DE69308077D1 - Anordnung zur Polymer-Beschichtung mittels einen durch Mikrowellen angeregten Plasma - Google Patents

Anordnung zur Polymer-Beschichtung mittels einen durch Mikrowellen angeregten Plasma

Info

Publication number
DE69308077D1
DE69308077D1 DE69308077T DE69308077T DE69308077D1 DE 69308077 D1 DE69308077 D1 DE 69308077D1 DE 69308077 T DE69308077 T DE 69308077T DE 69308077 T DE69308077 T DE 69308077T DE 69308077 D1 DE69308077 D1 DE 69308077D1
Authority
DE
Germany
Prior art keywords
microwaves
arrangement
polymer coating
plasma excited
excited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69308077T
Other languages
English (en)
Other versions
DE69308077T2 (de
Inventor
Dominique Montalan
Pascal Phan
Jean-Pierre Renoult
Pascal Rolland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Valeo Vision SAS
Original Assignee
Valeo Vision SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valeo Vision SAS filed Critical Valeo Vision SAS
Application granted granted Critical
Publication of DE69308077D1 publication Critical patent/DE69308077D1/de
Publication of DE69308077T2 publication Critical patent/DE69308077T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32238—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32266—Means for controlling power transmitted to the plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Optical Elements Other Than Lenses (AREA)
DE1993608077 1992-07-08 1993-07-08 Anordnung zur Polymer-Beschichtung mittels einen durch Mikrowellen angeregten Plasma Expired - Fee Related DE69308077T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9208447A FR2693619B1 (fr) 1992-07-08 1992-07-08 Dispositif pour le dépôt de polymère par l'intermédiaire d'un plasma excité par micro-ondes.

Publications (2)

Publication Number Publication Date
DE69308077D1 true DE69308077D1 (de) 1997-03-27
DE69308077T2 DE69308077T2 (de) 1997-06-26

Family

ID=9431688

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1993608077 Expired - Fee Related DE69308077T2 (de) 1992-07-08 1993-07-08 Anordnung zur Polymer-Beschichtung mittels einen durch Mikrowellen angeregten Plasma

Country Status (4)

Country Link
EP (1) EP0578580B1 (de)
DE (1) DE69308077T2 (de)
ES (1) ES2100486T3 (de)
FR (1) FR2693619B1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0673055A1 (de) * 1994-03-17 1995-09-20 Shin-Etsu Chemical Co., Ltd. Verfahren zur Herstellung einer superharten kohlenstoffhaltigen Schutzschicht auf Objekten
JPH07263187A (ja) * 1994-03-18 1995-10-13 Hitachi Ltd プラズマ処理装置
EP0702393A3 (de) * 1994-09-16 1997-03-26 Daihen Corp Plasmabearbeitungsgerät zur Mikrowellen-Einstrahlung aus einem rechteckigen Wellenleiter durch einem langgestrekten Schlitz in der Plasmakammer
FR2736792B1 (fr) * 1995-07-11 1997-08-22 Plasmion Excitateur a micro-ondes auto-adapte, notamment excitateur de plasma
TW385623B (en) * 1997-10-20 2000-03-21 Sumitomo Metal Ind Apparatus and method for microwave plasma process
US6186090B1 (en) * 1999-03-04 2001-02-13 Energy Conversion Devices, Inc. Apparatus for the simultaneous deposition by physical vapor deposition and chemical vapor deposition and method therefor
JP3384795B2 (ja) * 1999-05-26 2003-03-10 忠弘 大見 プラズマプロセス装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2760845B2 (ja) * 1988-07-08 1998-06-04 株式会社日立製作所 プラズマ処理装置及びその方法
JPH07101685B2 (ja) * 1989-01-26 1995-11-01 富士通株式会社 マイクロ波プラズマ処理装置
JP2993675B2 (ja) * 1989-02-08 1999-12-20 株式会社日立製作所 プラズマ処理方法及びその装置
DE4003904A1 (de) * 1990-02-09 1991-08-14 Bosch Gmbh Robert Vorrichtung zum behandeln von substraten in einem durch mikrowellen erzeugten, gasgestuetzten plasma
JPH04144992A (ja) * 1990-10-01 1992-05-19 Idemitsu Petrochem Co Ltd マイクロ波プラズマ発生装置およびそれを利用するダイヤモンド膜の製造方法

Also Published As

Publication number Publication date
DE69308077T2 (de) 1997-06-26
EP0578580B1 (de) 1997-02-12
FR2693619A1 (fr) 1994-01-14
ES2100486T3 (es) 1997-06-16
FR2693619B1 (fr) 1994-10-07
EP0578580A1 (de) 1994-01-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee