DE69812828D1 - Ionenstrahl-Sputtering-System - Google Patents
Ionenstrahl-Sputtering-SystemInfo
- Publication number
- DE69812828D1 DE69812828D1 DE69812828T DE69812828T DE69812828D1 DE 69812828 D1 DE69812828 D1 DE 69812828D1 DE 69812828 T DE69812828 T DE 69812828T DE 69812828 T DE69812828 T DE 69812828T DE 69812828 D1 DE69812828 D1 DE 69812828D1
- Authority
- DE
- Germany
- Prior art keywords
- ion beam
- sputtering system
- beam sputtering
- ion
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/46—Sputtering by ion beam produced by an external ion source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
- C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Hall/Mr Elements (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/949,064 US6197164B1 (en) | 1997-10-10 | 1997-10-10 | Method and apparatus to improve the uniformity of ion beam deposited films in an ion beam sputtering system |
US949064 | 1997-10-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69812828D1 true DE69812828D1 (de) | 2003-05-08 |
DE69812828T2 DE69812828T2 (de) | 2004-02-05 |
Family
ID=25488550
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69812828T Expired - Fee Related DE69812828T2 (de) | 1997-10-10 | 1998-09-14 | Ionenstrahl-Sputtering-System |
Country Status (3)
Country | Link |
---|---|
US (1) | US6197164B1 (de) |
EP (1) | EP0908532B1 (de) |
DE (1) | DE69812828T2 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7062348B1 (en) * | 2000-07-13 | 2006-06-13 | The Extreme Ultaviolet Lithography Llc | Dynamic mask for producing uniform or graded-thickness thin films |
US6447653B1 (en) * | 2000-10-11 | 2002-09-10 | Litton Systems Inc. | Method of shaping a flux mask and process of sputtering with the shaped flux mask |
US6419802B1 (en) * | 2001-03-16 | 2002-07-16 | David Alan Baldwin | System and method for controlling deposition thickness by synchronously varying a sputtering rate of a target with respect to a position of a rotating substrate |
US6716322B1 (en) | 2001-04-19 | 2004-04-06 | Veeco Instruments Inc. | Method and apparatus for controlling film profiles on topographic features |
US6636400B2 (en) | 2001-09-18 | 2003-10-21 | International Business Machines Corporation | Magnetoresistive head having improved hard biasing characteristics through the use of a multi-layered seed layer including an oxidized tantalum layer and a chromium layer |
US6732421B2 (en) * | 2002-03-22 | 2004-05-11 | Seagate Technology Llc | Method for producing magnetoresistive heads ion bombardment etch to stripe height |
US7198699B2 (en) * | 2002-05-06 | 2007-04-03 | Guardian Industries Corp. | Sputter coating apparatus including ion beam source(s), and corresponding method |
US20040045671A1 (en) * | 2002-09-10 | 2004-03-11 | Ed Rejda | Selective etching device |
DE102006024068A1 (de) * | 2006-05-23 | 2007-11-29 | Oerlikon Leybold Vacuum Gmbh | Beschichtungsanlage |
US8308921B1 (en) | 2006-12-21 | 2012-11-13 | Western Digital (Fremont), Llc | Mask for increased uniformity in ion beam deposition |
US7863587B2 (en) * | 2007-01-31 | 2011-01-04 | Hitachi Global Storage Technologies, Netherlands, B.V. | Symmetrical shaper for an ion beam deposition and etching apparatus |
US8561333B2 (en) * | 2009-01-21 | 2013-10-22 | Roxanna Meyers | Snap N place sign system and method of use for interior signs |
US20150203955A1 (en) * | 2013-11-07 | 2015-07-23 | Carnegie Mellon University, A Pennsylvania Non-Profit Corporation | Apparatus and method for making composition spread alloy films |
FR3127761A1 (fr) * | 2021-10-05 | 2023-04-07 | Safran Electronics & Defense | Module de contrôle des gradients de caractéristiques physiques d’un dépôt de couche mince par un ensemble de caches automatisés |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4303489A (en) * | 1978-08-21 | 1981-12-01 | Vac-Tec Systems, Inc. | Method and apparatus for producing a variable intensity pattern of sputtering material on a substrate |
US4315960A (en) * | 1980-05-28 | 1982-02-16 | Matsushita Electric Industrial Co., Ltd. | Method of making a thin film |
JPS61124568A (ja) | 1984-11-16 | 1986-06-12 | Matsushita Electric Ind Co Ltd | イオンビ−ムスパツタ装置 |
US4793908A (en) | 1986-12-29 | 1988-12-27 | Rockwell International Corporation | Multiple ion source method and apparatus for fabricating multilayer optical films |
JPH0297673A (ja) | 1988-09-30 | 1990-04-10 | Hitachi Koki Co Ltd | イオンビームスパッタ法 |
US4923585A (en) | 1988-11-02 | 1990-05-08 | Arch Development Corporation | Sputter deposition for multi-component thin films |
JPH02251143A (ja) * | 1989-03-24 | 1990-10-08 | Sumitomo Electric Ind Ltd | イオンビーム式スパッタリング装置 |
JPH03202466A (ja) * | 1989-12-28 | 1991-09-04 | Fujitsu Ltd | スパッタリング装置 |
WO1992016014A2 (en) * | 1991-03-07 | 1992-09-17 | Honeywell Inc. | Method and apparatus for concave substrates |
JPH04308083A (ja) * | 1991-04-06 | 1992-10-30 | Japan Steel Works Ltd:The | 薄膜の作成方法 |
US5492605A (en) * | 1992-08-24 | 1996-02-20 | International Business Machines Corporation | Ion beam induced sputtered multilayered magnetic structures |
EP0600303B1 (de) | 1992-12-01 | 2002-02-06 | Matsushita Electric Industrial Co., Ltd. | Verfahren zur Herstellung einer elektrischen Dünnschicht |
US6086727A (en) * | 1998-06-05 | 2000-07-11 | International Business Machines Corporation | Method and apparatus to improve the properties of ion beam deposited films in an ion beam sputtering system |
-
1997
- 1997-10-10 US US08/949,064 patent/US6197164B1/en not_active Expired - Fee Related
-
1998
- 1998-09-14 EP EP98307422A patent/EP0908532B1/de not_active Expired - Lifetime
- 1998-09-14 DE DE69812828T patent/DE69812828T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0908532A2 (de) | 1999-04-14 |
US6197164B1 (en) | 2001-03-06 |
EP0908532A3 (de) | 1999-11-17 |
EP0908532B1 (de) | 2003-04-02 |
DE69812828T2 (de) | 2004-02-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |