EP0918938B1 - Reibungsvakuumpumpe - Google Patents

Reibungsvakuumpumpe Download PDF

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Publication number
EP0918938B1
EP0918938B1 EP97931744A EP97931744A EP0918938B1 EP 0918938 B1 EP0918938 B1 EP 0918938B1 EP 97931744 A EP97931744 A EP 97931744A EP 97931744 A EP97931744 A EP 97931744A EP 0918938 B1 EP0918938 B1 EP 0918938B1
Authority
EP
European Patent Office
Prior art keywords
stage
pump
thread
blades
pump stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP97931744A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0918938A1 (de
Inventor
Robert Stolle
Heinz-Dieter Odendahl
Christian Beyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP0918938A1 publication Critical patent/EP0918938A1/de
Application granted granted Critical
Publication of EP0918938B1 publication Critical patent/EP0918938B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Definitions

  • the invention relates to a friction vacuum pump with at least one turbomolecular pump stage and one adjoining the pressure pump stage on the pressure side.
  • turbomolecular vacuum pumps can be improved that their turbomolecular pump stages are a threaded pump stage is subordinated.
  • the problem of an effective one Use of the thread pump stage is that a Effective pumping speed dependent on pressure as possible on Entry of the thread (suction-side end of the thread) cannot be guaranteed.
  • the reason is in that the flow behavior of the funded Gases in the transition area between turbomolecular pump stages and thread pump stages from molecular (at Drükken ⁇ 10-3 mbar) on laminar (from about 10-2 mbar upwards) changes.
  • Known designs of the transition area between turbomolecular pump stages and thread pump stages have the disadvantage that it can be demolished Current is coming. These have a significant impact the pumping speed of the pump.
  • DE-A-36 27 642 (claim 4) is a friction vacuum pump of the species affected here.
  • a thread pump stage closes on.
  • the entry of the thread pump stage has one special design not on.
  • the thread depth changes not over the length of the thread pump stage.
  • the state of the art also includes the content of Documents FR-A-26 629 877 and WO-A-93/23672.
  • the subject of the first-mentioned script takes length the wing of the filling stage in the direction of flow.
  • at the turbomolecular vacuum pump according to the second document is the suction or pressure side length of the wing Filling level of the corresponding length of the blades upstream and downstream Turbomolecular pump stage adjusted.
  • the present invention is based on the object the pumping speed of a friction vacuum pump at the beginning mentioned type by an improvement in the entrance area to increase the thread pump stage.
  • the measures according to the invention have the effect that the transition area between the turbomolecular pump stage and the thread pump stage one of the flow form has adapted geometry.
  • the in this transition area from molecular to laminar flow is only slightly disturbed.
  • the properties of the fill level are the mass flow, the realized compression and adapted to the absolute pressure.
  • Figures 1 and 2 show that the invention Pump 1 a turbomolecular pump stage 2, a filling stage 3 and a thread pump stage 4 comprises. Gas production takes place between a rotor 5 (rotor sections 5a and 5b) and a stator 6 instead.
  • the axis of rotation of the rotor is denoted by 7.
  • Wear rotor 5 and / or stator 6 the structures that produce gas.
  • Components of the turbomolecular pump stage 2 are rows of stator blades 11 and rows of rotor blades 12.
  • the Filling stage 3 comprises several vanes 13.
  • the thread pump stage 4 is characterized by a thread 14.
  • a wing 13 does not have to be assigned to each web of the thread 14 his. Depending on the application, less or more wings 13 than thread webs 14 may be present.
  • the gap is between the rotor 5 and the stator 6 15, which should be as small as possible and usually is less than a millimeter.
  • FIG. 3 shows how the Wing 13 are designed. It is this Execution around wing-shaped end sections of the Thread 14, practically by a sharp increase in Thread depth t are marked. This increase begins at the dashed line 16 and extends over a relatively short length, denoted by h of the rotor 5.
  • the thread depth t increases towards the suction side Amount that is about the active length of the blades of the Stator blade row 11 or rotor blade row located on the suction side 12 corresponds to the turbomolecular pump stage 2.
  • This strong increase in the thread depth t takes place expediently over a length h of the rotor 5, which is smaller than the length of the suction side Blading the turbomolecular pump stage 2, preferably even less than half the length 1 of these blades.
  • the thread depth t increases by Factor 4 to 8, preferably about 6 to.
  • the angle of attack the wing 13 lies between the angle of attack the neighboring blades of the turbomolecular pump stage 2 and the inclination of the adjacent thread webs 14 (Web angle ⁇ ).
  • Figures 4 to 6 show that the thread pump stage 4 has several thread webs 14, e.g. between four and sixteen, preferably eight.
  • the bridge angle ⁇ (to the horizontal) is between about 10 ° and 20 °.
  • blades 12 are the last ones on the pressure side blade row of the turbomolecular pump stage 2 shown, which - as described in Figures 1 to 3 - Still on the rotor section 5b of the filling stage 3 and Thread stage 4 are attached.
  • the number of blades 12 exceeds the number of wings 13 by about a factor 1.5 to 5, preferably 4.
  • the Number of wings 13 greater than the number of Threaded webs 14. Between each suction side according to Art a wing-shaped end portion 13 of the Threaded webs 14 have another wing 13.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP97931744A 1996-08-16 1997-07-02 Reibungsvakuumpumpe Expired - Lifetime EP0918938B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19632874A DE19632874A1 (de) 1996-08-16 1996-08-16 Reibungsvakuumpumpe
DE19632874 1996-08-16
PCT/EP1997/003477 WO1998007989A1 (de) 1996-08-16 1997-07-02 Reibungsvakuumpumpe

Publications (2)

Publication Number Publication Date
EP0918938A1 EP0918938A1 (de) 1999-06-02
EP0918938B1 true EP0918938B1 (de) 2002-02-06

Family

ID=7802684

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97931744A Expired - Lifetime EP0918938B1 (de) 1996-08-16 1997-07-02 Reibungsvakuumpumpe

Country Status (5)

Country Link
US (1) US6168374B1 (ja)
EP (1) EP0918938B1 (ja)
JP (1) JP3957761B2 (ja)
DE (2) DE19632874A1 (ja)
WO (1) WO1998007989A1 (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29717079U1 (de) 1997-09-24 1997-11-06 Leybold Vakuum GmbH, 50968 Köln Compoundpumpe
JP3788558B2 (ja) * 1999-03-23 2006-06-21 株式会社荏原製作所 ターボ分子ポンプ
JP2001248587A (ja) * 1999-12-28 2001-09-14 Kashiyama Kogyo Kk 複合型真空ポンプ
US6514035B2 (en) * 2000-01-07 2003-02-04 Kashiyama Kougyou Industry Co., Ltd. Multiple-type pump
DE10046766A1 (de) 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-Reibungsvakuumpumpe
DE10111525A1 (de) * 2001-03-09 2002-09-12 Leybold Vakuum Gmbh Schraubenvakuumpumpe mit Rotoreinlauf und Rotorauslauf
GB0229355D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
US6957801B2 (en) * 2003-09-30 2005-10-25 Honeywell International, Inc. Valve having an integrated actuator assembly
US20090081022A1 (en) * 2007-09-21 2009-03-26 Honeywell International Inc. Radially Staged Microscale Turbomolecular Pump
DE202011002809U1 (de) * 2011-02-17 2012-06-12 Oerlikon Leybold Vacuum Gmbh Statorelement sowie Hochvakuumpumpe
US10190597B2 (en) * 2011-06-17 2019-01-29 Edwards Japan Limited Vacuum pump and rotor thereof
JP6692635B2 (ja) * 2015-12-09 2020-05-13 エドワーズ株式会社 連結型ネジ溝スペーサ、および真空ポンプ

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (ja) * 1973-03-30 1974-10-25 Cit Alcatel
NL8303927A (nl) 1983-11-16 1985-06-17 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
DE3410905A1 (de) 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
JPS6172896A (ja) * 1984-09-17 1986-04-14 Japan Atom Energy Res Inst 高速回転ポンプ
US4708586A (en) 1985-08-14 1987-11-24 Rikagaku Kenkyusho Thread groove type vacuum pump
FR2611818B1 (fr) * 1987-02-26 1991-04-19 Cit Alcatel Pompe rotative a vide moleculaire du type a canal de gaede
GB2232205B (en) 1987-12-25 1991-11-13 Sholokhov Valery B Molecular vacuum pump
US5217346A (en) * 1988-07-13 1993-06-08 Osaka Vacuum, Ltd. Vacuum pump
DE58905785D1 (de) 1989-07-20 1993-11-04 Leybold Ag Gasreibungspumpe mit mindestens einer auslassseitigen gewindestufe.
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten

Also Published As

Publication number Publication date
EP0918938A1 (de) 1999-06-02
JP2000516321A (ja) 2000-12-05
US6168374B1 (en) 2001-01-02
DE19632874A1 (de) 1998-02-19
DE59706325D1 (de) 2002-03-21
JP3957761B2 (ja) 2007-08-15
WO1998007989A1 (de) 1998-02-26

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