EP0080407A3 - Process and apparatus for removing coatings from objects - Google Patents

Process and apparatus for removing coatings from objects

Info

Publication number
EP0080407A3
EP0080407A3 EP19820402096 EP82402096A EP0080407A3 EP 0080407 A3 EP0080407 A3 EP 0080407A3 EP 19820402096 EP19820402096 EP 19820402096 EP 82402096 A EP82402096 A EP 82402096A EP 0080407 A3 EP0080407 A3 EP 0080407A3
Authority
EP
Grant status
Application
Patent type
Prior art keywords
process
apparatus
removing
coatings
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19820402096
Other versions
EP0080407A2 (en )
EP0080407B1 (en )
Inventor
Bernd Blaudszun
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
Original Assignee
Air Liquide SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DEGREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/04Apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0064Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes
    • B08B7/0092Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes by cooling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B44DECORATIVE ARTS
    • B44DPAINTING OR ARTISTIC DRAWING, NOT OTHERWISE PROVIDED FOR; PRESERVING PAINTINGS; SURFACE TREATMENT TO OBTAIN SPECIAL ARTISTIC SURFACE EFFECTS OR FINISHES
    • B44D3/00Accessories or implements for use in connection with painting or artistic drawing, not otherwise provided for; Methods or devices for colour determination, selection, or synthesis, e.g. use of colour tables
    • B44D3/16Implements or apparatus for removing dry paint from surfaces, e.g. by scraping, by burning
EP19820402096 1981-11-19 1982-11-17 Process and apparatus for removing coatings from objects Expired EP0080407B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19813145815 DE3145815C2 (en) 1981-11-19 1981-11-19
DE3145815 1981-11-19

Publications (3)

Publication Number Publication Date
EP0080407A2 true EP0080407A2 (en) 1983-06-01
EP0080407A3 true true EP0080407A3 (en) 1983-11-23
EP0080407B1 EP0080407B1 (en) 1986-03-26

Family

ID=6146705

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19820402096 Expired EP0080407B1 (en) 1981-11-19 1982-11-17 Process and apparatus for removing coatings from objects

Country Status (6)

Country Link
US (1) US4474199A (en)
EP (1) EP0080407B1 (en)
JP (1) JPS58117883A (en)
CA (1) CA1195594A (en)
DE (1) DE3145815C2 (en)
ES (1) ES517399A0 (en)

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DE3644807A1 (en) * 1986-12-31 1988-07-14 Meyer Rud Otto Method of treating the waste air from a continuous purification system, and system for carrying out the method
DE3725565A1 (en) * 1987-08-01 1989-02-16 Peter Weil Method and apparatus for paint removal of objects with a tauchbehaelter with solvent
DE8816444U1 (en) * 1988-05-27 1989-08-24 C. Christ Abgasfreie Werkzeugreinigungsapparate Fuer Die Kunststoffindustrie, 8000 Muenchen, De
DE3823322C2 (en) * 1988-07-09 1990-05-10 Carl Dittmann Gmbh & Co Kg, 7500 Karlsruhe, De
US5051135A (en) * 1989-01-30 1991-09-24 Kabushiki Kaisha Tiyoda Seisakusho Cleaning method using a solvent while preventing discharge of solvent vapors to the environment
CA2003859A1 (en) * 1989-02-01 1990-08-01 David Alan Dickinson Technique for cleaning an object with a combustible cleaning solvent
CA2011397C (en) * 1989-03-06 1994-07-12 Michael T. Mittag Method and apparatus for cleaning electronic and other devices
EP0458789B1 (en) * 1989-12-15 1994-02-23 Flühs Drehtechnik GmbH. Process and device for separating solvents and oils
US5304253A (en) * 1990-09-12 1994-04-19 Baxter International Inc. Method for cleaning with a volatile solvent
DE4119303C2 (en) * 1991-06-12 1993-04-01 Rolf Prof. Dr.-Ing. 6750 Kaiserslautern De Germerdonk
GB2264045B (en) * 1992-02-12 1995-10-11 Kwik Strip Stripping paint and varnish
US5261965A (en) * 1992-08-28 1993-11-16 Texas Instruments Incorporated Semiconductor wafer cleaning using condensed-phase processing
JP3390245B2 (en) * 1993-06-01 2003-03-24 富士通株式会社 Cleaning solution and a cleaning method
DE4324432C2 (en) * 1993-07-21 1996-04-25 Multimatic Oberflaechentechnik A method for cleaning soiled parts
US5377705A (en) * 1993-09-16 1995-01-03 Autoclave Engineers, Inc. Precision cleaning system
DE4436425A1 (en) * 1994-10-12 1996-04-18 Wack O K Chemie Gmbh Cleaning agent for polished metal surfaces
US6306564B1 (en) 1997-05-27 2001-10-23 Tokyo Electron Limited Removal of resist or residue from semiconductors using supercritical carbon dioxide
US6871656B2 (en) 1997-05-27 2005-03-29 Tokyo Electron Limited Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process
US6500605B1 (en) 1997-05-27 2002-12-31 Tokyo Electron Limited Removal of photoresist and residue from substrate using supercritical carbon dioxide process
DE19809622A1 (en) * 1998-03-06 1999-09-09 Knaack & Jahn Gmbh are plant for the treatment of objects in a defined gas atmosphere whose O¶2¶ content is less than of air and produced in the polluting processing gases
US6277753B1 (en) 1998-09-28 2001-08-21 Supercritical Systems Inc. Removal of CMP residue from semiconductors using supercritical carbon dioxide process
FI113750B (en) 1999-05-21 2004-06-15 Kojair Tech Oy A method and apparatus for washing in the semiconductor industry tools
US6748960B1 (en) 1999-11-02 2004-06-15 Tokyo Electron Limited Apparatus for supercritical processing of multiple workpieces
EP1243021A2 (en) 1999-11-02 2002-09-25 Tokyo Electron Limited Method and apparatus for supercritical processing of a workpiece
US6890853B2 (en) * 2000-04-25 2005-05-10 Tokyo Electron Limited Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module
DE10032109A1 (en) * 2000-07-01 2002-03-28 Bernd Blaudszun Recovery of active components from Aloe vera, e.g. juice with cathartic activity and gel for cosmetic or nutritional use, by mechanically separating the epidermis and parenchym under a cooled inert gas
JP4724353B2 (en) 2000-07-26 2011-07-13 東京エレクトロン株式会社 High-pressure processing chamber for semiconductor substrate
US20040040660A1 (en) * 2001-10-03 2004-03-04 Biberger Maximilian Albert High pressure processing chamber for multiple semiconductor substrates
US7001468B1 (en) 2002-02-15 2006-02-21 Tokyo Electron Limited Pressure energized pressure vessel opening and closing device and method of providing therefor
US7387868B2 (en) * 2002-03-04 2008-06-17 Tokyo Electron Limited Treatment of a dielectric layer using supercritical CO2
US7021635B2 (en) * 2003-02-06 2006-04-04 Tokyo Electron Limited Vacuum chuck utilizing sintered material and method of providing thereof
US7225820B2 (en) * 2003-02-10 2007-06-05 Tokyo Electron Limited High-pressure processing chamber for a semiconductor wafer
US7077917B2 (en) 2003-02-10 2006-07-18 Tokyo Electric Limited High-pressure processing chamber for a semiconductor wafer
US7270137B2 (en) * 2003-04-28 2007-09-18 Tokyo Electron Limited Apparatus and method of securing a workpiece during high-pressure processing
US7163380B2 (en) * 2003-07-29 2007-01-16 Tokyo Electron Limited Control of fluid flow in the processing of an object with a fluid
US20050022850A1 (en) * 2003-07-29 2005-02-03 Supercritical Systems, Inc. Regulation of flow of processing chemistry only into a processing chamber
US20050035514A1 (en) * 2003-08-11 2005-02-17 Supercritical Systems, Inc. Vacuum chuck apparatus and method for holding a wafer during high pressure processing
US20050067002A1 (en) * 2003-09-25 2005-03-31 Supercritical Systems, Inc. Processing chamber including a circulation loop integrally formed in a chamber housing
US7250374B2 (en) 2004-06-30 2007-07-31 Tokyo Electron Limited System and method for processing a substrate using supercritical carbon dioxide processing
US7307019B2 (en) 2004-09-29 2007-12-11 Tokyo Electron Limited Method for supercritical carbon dioxide processing of fluoro-carbon films
US20060065189A1 (en) * 2004-09-30 2006-03-30 Darko Babic Method and system for homogenization of supercritical fluid in a high pressure processing system
US7186093B2 (en) * 2004-10-05 2007-03-06 Tokyo Electron Limited Method and apparatus for cooling motor bearings of a high pressure pump
US7491036B2 (en) 2004-11-12 2009-02-17 Tokyo Electron Limited Method and system for cooling a pump
US20060102282A1 (en) * 2004-11-15 2006-05-18 Supercritical Systems, Inc. Method and apparatus for selectively filtering residue from a processing chamber
US7434590B2 (en) 2004-12-22 2008-10-14 Tokyo Electron Limited Method and apparatus for clamping a substrate in a high pressure processing system
US7140393B2 (en) 2004-12-22 2006-11-28 Tokyo Electron Limited Non-contact shuttle valve for flow diversion in high pressure systems
US7435447B2 (en) 2005-02-15 2008-10-14 Tokyo Electron Limited Method and system for determining flow conditions in a high pressure processing system
US7291565B2 (en) 2005-02-15 2007-11-06 Tokyo Electron Limited Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
US7380984B2 (en) * 2005-03-28 2008-06-03 Tokyo Electron Limited Process flow thermocouple
US7767145B2 (en) * 2005-03-28 2010-08-03 Toyko Electron Limited High pressure fourier transform infrared cell
US20060225772A1 (en) * 2005-03-29 2006-10-12 Jones William D Controlled pressure differential in a high-pressure processing chamber
US7494107B2 (en) * 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US7789971B2 (en) 2005-05-13 2010-09-07 Tokyo Electron Limited Treatment of substrate using functionalizing agent in supercritical carbon dioxide
US7524383B2 (en) 2005-05-25 2009-04-28 Tokyo Electron Limited Method and system for passivating a processing chamber
US9327243B2 (en) * 2012-08-24 2016-05-03 The Boeing Company Aircraft fuel tank flammability reduction methods and systems
GB201616581D0 (en) * 2016-09-29 2016-11-16 Mexichem Fluor Sa De Cv A propellant filling apparatus

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR423281A (en) * 1910-12-03 1911-04-12 Martini & Hueneke Maschb Aktie Method and apparatus for degreasing metal objects to be galvanized using volatile solvents maintained in continuous circulation
FR839867A (en) * 1937-09-18 1939-04-13 Suisse D Explosifs S A Fab Method and apparatus for cleaning objects
US3085948A (en) * 1961-07-17 1963-04-16 Detrex Chem Ind Continuous degreaser
DE2541613A1 (en) * 1975-09-18 1977-03-24 Gernot Karau Cleaning small metal parts - by agitation in fluoro-chloro-hydrocarbon and drying in vertical dryer
US4111715A (en) * 1976-03-15 1978-09-05 Westinghouse Electric Corp. Apparatus and method for chemically removing plastics

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE235548C (en) *
US2466769A (en) * 1947-05-02 1949-04-12 Barry Wehmiller Mach Co Apparatus for varying the temperatures of traveling containers
FR2223096B1 (en) * 1973-03-26 1976-09-10 Usinor
US4133663A (en) 1976-03-29 1979-01-09 Air Products And Chemicals, Inc. Removing vinyl chloride from a vent gas stream

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR423281A (en) * 1910-12-03 1911-04-12 Martini & Hueneke Maschb Aktie Method and apparatus for degreasing metal objects to be galvanized using volatile solvents maintained in continuous circulation
FR839867A (en) * 1937-09-18 1939-04-13 Suisse D Explosifs S A Fab Method and apparatus for cleaning objects
US3085948A (en) * 1961-07-17 1963-04-16 Detrex Chem Ind Continuous degreaser
DE2541613A1 (en) * 1975-09-18 1977-03-24 Gernot Karau Cleaning small metal parts - by agitation in fluoro-chloro-hydrocarbon and drying in vertical dryer
US4111715A (en) * 1976-03-15 1978-09-05 Westinghouse Electric Corp. Apparatus and method for chemically removing plastics

Also Published As

Publication number Publication date Type
ES517399A0 (en) 1983-12-01 application
ES517399D0 (en) grant
JPS58117883A (en) 1983-07-13 application
DE3145815C2 (en) 1984-08-09 grant
US4474199A (en) 1984-10-02 grant
ES8401532A1 (en) 1983-12-01 application
EP0080407A2 (en) 1983-06-01 application
EP0080407B1 (en) 1986-03-26 grant
DE3145815A1 (en) 1983-06-09 application
CA1195594A (en) 1985-10-22 grant
CA1195594A1 (en) grant

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