EP1141688A1 - Elektrodenanordung für ein elektrisches bauelement und als träger für sensoren - Google Patents
Elektrodenanordung für ein elektrisches bauelement und als träger für sensorenInfo
- Publication number
- EP1141688A1 EP1141688A1 EP99964384A EP99964384A EP1141688A1 EP 1141688 A1 EP1141688 A1 EP 1141688A1 EP 99964384 A EP99964384 A EP 99964384A EP 99964384 A EP99964384 A EP 99964384A EP 1141688 A1 EP1141688 A1 EP 1141688A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- electrode arrangement
- substrate
- substance
- sensor
- sensors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000126 substance Substances 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 239000000523 sample Substances 0.000 claims description 21
- 238000013507 mapping Methods 0.000 claims description 8
- 238000003384 imaging method Methods 0.000 claims description 4
- 238000009826 distribution Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 7
- 239000003795 chemical substances by application Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000000945 filler Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 206010042674 Swelling Diseases 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- 238000002560 therapeutic procedure Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000035876 healing Effects 0.000 description 1
- 229920001477 hydrophilic polymer Polymers 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C1/00—Details
- H01C1/14—Terminals or tapping points or electrodes specially adapted for resistors; Arrangements of terminals or tapping points or electrodes on resistors
- H01C1/146—Terminals or tapping points or electrodes specially adapted for resistors; Arrangements of terminals or tapping points or electrodes on resistors the resistive element surrounding the terminal
Definitions
- the invention relates to an electrode arrangement for an electrical component and as a support for sensors, which is applied to a support as a suitably dimensioned surface structure of two non-electrically connected, electrically conductive electrodes.
- Electrode arrangements for measuring probes from measuring devices for examining the substances located between the electrodes are known from the general prior art, in which the electrical characteristic values or their changes are evaluated. Examples of this are resistance measuring probes and measuring probes for electrolysis or electrophoresis. Furthermore, it is known to use specific electrical properties with specific substances between the electrodes and a correspondingly dimensioned electrode structure, the complex resistance of such a surface structure acting as a converter for voltage and current. According to IPC HOlC 17/242, examples of this are, in particular, the resistors and capacitors in thick and thin layer technology, the adjustment of which to the final value is often achieved by means of an external adjustment of the surface structure. This is done, for example, by means of targeted incisions with a laser.
- Both the material of the electrodes and that of the substance arranged between them are suitably selected.
- air can also be selected as the dielectric.
- suitable surface structures can be used to produce electrical measuring devices for the investigation of the measurands causing the specific effect, such as Example strain gauges, temperature sensors, magnetic field probes and light intensity probes.
- the usable specific property range of the electrodes and / or the substance can be mapped into a suitable value of the measuring probe or of the functional element by a suitable design of the surface structure on the carrier, which is determined by the electrode shape.
- the aim is to generate current paths that are as long and thin as possible, while those that are low are short and thick, with the electrodes being designed with a large electrode edge area and a small electrode area to reinforce this effect.
- their influence on other egg structures must properties are taken into account, for example on inductance, possible line resonances or compliance with certain excellent preferred directions.
- Resistors or capacitors can be applied to a support as comb electrode structures, in which the electrodes intermesh like a comb (Inter Digital Resistor or Inter Digital Capacitor), whereby a large electrode edge area is achieved with a small electrode spacing.
- the comb structures can be produced, for example, using phototechnical means or printing with subsequent etching of the electrode substance or by cutting with a laser.
- the disadvantage of electrode structures produced by these methods is the high technological outlay for their manufacture and the resulting relatively high prices of the end product, and in addition, surface structures with a large area can only be produced to a limited extent.
- the European patent application EP 0755695 AI discloses an electrode with a printed paste or binder, containing hydrophilic microgranules of hydrophilic polymers or water-soluble substances and electrically conductive microgranules. This electrode is used in particular on living bodies for measuring leakage currents, e.g. with EKG or EEG as well as in therapy for the treatment with low-frequency currents or the targeted application of active substances.
- the electrode is intended to transmit current from or to living bodies and thus to enable therapy effects in addition to measurements. Due to the material applied to the electrode, water is absorbed and this layer undergoes irreversible changes, so that the electrode described is used as an electrical component or transformer. ger is completely unsuitable for sensors that are to be used for determining agents.
- PCT application WO 91/03734 describes the use and manufacture of a resistance moisture sensor made of swellable plastic, which contains additives made of carbon, metal dust or the like to increase the conductivity.
- the additives for increasing the conductivity are located in a 3-dimensional polymer structure, the position of which constantly changes due to the swelling of the water-absorbing layer, as is the geometry of the electrode, which has adverse effects in long-term applications. With strong swellings or rapid moisture changes, non-healing cracks appear in the polymer layer. It cannot be used as an electrical component or carrier for sensors for the detection of agents.
- the object of the invention is to provide an electrode arrangement for an electrical component and as a support for sensors, which is applied to a substrate as a suitably dimensioned surface structure of two electrically conductive electrodes that are not electrically connected to one another and with a high flexibility of the imaging the conductivities of the electrode arrangement and / or the substance of a sensor-active layer, which maps this to the conductance of a measuring probe or a functional element and can be produced simply and inexpensively.
- the islands influence the area of the support near the surface structure and thus also the resulting overall conductance.
- the advantages of such an electrode structure lie in particular in the high flexibility of mapping the conductivities of the electrodes and / or the substance to the conductance of a measuring probe or a functional element.
- Such an island structure is realized according to the invention by fine distributions of conductive substances on any insulating substrates, such as foils.
- the substance is firmly localized on the substrate and can be sputtered on, vapor deposited, sprayed on, dabbed on, printed on or sprayed on, with a uniform distribution of conductive islands being present.
- connection electrodes these can also be arranged within special geometric figures.
- Variants of the carrier for sensors are coated on the surface with a substance-selective substance, which determine the overall conductance and are used as a detector for certain agents.
- the substrate itself if it is made sufficiently thin, can be coated with it, so that the overall conductance is essentially determined by the area close to the surface structure.
- the advantages of this design lie in the large variety in terms of the type, shape and size of the carrier and in the low manufacturing costs.
- a further advantageous embodiment of the island structure can be achieved by incorporating hyperstructures with anisometries of the Substances with respect to the substrate, which the islands have in their short-range order, are created, which gives a further usable degree of freedom, preferably for measuring probes, such as strain gauges.
- isotropic structures can be applied to the substrate, which are combined, for example, with ring-shaped electrodes and are therefore independent with respect to an orientation.
- Coated carriers for sensors can be used for the selective detection of certain agents.
- the manufacturing costs of the electrical components and supports for sensors according to the invention are low.
- the invention is based on an exemplary embodiment of
- FIG. 1 as a section through an electrode arrangement for an electrical component and carrier for sensors
- FIG. 2 as a top view of an electrode arrangement for an electrical component and carrier for sensors.
- the overall conductivity is determined by the partial conductivity between see the conductive islands 3 determined via the substrate 1 and the electrodes 2.
- agents are adsorbed on the surface of the substrate 1 and / or on the conductive islands 3, the overall conductance of the electrode arrangement changes, this is evaluated in the usual way and can be used, for example, for the detection of substances.
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Biochemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electrochemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Switches That Are Operated By Magnetic Or Electric Fields (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Wire Bonding (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE29822007U DE29822007U1 (de) | 1998-12-10 | 1998-12-10 | Elektrodenanordnung für ein elektrisches Bauelement und als Träger für Sensoren |
DE29822007U | 1998-12-10 | ||
PCT/DE1999/003793 WO2000034765A1 (de) | 1998-12-10 | 1999-11-26 | Elektrodenanordnung für ein elektrisches bauelement und als träger für sensoren |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1141688A1 true EP1141688A1 (de) | 2001-10-10 |
Family
ID=8066437
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99964384A Withdrawn EP1141688A1 (de) | 1998-12-10 | 1999-11-26 | Elektrodenanordung für ein elektrisches bauelement und als träger für sensoren |
Country Status (6)
Country | Link |
---|---|
US (1) | US6531859B1 (de) |
EP (1) | EP1141688A1 (de) |
DE (1) | DE29822007U1 (de) |
ES (1) | ES2161207T1 (de) |
GR (1) | GR20010300067T1 (de) |
WO (1) | WO2000034765A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9908696D0 (en) * | 1999-04-17 | 1999-06-09 | Chandler Robert W | High impedance sensor apparatus and method for detecting fluids |
GB2463284B (en) * | 2008-09-08 | 2011-11-23 | Qinetiq Ltd | Thermal emissive apparatus |
TWI388813B (zh) * | 2009-08-31 | 2013-03-11 | Universal Cement Corp | 壓力感測器以及具有壓力感測器之拳擊機 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3496513A (en) | 1967-11-17 | 1970-02-17 | Sprague Electric Co | Film resistor with securely soldered leads |
JPS5431715B2 (de) * | 1972-09-20 | 1979-10-09 | ||
US4358951A (en) * | 1981-02-17 | 1982-11-16 | General Motors Corporation | Zinc oxide thin film sensor having improved reducing gas sensitivity |
US4387165A (en) | 1982-04-22 | 1983-06-07 | Youngblood James L | H2 S Detector having semiconductor and noncontinuous inert film deposited thereon |
DE3440351A1 (de) | 1983-12-12 | 1985-06-20 | Voest-Alpine Ag, Linz | Feuchtigkeitssensor und verfahren zu dessen herstellung |
US4674320A (en) | 1985-09-30 | 1987-06-23 | The United States Of America As Represented By The United States Department Of Energy | Chemoresistive gas sensor |
US4820929A (en) | 1987-04-10 | 1989-04-11 | Texas Medical Instruments, Inc. | Dynamic infrared simulation cell |
US4761710A (en) * | 1987-06-23 | 1988-08-02 | Industrial Technology Research Institute | Polyimide capacitive humidity sensing element |
JPH0695082B2 (ja) * | 1987-10-08 | 1994-11-24 | 新コスモス電機株式会社 | 吸引式オゾンガス検知器 |
WO1991003734A1 (de) | 1989-08-29 | 1991-03-21 | At & S Austria Technologie & System Technik Gesellschaft M.B.H. | Verwendung eines quellfähigen kunststoffes, sowie verfahren zur herstellung eines resistiven feuchtigkeitssensors |
JP2517467B2 (ja) * | 1990-10-05 | 1996-07-24 | 山武ハネウエル株式会社 | 静電容量式圧力センサ |
US5205170A (en) * | 1991-04-01 | 1993-04-27 | Ford Motor Company | Mass flow sensor |
US5238729A (en) | 1991-04-05 | 1993-08-24 | Minnesota Mining And Manufacturing Company | Sensors based on nanosstructured composite films |
US5322602A (en) * | 1993-01-28 | 1994-06-21 | Teledyne Industries, Inc. | Gas sensors |
EP0651248B1 (de) * | 1993-11-02 | 2001-01-24 | Siemens Plc | Vorrichtung zum Messen der Wasserqualität |
JP2716361B2 (ja) * | 1994-02-16 | 1998-02-18 | 株式会社アドバンス | 生体用プリント電極 |
DE4423289C1 (de) * | 1994-07-02 | 1995-11-02 | Karlsruhe Forschzent | Gassensor für reduzierende oder oxidierende Gase |
DE4424028C2 (de) | 1994-07-11 | 1997-07-03 | Vdo Schindling | Abrißerkennung für einen Regensensor |
US5985673A (en) * | 1994-12-22 | 1999-11-16 | Arizona Baord Of Regents | Method for regeneration of a sensor |
WO1996033072A1 (de) * | 1995-04-19 | 1996-10-24 | Pelikan Produktions Ag | Elektrodenanordnung und kontragraphiegerät |
US5731584A (en) * | 1995-07-14 | 1998-03-24 | Imec Vzw | Position sensitive particle sensor and manufacturing method therefor |
JP2910681B2 (ja) * | 1996-07-24 | 1999-06-23 | 日本電気株式会社 | 半導体装置 |
US5659127A (en) * | 1996-08-26 | 1997-08-19 | Opto Tech Corporation | Substrate structure of monolithic gas sensor |
DE19713719C2 (de) | 1997-04-03 | 2002-11-14 | Kuehn Hans R | Sensor zur Messung physikalischer und / oder chemischer Größen und Verfahren zur Herstellung eines Sensors |
SE530172C2 (sv) * | 2000-03-31 | 2008-03-18 | Xcounter Ab | Spektralt upplöst detektering av joniserande strålning |
-
1998
- 1998-12-10 DE DE29822007U patent/DE29822007U1/de not_active Expired - Lifetime
-
1999
- 1999-11-26 EP EP99964384A patent/EP1141688A1/de not_active Withdrawn
- 1999-11-26 WO PCT/DE1999/003793 patent/WO2000034765A1/de not_active Application Discontinuation
- 1999-11-26 US US09/831,987 patent/US6531859B1/en not_active Expired - Fee Related
- 1999-11-26 ES ES99964384T patent/ES2161207T1/es active Pending
-
2001
- 2001-11-30 GR GR20010300067T patent/GR20010300067T1/el unknown
Non-Patent Citations (1)
Title |
---|
See references of WO0034765A1 * |
Also Published As
Publication number | Publication date |
---|---|
ES2161207T1 (es) | 2001-12-01 |
DE29822007U1 (de) | 1999-04-08 |
US6531859B1 (en) | 2003-03-11 |
WO2000034765A1 (de) | 2000-06-15 |
GR20010300067T1 (en) | 2001-11-30 |
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Legal Events
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