DE69401453D1 - Zusammensetzung für die Behandlung von Kupfer oder Kupferlegierungen - Google Patents
Zusammensetzung für die Behandlung von Kupfer oder KupferlegierungenInfo
- Publication number
- DE69401453D1 DE69401453D1 DE69401453T DE69401453T DE69401453D1 DE 69401453 D1 DE69401453 D1 DE 69401453D1 DE 69401453 T DE69401453 T DE 69401453T DE 69401453 T DE69401453 T DE 69401453T DE 69401453 D1 DE69401453 D1 DE 69401453D1
- Authority
- DE
- Germany
- Prior art keywords
- copper
- treatment
- composition
- alloys
- copper alloys
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title 1
- 229910000881 Cu alloy Inorganic materials 0.000 title 1
- 229910052802 copper Inorganic materials 0.000 title 1
- 239000010949 copper Substances 0.000 title 1
- 239000000203 mixture Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/36—Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest
- B23K35/3612—Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest with organic compounds as principal constituents
- B23K35/3618—Carboxylic acids or salts
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/382—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
- H05K3/383—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by microetching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/12—Using specific substances
- H05K2203/121—Metallo-organic compounds
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/12—Using specific substances
- H05K2203/122—Organic non-polymeric compounds, e.g. oil, wax or thiol
- H05K2203/124—Heterocyclic organic compounds, e.g. azole, furan
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/064—Photoresists
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- ing And Chemical Polishing (AREA)
- Preventing Corrosion Or Incrustation Of Metals (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5100121A JPH06287774A (ja) | 1993-04-05 | 1993-04-05 | 銅および銅合金の表面処理剤 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69401453D1 true DE69401453D1 (de) | 1997-02-27 |
DE69401453T2 DE69401453T2 (de) | 1997-04-30 |
Family
ID=14265513
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69401453T Expired - Fee Related DE69401453T2 (de) | 1993-04-05 | 1994-03-30 | Zusammensetzung für die Behandlung von Kupfer oder Kupferlegierungen |
Country Status (7)
Country | Link |
---|---|
US (1) | US5439783A (de) |
EP (1) | EP0620293B1 (de) |
JP (1) | JPH06287774A (de) |
CN (1) | CN1053233C (de) |
DE (1) | DE69401453T2 (de) |
SG (1) | SG47858A1 (de) |
TW (1) | TW256856B (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2923524B2 (ja) * | 1995-08-01 | 1999-07-26 | メック株式会社 | 銅および銅合金のマイクロエッチング剤並びにマイクロエッチング方法 |
TW374802B (en) | 1996-07-29 | 1999-11-21 | Ebara Densan Ltd | Etching composition, method for roughening copper surface and method for producing printed wiring board |
AU6268198A (en) * | 1997-01-31 | 1998-08-25 | James M. Taylor | Composition and method for priming substrate materials |
US6284309B1 (en) | 1997-12-19 | 2001-09-04 | Atotech Deutschland Gmbh | Method of producing copper surfaces for improved bonding, compositions used therein and articles made therefrom |
JP2000064067A (ja) | 1998-06-09 | 2000-02-29 | Ebara Densan Ltd | エッチング液および銅表面の粗化処理方法 |
US6524644B1 (en) | 1999-08-26 | 2003-02-25 | Enthone Inc. | Process for selective deposition of OSP coating on copper, excluding deposition on gold |
US6432826B1 (en) * | 1999-11-29 | 2002-08-13 | Applied Materials, Inc. | Planarized Cu cleaning for reduced defects |
US7220322B1 (en) | 2000-08-24 | 2007-05-22 | Applied Materials, Inc. | Cu CMP polishing pad cleaning |
WO2002061810A1 (en) * | 2001-01-16 | 2002-08-08 | Cabot Microelectronics Corporation | Ammonium oxalate-containing polishing system and method |
JP4309602B2 (ja) * | 2001-04-25 | 2009-08-05 | メック株式会社 | 銅または銅合金と樹脂との接着性を向上させる方法、ならびに積層体 |
US6783432B2 (en) | 2001-06-04 | 2004-08-31 | Applied Materials Inc. | Additives for pressure sensitive polishing compositions |
US20030221748A1 (en) * | 2002-05-30 | 2003-12-04 | Fry's Metals, Inc. | Solder paste flux system |
JP4018559B2 (ja) * | 2003-02-27 | 2007-12-05 | メック株式会社 | 電子基板の製造方法 |
US7232478B2 (en) | 2003-07-14 | 2007-06-19 | Enthone Inc. | Adhesion promotion in printed circuit boards |
US7210988B2 (en) | 2004-08-24 | 2007-05-01 | Applied Materials, Inc. | Method and apparatus for reduced wear polishing pad conditioning |
TW200720493A (en) | 2005-10-31 | 2007-06-01 | Applied Materials Inc | Electrochemical method for ecmp polishing pad conditioning |
US7794531B2 (en) * | 2007-01-08 | 2010-09-14 | Enthone Inc. | Organic solderability preservative comprising high boiling temperature alcohol |
KR20100061731A (ko) * | 2007-09-14 | 2010-06-08 | 퀄컴 엠이엠스 테크놀로지스, 인크. | Mems 제조에 이용되는 에칭 방법 |
JP5363377B2 (ja) * | 2010-02-19 | 2013-12-11 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
CN102717161B (zh) * | 2011-05-10 | 2014-09-03 | 中国科学院金属研究所 | 一种通过表面多孔结构实现钎焊性可调的工艺 |
US9644274B2 (en) | 2011-07-04 | 2017-05-09 | Mitsubishi Gas Chemical Company, Inc. | Etching solution for copper or a compound comprised mainly of copper |
JP5382892B2 (ja) * | 2012-12-27 | 2014-01-08 | メック株式会社 | エッチング方法 |
KR101318733B1 (ko) * | 2013-06-13 | 2013-10-18 | 주식회사 에이씨엠 | 구리 유기 착물을 이용한 에칭제 조성물 |
CN103441129A (zh) * | 2013-08-23 | 2013-12-11 | 京东方科技集团股份有限公司 | 阵列基板及其制作方法和显示装置 |
US9735177B2 (en) | 2013-08-23 | 2017-08-15 | Boe Technology Group Co., Ltd. | Array substrate, method for manufacturing the same and display device |
JP6218000B2 (ja) | 2016-02-19 | 2017-10-25 | メック株式会社 | 銅のマイクロエッチング剤および配線基板の製造方法 |
JP6710402B2 (ja) * | 2017-10-23 | 2020-06-17 | メック株式会社 | 膜形成基材の製造方法及び表面処理剤 |
CN109487257A (zh) * | 2018-11-13 | 2019-03-19 | 南通赛可特电子有限公司 | 一种osp铜面抗氧化剂及其制备方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5221460B1 (de) * | 1971-04-26 | 1977-06-10 | ||
JPS5120972B1 (de) * | 1971-05-13 | 1976-06-29 | ||
JPS5332341B2 (de) * | 1973-03-27 | 1978-09-07 | ||
US4264418A (en) * | 1978-09-19 | 1981-04-28 | Kilene Corp. | Method for detersifying and oxide coating removal |
US4319955A (en) * | 1980-11-05 | 1982-03-16 | Philip A. Hunt Chemical Corp. | Ammoniacal alkaline cupric etchant solution for and method of reducing etchant undercut |
JPH0249393B2 (ja) * | 1983-05-31 | 1990-10-30 | Yamatoya Shokai | Dooyobidogokinnoetsuchingueki |
JPS6190492A (ja) * | 1984-10-11 | 1986-05-08 | 四国化成工業株式会社 | 銅スル−ホ−ルプリント配線板の製造方法 |
US4859281A (en) * | 1987-06-04 | 1989-08-22 | Pennwalt Corporation | Etching of copper and copper bearing alloys |
US5219484A (en) * | 1991-04-25 | 1993-06-15 | Applied Electroless Concepts Inc. | Solder and tin stripper compositions |
-
1993
- 1993-04-05 JP JP5100121A patent/JPH06287774A/ja active Pending
- 1993-11-23 TW TW082109858A patent/TW256856B/zh active
-
1994
- 1994-03-25 US US08/217,638 patent/US5439783A/en not_active Expired - Fee Related
- 1994-03-30 DE DE69401453T patent/DE69401453T2/de not_active Expired - Fee Related
- 1994-03-30 EP EP94105065A patent/EP0620293B1/de not_active Expired - Lifetime
- 1994-03-30 SG SG1996004756A patent/SG47858A1/en unknown
- 1994-04-04 CN CN94104029A patent/CN1053233C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0620293B1 (de) | 1997-01-15 |
TW256856B (de) | 1995-09-11 |
CN1053233C (zh) | 2000-06-07 |
US5439783A (en) | 1995-08-08 |
CN1120077A (zh) | 1996-04-10 |
JPH06287774A (ja) | 1994-10-11 |
SG47858A1 (en) | 1998-04-17 |
EP0620293A1 (de) | 1994-10-19 |
DE69401453T2 (de) | 1997-04-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |