EA008878B1 - Rule based system and method for automatically generating photomask orders - Google Patents

Rule based system and method for automatically generating photomask orders

Info

Publication number
EA008878B1
EA008878B1 EA200500694A EA200500694A EA008878B1 EA 008878 B1 EA008878 B1 EA 008878B1 EA 200500694 A EA200500694 A EA 200500694A EA 200500694 A EA200500694 A EA 200500694A EA 008878 B1 EA008878 B1 EA 008878B1
Authority
EA
Eurasian Patent Office
Prior art keywords
order
template
photomask
specified
format
Prior art date
Application number
EA200500694A
Other languages
Russian (ru)
Unknown language (xx)
Other versions
EA200500694A1 (en
Inventor
Чарльз И. Кроук
Эдвард Дж. Саттайл
Дэниел Дж. Кахалейн
Ник Ридгуэй
Original Assignee
Фотроникс, Инк.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US10/209,254 priority Critical patent/US6842881B2/en
Priority to US10/877,001 priority patent/US7669167B2/en
Priority to US10/981,201 priority patent/US7640529B2/en
Application filed by Фотроникс, Инк. filed Critical Фотроникс, Инк.
Publication of EA200500694A1 publication Critical patent/EA200500694A1/en
Publication of EA008878B1 publication Critical patent/EA008878B1/en

Links

Classifications

    • GPHYSICS
    • G06COMPUTING; CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F17/00Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/50Computer-aided design
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68Preparation processes not covered by groups G03F1/20 - G03F1/50

Abstract

A system for generating photomask orders in a specified format includes at least one template or order for entry and storage of photomask order data, wherein the at least one template or order is created based upon requirements of a specified photomask order format. The system includes at least one set of rules corresponding to the at least one template or order, wherein the set of rules includes instructions which insure that a user enter complete information into the at least one template or order as required by the specified order format. A graphical user interface is associated with the at least one template or order, wherein the user can access the at least one template or order to enter photomask order data and create an order in a specified format. A data processing mechanism imports electronic information from external media into the at least one template or order.
EA200500694A 2002-07-30 2005-05-20 Rule based system and method for automatically generating photomask orders EA008878B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US10/209,254 US6842881B2 (en) 2002-07-30 2002-07-30 Rule based system and method for automatically generating photomask orders in a specified order format
US10/877,001 US7669167B2 (en) 2002-07-30 2004-06-25 Rule based system and method for automatically generating photomask orders by conditioning information from a customer's computer system
US10/981,201 US7640529B2 (en) 2002-07-30 2004-11-03 User-friendly rule-based system and method for automatically generating photomask orders

Publications (2)

Publication Number Publication Date
EA200500694A1 EA200500694A1 (en) 2005-12-29
EA008878B1 true EA008878B1 (en) 2007-08-31

Family

ID=46205596

Family Applications (1)

Application Number Title Priority Date Filing Date
EA200500694A EA008878B1 (en) 2002-07-30 2005-05-20 Rule based system and method for automatically generating photomask orders

Country Status (1)

Country Link
EA (1) EA008878B1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2089401C1 (en) * 1995-06-27 1997-09-10 Юрий Михайлович Елшин Method of imaging on solid material and device for its embodiment
US6225025B1 (en) * 1998-02-25 2001-05-01 Fujitsu Limited Fabrication process of a semiconductor device by electron-beam lithography
US6330708B1 (en) * 1998-09-17 2001-12-11 International Business Machines Corporation Method for preparing command files for photomask production
WO2002003141A2 (en) * 2000-07-05 2002-01-10 Dupont Photomasks, Inc. Network-based photomask data entry interface and instruction generator for manufacturing photomasks

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2089401C1 (en) * 1995-06-27 1997-09-10 Юрий Михайлович Елшин Method of imaging on solid material and device for its embodiment
US6225025B1 (en) * 1998-02-25 2001-05-01 Fujitsu Limited Fabrication process of a semiconductor device by electron-beam lithography
US6330708B1 (en) * 1998-09-17 2001-12-11 International Business Machines Corporation Method for preparing command files for photomask production
WO2002003141A2 (en) * 2000-07-05 2002-01-10 Dupont Photomasks, Inc. Network-based photomask data entry interface and instruction generator for manufacturing photomasks

Also Published As

Publication number Publication date
EA200500694A1 (en) 2005-12-29

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Legal Events

Date Code Title Description
MM4A Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s)

Designated state(s): AM AZ KZ KG MD TJ TM

MM4A Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s)

Designated state(s): BY RU