DE69506292D1 - Verwendung eines Materials für ein Substrat. - Google Patents
Verwendung eines Materials für ein Substrat.Info
- Publication number
- DE69506292D1 DE69506292D1 DE69506292T DE69506292T DE69506292D1 DE 69506292 D1 DE69506292 D1 DE 69506292D1 DE 69506292 T DE69506292 T DE 69506292T DE 69506292 T DE69506292 T DE 69506292T DE 69506292 D1 DE69506292 D1 DE 69506292D1
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000463 material Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
- C04B35/524—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite obtained from polymer precursors, e.g. glass-like carbon material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Carbon And Carbon Compounds (AREA)
- Ceramic Products (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3312794 | 1994-02-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69506292D1 true DE69506292D1 (de) | 1999-01-14 |
DE69506292T2 DE69506292T2 (de) | 1999-04-29 |
Family
ID=12377954
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69506292T Expired - Fee Related DE69506292T2 (de) | 1994-02-03 | 1995-01-02 | Verwendung eines Materials für ein Substrat. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5665636A (de) |
EP (1) | EP0666245B1 (de) |
KR (1) | KR100358527B1 (de) |
CA (1) | CA2141269A1 (de) |
DE (1) | DE69506292T2 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011225949A (ja) * | 2010-04-21 | 2011-11-10 | Ibiden Co Ltd | 炭素部品および炭素部品の製造方法 |
CN104411630B (zh) * | 2012-06-15 | 2016-05-11 | 蓝立方知识产权有限责任公司 | 玻璃碳组合物 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4816338A (en) * | 1986-06-10 | 1989-03-28 | Denki Kagaku Kogyo Kabushiki Kaisha | Glassy carbon-coated article |
JP2725705B2 (ja) * | 1988-12-02 | 1998-03-11 | 日清紡績株式会社 | 燃料電池用セルセパレーター |
JP2939759B2 (ja) * | 1990-02-21 | 1999-08-25 | 明 高久 | 炭素薄板及びその製造方法 |
-
1995
- 1995-01-02 EP EP95100019A patent/EP0666245B1/de not_active Expired - Lifetime
- 1995-01-02 DE DE69506292T patent/DE69506292T2/de not_active Expired - Fee Related
- 1995-01-06 KR KR1019950000139A patent/KR100358527B1/ko not_active IP Right Cessation
- 1995-01-18 US US08/374,233 patent/US5665636A/en not_active Expired - Fee Related
- 1995-01-27 CA CA002141269A patent/CA2141269A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
CA2141269A1 (en) | 1995-08-04 |
DE69506292T2 (de) | 1999-04-29 |
US5665636A (en) | 1997-09-09 |
EP0666245B1 (de) | 1998-12-02 |
EP0666245A3 (de) | 1995-11-08 |
EP0666245A2 (de) | 1995-08-09 |
KR950034491A (ko) | 1995-12-28 |
KR100358527B1 (ko) | 2003-01-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69700417D1 (de) | Glaszusammensetzung für ein Substrat | |
DE69835988D1 (de) | Doppelseitenreinigungsmaschine für ein Substrat | |
DE69429318D1 (de) | Halteverfahren und Haltesystem für ein Substrat | |
NO953298D0 (no) | Belagt substrat og fremgangsmåte for dannelse derav | |
DE69635682D1 (de) | Trocknungssystem für ein beschichtetes Substrat | |
ATA50197A (de) | Beschichtetes substrat für eine transparente anordnung mit hoher selektivität | |
DE69515127D1 (de) | In einem durchgang arbeitendes druckverfahren für ein doppellagiges substrat | |
DE69532979D1 (de) | Schalldämpfungseinrichtung unter Verwendung eines porösen Materials | |
DE69531019D1 (de) | Behandlungsmethode und -vorrichtung für ein resistbeschichtetes Substrat | |
DE69826556D1 (de) | Verwendung eines blutverträglichen Materials mit supramolekularer Struktur | |
DE69839427D1 (de) | Herstellungsverfahren für einen dünnfilm aus festem material | |
DE69619074D1 (de) | Substratträgervorrichtung für eine Beschichtungskammer | |
DE59403364D1 (de) | Metallbeschichtetes Substrat | |
DE69600350D1 (de) | Aufzeichnungsmaterial mit einer farbstoffabsorbierenden Schicht | |
DE69031087D1 (de) | Korrosionsbeständiges Substrat aus Sinterkarbid | |
DE69502483D1 (de) | Basisschicht für ein beschichtungsystem | |
DE59804623D1 (de) | Adapter für ein Sterilisationsgefäss in Form einer Kassette | |
DE69303849D1 (de) | Verarbeitungszusammensetzung für ein photographisches Silberhalogenidmaterial und Verarbeitungsverfahren unter Verwendung derselben | |
DE69513361D1 (de) | Trägerbehälter für Substratscheiben | |
DE69715600D1 (de) | Beschichtetes Material für ein Überdruckventil | |
DE69102244D1 (de) | Packungsmaterial für Flüssigkeitschromatographie und Verfahren zu dessen Herstellung. | |
DE69835572D1 (de) | Substrat für informationsträger | |
DE69932358D1 (de) | FLüSSIGKRISTALLINES, OPTISCHES ELEMENT UND VERFAHREN ZU DESSEN HERSTELLUNG | |
DE69028813D1 (de) | Verpackungsmaterial für photoempfindliche Materialien | |
DE69027102D1 (de) | Substrat für ein wärmeempfindliches Aufzeichnungspapier |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |