EP0960692A3 - Machining apparatus - Google Patents

Machining apparatus Download PDF

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Publication number
EP0960692A3
EP0960692A3 EP19990104816 EP99104816A EP0960692A3 EP 0960692 A3 EP0960692 A3 EP 0960692A3 EP 19990104816 EP19990104816 EP 19990104816 EP 99104816 A EP99104816 A EP 99104816A EP 0960692 A3 EP0960692 A3 EP 0960692A3
Authority
EP
Grant status
Application
Patent type
Prior art keywords
working surface
particular
machining
covering
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19990104816
Other languages
German (de)
French (fr)
Other versions
EP0960692A2 (en )
Inventor
Heinrich Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mueller Heinrich
Original Assignee
Heinrich Müller
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/04Headstocks; Working-spindles; Features relating thereto
    • B24B41/047Grinding heads for working on plane surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces

Abstract

Die Erfindung bezieht sich auf eine Vorrichtung zum maschinellen Bearbeiten, insbesondere zum Schleifen und Polieren, der Oberfläche von Werkstücken, insbesondere von Probekörpern, bestehend aus einem drehbaren, ein Bearbeitungswerkzeug bildenden Tragkörper mit einem auf dessen Arbeitsfläche auswechselbaren gehaltenen, folien- oder papierartigen Bearbeitungsbelag. The invention relates to an apparatus for machining, in particular for grinding and polishing, the surface of workpieces, in particular of sample bodies, comprising a rotatable, a machining tool forming the support body with a replaceable on its working surface held, foil or paper-like processing covering.
Um sicherzustellen, daß jeder papier- oder folienartige Bearbeitungsbelag ohne zusätzlich Vorbehandlung und ohne eine besondere Klemmeinrichtung auf der Arbeitsfläche des Tragkörpers befestigt werden kann, wobei ausgeschlossen sein soll, daß Metallpartikel, insbesondere Metallstaub, auf dem Bearbeitungsbelag haften bleibt, weist die Arbeitsfläche des Tragkörpers mehrere verteilt angeordnete und an eine Saugleitung angeschlossene Kanäle auf und der Bearbeitungsbelag ist durch Unterdruck lösbar auf der Arbeitsfläche des Tragkörpers gesichert. To ensure that any paper or foil-like processing covering can be attached without additional treatment and without a special clamping device on the working surface of the supporting body, to be where possible that metal particles, in particular metal dust, adhere to the processing lining remains, the working surface of the support body a plurality of arranged distributed and on to a suction line connected channels and the machining covering is secured by vacuum detachably on the working surface of the supporting body.
EP19990104816 1998-05-29 1999-03-11 Machining apparatus Withdrawn EP0960692A3 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE29809710U 1998-05-29
DE1998209710 DE29809710U1 (en) 1998-05-29 1998-05-29 Machining device

Publications (2)

Publication Number Publication Date
EP0960692A2 true EP0960692A2 (en) 1999-12-01
EP0960692A3 true true EP0960692A3 (en) 2002-03-13

Family

ID=8057873

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19990104816 Withdrawn EP0960692A3 (en) 1998-05-29 1999-03-11 Machining apparatus

Country Status (2)

Country Link
EP (1) EP0960692A3 (en)
DE (1) DE29809710U1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006047007A1 (en) * 2006-10-02 2008-04-03 Onsystem Ohg Disc grinder grinding plate, has channel for fixture of grinding material by vacuum normal to grinding plane

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5676590A (en) * 1995-03-16 1997-10-14 Fujitsu Limited Polishing apparatus provided with abrasive cloth
US5704827A (en) * 1994-10-19 1998-01-06 Ebara Corporation Polishing apparatus including cloth cartridge connected to turntable
EP0818272A1 (en) * 1996-07-12 1998-01-14 Applied Materials, Inc. Holding a polishing pad on a platen in a chemical mechanical polishing system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5704827A (en) * 1994-10-19 1998-01-06 Ebara Corporation Polishing apparatus including cloth cartridge connected to turntable
US5676590A (en) * 1995-03-16 1997-10-14 Fujitsu Limited Polishing apparatus provided with abrasive cloth
EP0818272A1 (en) * 1996-07-12 1998-01-14 Applied Materials, Inc. Holding a polishing pad on a platen in a chemical mechanical polishing system

Also Published As

Publication number Publication date Type
EP0960692A2 (en) 1999-12-01 application
DE29809710U1 (en) 1998-10-15 grant

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