EP0000866A1 - Procédé de fabrication d'un système analyseur pour filtre de masse multipôles - Google Patents

Procédé de fabrication d'un système analyseur pour filtre de masse multipôles Download PDF

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Publication number
EP0000866A1
EP0000866A1 EP78100260A EP78100260A EP0000866A1 EP 0000866 A1 EP0000866 A1 EP 0000866A1 EP 78100260 A EP78100260 A EP 78100260A EP 78100260 A EP78100260 A EP 78100260A EP 0000866 A1 EP0000866 A1 EP 0000866A1
Authority
EP
European Patent Office
Prior art keywords
tube
metal
grooves
mandrel
foils
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP78100260A
Other languages
German (de)
English (en)
Other versions
EP0000866B1 (fr
Inventor
Jochen Dr.Rer.Nat. Franzen
Gerhard Dipl.-Phys. Weiss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bruker Daltonics GmbH and Co KG
Original Assignee
Dr Franzen Analysentechnik GmbH and Co KG
Bruken Franzen Analytik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19772737903 external-priority patent/DE2737903C2/de
Priority claimed from DE19772752674 external-priority patent/DE2752674A1/de
Application filed by Dr Franzen Analysentechnik GmbH and Co KG, Bruken Franzen Analytik GmbH filed Critical Dr Franzen Analysentechnik GmbH and Co KG
Publication of EP0000866A1 publication Critical patent/EP0000866A1/fr
Application granted granted Critical
Publication of EP0000866B1 publication Critical patent/EP0000866B1/fr
Expired legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H01J49/4215—Quadrupole mass filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/4255—Device types with particular constructional features
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S228/00—Metal fusion bonding
    • Y10S228/903—Metal to nonmetal

Definitions

  • the invention relates to a method for producing a high-precision and dimensionally stable analyzer system for a multipole mass filter, in which a tube made of electrically poorly conductive, thermally softenable material is drawn over a dimensionally precise mold core with a higher expansion coefficient and parallel grooves, whereupon the tube material is heated Grooves of the mandrel nestles and then after solidifying cooling with the embossed tube indentations is pulled off the mandrel.
  • an analyzer system with high precision and dimensional stability for a multipole mass filter with a tube made of electrically poorly conductive, thermally softenable material with tube indentations impressed by softening over a dimensionally precise mandrel with a higher expansion coefficient and parallel grooves.
  • a multipole usually consists of the number of poles corresponding to electrically conductive round or hyperbole rods;
  • a quadrupole consists of four parallel, electrically conductive round or hyperbole rods.
  • the rods are held parallel to one another by one or more electrically insulating mounting parts that surround them on the outside in the form of rings or cages, the rod centers being arranged square in section.
  • the requirements for parallelism, freedom from torsion, the equality of the spacing of diagonally opposed rods and the perpendicularity of these diagonals are particularly for those mass filters that are in higher mass ranges with masses larger than 500 atomic mass units: (m> 500 u ), should be used, extremely high.
  • a filter was described in GB-PS 1 367 638, which consists of a tubular, torsion-free and low-deflection insulator with conductive surface coverings, this filter being produced from an extruded ceramic tube with subsequent firing and partial covering of the inner surfaces with a conductive layer .
  • the firing causes the pipe to shrink by about 10% and therefore does not allow the dimensional accuracy requirements described above; therefore, the use of such quadrupole filters as a residual gas analyzer is only in the lower mass range.
  • DE-PS 1 297 360 describes the production of high-precision glass tubes on a mandrel with subsequent metallization of the indented inner surfaces for use as a quadrupole system.
  • D as .Quadrupolsystem provides namely electrically seen a capacitor of capacitance C is, in which a H with the frequency ochfrequenzschreib and lies with the amplitude V.
  • C 50 pF
  • V 2 MHz
  • V 5kV
  • the invention is therefore based on the object of improving the known method of the type described in the introduction while avoiding its disadvantages and, in particular, of creating a warp and bend-free, highly precise and dimensionally stable analyzer system for a multipole mass filter, the adhesion of the layers or layers being electrical conductive material on the softenable pipe material to be improved should, so that highly precise and dimensionally stable electrodes can be created overall in analyzer systems for multipole mass filters by using also different types of metallic components for the layers to be connected to the tube material.
  • this object is achieved in a method of the type mentioned in that before heating the tube between the mandrel and the tube, layers of electrically conductive, easily connectable to the softenable tube material are introduced in the region of the grooves; that the layer material is connected to the pipe material when the pipe is softened and nestled against the grooves; and that when the tube thus formed is removed, the layers connected to the embossed tube indentations are removed with the mold core, a particularly preferred embodiment providing that metal foils are used as layers, which are inserted into the grooves of the core before the tube is softened.
  • the analyzer according to the invention is preferably characterized in that connected to the tube in the interior to the Rohreinbuchtitch films of good electrical conductivity fähi g em metal.
  • the tube is evacuated before it is softened as a whole. This makes it easier for the softened pipe to nestle against the grooves of the mandrel.
  • foil material with a largely identical coefficient of thermal expansion as the tube material is used or that foils made of a very ductile metal are used so that the covering material always takes the form of the tube material when it cools down.
  • Gold and platinum are particularly suitable as film material.
  • Another preferred embodiment of the present invention is characterized in that the film surface is provided with a meltable coating before insertion into the grooves of the mandrel to facilitate melting. This facilitates the melting of the foils with the pipe material.
  • the tube is a glass tube.
  • the metal foils are provided with protrusions extending from the foil surface facing away from the mold core; and that the protrusions are essentially melted in the softenable material, the corresponding analyzer system in a preferred development of the invention then being characterized in that the metal foils are connected to the tube material essentially by means of protrusions extending from the foil surface into the tube material.
  • a coating of a glossy metal paste is applied to the inner surfaces of the tube as the metallic component; and that the paste is converted into metal by means of higher temperatures.
  • a metallic Component a coating of a conductive metal composition is applied to the inner surface of the tube; and that the lead metal composition is subsequently converted to metal.
  • An essential part of the idea of the invention lies in the fact that during the final molding process of the tube made of softenable material, the metal electrodes are formed at the same time - in particular by resting the grooves of the mandrel - and are pressed there by the surrounding tube material in order to provide a highly precise and extremely smooth surface of the metal layer to reach.
  • the metallization is carried out only after the analyzer tube has been formed on the mandrel, and, as explained, insufficient accuracy is not guaranteed.
  • FIG. 1 Further embodiments of the invention are characterized in that the projections of the films are bent flanges, that the projections are notches in the films, that the projections on the films are soldered or welded ribs, or that the projections are wires or soldered or welded to the films .
  • a conductive varnish is applied and that the conductive varnish is dried.
  • the conductive varnish can be spread on, sprayed on or applied by dipping.
  • the conductive layer is applied by means of reduction metallization and in particular that an end metal layer is electroplated.
  • an end metal layer is electroplated.
  • gold, silver or copper, but also tin as tin oxide in a preferred embodiment can be applied as the lead metals in the dipping process.
  • a pre-machined mandrel 1 which in the illustrated embodiment consists of ground special steel, with semicircular grooves 3 being ground in the mandrel 1, is provided with metal foils 5, in particular gold foils, by inserting the metal foils 5 into the semicircular grooves 3 become.
  • a glass tube 7 is then pulled over the mold core 1 provided with metal foils 5 and, if necessary, closed and evacuated.
  • the glass tube 7 filled with the mandrel 1 is e.g. heated in an oven to a temperature point slightly above the transformation point of the glass, the glass tube 7 laying on the metal foils 5 in the grooves 3 and fusing with them (FIG. 3).
  • the mandrel 1 contracts more than the shaped glass tube 7, so that the mandrel 1 can be easily pulled out of the shaped glass tube 7.
  • FIG. 4 shows the completely manufactured analyzer system for a quadrupole mass filter as a glass tube 7 provided with tube indentations 9, the metal foils 5 being melted onto the tube indentations 9 in the interior of the glass tube 7.
  • a preprocessed mandrel 1 in the exemplary embodiment shown consisting of ground special steel, with semicircular grooves 3 being ground in the mandrel 1, is provided with metal foils 5 by inserting them into the semicircular grooves 2 are inserted.
  • the metal foils 5 are provided with longitudinally extending flanges 6, which are perpendicular to the metal foil surface, on the side of the metal foil 5 which is applied to the mandrel 1.
  • a glass tube 7 is pulled over the mold core 1 provided with the metal foils 5 and optionally closed and evacuated.
  • the glass tube 7 filled with the mandrel 1 is e.g. in an oven, heated to a temperature slightly above the transformation point of the glass, the glass tube 7 laying on the metal foils in the grooves 3.
  • the flanges 6 dig into the soft material of the glass tube (FIG. 2).
  • the mandrel 1 contracts more than the shaped glass tube 7, so that the mandrel 1 can be easily pulled out of the shaped glass tube 7.
  • the metal foils 5 remain firmly connected to the tube indentations 9 of the glass tube 7 formed over the grooves 3 of the mandrel 1, the hold being reinforced in particular by the flanges 6 of the metal foils 5 melted into the glass tube 7.
  • FIG. 3 shows the completely manufactured analyzer system for a quadrupole mass filter as a glass tube provided with the tube indentations 9, the metal foils 5 being applied to the tube indentations 9 in the interior of the glass tube 7 and, in particular, being fused to the tube material by means of their flanges 6.
  • gloss metal paste, conductive lacquer or a conductive layer is applied in a known manner and then metallized in a known manner, optionally with a conductive layer an additional metal layer is electroplated in a conventional manner.
  • the mandrel 1 is then introduced into the tube 7 provided with the metal coatings in such a way that the metal coatings are located above the grooves 3 of the mandrel and rest on the tube indentations 9 formed in the interior of the glass tube 7 according to the method steps described above.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
EP78100260A 1977-08-23 1978-06-28 Procédé de fabrication d'un système analyseur pour filtre de masse multipôles Expired EP0000866B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE2737903 1977-08-23
DE19772737903 DE2737903C2 (de) 1977-08-23 1977-08-23 Verfahren zur Herstellung eines Analysatorsystems für ein Multipol-Massenfilter
DE19772752674 DE2752674A1 (de) 1977-11-25 1977-11-25 Verfahren zum herstellen eines massenfilter-analysatorsystems sowie danach hergestelltes analysatorsystem
DE2752674 1977-11-25

Publications (2)

Publication Number Publication Date
EP0000866A1 true EP0000866A1 (fr) 1979-03-07
EP0000866B1 EP0000866B1 (fr) 1981-05-20

Family

ID=25772594

Family Applications (1)

Application Number Title Priority Date Filing Date
EP78100260A Expired EP0000866B1 (fr) 1977-08-23 1978-06-28 Procédé de fabrication d'un système analyseur pour filtre de masse multipôles

Country Status (2)

Country Link
US (1) US4213557A (fr)
EP (1) EP0000866B1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0268048A2 (fr) * 1986-11-19 1988-05-25 Hewlett-Packard Company Quadrupole en quartz pour filtre de masses
EP3336878A1 (fr) * 2016-12-19 2018-06-20 Agilent Technologies, Inc. (A Delaware Corporation) Ensemble de tige quadripôle

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8707169D0 (en) * 1987-03-25 1987-04-29 Philips Nv Electron beam device
US4983195A (en) * 1990-01-04 1991-01-08 Corning Incorporated Method of making fiber optic coupler with longitudinal protrusions
US5298745A (en) * 1992-12-02 1994-03-29 Hewlett-Packard Company Multilayer multipole
GB2304991B (en) * 1992-12-02 1997-05-28 Hewlett Packard Co Multipole apparatus having integral interpole bridges
US5525084A (en) * 1994-03-25 1996-06-11 Hewlett Packard Company Universal quadrupole and method of manufacture
US5644131A (en) * 1996-05-22 1997-07-01 Hewlett-Packard Co. Hyperbolic ion trap and associated methods of manufacture
US5852270A (en) * 1996-07-16 1998-12-22 Leybold Inficon Inc. Method of manufacturing a miniature quadrupole using electrode-discharge machining
EP1137046A2 (fr) * 2000-03-13 2001-09-26 Agilent Technologies Inc. a Delaware Corporation Réalisation de filtres et de multipôles à haute précision
DE102004014584B4 (de) * 2004-03-25 2009-06-10 Bruker Daltonik Gmbh Hochfrequenz-Quadrupolsysteme mit Potentialgradienten
DE102004014582B4 (de) * 2004-03-25 2009-08-20 Bruker Daltonik Gmbh Ionenoptische Phasenvolumenkomprimierung
DE102004048496B4 (de) * 2004-10-05 2008-04-30 Bruker Daltonik Gmbh Ionenführung mit HF-Blendenstapeln

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1297360B (de) * 1962-07-21 1969-06-12 Siemens Ag Verfahren zum Herstellen eines verwindungsfreien Analysatorsystems fuer ein Multipolmassenfilter
FR2275877A1 (fr) * 1974-06-18 1976-01-16 Varian Mat Gmbh Ensemble d'electrodes de spectrometres de masse multipolaires ou unipolaires

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2592614A (en) * 1946-01-08 1952-04-15 Champion Paper & Fibre Co Method of making tubular metallic wave guides
CH409463A (de) * 1962-07-21 1966-03-15 Siemens Ag Verfahren zum Herstellen des Analysatorsystems von Massenspektrometern
US3248788A (en) * 1962-11-21 1966-05-03 Martin Marietta Corp Application of flame-sprayed linings on the inside diameter of tubes

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1297360B (de) * 1962-07-21 1969-06-12 Siemens Ag Verfahren zum Herstellen eines verwindungsfreien Analysatorsystems fuer ein Multipolmassenfilter
FR2275877A1 (fr) * 1974-06-18 1976-01-16 Varian Mat Gmbh Ensemble d'electrodes de spectrometres de masse multipolaires ou unipolaires

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0268048A2 (fr) * 1986-11-19 1988-05-25 Hewlett-Packard Company Quadrupole en quartz pour filtre de masses
EP0268048A3 (en) * 1986-11-19 1989-07-26 Hewlett-Packard Company Quartz quadrupole for mass filter
EP3336878A1 (fr) * 2016-12-19 2018-06-20 Agilent Technologies, Inc. (A Delaware Corporation) Ensemble de tige quadripôle
US10147595B2 (en) 2016-12-19 2018-12-04 Agilent Technologies, Inc. Quadrupole rod assembly

Also Published As

Publication number Publication date
US4213557A (en) 1980-07-22
EP0000866B1 (fr) 1981-05-20

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