EP0040137B1 - Machine de rectification de matériaux durs, notamment de quartz - Google Patents

Machine de rectification de matériaux durs, notamment de quartz Download PDF

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Publication number
EP0040137B1
EP0040137B1 EP19810400703 EP81400703A EP0040137B1 EP 0040137 B1 EP0040137 B1 EP 0040137B1 EP 19810400703 EP19810400703 EP 19810400703 EP 81400703 A EP81400703 A EP 81400703A EP 0040137 B1 EP0040137 B1 EP 0040137B1
Authority
EP
European Patent Office
Prior art keywords
machine according
plate
satellites
satellite
abovementioned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP19810400703
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German (de)
English (en)
French (fr)
Other versions
EP0040137A1 (fr
Inventor
Daniel Maurice Paul Bieler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
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Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP0040137A1 publication Critical patent/EP0040137A1/fr
Application granted granted Critical
Publication of EP0040137B1 publication Critical patent/EP0040137B1/fr
Expired legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor

Definitions

  • the present invention relates to a grinding or grinding machine, of hard materials, and in particular of quartz with piezoelectric effect, by abrasion, of the type in which the part is worn by friction against a surface on which an abrasive is deposited.
  • the upper grinding plate is driven by a main oscillatory or rotary movement, being mounted by its central part on an eccentric spindle, driven in rotation around the axis of symmetry of the annular retaining element, as well as an intermittent or continuous secondary movement, ensured, respectively, by means of an elastic return roller or roller cooperating with a toothing formed on the periphery of the upper grinding plate, each time the latter is brought against the roller in its movement main, or by means of a toothed wheel secured to the eccentric pin and engaged with a fixed pinion coaxial with the axis of symmetry of the annular retaining element, an arm, the free end of which carries a finger penetrating into a blind hole on the upper face of the upper plate, being further articulated by its other upper end of the spindle, so that there occurs a renewal, respectively, intermittent or conti bare, from the lower surface of the upper grinding plate in contact with the upper face of the wafers, the grinding of which is facilitated by the supply, towards the latter, of an abras
  • this machine does not allow the relative movements described by the surfaces in contact to be adapted as well as the speeds with which these movements are described, in order to obtain good accuracy, regardless of the nature of the hard material to be ground. Incidentally, this machine does not make it possible to choose the planes according to which each face of a wafer must be rectified.
  • German patent DE-B-1,029,699 describes a flat stone polishing machine in which the stone is supported by a turntable resting on hydraulic cylinders connected to a common chamber by means of restrictions.
  • the pressure which the grinding wheel exerts on the thickest parts of the stone, causes a modification of the position of the latter relative to the grinding wheel by hydraulic compensation of the pressures in the support jacks.
  • the stone then quickly finds an average position corresponding substantially to the theoretical plane of "smoothing the bumps and hollows.
  • This arrangement does not have the guiding qualities necessary for polishing crystals such as quartz and furthermore does not make it possible to choose and maintain the orientation of the face to be polished with respect to a determined direction.
  • a first object of the present invention is a grinding machine making it possible to rectify parts made of hard materials, such as quartz, and to make them flat and parallel by turning once the correction is made on one face.
  • a second object of the present invention is to allow, in a grinding machine, the adjustment of the angle of the faces relative to the main axis of the crystal to the desired value, as well as that of the thickness of the pieces while obtaining a very good surface condition.
  • the machine for the grinding of parts made of hard materials by abrasion, comprising ducts for supplying an abrasive to the parts arranged in the cells of a fixed plate, above which a friction surface is driven in rotation, as is the case in the machine which is the subject of the aforementioned patent, is characterized in that it comprises a planetary system, rotating above the fixed plate, and the satellites of which rotate above the parts, so that the underside of the satellites constitutes the friction surface capable of being brought into contact with the upper faces of the parts, each placed on a table also placed in the corresponding plate of the fixed plate.
  • the satellites rotate in cycloidal movements beyond above plates or parts carried by tables and remaining fixed on the tray.
  • the tables are pivotally mounted on the edge of a knife placed below one of their ends, the angular position of each table being adjusted by the action of a micrometric screw carrying under the table in the vicinity of another end, each position adjustment being carried out individually, so that it is possible to erode the plates at a determined angle.
  • each table is mechanically biased against a base, arranged in the fixed plate, and carrying on the one hand, the knife, and on the other hand, the drive means of the micrometric screw, such as a stepper or direct current motor, by a magnetic suction cup, whose body is fixed to the base and whose pole plate is fixed to the table.
  • the drive means of the micrometric screw such as a stepper or direct current motor
  • the quartz plates are held on the aforementioned tables by suction. This is obtained by using tables having a multitude of orifices opening at their upper faces and joined together by means of a collector to a suction device.
  • the cooperation of satellites and plates for running-in can be ensured by mounting the base on the rods of a jack and by guiding it by vertical rails on guide columns, the jack controlling the elevation of the base and tables at as the parts are abraded.
  • the satellites are driven by an internal toothed ring and guided by an external toothed ring secured to a fixed plate support, the internal toothed ring being itself driven by an axis extending to the inside a sheath through the base, the axis itself being driven by a motor.
  • the satellites are rotated with a planet carrier plate, under which each satellite is suspended by means of a gimbal type transmission, the planet carrier plate being mounted in rotation under an arm a bracket whose mast is disposed laterally relative to the fixed plate.
  • the satellites are each driven in rotation on themselves on an axis passing through the planet carrier plate and secured, above the latter, to a pulley connected by a belt to a central pulley, coaxial with the planet carrier plate, and capable of being driven in rotation independently of the rotation of the planet carrier plate, so that the speed and the direction of rotation of the satellites on themselves can be chosen independently of the speed and direction of rotation of the planet carrier plate, which allows a very advantageous adaptation of the machine to the nature of the hard material constituting the plates to be lapped.
  • the means for driving in rotation the planet carrier plate as well are carried by the bracket, preferably by the arm mounted to pivot on the mast, and sliding along this latest.
  • the machine consists of a base 1 on which is mounted a base 2, both preferably of granite, the base 2 can move vertically along five guide columns 3 under faction d 'a jack 4, preferably comprising three rods 5.
  • the base 2 is pierced, in its central part, with a bore 6 through which passes a sheath 7 containing a drive axis 8, which drives the internal toothed crown 9 in rotation.
  • Satellites 10 are supported by their teeth on the one hand on the pinion 9 and on the other hand on the external toothed ring 11.
  • the shaft 8 is rotated by a bevel gear 12, the shaft of which 13 is connected to an electric motor, not shown.
  • the plate 18 carries five tables 17.
  • the base 2 slides on the columns 3 by means of vertical guide rails 20 on which come rolling tables.
  • the base 1 and the base 2 are made of granite, the stability of which compares advantageously with that of cast iron.
  • the precision rolling tables make it possible to obtain an absolutely vertical displacement, which is necessary so that the plate 18 is very exactly horizontal. It is in fact with respect to the position of the plate 18 that we will determine the inclination of the tables 17 and consequently the inclination of the faces of each quartz with respect to its main axis.
  • the operation of the machine is generally as follows: the base 2 occupying its low position by retraction of the rods 5 of the jack 4 inside the cylinder body, the quartz plates are placed on the tables 17 and held thereon as explained later.
  • the satellites 10 are arranged above the quartz plates and the cover 14 is lowered. Then, by the action of the jack 4, the base 2 is pushed upwards.
  • the pinion 9 is rotated while the abrasive arrives through the conduits 15.
  • FIG. 3 represents a vertical section through a radial plane passing through the axis of the machine representing in partial view the mounting of a table 17 on the base 2.
  • the machine makes it possible to obtain an inclination of the tables 17, on which the quartz plates (not shown in FIG. 3) are arranged, so as to obtain the formation of an angle between a face of said plate and the horizontal plane.
  • a table 17 is included in a cell 21, formed in the plate 18 mounted on the support 19, by means of a seal 22 which prevents the abrasive from entering the inside of the mechanism of the machine.
  • the table 17 is supported by the base 2 preferably by means of a magnetic suction cup, the body 23 of which is screwed by a screw 24 into the base 2, and the pole plate 25 of which is integral with the table 17 by a screw 26.
  • the table 17 rests by its two ends on the one hand on a pivot 27, knife-shaped, secured to the base 2 by one of its ends, and on a micrometric screw 28, whose movement is controlled by a stepping or direct current motor 29.
  • FIG. 4 represents a section similar to that of FIG. 3, but by another radial plane, which makes it possible to distinguish the system for holding the wafers in a horizontal position by a set of conduits 30 interconnected by a manifold 31 with a pipe 32 connected to any device capable of producing a strong depression.
  • the three quartz plates 16 are held against the forces applied to them laterally by a frame 33.
  • the device for holding and applying the plates against the table surface makes it possible to avoid errors. angle resulting from the presence of drops of adhesive of undetermined diameter.
  • Figures 6, 7 and 8 are diagrams for understanding the process of developing quartz wafers with parallel faces oriented relative to the main axis.
  • the first step is to make the upper face 16b parallel to the axis 16a. This is obtained as explained above by tilting the table 17 by a determined angle. Then, the wafer is turned over and, according to the same inclination, the face 16c is lapped so as to become parallel to the face 16b, and consequently to the main axis 16a. Under these conditions, a quartz or a quartz plate is obtained, the faces 16b and 16c of which are parallel to each other on the one hand and parallel to the direction of the main axis on the other or inclined thereon. a well-defined angle.
  • the position of the faces 16b and 16c relative to the main axis is determined by direction finding by rectification.
  • the machine according to the invention therefore makes it possible to produce parts the opposite surfaces of which form an angle of a certain precision while having perfect flatness, which makes it possible to use quartz which previously was rejected as having insufficient radioelectric characteristics.
  • the cylinder 4 which can be a hydraulic or pneumatic cylinder, just intended to compensate for the elimination of the material due to abrasion, a system for evacuating the abrasive and powdered material being provided.
  • the machine shown in Figures 9 and 10 differs from that shown in Figures 1 to 5 only in the constitution and drive of the planetary system, which, in this second embodiment, does not include any of the elements following; pinion 9, drive shaft 8, sheath 7, angular gear 12 and shaft 13, and external gear ring 11.
  • This central pulley 39 is fixedly mounted on the lower end of a sleeve crossed coaxially by a shaft 40, mounted journalled in the free end of the arm 41 of a bracket whose other end is pivotally mounted around the mast 42 of the bracket disposed vertically on the base 1, on the side of the fixed plate 18 and its support 19.
  • the planet carrier plate 34 is integral in rotation, by its part c entry, from the lower end of the shaft 40, the upper end of which, projecting above the arm 41 of the bracket, is rotationally secured to a pulley 43 connected by a belt 44 to a pulley 45 fixed on the output shaft of an electric drive motor 46 carried by the pivoting end of the arm 41, in a direction diametrically opposite to that directed towards the shaft 40 relative to the pivot axis of the arm 41 on the mast 42 of the gallows, for the purpose of balance.
  • auxiliary motor also carried by the arm 41 of the bracket, or from a power take-off suitably chosen on the motor 46 or the pulleys 45 and 43, and by means adapted references, to drive the central pulley 39 in rotation independently of the rotational movement of the planet carrier plate 34, so that the direction and the speed of rotation of the satellites 10 on themselves are chosen independently of the direction and the speed of rotation of the planet carrier plate 34, which makes it possible to adapt to the hard material from which the plates to be lapped are made.
  • the arm 41 of the bracket is slidably mounted along the mast 42 and its vertical movements are controlled by a hydraulic or pneumatic cylinder (not shown) housed in the mast 42, making it possible to apply the satellites 10 to the fixed plate 18, or to release them from this plate 18, which controls the flatness of the satellites 10 suspended by cardan joints 35 under the planet carrier plate 34.
  • the abrasive supply conduits can be arranged in a substantially radial position so that the abrasive is supplied either between the satellites 10 and the planet carrier plate 34, if these conduits are carried by the bracket and moved with the planetary system, or between the satellites 10 and the fixed plate 18 if these conduits are carried by the base 1 for example.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
EP19810400703 1980-05-08 1981-05-05 Machine de rectification de matériaux durs, notamment de quartz Expired EP0040137B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8010300A FR2481980A1 (fr) 1980-05-08 1980-05-08 Machine de rectification de materiaux durs et notamment de quartz
FR8010300 1980-05-08

Publications (2)

Publication Number Publication Date
EP0040137A1 EP0040137A1 (fr) 1981-11-18
EP0040137B1 true EP0040137B1 (fr) 1984-09-05

Family

ID=9241762

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19810400703 Expired EP0040137B1 (fr) 1980-05-08 1981-05-05 Machine de rectification de matériaux durs, notamment de quartz

Country Status (3)

Country Link
EP (1) EP0040137B1 (enrdf_load_stackoverflow)
DE (1) DE3165824D1 (enrdf_load_stackoverflow)
FR (1) FR2481980A1 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0684106B1 (en) 1994-05-23 2000-04-05 Sumitomo Electric Industries, Ltd. Method to produce a hard material coated wafer
CN104029117B (zh) * 2014-07-01 2015-04-29 中州大学 一种转角离合式永磁体吸盘
CN111015423A (zh) * 2020-01-15 2020-04-17 东阳阿语机械科技有限公司 一种用于高精度齿轮的研磨装置
CN114523377B (zh) * 2022-03-19 2023-02-17 惠州大唐伟业电子有限公司 一种可以双面打磨光学镜片的高效打磨装置
CN116372702B (zh) * 2023-06-06 2023-08-15 安徽宏路新材料科技有限公司 一种路缘石可定厚多面磨抛装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR958861A (enrdf_load_stackoverflow) * 1950-03-21
DE848918C (de) * 1950-09-20 1952-09-08 Otto Wilhelm Dipl-In Burkhardt Plattenplanschleifmaschine mittels rotierender Schurscheibe
DE1029699B (de) * 1954-06-30 1958-05-08 Fritz Graupner Vorrichtung zum Planschleifen von Steinplatten, insbesondere Terrazzoplatten
US3461621A (en) * 1967-06-27 1969-08-19 Textron Inc Machine for face-grinding bearing rings or the like

Also Published As

Publication number Publication date
EP0040137A1 (fr) 1981-11-18
FR2481980A1 (fr) 1981-11-13
FR2481980B1 (enrdf_load_stackoverflow) 1983-07-22
DE3165824D1 (en) 1984-10-11

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