DK1965243T3 - Piezoelektrisk adaptivt spejl - Google Patents

Piezoelektrisk adaptivt spejl

Info

Publication number
DK1965243T3
DK1965243T3 DK08290155.4T DK08290155T DK1965243T3 DK 1965243 T3 DK1965243 T3 DK 1965243T3 DK 08290155 T DK08290155 T DK 08290155T DK 1965243 T3 DK1965243 T3 DK 1965243T3
Authority
DK
Denmark
Prior art keywords
actuators
piezoelectric
monolithic
mirror
electrodes
Prior art date
Application number
DK08290155.4T
Other languages
English (en)
Inventor
Jean-Christophe Sinquin
Jean-Marie Lurcon
Claude Guillemard
Original Assignee
Cilas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cilas filed Critical Cilas
Application granted granted Critical
Publication of DK1965243T3 publication Critical patent/DK1965243T3/da

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
DK08290155.4T 2007-02-28 2008-02-18 Piezoelektrisk adaptivt spejl DK1965243T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0701439A FR2913117B1 (fr) 2007-02-28 2007-02-28 Miroir adaptatif piezoelectrique.

Publications (1)

Publication Number Publication Date
DK1965243T3 true DK1965243T3 (da) 2011-01-31

Family

ID=38543664

Family Applications (1)

Application Number Title Priority Date Filing Date
DK08290155.4T DK1965243T3 (da) 2007-02-28 2008-02-18 Piezoelektrisk adaptivt spejl

Country Status (8)

Country Link
US (1) US7782526B2 (da)
EP (1) EP1965243B1 (da)
JP (1) JP2008217006A (da)
AT (1) ATE486296T1 (da)
DE (1) DE602008003138D1 (da)
DK (1) DK1965243T3 (da)
ES (1) ES2354588T3 (da)
FR (1) FR2913117B1 (da)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8866364B2 (en) * 2010-07-05 2014-10-21 Aron Michael Piezo-electric based micro-electro-mechanical lens actuation system
DE102013009606A1 (de) * 2013-06-07 2014-12-11 Gottfried Wilhelm Leibniz Universität Hannover Spiegelanordnung
DE102016103660A1 (de) 2016-03-01 2017-09-07 Friedrich-Schiller-Universität Jena Vorrichtung zur Deformation eines optischen Elements und optisches Element mit der Vorrichtung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2069883C1 (ru) * 1996-03-19 1996-11-27 Йелстаун Корпорейшн Н.В. Мозаичное адаптивное биморфное зеркало
US5745278A (en) * 1997-02-05 1998-04-28 Raytheon Optical Systems, Inc. Innovative deformable mirror actuator configuration
JP3058143B2 (ja) * 1998-02-12 2000-07-04 日本電気株式会社 圧電アクチュエータおよびその製造方法
US6864620B2 (en) * 2000-12-22 2005-03-08 Ngk Insulators, Ltd. Matrix type actuator
JP4294924B2 (ja) * 2001-09-12 2009-07-15 日本碍子株式会社 マトリクス型圧電／電歪デバイス及び製造方法
JP4473532B2 (ja) * 2002-10-10 2010-06-02 日本碍子株式会社 圧電／電歪デバイス及び製造方法
JP2005043544A (ja) * 2003-07-25 2005-02-17 Ricoh Co Ltd 波面収差補正ミラーおよび光ピックアップ

Also Published As

Publication number Publication date
US7782526B2 (en) 2010-08-24
EP1965243B1 (fr) 2010-10-27
DE602008003138D1 (de) 2010-12-09
FR2913117A1 (fr) 2008-08-29
JP2008217006A (ja) 2008-09-18
FR2913117B1 (fr) 2009-07-03
ES2354588T3 (es) 2011-03-16
ATE486296T1 (de) 2010-11-15
EP1965243A1 (fr) 2008-09-03
US20080204844A1 (en) 2008-08-28

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