DK1062478T3 - Apparatus and method for optical measurement of a objektoverfladekontur - Google Patents

Apparatus and method for optical measurement of a objektoverfladekontur

Info

Publication number
DK1062478T3
DK1062478T3 DK99907786T DK99907786T DK1062478T3 DK 1062478 T3 DK1062478 T3 DK 1062478T3 DK 99907786 T DK99907786 T DK 99907786T DK 99907786 T DK99907786 T DK 99907786T DK 1062478 T3 DK1062478 T3 DK 1062478T3
Authority
DK
Grant status
Grant
Patent type
Prior art keywords
objektoverfladekontur
apparatus
method
optical measurement
measurement
Prior art date
Application number
DK99907786T
Other languages
Danish (da)
Inventor
Shimshon Ben-Dov
Michael Fridhendler
Igal Lanzet
Igor Kuperman
Original Assignee
Metroptic Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

DK99907786T 1997-12-31 1999-03-12 Apparatus and method for optical measurement of a objektoverfladekontur DK1062478T3 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US09039342 US6094269A (en) 1997-12-31 1998-03-13 Apparatus and method for optically measuring an object surface contour
PCT/IB1999/000410 WO1999047886A1 (en) 1998-03-13 1999-03-12 Apparatus and method for optically measuring an object surface contour
EP19990907786 EP1062478B8 (en) 1998-03-13 1999-03-12 Apparatus and method for optically measuring an object surface contour

Publications (1)

Publication Number Publication Date
DK1062478T3 true DK1062478T3 (en) 2005-06-27

Family

ID=34702437

Family Applications (1)

Application Number Title Priority Date Filing Date
DK99907786T DK1062478T3 (en) 1997-12-31 1999-03-12 Apparatus and method for optical measurement of a objektoverfladekontur

Country Status (1)

Country Link
DK (1) DK1062478T3 (en)

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