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Kardanaufgehängtes gyroskop mit vibrierendem ring, das merkmale zum abbau von spannungen aufweist

Info

Publication number
DE69626110D1
DE69626110D1 DE1996626110 DE69626110A DE69626110D1 DE 69626110 D1 DE69626110 D1 DE 69626110D1 DE 1996626110 DE1996626110 DE 1996626110 DE 69626110 A DE69626110 A DE 69626110A DE 69626110 D1 DE69626110 D1 DE 69626110D1
Authority
DE
Grant status
Grant
Patent type
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1996626110
Other languages
English (en)
Other versions
DE69626110T2 (de )
Inventor
Paul Greiff
M Antkowiak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Charles Stark Draper Laboratory Inc
Original Assignee
Charles Stark Draper Laboratory Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051For defining the movement, i.e. structures that guide or limit the movement of an element
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/02Sensors
    • B81B2201/0228Inertial sensors
    • B81B2201/0242Gyroscopes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/05Type of movement
    • B81B2203/056Rotation in a plane parallel to the substrate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/05Type of movement
    • B81B2203/058Rotation out of a plane parallel to the substrate
DE1996626110 1993-02-10 1996-05-08 Kardanaufgehängtes gyroskop mit vibrierendem ring, das merkmale zum abbau von spannungen aufweist Expired - Lifetime DE69626110D1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US08440536 US5650568A (en) 1993-02-10 1995-05-12 Gimballed vibrating wheel gyroscope having strain relief features
PCT/US1996/006426 WO1996035957A1 (en) 1995-05-12 1996-05-08 Gimballed vibrating wheel gyroscope having strain relief features

Publications (1)

Publication Number Publication Date
DE69626110D1 true DE69626110D1 (de) 2003-03-13

Family

ID=23749151

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1996626110 Expired - Lifetime DE69626110D1 (de) 1993-02-10 1996-05-08 Kardanaufgehängtes gyroskop mit vibrierendem ring, das merkmale zum abbau von spannungen aufweist
DE1996626110 Expired - Lifetime DE69626110T2 (de) 1993-02-10 1996-05-08 Kardanaufgehängtes gyroskop mit vibrierendem ring, das merkmale zum abbau von spannungen aufweist

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE1996626110 Expired - Lifetime DE69626110T2 (de) 1993-02-10 1996-05-08 Kardanaufgehängtes gyroskop mit vibrierendem ring, das merkmale zum abbau von spannungen aufweist

Country Status (6)

Country Link
US (1) US5650568A (de)
JP (1) JP4114890B2 (de)
CA (1) CA2220773C (de)
DE (2) DE69626110D1 (de)
EP (1) EP0824702B1 (de)
WO (1) WO1996035957A1 (de)

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CA2220773C (en) 2001-08-07 grant
JP4114890B2 (ja) 2008-07-09 grant
EP0824702B1 (de) 2003-02-05 grant
EP0824702A4 (de) 2000-03-08 application
CA2220773A1 (en) 1996-11-14 application
DE69626110T2 (de) 2003-07-31 grant
JPH11505021A (ja) 1999-05-11 application
US5650568A (en) 1997-07-22 grant
EP0824702A1 (de) 1998-02-25 application
WO1996035957A1 (en) 1996-11-14 application

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