EP0685838A3 - - Google Patents

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Publication number
EP0685838A3
EP0685838A3 EP95303383A EP95303383A EP0685838A3 EP 0685838 A3 EP0685838 A3 EP 0685838A3 EP 95303383 A EP95303383 A EP 95303383A EP 95303383 A EP95303383 A EP 95303383A EP 0685838 A3 EP0685838 A3 EP 0685838A3
Authority
EP
European Patent Office
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP95303383A
Other versions
EP0685838A2 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of EP0685838A2 publication Critical patent/EP0685838A2/en
Publication of EP0685838A3 publication Critical patent/EP0685838A3/xx
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/60—Fluid-dynamic spacing of heads from record-carriers
    • G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00—Head arrangements not specific to the method of recording or reproducing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00—Head arrangements not specific to the method of recording or reproducing
    • G11B21/16—Supporting the heads; Supporting the sockets for plug-in heads
    • G11B21/20—Supporting the heads; Supporting the sockets for plug-in heads while the head is in operative position but stationary or permitting minor movements to follow irregularities in surface of record carrier
    • G11B21/21—Supporting the heads; Supporting the sockets for plug-in heads while the head is in operative position but stationary or permitting minor movements to follow irregularities in surface of record carrier with provision for maintaining desired spacing of head from record carrier, e.g. fluid-dynamic spacing, slider
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G11B5/3173—Batch fabrication, i.e. producing a plurality of head structures in one batch
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/60—Fluid-dynamic spacing of heads from record-carriers
    • G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
    • G11B5/6082—Design of the air bearing surface
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T225/00—Severing by tearing or breaking
    • Y10T225/10—Methods
    • Y10T225/12—With preliminary weakening
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
EP95303383A 1994-05-23 1995-05-22 Method of producing thin film elements Withdrawn EP0685838A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US248281 1994-05-23
US08/248,281 US5739048A (en) 1994-05-23 1994-05-23 Method for forming rows of partially separated thin film elements

Publications (2)

Publication Number Publication Date
EP0685838A2 EP0685838A2 (en) 1995-12-06
EP0685838A3 true EP0685838A3 (en) 1996-01-03

Family

ID=22938444

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95303383A Withdrawn EP0685838A2 (en) 1994-05-23 1995-05-22 Method of producing thin film elements

Country Status (7)

Country Link
US (1) US5739048A (en)
EP (1) EP0685838A2 (en)
JP (1) JP3098394B2 (en)
KR (1) KR100207878B1 (en)
CN (1) CN1099134C (en)
MY (1) MY125591A (en)
TW (1) TW275153B (en)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2322226B (en) * 1996-02-15 1999-06-23 Tdk Corp Magnetic head apparatus
US6360428B1 (en) * 1998-04-16 2002-03-26 Seagate Technology Llc Glide heads and methods for making glide heads
SG93218A1 (en) * 1998-05-06 2002-12-17 Tdk Corp Thin-film magnetic head material and method of manufacturing same and method of manufacturing thin-film magnetic heads
FR2781916B1 (en) * 1998-07-28 2000-09-08 Commissariat Energie Atomique METHOD FOR THE COLLECTIVE REALIZATION OF INTEGRATED MAGNETIC HEADS WITH A SUPPORTING SURFACE OBTAINED BY PHOTOLITHOGRAPHY
US6663817B1 (en) * 1999-03-26 2003-12-16 Hitachi Global Storage Technologies Netherlands, B.V. Method for manufacture of sliders
US6312313B1 (en) 1999-10-06 2001-11-06 Intenational Business Machines Corporation Non-linear transducer lay-out of thin film head wafer for fabrication of high camber and crown sliders
JP3332222B2 (en) * 1999-10-21 2002-10-07 ティーディーケイ株式会社 Method for manufacturing slider material, method for manufacturing slider, and material for slider
US6255621B1 (en) 2000-01-31 2001-07-03 International Business Machines Corporation Laser cutting method for forming magnetic recording head sliders
US6710295B1 (en) * 2000-06-15 2004-03-23 Hitachi Global Storage Technologies Netherlands, B.V. Slider curvature modification by substrate melting effect produced with a pulsed laser beam
KR100525568B1 (en) * 2000-07-13 2005-11-03 시게이트 테크놀로지 엘엘씨 Process and apparatus for finishing a magnetic slider
US6676878B2 (en) 2001-01-31 2004-01-13 Electro Scientific Industries, Inc. Laser segmented cutting
US7157038B2 (en) 2000-09-20 2007-01-02 Electro Scientific Industries, Inc. Ultraviolet laser ablative patterning of microstructures in semiconductors
US20060091126A1 (en) * 2001-01-31 2006-05-04 Baird Brian W Ultraviolet laser ablative patterning of microstructures in semiconductors
JP2004532013A (en) * 2001-03-01 2004-10-21 エピゲノミクス アーゲー Methods, systems and computer program products for determining the biological effect and / or activity of a drug, chemical and / or pharmaceutical composition based on its effect on DNA methylation
US6798931B2 (en) * 2001-03-06 2004-09-28 Digital Optics Corp. Separating of optical integrated modules and structures formed thereby
US20030066816A1 (en) * 2001-09-17 2003-04-10 Schultz Gary A. Uniform patterning for deep reactive ion etching
JP3793125B2 (en) * 2002-07-18 2006-07-05 富士通株式会社 Device chip manufacturing method
US8053279B2 (en) * 2007-06-19 2011-11-08 Micron Technology, Inc. Methods and systems for imaging and cutting semiconductor wafers and other semiconductor workpieces
US7662669B2 (en) * 2007-07-24 2010-02-16 Northrop Grumman Space & Mission Systems Corp. Method of exposing circuit lateral interconnect contacts by wafer saw
US9165573B1 (en) 2009-11-12 2015-10-20 Western Digital (Fremont), Llc Method for controlling camber on air bearing surface of a slider
JP5701804B2 (en) * 2012-03-23 2015-04-15 株式会社東芝 Magnetic head slider inspection method, inspection program, and magnetic head manufacturing method
US9242340B1 (en) 2013-03-12 2016-01-26 Western Digital Technologies, Inc. Method to stress relieve a magnetic recording head transducer utilizing ultrasonic cavitation
CN104647615A (en) * 2013-11-15 2015-05-27 台湾暹劲股份有限公司 Wafer cutting device and cutting method thereof
EP3165615B1 (en) * 2014-07-03 2022-12-21 Nippon Steel Corporation Use of a laser processing apparatus for refining magnetic domains of a grain-oriented electromagnetic steel sheet
CN107188111A (en) * 2017-05-27 2017-09-22 龙微科技无锡有限公司 The splinter method of MEMS sensor wafer, MEMS sensor wafer
CN115831736B (en) * 2023-02-13 2023-05-05 成都万应微电子有限公司 Cutting method of semiconductor material product

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4226018A (en) * 1978-02-27 1980-10-07 Nippon Telegraph And Telephone Public Corporation Method for manufacturing a floating type thin film magnetic head
JPS61181177A (en) * 1985-02-07 1986-08-13 Toshiba Corp Semiconductor light-emitting element
US4624048A (en) * 1983-08-17 1986-11-25 International Business Machines Method of making magnetic head sliders
JPH03222346A (en) * 1990-01-26 1991-10-01 Nec Corp Manufacture of semiconductor element
JPH04276645A (en) * 1991-03-04 1992-10-01 Toshiba Corp Dicing method of compound semiconductor wafer

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3970819A (en) * 1974-11-25 1976-07-20 International Business Machines Corporation Backside laser dicing system
DE2730130C2 (en) * 1976-09-14 1987-11-12 Mitsubishi Denki K.K., Tokyo Method for manufacturing semiconductor components
IN154896B (en) * 1980-07-10 1984-12-22 Westinghouse Electric Corp
US4333229A (en) * 1980-07-21 1982-06-08 Memorex Corporation Method of manufacturing thin film magnetic head/slider combination
US4644641A (en) * 1985-12-30 1987-02-24 Memorex Corporation Fabrication of "Delta" magnetic head-sliders
US5196378A (en) * 1987-12-17 1993-03-23 Texas Instruments Incorporated Method of fabricating an integrated circuit having active regions near a die edge
US5095613A (en) * 1990-06-29 1992-03-17 Digital Equipment Corporation Thin film head slider fabrication process
US5272114A (en) * 1990-12-10 1993-12-21 Amoco Corporation Method for cleaving a semiconductor crystal body
US5418190A (en) * 1993-12-30 1995-05-23 At&T Corp. Method of fabrication for electro-optical devices

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4226018A (en) * 1978-02-27 1980-10-07 Nippon Telegraph And Telephone Public Corporation Method for manufacturing a floating type thin film magnetic head
US4624048A (en) * 1983-08-17 1986-11-25 International Business Machines Method of making magnetic head sliders
JPS61181177A (en) * 1985-02-07 1986-08-13 Toshiba Corp Semiconductor light-emitting element
JPH03222346A (en) * 1990-01-26 1991-10-01 Nec Corp Manufacture of semiconductor element
JPH04276645A (en) * 1991-03-04 1992-10-01 Toshiba Corp Dicing method of compound semiconductor wafer
US5314844A (en) * 1991-03-04 1994-05-24 Kabushiki Kaisha Toshiba Method for dicing a semiconductor wafer

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 011, no. 004 (E - 468) 7 January 1987 (1987-01-07) *
PATENT ABSTRACTS OF JAPAN vol. 015, no. 506 (E - 1148) 20 December 1991 (1991-12-20) *
PATENT ABSTRACTS OF JAPAN vol. 017, no. 075 (E - 1320) 15 February 1993 (1993-02-15) *

Also Published As

Publication number Publication date
CN1099134C (en) 2003-01-15
CN1122518A (en) 1996-05-15
TW275153B (en) 1996-05-01
MY125591A (en) 2006-08-30
EP0685838A2 (en) 1995-12-06
JPH07320249A (en) 1995-12-08
KR100207878B1 (en) 1999-07-15
JP3098394B2 (en) 2000-10-16
US5739048A (en) 1998-04-14

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 19960308

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Withdrawal date: 19960412