EP0695813A3 - Verfahren zum Aufkohlen von Bauteilen aus kohlungsfähigen Werkstoffen mittels einer impulsförmig betriebenen Plasma-entladung - Google Patents

Verfahren zum Aufkohlen von Bauteilen aus kohlungsfähigen Werkstoffen mittels einer impulsförmig betriebenen Plasma-entladung Download PDF

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Publication number
EP0695813A3
EP0695813A3 EP95109082A EP95109082A EP0695813A3 EP 0695813 A3 EP0695813 A3 EP 0695813A3 EP 95109082 A EP95109082 A EP 95109082A EP 95109082 A EP95109082 A EP 95109082A EP 0695813 A3 EP0695813 A3 EP 0695813A3
Authority
EP
European Patent Office
Prior art keywords
carburisable
carburizing
pulses
plasma
action
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95109082A
Other languages
English (en)
French (fr)
Other versions
EP0695813B1 (de
EP0695813A2 (de
Inventor
Frank Dr Schnatbaum
Albrecht Dr Melber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALD Vacuum Technologies GmbH
Original Assignee
ALD Vacuum Technologies GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ALD Vacuum Technologies GmbH filed Critical ALD Vacuum Technologies GmbH
Publication of EP0695813A2 publication Critical patent/EP0695813A2/de
Publication of EP0695813A3 publication Critical patent/EP0695813A3/de
Application granted granted Critical
Publication of EP0695813B1 publication Critical patent/EP0695813B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C23C8/38—Treatment of ferrous surfaces

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Plasma Technology (AREA)
  • Arc Welding In General (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
EP95109082A 1994-08-06 1995-06-13 Verfahren zum Aufkohlen von Bauteilen aus kohlungsfähigen Werkstoffen mittels einer impulsförmig betriebenen Plasma-entladung Expired - Lifetime EP0695813B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4427902 1994-08-06
DE4427902A DE4427902C1 (de) 1994-08-06 1994-08-06 Verfahren zum Aufkohlen von Bauteilen aus kohlungsfähigen Werkstoffen mittels einer impulsförmig betriebenen Plasmaentladung

Publications (3)

Publication Number Publication Date
EP0695813A2 EP0695813A2 (de) 1996-02-07
EP0695813A3 true EP0695813A3 (de) 1997-02-12
EP0695813B1 EP0695813B1 (de) 1999-09-08

Family

ID=6525098

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95109082A Expired - Lifetime EP0695813B1 (de) 1994-08-06 1995-06-13 Verfahren zum Aufkohlen von Bauteilen aus kohlungsfähigen Werkstoffen mittels einer impulsförmig betriebenen Plasma-entladung

Country Status (5)

Country Link
US (1) US5558725A (de)
EP (1) EP0695813B1 (de)
JP (1) JPH08170162A (de)
AT (1) ATE184329T1 (de)
DE (2) DE4427902C1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19547131A1 (de) † 1995-12-16 1997-06-19 Ipsen Ind Int Gmbh Verfahren zur Plasmaaufkohlung metallischer Werkstücke
WO1999031291A2 (de) * 1997-12-15 1999-06-24 Volkswagen Aktiengesellschaft Plasmaborierung
GB2336603A (en) * 1998-04-23 1999-10-27 Metaltech Limited A method and apparatus for plasma boronising
IT1309928B1 (it) * 1999-12-01 2002-02-05 Bundy S P A Tubo per impianti di alimentazione di fluidi a pressione, inparticolare per l'alimentazione di carburante nei motori diesel,
DE10021583A1 (de) * 2000-05-04 2001-11-15 Ald Vacuum Techn Ag Verfahren und Vorrichtung zum Aufkohlen und Härten von Werkstückchargen
JP4744019B2 (ja) * 2000-07-12 2011-08-10 大阪府 チタン金属の表面処理方法
DE10109565B4 (de) 2001-02-28 2005-10-20 Vacuheat Gmbh Verfahren und Vorrichtung zur partiellen thermochemischen Vakuumbehandlung von metallischen Werkstücken
KR100614288B1 (ko) * 2005-01-17 2006-08-21 한국에너지기술연구원 주기적 주입방식의 저압식 진공 침탄 제어방법
DE102013006589A1 (de) * 2013-04-17 2014-10-23 Ald Vacuum Technologies Gmbh Verfahren und Vorrichtung für das thermochemische Härten von Werkstücken
JP7421373B2 (ja) * 2020-03-02 2024-01-24 日立Astemo株式会社 浸炭方法及び被処理基材

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2946708A (en) * 1950-11-09 1960-07-26 Berghaus Elektrophysik Anst Nitriding with electric glow discharge
DE2842407A1 (de) * 1978-09-29 1980-04-03 Norbert Stauder Verfahren und vorrichtung zur oberflaechenbehandlung von werkstuecken in einer gasdichten kammer durch entladung ionisierter gase
US4406765A (en) * 1980-01-28 1983-09-27 Fuji Photo Film Co., Ltd. Apparatus and process for production of amorphous semiconductor
JPH02125856A (ja) * 1988-11-04 1990-05-14 Shindengen Electric Mfg Co Ltd 金属などの熱化学処理装置
DE4003623A1 (de) * 1990-02-07 1991-08-08 Kloeckner Ionon Verfahren zur steuerung einer anlage zur plasmabehandlung von werkstuecken
DE4238993C1 (de) * 1992-01-20 1993-07-01 Leybold Durferrit Gmbh, 5000 Koeln, De
FR2708624A1 (fr) * 1993-07-30 1995-02-10 Neuville Stephane Procédé de dépôt d'un revêtement protecteur à base de pseudo carbone diamant amorphe ou de carbure de silicium modifié.

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE601847C (de) * 1933-04-01 1934-08-25 Siemens Schuckertwerke Akt Ges Verfahren zum Einbringen eines Stoffes in ein Metall
FR2501727A1 (fr) * 1981-03-13 1982-09-17 Vide Traitement Procede de traitements thermochimiques de metaux par bombardement ionique
US5127967A (en) * 1987-09-04 1992-07-07 Surface Combustion, Inc. Ion carburizing
US5383980A (en) * 1992-01-20 1995-01-24 Leybold Durferrit Gmbh Process for hardening workpieces in a pulsed plasma discharge

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2946708A (en) * 1950-11-09 1960-07-26 Berghaus Elektrophysik Anst Nitriding with electric glow discharge
DE2842407A1 (de) * 1978-09-29 1980-04-03 Norbert Stauder Verfahren und vorrichtung zur oberflaechenbehandlung von werkstuecken in einer gasdichten kammer durch entladung ionisierter gase
US4406765A (en) * 1980-01-28 1983-09-27 Fuji Photo Film Co., Ltd. Apparatus and process for production of amorphous semiconductor
JPH02125856A (ja) * 1988-11-04 1990-05-14 Shindengen Electric Mfg Co Ltd 金属などの熱化学処理装置
DE4003623A1 (de) * 1990-02-07 1991-08-08 Kloeckner Ionon Verfahren zur steuerung einer anlage zur plasmabehandlung von werkstuecken
DE4238993C1 (de) * 1992-01-20 1993-07-01 Leybold Durferrit Gmbh, 5000 Koeln, De
FR2708624A1 (fr) * 1993-07-30 1995-02-10 Neuville Stephane Procédé de dépôt d'un revêtement protecteur à base de pseudo carbone diamant amorphe ou de carbure de silicium modifié.

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 14, no. 342 (C - 0743) 24 July 1990 (1990-07-24) *

Also Published As

Publication number Publication date
ATE184329T1 (de) 1999-09-15
JPH08170162A (ja) 1996-07-02
EP0695813B1 (de) 1999-09-08
EP0695813A2 (de) 1996-02-07
DE59506771D1 (de) 1999-10-14
US5558725A (en) 1996-09-24
DE4427902C1 (de) 1995-03-30

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