.
  • this filter (100) is derived from the association of the filters illustrated with Figures 6 and 9.
  • the loops (101, 102) are in a configuration similar to that of FIG. 6, and each comprise a bridge (103, 104) which spans their end segments (105, 106, 107, 108).
  • These loops (101,102) include also an additional track (109, 110).
  • These tracks (109, 110) are spanned by bridges (111, 112) which also span the segments (106, 108) of the loops (101, 102).
  • the loops (101, 102) have parallel zones (113, 114) which are therefore magnetically coupled, this magnetic coupling is reinforced by a coupling capacitive thanks to the bridge (115) which generates the two zones (113, 114).
  • the filter (100) also comprises two loops (121, 122) whose segments in ends (123, 124, 125, 126) are respectively spanned two by two by bridges (127, 128).
  • loops (121, 122) repeat the central structure of the filter of FIG. 9.
  • these two loops (121, 122) are coupled by a bridge (130) which spans the first segment (124) of the loop (121) and the segment (125) of the loop (122).
  • the loops (121, 122) are respectively coupled to the loops (101, 102). This coupling is achieved by the proximity of the zones (131, 132) with regard to the loops (101, 121) as well as by the zones (133, 134) for the loops (122, 102). This coupling can be reinforced by bridges (135, 136) forming variable capacity.
  • FIG. 12 shows an equivalent diagram in which two capacitors C1 and C2 are observed, which are used to adjust the input coupling of the filter.
  • inductors L 1 , L 2 which correspond to the loops (101, 121, 133, 102) of figure 11. By proximity, these 4 inductors are coupled, which is represented on the diagram by mutual inductors ( Lm 1 and Lm 2 ).
  • Lm 1 and Lm 2 Two loops, at the top of figure 12, are coupled by a mutual capacitance (Cm).
  • Cm mutual capacitance
  • FIG. 13 shows the reflection and transmission parameters of the filter of FIG. 11 measured between the terminals (141, 142, 143, 144) for two sets of capacitance values. More precisely, the curves in solid lines (145) and (146) represent the parameters S 11 and S 12 of this filter. The curves in dotted lines (147) and (148) represent the same parameters after modification of the adjustable capacity values.
  • This resonator can therefore be easily integrated into microcomponents used in radio or hyper frequency applications, and in particular in the field of mobile telephony, or more generally in all analog radio devices and digital, can receive several standards.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Filters And Equalizers (AREA)
EP01420209A 2000-10-24 2001-10-16 Elektrischer Resonator Withdrawn EP1202376A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0013619 2000-10-24
FR0013619A FR2815774B1 (fr) 2000-10-24 2000-10-24 Resonateur electrique

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EP1202376A1 true EP1202376A1 (de) 2002-05-02

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EP01420209A Withdrawn EP1202376A1 (de) 2000-10-24 2001-10-16 Elektrischer Resonator

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US (1) US6549097B2 (de)
EP (1) EP1202376A1 (de)
JP (1) JP2002198780A (de)
CA (1) CA2358282A1 (de)
FR (1) FR2815774B1 (de)

Families Citing this family (11)

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Publication number Priority date Publication date Assignee Title
JP4226390B2 (ja) * 2003-05-15 2009-02-18 シャープ株式会社 マルチバンドフィルタ回路および高周波通信装置
US8058950B1 (en) * 2003-07-22 2011-11-15 Daniel Senderowicz Highly selective passive filters using low-Q planar capacitors and inductors
US20050073078A1 (en) * 2003-10-03 2005-04-07 Markus Lutz Frequency compensated oscillator design for process tolerances
JP4206904B2 (ja) * 2003-11-06 2009-01-14 ソニー株式会社 Ｍｅｍｓ共振器
US7327210B2 (en) * 2004-06-15 2008-02-05 Radio Frequency Systems, Inc. Band agile filter
EP1829126B1 (de) * 2004-12-09 2020-05-27 Wispry, Inc. Mems-kondensatoren, induktoren und zugehörige systeme und verfahren
JP2006197027A (ja) * 2005-01-11 2006-07-27 Maspro Denkoh Corp フィルタ回路
DE102006044570A1 (de) * 2006-09-21 2008-04-03 Atmel Duisburg Gmbh Integrierte Schaltungsanordnung und integrierte Schaltung
JP4847937B2 (ja) * 2007-09-10 2011-12-28 株式会社エヌ・ティ・ティ・ドコモ 信号選択装置
JP5428771B2 (ja) * 2009-11-06 2014-02-26 富士通株式会社 可変分布定数線路、可変フィルタ、および通信モジュール
TWI499123B (zh) * 2011-12-14 2015-09-01 矽品精密工業股份有限公司 交錯耦合帶通濾波器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05110315A (ja) * 1991-10-14 1993-04-30 Matsushita Electric Ind Co Ltd 共振器
WO2000055936A1 (en) * 1999-03-16 2000-09-21 Superconductor Technologies, Inc. High temperature superconductor tunable filter

Family Cites Families (3)

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Publication number Priority date Publication date Assignee Title
US5959515A (en) * 1997-08-11 1999-09-28 Motorola, Inc. High Q integrated resonator structure
US6127908A (en) * 1997-11-17 2000-10-03 Massachusetts Institute Of Technology Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same
KR100344790B1 (ko) * 1999-10-07 2002-07-19 엘지전자주식회사 마이크로 기계구조를 이용한 주파수 가변 초고주파 필터

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05110315A (ja) * 1991-10-14 1993-04-30 Matsushita Electric Ind Co Ltd 共振器
WO2000055936A1 (en) * 1999-03-16 2000-09-21 Superconductor Technologies, Inc. High temperature superconductor tunable filter

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
C.S. AITCHISON ET AL.: "LUMPED-CIRCUIT ELEMENTS AT MICROWAVE FREQUENCIES", IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES., vol. 19, no. 12, December 1971 (1971-12-01), IEEE INC. NEW YORK., US, pages 928 - 937, XP002168256, ISSN: 0018-9480 *
PATENT ABSTRACTS OF JAPAN vol. 017, no. 466 (E - 1421) 25 August 1993 (1993-08-25) *

Also Published As

Publication number Publication date
US20020047758A1 (en) 2002-04-25
FR2815774B1 (fr) 2003-01-31
CA2358282A1 (fr) 2002-04-24
FR2815774A1 (fr) 2002-04-26
US6549097B2 (en) 2003-04-15
JP2002198780A (ja) 2002-07-12

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