DEP0055751DA - Device for renewing the filament in an ion source - Google Patents

Device for renewing the filament in an ion source

Info

Publication number
DEP0055751DA
DEP0055751DA DEP0055751DA DE P0055751D A DEP0055751D A DE P0055751DA DE P0055751D A DEP0055751D A DE P0055751DA
Authority
DE
Germany
Prior art keywords
renewing
filament
ion source
ion
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
German (de)
Inventor
Willy Dietermann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
E Leybolds Nachfolger AG
Publication date

Links

Description

Claims (1)

Patent- "bzw. Schutz an SprüchePatent "or protection of sayings 5*15 * 1 pj ttsi,*«: Sei·?***· «""ir-»pj ttsi, * «: Be ·? *** ·« "" ir- » ϊ ftf.«ϊ ftf. "

Family

ID=

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