DE69401023D1 - Dampfdränageeinrichtung - Google Patents

Dampfdränageeinrichtung

Info

Publication number
DE69401023D1
DE69401023D1 DE1994601023 DE69401023A DE69401023D1 DE 69401023 D1 DE69401023 D1 DE 69401023D1 DE 1994601023 DE1994601023 DE 1994601023 DE 69401023 A DE69401023 A DE 69401023A DE 69401023 D1 DE69401023 D1 DE 69401023D1
Authority
DE
Germany
Prior art keywords
dampfdränageeinrichtung
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1994601023
Other languages
English (en)
Inventor
Robert Jeffrey Baseman
Charles Allan Brown
Benjamin Niles Eldridge
Laura Beth Rothman
Herman Russel Wendt
James Tien-Cheng Yeh
Arthur R Zingher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US08/035,999 priority Critical patent/US5346518A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69401023D1 publication Critical patent/DE69401023D1/de
Anticipated expiration legal-status Critical
Application status is Expired - Lifetime legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67366Closed carriers characterised by materials, roughness, coatings or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67389Closed carriers characterised by atmosphere control
    • H01L21/67393Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
DE1994601023 1993-03-23 1994-02-23 Dampfdränageeinrichtung Expired - Lifetime DE69401023D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US08/035,999 US5346518A (en) 1993-03-23 1993-03-23 Vapor drain system

Publications (1)

Publication Number Publication Date
DE69401023D1 true DE69401023D1 (de) 1997-01-16

Family

ID=21886014

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1994601023 Expired - Lifetime DE69401023D1 (de) 1993-03-23 1994-02-23 Dampfdränageeinrichtung

Country Status (4)

Country Link
US (1) US5346518A (de)
EP (1) EP0617573B1 (de)
JP (1) JP2601990B2 (de)
DE (1) DE69401023D1 (de)

Families Citing this family (68)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2976755B2 (ja) * 1993-08-06 1999-11-10 株式会社ダイフク 荷物保管装置
US5417743A (en) * 1994-01-21 1995-05-23 W. L. Gore & Associates, Inc. Self-adhesive vent filter and adsorbent assembly with a diffusion tube
JP2601999B2 (ja) * 1994-07-29 1997-04-23 インターナショナル・ビジネス・マシーンズ・コーポレイション ディスクドライブ装置
US6132492A (en) * 1994-10-13 2000-10-17 Advanced Technology Materials, Inc. Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same
US5582411A (en) * 1994-12-13 1996-12-10 International Business Machines Corporation Scavenging compound infiltrated gasket
US5833726A (en) * 1995-05-26 1998-11-10 Extraction System, Inc. Storing substrates between process steps within a processing facility
DE19540963C2 (de) * 1995-11-03 1999-05-20 Jenoptik Jena Gmbh Transportbehälter für scheibenförmige Objekte
FR2747112B1 (fr) * 1996-04-03 1998-05-07 Commissariat Energie Atomique Dispositif de transport d'objets plats et procede de transfert de ces objets entre ledit dispositif et une machine de traitement
US5709065A (en) * 1996-07-31 1998-01-20 Empak, Inc. Desiccant substrate package
US5843196A (en) * 1997-01-21 1998-12-01 International Business Machines Corporation Ultra-clean transport carrier
US6031685A (en) * 1997-07-11 2000-02-29 Seagate Technology, Inc. Information storage systems comprising a liquid bearing maintained by adsorption isotherm
KR100576758B1 (ko) * 1997-11-28 2006-05-03 가부시키가이샤 에바라 세이사꾸쇼 반도체기판용 반송박스
JP3933394B2 (ja) * 1997-12-03 2007-06-20 株式会社荏原製作所 クリーンボックス
US6319297B1 (en) * 1998-03-27 2001-11-20 Asyst Technologies, Inc. Modular SMIF pod breather, adsorbent, and purge cartridges
US6152885A (en) * 1998-04-30 2000-11-28 Medtronic, Inc. Barometric pressure sensor for use with implantable absolute pressure sensor
US5997614A (en) * 1998-07-13 1999-12-07 Donaldson Company, Inc. Filter with diffusion channel and methods of making and using the filter
JP3916380B2 (ja) 1999-07-06 2007-05-16 株式会社荏原製作所 基板搬送容器待機ステーション
US6214070B1 (en) 1999-07-19 2001-04-10 Maxtor Corporation Disk drive filter
US6401929B2 (en) * 2000-01-12 2002-06-11 Agere Systems Guardian Corp. Insert for use in transporting a wafer carrier
JP2001284443A (ja) * 2000-04-03 2001-10-12 Nec Corp 半導体基板の保管搬送容器、半導体装置の製造方法
JP3939101B2 (ja) 2000-12-04 2007-07-04 株式会社荏原製作所 基板搬送方法および基板搬送容器
JP2002313867A (ja) * 2001-02-09 2002-10-25 Toshiba Corp 半導体装置の製造方法
CN1313329C (zh) * 2001-04-01 2007-05-02 诚实公司 晶片承载器与插入件以及支承薄晶片的方法
US6875282B2 (en) 2001-05-17 2005-04-05 Ebara Corporation Substrate transport container
JP2003007813A (ja) * 2001-06-20 2003-01-10 Nec Corp 半導体ウエハの保管ボックス、運搬装置、運搬方法及び保管倉庫
AT412987T (de) * 2001-08-16 2008-11-15 Communications & Power Industries Inc Wellenleiter- fremdobjektbeschädigungsverhinderungsfenster
US6637998B2 (en) 2001-10-01 2003-10-28 Air Products And Chemicals, Inc. Self evacuating micro environment system
EP1548820B1 (de) * 2002-09-11 2010-12-15 Shin-Etsu Polymer Co., Ltd. Substratlagerungsbehälter
CN1316583C (zh) * 2002-11-26 2007-05-16 株式会社迪斯科 用于储存多个半导体片的盒子
JP2004210421A (ja) 2002-12-26 2004-07-29 Semiconductor Energy Lab Co Ltd 製造システム、並びに処理装置の操作方法
TW594906B (en) * 2003-05-14 2004-06-21 Au Optronics Corp Cassette in a load-lock
US6913654B2 (en) * 2003-06-02 2005-07-05 Mykrolis Corporation Method for the removal of airborne molecular contaminants using water gas mixtures
WO2004109748A2 (en) * 2003-06-05 2004-12-16 Palbam Class Ltd. Supporting shelf for front opening unified pod
TW200540922A (en) * 2004-06-04 2005-12-16 Kondoh Ind Ltd Air-purifying equipment in a semiconductor wafer container
US20050108996A1 (en) * 2003-11-26 2005-05-26 Latham Steven R. Filter system for an electronic equipment enclosure
FR2865314B1 (fr) * 2004-01-20 2006-04-28 Cit Alcatel Station de controle et de purge de mini-environnement
US20050155874A1 (en) * 2004-01-21 2005-07-21 Noah Chen SMIF box and loading system of reticle
DE602005017250D1 (de) 2004-02-05 2009-12-03 Entegris Inc Reinigen eines wafer-überführungsbehälters
US7328727B2 (en) 2004-04-18 2008-02-12 Entegris, Inc. Substrate container with fluid-sealing flow passageway
FR2869451B1 (fr) 2004-04-21 2006-07-21 Alcatel Sa Enveloppe de transport a protection par effet thermophorese
FR2869452B1 (fr) 2004-04-21 2006-09-08 Alcatel Sa Dispositif pour le transport de substrats sous atmosphere controlee
DE102004063912B4 (de) * 2004-04-22 2007-09-20 Siltronic Ag Verfahren zum versandfertigen Verpacken von Halbleiterscheiben
TWM276316U (en) * 2004-08-17 2005-09-21 Tzu-Lung Fu Device having a function of absorbing gas
US7400383B2 (en) 2005-04-04 2008-07-15 Entegris, Inc. Environmental control in a reticle SMIF pod
KR20080034492A (ko) * 2005-08-03 2008-04-21 엔테그리스, 아이엔씨. 이송 용기
US20070076292A1 (en) * 2005-09-27 2007-04-05 Taiwan Semiconductor Manufacturing Company, Ltd. Fully electric field shielding reticle pod
US20070144118A1 (en) * 2005-12-22 2007-06-28 Alvarez Daniel Jr Purging of a wafer conveyance container
TWI298185B (en) * 2006-01-25 2008-06-21 Promos Technologies Inc Wafer-transferring pod capable of monitoring process environment
US20080060974A1 (en) * 2006-02-21 2008-03-13 Taiwan Semiconductor Manufacturing Company, Ltd. Mask carrier treatment to prevent haze and ESD damage
WO2007149513A2 (en) * 2006-06-19 2007-12-27 Entegris, Inc. System for purging reticle storage
EP2122014A4 (de) * 2007-02-28 2014-09-17 Entegris Inc Reinigungssystem für einen substratbehälter
JP5073565B2 (ja) * 2007-04-16 2012-11-14 アドハンド株式会社 カートリッジ型ケミカルアブソーバー
TWM331514U (en) * 2007-11-15 2008-05-01 Gudeng Prec Industral Co Ltd Storage apparatus for storing semiconductor element or reticle
JP5613367B2 (ja) * 2008-01-18 2014-10-22 大日商事株式会社 ケミカルフィルタ及びその梱包体並びにレチクル保管ボックス
KR101851095B1 (ko) 2008-03-13 2018-04-20 엔테그리스, 아이엔씨. 관형 환경 제어 요소를 갖는 웨이퍼 용기
US7938269B2 (en) * 2008-11-11 2011-05-10 Taiwan Semiconductor Manufacturing Co., Ltd. Ventilated front-opening unified pod
US8175757B2 (en) * 2009-09-10 2012-05-08 Avaya Inc. Self-cleaning chassis
JP5403555B2 (ja) * 2010-03-09 2014-01-29 信越ポリマー株式会社 基板収納容器及びその搬送設備
US8377182B2 (en) * 2010-05-14 2013-02-19 Brady Worldwide, Inc. Gas anti diffusion assemblies
TWI403443B (de) * 2010-05-19 2013-08-01
WO2012151431A2 (en) 2011-05-03 2012-11-08 Entergris, Inc. Wafer container with particle shield
US8544651B2 (en) * 2012-01-20 2013-10-01 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer transfer pod for reducing wafer particulate contamination
KR20130095495A (ko) * 2012-02-20 2013-08-28 삼성전자주식회사 반도체 기판 적재용 보트
JP2013251348A (ja) * 2012-05-30 2013-12-12 Tokyo Ohka Kogyo Co Ltd 基板保持装置及び基板処理装置
WO2015001906A1 (ja) * 2013-07-03 2015-01-08 村田機械株式会社 保管容器
EP3042392A4 (de) * 2013-09-06 2017-08-23 Entegris, Inc. Substrathalterung mit verbessertem feststoffgetter
US9881826B2 (en) 2014-10-24 2018-01-30 Lam Research Corporation Buffer station with single exit-flow direction
CN109095005A (zh) * 2018-06-29 2018-12-28 池州市清心信息技术服务有限公司 一种竹家具防霉装置

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3631423A (en) * 1969-06-13 1971-12-28 Burroughs Corp Self-purging disk system
US3710540A (en) * 1970-11-25 1973-01-16 Burroughs Corp Self-purging disk system having air flow guide means
US3846835A (en) * 1973-05-29 1974-11-05 Sperry Rand Corp Clean air system for magnetic storage disk pack
GB2024495B (en) * 1978-05-16 1982-12-22 Burroughs Corp Record-disc cover having air filtration section
US4339777A (en) * 1980-04-10 1982-07-13 Minnesota Mining And Manufacturing Company Air-flow system for a disk file
JPH0355909B2 (de) * 1981-06-01 1991-08-26
US4489356A (en) * 1982-06-24 1984-12-18 Atasi Corporation Enclosed disk drive with improved air filtration system
DE3483828D1 (de) * 1983-09-28 1991-02-07 Hewlett Packard Co Verarbeitungssystem fuer integrierte schaltkreise.
US4532970A (en) * 1983-09-28 1985-08-06 Hewlett-Packard Company Particle-free dockable interface for integrated circuit processing
US4534389A (en) * 1984-03-29 1985-08-13 Hewlett-Packard Company Interlocking door latch for dockable interface for integrated circuit processing
US4620248A (en) * 1984-09-04 1986-10-28 Magnetic Peripherals Inc. Apparatus for controlling humidity in a disk drive
US4772300A (en) * 1985-04-04 1988-09-20 Multiform Desiccants, Inc. Adsorbent cartridge
US4666479A (en) * 1985-07-18 1987-05-19 Tensho Electric Industrial Co., Ltd. Semiconductor wafer container
US4684510A (en) * 1985-12-20 1987-08-04 Hewlett-Packard Company Method and apparatus for prevention of atmospheric corrosion of electronic equipment
US4739882A (en) * 1986-02-13 1988-04-26 Asyst Technologies Container having disposable liners
US4721207A (en) * 1986-04-28 1988-01-26 Tensho Electric Industrial Co., Ltd. Hard disk container
KR960015106B1 (ko) * 1986-11-25 1996-10-28 미다 가쓰시게 면실장형 반도체패키지 포장체
FR2610846A1 (fr) * 1987-02-17 1988-08-19 Air Liquide Element filtrant pour dispositif d'event et dispositif comportant un tel element
US5057217A (en) * 1987-06-25 1991-10-15 W. L. Gore & Associates, Inc. Integral supported filter medium assembly
US5047348A (en) * 1989-04-10 1991-09-10 Massachusetts Institute Of Technology Apparatus for housing radioactive items during incubation
JPH02281495A (en) * 1989-04-20 1990-11-19 Mitsubishi Electric Corp Magnetic disk device
US5030260A (en) * 1989-12-04 1991-07-09 International Business Machines Corporation Disk drive breather filter
JP2803688B2 (ja) * 1990-05-24 1998-09-24 インターナショナル・ビジネス・マシーンズ・コーポレイション 磁気ディスク記憶装置

Also Published As

Publication number Publication date
JPH0794577A (ja) 1995-04-07
US5346518A (en) 1994-09-13
JP2601990B2 (ja) 1997-04-23
EP0617573A1 (de) 1994-09-28
EP0617573B1 (de) 1996-12-04

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Legal Events

Date Code Title Description
8332 No legal effect for de