EP0799908B1 - Galvanische Abscheidungszelle mit Leitblende - Google Patents
Galvanische Abscheidungszelle mit Leitblende Download PDFInfo
- Publication number
- EP0799908B1 EP0799908B1 EP96105228A EP96105228A EP0799908B1 EP 0799908 B1 EP0799908 B1 EP 0799908B1 EP 96105228 A EP96105228 A EP 96105228A EP 96105228 A EP96105228 A EP 96105228A EP 0799908 B1 EP0799908 B1 EP 0799908B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- aperture
- container
- collar
- anode
- electrolyte
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/10—Moulds; Masks; Masterforms
Definitions
- the invention relates to a device for galvanic deposition a metal layer on a support, with a container for receiving the electrolyte, with one with anode material filled anode container, its essentially flat Exit surface for metal ions of the anode material permeable which is on the support surface facing the anode container of the carrier serving as the cathode be, the carrier surface approximately parallel and in Distance to the outlet surface of the anode container facing it is arranged, with a between the exit surface and the insulating surface arranged on the support surface with an opening for the defined formation of the electrical current distribution between anode and cathode in the opening, and with an injection nozzle for injection of the electrolyte in the cathode space between the baffle and Carrier surface.
- Such a device is used, for example, for galvanoplastic Manufacture of pressing tools or molds, especially made of nickel.
- These press tools will be in compression molding or injection molding of plates, for example of compact discs (so-called CD's), laser vision discs and other information-bearing plates.
- CD's compact discs
- the aforementioned forms, to which archetypes like the so-called "glass masters" as well as impressions from the glass master belong, are intermediate forms for the production of the pressing tools.
- the shapes carry information in relief on their surfaces.
- the surface structure is made by galvanoplastic Transfer the impression to the press tool.
- the one in this Information contained in surface structure is provided by the use of the press tool in injection molding or compression molding embossed on the surface of a plastic material.
- the optical disc which also includes the compact disc heard, the relief structure modulates the light of a laser beam, so that on the surface of the plastic body existing information can be read out.
- a metal layer generally a nickel layer a carrier, either an insulating carrier with a thin electrically conductive layer, for example Glass, or a metallic support, for example made of Nikkel, deposited
- the respective carrier surface has a relief-like structure that contains the information to be read contains.
- the smallest unit of information, the so-called "Pit" has a local wavelength in the micrometer range, where the track spacing between adjacent information tracks is also in the micrometer range. Because the support surface contain several billion pieces of information can and the associated fine structures in the micrometer range are to be transferred to the metal layer, to the Metal deposition process made the highest demands.
- the deposited metal layer should be very fine-grained and be stress-free; it is said to be a relatively large thickness of the deposited Layer can be reached, e.g. for making Compact discs are said to be those made by metal deposition Press tool have a thickness of 295 ⁇ m ⁇ 5 ⁇ m; Moreover the deposition process should run at high speed. Furthermore, the device for galvanic deposition have a small size and are easy to use. An important requirement in the manufacture of galvanoplastic Metal layers on a support is uniformity the layer thickness. It may cover the entire area of the Fluctuate only within small limits. Become if these limits are exceeded, the product quality suffers of the optical disks made with this metal layer.
- a device of the type mentioned is from EP-A-0 058 649 known.
- the anode container filled with anode material has an exit surface for metal ions.
- an insulating baffle arranged with an opening Between this Exit surface and the cathodically connected carrier an insulating baffle arranged with an opening.
- This baffle has the task of connecting the current between the anode and narrow the cathode to the area that is essentially predetermined by the carrier surface of the carrier is. This is intended to ensure a uniform precipitation of metal ions can be achieved on the carrier surface. It has however, shown in practice that on the support surface show adverse thickness fluctuations.
- the Injector the electrolyte towards the center of the Carrier surface. Due to the rotation of the carrier, whose surface electrolyte liquid in the direction of rotation moving, is the one created by the deadweight effect Flow velocity in the center of the carrier is minimal. By injecting the electrolyte into this center in combination with the vortex-shaped flow an optimal Distribution of the fresh electrolyte over the entire Carrier surface reached.
- the collar preferably has a recess into or into the vicinity of which projects or is arranged at the outlet end of the injection nozzle is, the upper edge of the outlet end is smaller or equal to the height of the collar.
- the baffle from outside the container easily to be able to take it out, it is towards the opening of the Extended container and has an angled Handle section.
- An operator can use this handle section grasp from the outside and the guide panel in relation to the Carrier surface or the exit surface of the anode container to adjust.
- the creation is such that the Central axes of the carrier and the opening of the guide screen to match.
- a movably mounted correction plate made of plastic, with a small section the opening can be covered.
- This correction plate can target the streamline distribution within the Opening of the guide screen can be adjusted to make a fine adjustment the distribution of the ion current from the anode container to reach the carrier surface.
- Figure 1 shows schematically the production of a compact disc for audio applications. Molds are used in the manufacturing process whose metal layer by galvanic deposition in a device according to the invention are generated. The quality this metal layer is crucial for quality of the finished product, i.e. for the playback quality of the on audio signals stored on the compact disc.
- the manufacturing steps can be roughly divided into four groups A, Classify B, C, D, of which A is the production of the glass master, B the production of the pressing tool, C the pressing and D concern finishing.
- Starting point for the Production of the glass master is the production of a master magnetic tape (Step 10) with audio information on a magnetic tape stored digitally with the highest precision.
- production steps group A is a thin photoresist on a polished glass applied (steps 12 and 14).
- step 16 the photoresist is exposed by a bundled laser beam, taking the laser beam through the digital information is modulated on the master magnetic tape.
- Step 18 becomes the exposed areas of the photoresist removed - a relief-like photoresist structure remains back on the glass pane.
- This structure contains the pits taken from the master magnetic tape digital information.
- step 20 the relief-like surface structure with a thin electrically conductive layer, e.g. a nickel layer overdrawn.
- the so-called intermediate is obtained Glass master for the compact disc.
- step 22 a galvanic Device according to the invention as a metal mold so-called "father" made, being thin on the electrical conductive layer of the glass master a thick nickel layer, e.g. with a thickness of 500 ⁇ m, in a galvano process is deposited.
- the father now carries one to the glass master complementary relief structure. The father can directly used as the tool for making compact discs become. Usually in another galvanoplastic Process from the father a form called “mother” Nickel creates.
- the actual pressing tool is then subsequently in a further galvano process (step 26) as negative image derived from the mother.
- the resulting one Form becomes "son” or matrix (English “stamper") called and serves as a press tool for mass production.
- son or matrix (English “stamper”
- the compact disc is included a transparent protective layer covering the reflective layer protects against damage and corrosion.
- the relief-like pit structure on the reflection layer of the Compactdisc has extremely small dimensions, e.g. is the The width of a pit is about 0.5 ⁇ m, the depth is about 0.1 ⁇ m and the Length varies from 1 to 3 ⁇ m, with the track spacing about 1.6 ⁇ m is.
- the width of a pit is about 0.5 ⁇ m
- the depth is about 0.1 ⁇ m
- the Length varies from 1 to 3 ⁇ m
- the track spacing about 1.6 ⁇ m is.
- FIG. 2 shows a view of an electroplating system 40, in which a deposition cell 42 is included.
- this separation cell 42 the different forms, like fathers, Mothers and matrices (sons), by depositing nickel metal manufactured.
- a cleaning system 44 for cleaning and filtering the Electrolytes.
- the rectifiers to generate the required high DC are computer controlled.
- Components in contact stand with the electrolyte are preferably off Polypropylene plastic or titanium.
- a clean room filter 48 is arranged above the separation cell 42 .
- the deposition cell 42 has one Container 50 with two outer walls, essentially are inclined at an angle to the vertical.
- a drive device 54 is arranged, which will be described in more detail below.
- a removable cover plate 51 is arranged inside the container 50.
- an anode container 56 made of titanium, which when open Cover plate 51 accessible to an operator is.
- Figure 3 shows a schematic view of the deposition cell 42 according to the invention.
- the two outer walls 60, 62 under 45 ° to the vertical is parallel to the outer wall 62 the anode container 56 is arranged, the nickel material in the form of pieces, also called pellets or flats is.
- the anode container 56 carries on its upper side a female connector 66 which is in electrical contact with a Anode line 68 has a circular cross section Has.
- the female connector 66 can be easily removed from the anode lead 68 can be solved so that the anode container 56 of an operator can be removed from the container 50 can.
- the lid 52 is connected to the by a swivel device 70 Base of the electroplating system 40 or an edge part of the container 50 connected.
- the lid 52 can thus in the direction of the arrow 72 are raised to make the interior of the container 50 accessible close.
- the shelf 78 carries the drive device 54, which is a motor 82 contains, which drives a drive shaft 84 via a gear, at the end of a clamping plate 86 is attached. On this clamping plate 86, the carrier 87 is clamped on the Nickel is deposited.
- Adjustment device 74 By adjusting the screws of the Adjustment device 74 can the clamping plate 86 and thus the Carrier 87 parallel to the opposite plane exit surface 89 aligned for nickel ions of the anode container 56 or the distance between the carrier 87 and the anode container 56 can be finely regulated.
- FIG. 4 shows a top view of the guide screen in the lower part 90; in the upper part is a cross section through the guide screen 90 shown along A-A.
- Baffle 90 may e.g. be made of solid polypropylene. Another possible manufacture can be done so that a basis of Baffle 90 made of polypropylene flat material becomes. The collar-shaped part is then welded on subsequently.
- the Baffle 90 a base 91 with a cylindrical opening 96 by a collar 98 in the form of a tube section is limited.
- the collar 98 has a recess 100, into which the outlet end of an injection nozzle (in FIG. 4 not shown).
- the top edge of the Exit end of the injector reaches the height of the Collar 98.
- the edge 102 of the opening runs in this way 96 largely smooth from the inside.
- the injector injects the cleaned electrolyte 58 toward the center of the wearer, i.e. to an intersection with an axis, which perpendicularly intersects the paper plane at point M.
- a further recess 104 is also provided in the collar 98, which is a movably mounted correction plate (not shown) from plastic. Part of this correction plate can be pushed into the opening 96 of the guide plate 90 be so that the density curve of the streamlines through this Opening 96 can be influenced. That way is one Fine adjustment of the current density distribution through the opening 96 possible, whereby the layer thickness build-up on the carrier 87 can be finely controlled.
- the base 91 is extended on the left in FIG and has an angled handle portion 106 with a hole 107. An operator can handle section 106 of outside of the container 50 easily grasp and Set the correction plate on the guide screen.
- FIG. 5 shows two views of an embodiment of the Injector 92.
- the injector 92 is made of one made of thin-walled plastic pipe, which has a Threaded section (not shown) with a corresponding Threaded portion in the feed pipe 94 is connected.
- the Plastic pipe 108 is at the outlet end 110 for the Electrolyte 58 formed slot-like and has an im Cross-section of approximately rectangular outflow channel 112 front section 114 of plastic tube 108 is so bent that the axis of the outflow channel 112 in the direction of the center of the support surface of the support 87, so that the electrolyte 58 substantially in the direction of Center of the carrier 87 is injected.
- Below the angled surface is a in this embodiment further opening 109 provided, primarily for this purpose contributes sufficient fresh electrolyte fluid to the Feed cathode compartment.
- Figure 6 shows a further embodiment of the Injector 92, which is made of solid material by turning and Milling is made. Unlike for example after Figure 5 is the inner bore eccentric to the central axis M, whereby the upper edge 116 of the front portion of the Injector 92 does not protrude higher than the height of the collar 98. This enables the distance between the clamping plates 86 and collar 98 to be kept to a minimum (see FIG. 3), so that a high growth rate of the nickel layer on the Carrier 87 is achieved with a uniform thickness. Of the rectangular outlet channel 112 is through an incision realized in the solid material. The foot section 118 can also connected to the feed pipe 94 (see FIG. 3) become.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrolytic Production Of Metals (AREA)
- Physical Vapour Deposition (AREA)
- Coating Apparatus (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Electroplating Methods And Accessories (AREA)
- Medicinal Preparation (AREA)
Description
- Fig. 1
- schematisch ein wichtiges Anwendungsgebiet der Erfindung, bei dem Formen und Preßwerkzeuge für die Compactdisc-Herstellung durch Metallabscheidung erzeugt werden,
- Fig. 2
- eine Ansicht einer Galvanikanlage, in welche eine Abscheidungszelle einbezogen ist,
- Fig. 3
- eine schematische Ansicht der Abscheidungszelle mit einem schwenkbaren und verschiebbaren Deckel,
- Fig. 4
- eine Draufsicht und eine geschnittene Ansicht der neuen Leitblende,
- Fig. 5
- zwei Ansichten einer ersten Ausführungsform der Einspritzdüse, und
- Fig. 6
- eine Ansicht einer weiteren Ausführungsform der Einspritzdüse.
Claims (10)
- Einrichtung zur galvanischen Abscheidung einer Metallschicht auf einem Träger,mit einem Behälter (50) zur Aufnahme des Elektrolyten (58),mit einem mit Anodenmaterial gefüllten Anodenbehälter (56), dessen im wesentlichen plane Austrittsfläche (89) für Metallionen des Anodenmaterials durchlässig ist, welche auf der dem Anodenbehälter (56) zugewandten Trägeroberfläche des als Kathode dienenden Trägers (87) abgeschieden werden,wobei die Trägeroberfläche annähernd parallel und im Abstand zu der ihr zugewandten Austrittsfläche (89) des Anodenbehälters (56) angeordnet ist,mit einer zwischen der Austrittsfläche (89) und der Trägeroberfläche angeordneten isolierenden Leitblende (90) mit einer Öffnung (96) zum definierten Ausbilden der elektrischen Stromlinienverteilung zwischen Anode und Kathode in der Öffnung,und mit einer Einspritzdüse (92) zum Einspritzen des Elektrolyten (58) in den Kathodenraum zwischen Leitblende (90) und Trägeroberfläche,die Leitblende (90) am Rand ihrer Öffnung (96) einen Kragen (98) in Form eines Rohrabschnitts hat,und daß das Austrittsende (110) der Einspritzdüse (92) nahe dem Kragen (98) außerhalb der öffnung (96) der Leitblende (90) angeordnet ist und den Elektrolyten (58) in Richtung der Trägeroberfläche einspritzt.
- Einrichtung nach Anspruch 1, dadurch gekennzeichnet, daß die Einspritzdüse (92) den Elektrolyten (58) in Richtung des Zentrums der Trägeroberfläche einspritzt.
- Einrichtung nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß die Einspritzdüse (92) aus einem dünnwandigen Kunststoffrohr (108) hergestellt ist.
- Einrichtung nach Anspruch 3, dadurch gekennzeichnet, daß das Austrittsende (110) der Einspritzdüse (92) schlitzartig ausgebildet ist und einen im Querschnitt annähernd rechteckigen Ausströmkanal (112) hat, dessen Längsachse annähernd in Richtung des Zentrums der Trägeroberfläche verläuft.
- Einrichtung nach Anspruch 4, dadurch gekennzeichnet, daß im Übergangsbereich zwischen rohrförmigem Teil und Ausströmkanal (112) eine in Richtung des Kathodenraums zeigende Öffnung (109) vorgesehen ist.
- Einrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß die Leitblende (90) in Richtung der Öffnung des Behälters (50) verlängert ist und einen abgewinkelten Griffabschnitt (106) hat.
- Einrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß der Kragen (98) eine Ausnehmung (100) hat, in der das Austrittsende (110) der Einspritzdüse (92) angeordnet ist, und daß die Höhe des Austrittsendes (110) kleiner oder gleich der Höhe des Kragens (98) ist.
- Einrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß zwischen Austrittsfläche (89) des Anodenbehälters (56) und Leitblende (90) eine Trennwand (88) angeordnet ist, welche den Eintritt von Teilchen oder Schlamm aus Anodenmaterial in die Öffnung (96) der Leitblende (90) verhindert.
- Einrichtung nach Anspruch 8, dadurch gekennzeichnet, daß die Trennwand (88) eine mit der Öffnung (96) der Leitblende (90) ausgerichtete Durchlaßöffnung hat, die mit einem für Metallionen durchlässigen Filter versehen ist.
- Einrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß in einer weiteren Ausnehmung (104) des Kragens (98) eine beweglich gelagerte Korrekturplatte aus Kunststoff vorgesehen ist, mit der ein kleiner Abschnitt der Öffnung (96) abdeckbar ist.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT96105228T ATE183557T1 (de) | 1996-04-01 | 1996-04-01 | Galvanische abscheidungszelle mit leitblende |
DE59602798T DE59602798D1 (de) | 1996-04-01 | 1996-04-01 | Galvanische Abscheidungszelle mit Leitblende |
EP96105228A EP0799908B1 (de) | 1996-04-01 | 1996-04-01 | Galvanische Abscheidungszelle mit Leitblende |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP96105228A EP0799908B1 (de) | 1996-04-01 | 1996-04-01 | Galvanische Abscheidungszelle mit Leitblende |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0799908A1 EP0799908A1 (de) | 1997-10-08 |
EP0799908B1 true EP0799908B1 (de) | 1999-08-18 |
Family
ID=8222637
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP96105228A Expired - Lifetime EP0799908B1 (de) | 1996-04-01 | 1996-04-01 | Galvanische Abscheidungszelle mit Leitblende |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0799908B1 (de) |
AT (1) | ATE183557T1 (de) |
DE (1) | DE59602798D1 (de) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3067925D1 (en) * | 1979-06-01 | 1984-06-28 | Emi Ltd | High-speed plating arrangement and stamper plate formed using such an arrangement |
NL8300916A (nl) * | 1983-03-14 | 1984-10-01 | Philips Nv | Werkwijze voor het galvanisch neerslaan van een homogeen dikke metaallaag, aldus verkregen metaallaag en toepassing van de aldus verkregen metaallaag, inrichting voor het uitvoeren van de werkwijze en verkregen matrijs. |
-
1996
- 1996-04-01 EP EP96105228A patent/EP0799908B1/de not_active Expired - Lifetime
- 1996-04-01 AT AT96105228T patent/ATE183557T1/de not_active IP Right Cessation
- 1996-04-01 DE DE59602798T patent/DE59602798D1/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0799908A1 (de) | 1997-10-08 |
DE59602798D1 (de) | 1999-09-23 |
ATE183557T1 (de) | 1999-09-15 |
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