DE69428617D1 - Elektromagnetische Justiervorrichtung - Google Patents
Elektromagnetische JustiervorrichtungInfo
- Publication number
- DE69428617D1 DE69428617D1 DE69428617T DE69428617T DE69428617D1 DE 69428617 D1 DE69428617 D1 DE 69428617D1 DE 69428617 T DE69428617 T DE 69428617T DE 69428617 T DE69428617 T DE 69428617T DE 69428617 D1 DE69428617 D1 DE 69428617D1
- Authority
- DE
- Germany
- Prior art keywords
- adjustment device
- electromagnetic adjustment
- electromagnetic
- adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1615—Programme controls characterised by special kind of manipulator, e.g. planar, scara, gantry, cantilever, space, closed chain, passive/active joints and tendon driven manipulators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Health & Medical Sciences (AREA)
- Robotics (AREA)
- Orthopedic Medicine & Surgery (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Machine Tool Units (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/015,520 US5285142A (en) | 1993-02-09 | 1993-02-09 | Wafer stage with reference surface |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69428617D1 true DE69428617D1 (de) | 2001-11-22 |
DE69428617T2 DE69428617T2 (de) | 2002-08-01 |
Family
ID=21771876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69428617T Expired - Fee Related DE69428617T2 (de) | 1993-02-09 | 1994-01-24 | Elektromagnetische Justiervorrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US5285142A (de) |
EP (1) | EP0611062B1 (de) |
JP (1) | JP3325077B2 (de) |
KR (1) | KR100283784B1 (de) |
CA (1) | CA2114059A1 (de) |
DE (1) | DE69428617T2 (de) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07142336A (ja) * | 1993-06-30 | 1995-06-02 | Canon Inc | 露光装置 |
US5528118A (en) | 1994-04-01 | 1996-06-18 | Nikon Precision, Inc. | Guideless stage with isolated reaction stage |
US7365513B1 (en) | 1994-04-01 | 2008-04-29 | Nikon Corporation | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device |
US6989647B1 (en) * | 1994-04-01 | 2006-01-24 | Nikon Corporation | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device |
US5874820A (en) | 1995-04-04 | 1999-02-23 | Nikon Corporation | Window frame-guided stage mechanism |
US6246204B1 (en) | 1994-06-27 | 2001-06-12 | Nikon Corporation | Electromagnetic alignment and scanning apparatus |
JP3800616B2 (ja) * | 1994-06-27 | 2006-07-26 | 株式会社ニコン | 目標物移動装置、位置決め装置及び可動ステージ装置 |
US5623853A (en) * | 1994-10-19 | 1997-04-29 | Nikon Precision Inc. | Precision motion stage with single guide beam and follower stage |
US6008500A (en) * | 1995-04-04 | 1999-12-28 | Nikon Corporation | Exposure apparatus having dynamically isolated reaction frame |
TW318255B (de) | 1995-05-30 | 1997-10-21 | Philips Electronics Nv | |
US5760564A (en) * | 1995-06-27 | 1998-06-02 | Nikon Precision Inc. | Dual guide beam stage mechanism with yaw control |
US5656942A (en) * | 1995-07-21 | 1997-08-12 | Electroglas, Inc. | Prober and tester with contact interface for integrated circuits-containing wafer held docked in a vertical plane |
US5861549A (en) | 1996-12-10 | 1999-01-19 | Xros, Inc. | Integrated Silicon profilometer and AFM head |
JP2001514733A (ja) * | 1995-12-11 | 2001-09-11 | クセロス・インク | 一体化シリコン側面計及びafmヘッド |
US5757160A (en) * | 1996-12-23 | 1998-05-26 | Svg Lithography Systems, Inc. | Moving interferometer wafer stage |
US5789830A (en) * | 1997-07-08 | 1998-08-04 | Systems, Machines, Automation Components Corporation | In-line rotational drive |
US6089525A (en) * | 1997-10-07 | 2000-07-18 | Ultratech Stepper, Inc. | Six axis active vibration isolation and payload reaction force compensation system |
JPH11287880A (ja) | 1998-04-01 | 1999-10-19 | Canon Inc | ステージ装置、およびこれを用いた露光装置ならびにデバイス製造方法 |
US6307619B1 (en) | 2000-03-23 | 2001-10-23 | Silicon Valley Group, Inc. | Scanning framing blade apparatus |
US6538720B2 (en) | 2001-02-28 | 2003-03-25 | Silicon Valley Group, Inc. | Lithographic tool with dual isolation system and method for configuring the same |
JP2005509874A (ja) * | 2001-11-15 | 2005-04-14 | ザイゴ コーポレイション | 非球面フィゾーの高速インサイチュ習得 |
US6717679B2 (en) * | 2001-11-15 | 2004-04-06 | Zygo Corporation | Dispersive null-optics for aspheric surface and wavefront metrology |
US6784978B2 (en) * | 2002-03-12 | 2004-08-31 | Asml Holding N.V. | Method, system, and apparatus for management of reaction loads in a lithography system |
US6757110B2 (en) * | 2002-05-29 | 2004-06-29 | Asml Holding N.V. | Catadioptric lithography system and method with reticle stage orthogonal to wafer stage |
KR100437263B1 (ko) * | 2002-08-02 | 2004-06-23 | 한국과학기술원 | 이중 h구조를 이용한 장행정 6축 운동 스테이지 |
US20070131879A1 (en) * | 2004-02-02 | 2007-06-14 | Nikon Corporation | Force provider with adjustable force characteristics for a stage assembly |
US20050169784A1 (en) * | 2004-02-02 | 2005-08-04 | Poon Alex K.T. | Force provider for a mover assembly of a stage assembly |
KR100568207B1 (ko) | 2004-02-13 | 2006-04-05 | 삼성전자주식회사 | 이송장치 |
US20050236915A1 (en) * | 2004-04-23 | 2005-10-27 | Nikon Corporation | Electromagnetic force actuator |
US7678458B2 (en) | 2007-01-24 | 2010-03-16 | Asml Holding N.V. | Bonding silicon silicon carbide to glass ceramics |
CN102809346B (zh) * | 2011-05-31 | 2014-12-17 | 上海微电子装备有限公司 | 运动平台的位置测量装置及其测量方法 |
CN110000573A (zh) * | 2019-05-08 | 2019-07-12 | 盐城盐东速削科技有限公司 | 一种基于磁悬浮技术的动梁式速削机 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4223257A (en) * | 1978-11-15 | 1980-09-16 | Miller Donald K | Adaptive servo control system |
US4654571A (en) * | 1985-09-16 | 1987-03-31 | Hinds Walter E | Single plane orthogonally movable drive system |
US4742286A (en) * | 1985-10-29 | 1988-05-03 | Micro-Stage, Inc. | Gas bearing X-Y-θ stage assembly |
US4676649A (en) * | 1985-11-27 | 1987-06-30 | Compact Spindle Bearing Corp. | Multi-axis gas bearing stage assembly |
US5040431A (en) * | 1988-01-22 | 1991-08-20 | Canon Kabushiki Kaisha | Movement guiding mechanism |
US4952858A (en) * | 1988-05-18 | 1990-08-28 | Galburt Daniel N | Microlithographic apparatus |
US5168512A (en) * | 1990-03-13 | 1992-12-01 | Canon Kabushiki Kaisha | Method of manufacture of semiconductor devices |
-
1993
- 1993-02-09 US US08/015,520 patent/US5285142A/en not_active Expired - Lifetime
- 1993-05-10 JP JP10852393A patent/JP3325077B2/ja not_active Expired - Fee Related
-
1994
- 1994-01-24 EP EP94300499A patent/EP0611062B1/de not_active Expired - Lifetime
- 1994-01-24 DE DE69428617T patent/DE69428617T2/de not_active Expired - Fee Related
- 1994-01-24 CA CA002114059A patent/CA2114059A1/en not_active Abandoned
- 1994-02-08 KR KR1019940002322A patent/KR100283784B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0611062B1 (de) | 2001-10-17 |
US5285142A (en) | 1994-02-08 |
CA2114059A1 (en) | 1994-08-10 |
KR100283784B1 (ko) | 2001-04-02 |
DE69428617T2 (de) | 2002-08-01 |
JPH06252034A (ja) | 1994-09-09 |
JP3325077B2 (ja) | 2002-09-17 |
EP0611062A1 (de) | 1994-08-17 |
KR940020524A (ko) | 1994-09-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |