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Flüssigkeitverteilvorrichtung und Verfahren

Info

Publication number
DE69826804D1
DE69826804D1 DE1998626804 DE69826804A DE69826804D1 DE 69826804 D1 DE69826804 D1 DE 69826804D1 DE 1998626804 DE1998626804 DE 1998626804 DE 69826804 A DE69826804 A DE 69826804A DE 69826804 D1 DE69826804 D1 DE 69826804D1
Authority
DE
Grant status
Grant
Patent type
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1998626804
Other languages
English (en)
Other versions
DE69826804T2 (de )
Inventor
Peter M Pozniak
Benjamin R Roberts
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Vacuum Inc
Original Assignee
Linde Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
DE1998626804 1997-10-14 1998-10-13 Flüssigkeitverteilvorrichtung und Verfahren Expired - Fee Related DE69826804D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US08950150 US6019250A (en) 1997-10-14 1997-10-14 Liquid dispensing apparatus and method

Publications (1)

Publication Number Publication Date
DE69826804D1 true DE69826804D1 (de) 2004-11-11

Family

ID=25490029

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1998626804 Expired - Fee Related DE69826804D1 (de) 1997-10-14 1998-10-13 Flüssigkeitverteilvorrichtung und Verfahren
DE1998626804 Active DE69826804T2 (de) 1997-10-14 1998-10-13 Flüssigkeitsverteilvorrichtung und Verfahren

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE1998626804 Active DE69826804T2 (de) 1997-10-14 1998-10-13 Flüssigkeitsverteilvorrichtung und Verfahren

Country Status (6)

Country Link
US (1) US6019250A (de)
JP (1) JP4354551B2 (de)
KR (1) KR100274925B1 (de)
CA (1) CA2248386C (de)
DE (2) DE69826804D1 (de)
EP (1) EP0909610B1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6616014B1 (en) * 2000-02-25 2003-09-09 The Boc Group, Inc. Precision liquid mixing apparatus and method
US6736154B2 (en) * 2001-01-26 2004-05-18 American Air Liquide, Inc. Pressure vessel systems and methods for dispensing liquid chemical compositions
US6783429B2 (en) * 2001-08-17 2004-08-31 The Boc Group, Inc. Apparatus and method for sampling a chemical-mechanical polishing slurry
US20050224523A1 (en) * 2004-04-13 2005-10-13 Advanced Technology Materials, Inc. Liquid dispensing method and system with headspace gas removal
JP4763262B2 (ja) * 2004-10-15 2011-08-31 株式会社ディスコ 高圧液噴射式切断装置
GB0501335D0 (en) * 2005-01-21 2005-03-02 Cryostar France Sa Natural gas supply method and apparatus
CN101193815B (zh) 2005-03-04 2012-03-28 液化空气电子美国有限公司 容积流体输送系统中的流体状态的控制
US7810516B2 (en) * 2005-03-04 2010-10-12 Air Liquide Electronics U.S. Lp Control of fluid conditions in bulk fluid distribution systems
DE102006016087B4 (de) 2005-04-11 2007-09-06 Unaxis International Trading Ltd. Verfahren zum Betrieb einer pneumatischen Vorrichtung für die dosierte Abgabe einer Flüssigkeit und pneumatische Vorrichtung
US20070215639A1 (en) * 2006-02-15 2007-09-20 Roberts Benjamin R Method and Apparatus for Dispensing Liquid with Precise Control
US20070205214A1 (en) * 2006-03-03 2007-09-06 Roberts Benjamin R Liquid dispense system
KR20100017695A (ko) * 2007-05-09 2010-02-16 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 재료 혼합과 분배를 위한 시스템 및 방법
JP2011506110A (ja) * 2007-12-06 2011-03-03 フォアサイト プロセッシング,エルエルシー 流体を含む加工材料混合物を搬送するシステムおよび方法
US8997789B2 (en) * 2008-06-22 2015-04-07 Malema Engineering Corporation Internal leak detection and backflow prevention in a flow control arrangement
US9038855B2 (en) 2009-06-10 2015-05-26 Advanced Technology Materials, Inc. Fluid processing systems and methods
US9770804B2 (en) 2013-03-18 2017-09-26 Versum Materials Us, Llc Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture
US9279419B2 (en) 2013-01-16 2016-03-08 Prochem Ulc System and process for supplying a chemical agent to a process fluid
CN104108072B (zh) * 2013-04-16 2016-06-01 陈炤彰 气体添加研磨液的供应系统及其方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5148945B1 (en) * 1990-09-17 1996-07-02 Applied Chemical Solutions Apparatus and method for the transfer and delivery of high purity chemicals
US5417346A (en) * 1990-09-17 1995-05-23 Applied Chemical Solutions Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
US5485941A (en) * 1994-06-30 1996-01-23 Basf Corporation Recirculation system and method for automated dosing apparatus
KR100377304B1 (ko) * 1994-07-19 2003-06-09 어플라이드 케미컬 솔루션즈, 인크. 화학-기계적연마공정에서사용되는장치및방법

Also Published As

Publication number Publication date Type
EP0909610A2 (de) 1999-04-21 application
KR100274925B1 (ko) 2000-12-15 grant
CA2248386C (en) 2003-02-25 grant
EP0909610A3 (de) 2001-01-31 application
DE69826804T2 (de) 2006-03-09 grant
CA2248386A1 (en) 1999-04-14 application
US6019250A (en) 2000-02-01 grant
EP0909610B1 (de) 2004-10-06 grant
JP4354551B2 (ja) 2009-10-28 grant
JPH11182800A (ja) 1999-07-06 application

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS VACCUM.INC. (N. D. GES. D. STAATES DEL, US

8339 Ceased/non-payment of the annual fee