EP0965851A3 - Magneto-Impedanz-Sensor - Google Patents

Magneto-Impedanz-Sensor Download PDF

Info

Publication number
EP0965851A3
EP0965851A3 EP99115496A EP99115496A EP0965851A3 EP 0965851 A3 EP0965851 A3 EP 0965851A3 EP 99115496 A EP99115496 A EP 99115496A EP 99115496 A EP99115496 A EP 99115496A EP 0965851 A3 EP0965851 A3 EP 0965851A3
Authority
EP
European Patent Office
Prior art keywords
soft magnetic
magneto
impedance sensor
magnetic element
insulator substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99115496A
Other languages
English (en)
French (fr)
Other versions
EP0965851A2 (de
EP0965851B1 (de
Inventor
Akihiro Isomura
Ken-Ichi Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP24507196A external-priority patent/JP3203547B2/ja
Priority claimed from JP24486096A external-priority patent/JP3210933B2/ja
Priority claimed from JP24672796A external-priority patent/JP3385501B2/ja
Application filed by Tokin Corp filed Critical Tokin Corp
Publication of EP0965851A2 publication Critical patent/EP0965851A2/de
Publication of EP0965851A3 publication Critical patent/EP0965851A3/de
Application granted granted Critical
Publication of EP0965851B1 publication Critical patent/EP0965851B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
EP99115496A 1996-09-17 1997-09-17 Magneto-Impedanz-Sensor Expired - Lifetime EP0965851B1 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP24507196 1996-09-17
JP24507196A JP3203547B2 (ja) 1996-09-17 1996-09-17 磁気検出素子
JP24486096 1996-09-17
JP24486096A JP3210933B2 (ja) 1996-09-17 1996-09-17 磁気検出素子及びその製造方法
JP24672796 1996-09-18
JP24672796A JP3385501B2 (ja) 1996-09-18 1996-09-18 磁気検出素子
EP97116192A EP0831335B1 (de) 1996-09-17 1997-09-17 Magneto-Impedanz-Sensor

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP97116192A Division EP0831335B1 (de) 1996-09-17 1997-09-17 Magneto-Impedanz-Sensor

Publications (3)

Publication Number Publication Date
EP0965851A2 EP0965851A2 (de) 1999-12-22
EP0965851A3 true EP0965851A3 (de) 2000-03-15
EP0965851B1 EP0965851B1 (de) 2002-08-07

Family

ID=27333293

Family Applications (2)

Application Number Title Priority Date Filing Date
EP97116192A Expired - Lifetime EP0831335B1 (de) 1996-09-17 1997-09-17 Magneto-Impedanz-Sensor
EP99115496A Expired - Lifetime EP0965851B1 (de) 1996-09-17 1997-09-17 Magneto-Impedanz-Sensor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP97116192A Expired - Lifetime EP0831335B1 (de) 1996-09-17 1997-09-17 Magneto-Impedanz-Sensor

Country Status (8)

Country Link
US (2) US6069475A (de)
EP (2) EP0831335B1 (de)
CN (2) CN1110794C (de)
DE (2) DE69714613T2 (de)
HK (1) HK1004822A1 (de)
MY (1) MY130911A (de)
SG (2) SG82576A1 (de)
TW (1) TW344799B (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3344468B2 (ja) * 1998-12-21 2002-11-11 アルプス電気株式会社 薄膜磁気ヘッド
JP2000284028A (ja) * 1999-03-30 2000-10-13 Kaneo Mori 薄膜磁性体ｍｉ素子
KR100378553B1 (ko) * 1999-04-15 2003-03-31 마쯔시다덴기산교 가부시키가이샤 자기재생소자 및 그것을 사용한 자기헤드와 그 제조방법
US6538843B1 (en) * 1999-11-09 2003-03-25 Matsushita Electric Industrial Co., Ltd. Magnetic head
KR100383564B1 (ko) * 2000-02-17 2003-05-12 주식회사 코디소프트 임피던스 밸브형 물질 형성 방법 및 그 임피던스 밸브형 물질
JP2002056510A (ja) * 2000-08-07 2002-02-22 Matsushita Electric Ind Co Ltd シールド型磁気ヘッド並びに磁気再生装置
JP2002208118A (ja) * 2001-01-04 2002-07-26 Tdk Corp 薄膜磁気ヘッド装置
US6727692B2 (en) 2001-02-15 2004-04-27 Petru Ciureanu Magnetic field sensor with enhanced sensitivity, internal biasing and magnetic memory
US7145331B2 (en) 2001-07-19 2006-12-05 Matsushita Electric Industrial Co., Ltd. Magnetic sensor having a closed magnetic path formed by soft magnetic films
US7196514B2 (en) * 2002-01-15 2007-03-27 National University Of Singapore Multi-conductive ferromagnetic core, variable permeability field sensor and method
US6853186B2 (en) * 2002-01-15 2005-02-08 National University Of Singapore Variable permeability magnetic field sensor and method
EP1450378A3 (de) * 2003-02-24 2006-07-05 TDK Corporation Weichmagnetisches Glied, Verfahren zu dessen Herstellung und Blatt zur Kontrolle Elektromagnetischer Wellen
JP3781056B2 (ja) * 2003-07-18 2006-05-31 愛知製鋼株式会社 ３次元磁気方位センサおよびマグネト・インピーダンス・センサ素子
US7554324B2 (en) * 2003-10-28 2009-06-30 Honeywell International Inc. Turbine blade proximity sensor and control system
US20050237197A1 (en) * 2004-04-23 2005-10-27 Liebermann Howard H Detection of articles having substantially rectangular cross-sections
US7208684B2 (en) 2004-07-30 2007-04-24 Ulectra Corporation Insulated, high voltage power cable for use with low power signal conductors in conduit
US6998538B1 (en) 2004-07-30 2006-02-14 Ulectra Corporation Integrated power and data insulated electrical cable having a metallic outer jacket
US7145321B2 (en) 2005-02-25 2006-12-05 Sandquist David A Current sensor with magnetic toroid
JP4283263B2 (ja) * 2005-10-20 2009-06-24 本田技研工業株式会社 磁歪式トルクセンサの製造方法
EP2402778B1 (de) 2009-02-27 2014-04-16 Aichi Steel Corporation Magnetoimpedanzsensorelement und herstellungsverfahren dafür
US8269490B2 (en) * 2009-04-03 2012-09-18 Honeywell International Inc. Magnetic surface acoustic wave sensor apparatus and method
CN101880858B (zh) * 2009-05-06 2015-07-29 光洋应用材料科技股份有限公司 高磁通量的钴铁基合金磁性溅射靶材及其制造方法
US8994366B2 (en) 2012-12-12 2015-03-31 Ascension Technology Corporation Magnetically tracked sensor
US20180266991A1 (en) * 2017-03-15 2018-09-20 Qualcomm Incorporated Magneto-impedance (mi) sensors employing current confinement and exchange bias layer(s) for increased sensitivity
JP7203490B2 (ja) 2017-09-29 2023-01-13 昭和電工株式会社 磁気センサ集合体及び磁気センサ集合体の製造方法
JP6516057B1 (ja) * 2017-12-26 2019-05-22 Tdk株式会社 磁気センサ
CN111323737B (zh) * 2020-04-09 2021-03-02 西安交通大学 一种阻抗敏感型磁传感器及其硬件检测电路
JP7540234B2 (ja) * 2020-08-06 2024-08-27 株式会社レゾナック 磁気センサ回路および磁界検出装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0501478A2 (de) * 1991-02-28 1992-09-02 Sony Corporation Magnetisches Detektionssystem mit verteilter konstanter Schaltung
EP0640840A2 (de) * 1993-08-25 1995-03-01 Nippon Telegraph And Telephone Corporation Magnetfeldmessverfahren und -vorrichtung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4635152A (en) * 1983-07-29 1987-01-06 Kabushiki Kaisha Toshiba Magnetic resonance-type playback apparatus including a magnetic material having magnetic anisotropy
US5390061A (en) * 1990-06-08 1995-02-14 Hitachi, Ltd. Multilayer magnetoresistance effect-type magnetic head
JPH05303724A (ja) * 1992-02-26 1993-11-16 Hitachi Ltd 磁気ディスク装置
JP3272423B2 (ja) * 1992-12-01 2002-04-08 科学技術振興事業団 磁気インダクタンス素子の製造方法、磁気インダクタンス素子、磁界センサ、および磁気スイッチハイブリッドｉｃデバイス
JPH07248365A (ja) * 1994-03-10 1995-09-26 Sumitomo Metal Mining Co Ltd 磁気・磁気方位センサ及び磁気・磁気方位測定方法
JP3360519B2 (ja) * 1995-03-17 2002-12-24 株式会社豊田中央研究所 積層型磁界検出装置
US5978186A (en) * 1996-03-14 1999-11-02 Matsushita Electric Industrial Co., Ltd. Magnetic head and reproducing apparatus with head having central core with winding thereabout and wire therethrough

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0501478A2 (de) * 1991-02-28 1992-09-02 Sony Corporation Magnetisches Detektionssystem mit verteilter konstanter Schaltung
EP0640840A2 (de) * 1993-08-25 1995-03-01 Nippon Telegraph And Telephone Corporation Magnetfeldmessverfahren und -vorrichtung

Non-Patent Citations (6)

* Cited by examiner, † Cited by third party
Title
KAMO Y ET AL: "FABRICATION OF AN INDUCTOR USING AMORPHOUS FILMS WITH A MULTILAYERED STRUCTURE", JOURNAL OF APPLIED PHYSICS,US,AMERICAN INSTITUTE OF PHYSICS. NEW YORK, vol. 64, no. 10, PART 2, pages 5673-5675, XP000024012, ISSN: 0021-8979 *
MASAKATSU SENDA ET AL: "HIGH FREQUENCY MEASUREMENT TECHNIQUE FOR PATTERNED SOFT MAGNETIC FILM PERMEABILITY WITH MAGNETIC FILM/CONDUCTOR/MAGNETIC FILM INDUCTANCE LINE", REVIEW OF SCIENTIFIC INSTRUMENTS,US,AMERICAN INSTITUTE OF PHYSICS. NEW YORK, vol. 64, no. 4, pages 1034-1037, XP000363977, ISSN: 0034-6748 *
MASAKATSU SENDA ET AL: "MICRO-MAGNETIC DEVICES USING MAGNETIC MULTILAYER FILMS", NTT REVIEW, vol. 7, no. 6, 1 November 1995 (1995-11-01), pages 89 - 95, XP000548930 *
SENDA M ET AL: "A STUDY OF THE HIGH-FREQUENCY MAGNETIC PROPERTIES OF COZRNB/SIO2 MULTILAYER FILMS", IEEE TRANSLATION JOURNAL ON MAGNETICS IN JAPAN,US,IEEE INC, NEW YORK, vol. 9, no. 2, pages 124-129, XP000489675, ISSN: 0882-4959 *
SENDA M ET AL: "Permeability Measurement in the GHz Range for Soft-Magnetic Film using the M/C/M Inductance-Line", IEEE TRANSACTIONS ON MAGNETICS,IEEE INC, NEW YORK, vol. 31, no. 2, March 1995 (1995-03-01), US, pages 960 - 965, XP000867105 *
SUGAWARA E: "MAGNETIC PROPERTIES OF COMPOSITE ANISOTROPY CONBZR/CERAMICS MULTI-LAYERS", IEEE TRANSLATION JOURNAL ON MAGNETICS IN JAPAN,US,IEEE INC, NEW YORK, vol. 7, no. 12, pages 969-974, XP000365006, ISSN: 0882-4959 *

Also Published As

Publication number Publication date
SG82576A1 (en) 2001-08-21
CN1186295A (zh) 1998-07-01
EP0831335A2 (de) 1998-03-25
MY130911A (en) 2007-07-31
US6255813B1 (en) 2001-07-03
EP0965851A2 (de) 1999-12-22
EP0831335B1 (de) 2001-06-06
DE69705095T2 (de) 2002-02-07
SG89311A1 (en) 2002-06-18
EP0965851B1 (de) 2002-08-07
EP0831335A3 (de) 1998-06-03
DE69705095D1 (de) 2001-07-12
TW344799B (en) 1998-11-11
DE69714613T2 (de) 2003-04-10
CN1110794C (zh) 2003-06-04
US6069475A (en) 2000-05-30
HK1004822A1 (en) 1998-12-11
CN1432998A (zh) 2003-07-30
DE69714613D1 (de) 2002-09-12

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