DE69303127D1 - Harter, mehrlagiger Film und Verfahren zu seiner Herstellung - Google Patents

Harter, mehrlagiger Film und Verfahren zu seiner Herstellung

Info

Publication number
DE69303127D1
DE69303127D1 DE69303127T DE69303127T DE69303127D1 DE 69303127 D1 DE69303127 D1 DE 69303127D1 DE 69303127 T DE69303127 T DE 69303127T DE 69303127 T DE69303127 T DE 69303127T DE 69303127 D1 DE69303127 D1 DE 69303127D1
Authority
DE
Germany
Prior art keywords
hard
production
multilayer film
multilayer
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69303127T
Other languages
English (en)
Other versions
DE69303127T2 (de
Inventor
Minoru Yamada
Shingo Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YKK Corp
Original Assignee
YKK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YKK Corp filed Critical YKK Corp
Application granted granted Critical
Publication of DE69303127D1 publication Critical patent/DE69303127D1/de
Publication of DE69303127T2 publication Critical patent/DE69303127T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal
DE1993603127 1992-07-31 1993-07-16 Harter, mehrlagiger Film und Verfahren zu seiner Herstellung Expired - Fee Related DE69303127T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20504292A JPH0649645A (ja) 1992-07-31 1992-07-31 硬質多層膜形成体およびその製造方法

Publications (2)

Publication Number Publication Date
DE69303127D1 true DE69303127D1 (de) 1996-07-18
DE69303127T2 DE69303127T2 (de) 1997-01-23

Family

ID=16500490

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1993603127 Expired - Fee Related DE69303127T2 (de) 1992-07-31 1993-07-16 Harter, mehrlagiger Film und Verfahren zu seiner Herstellung

Country Status (4)

Country Link
US (2) US5663000A (de)
EP (1) EP0585583B1 (de)
JP (1) JPH0649645A (de)
DE (1) DE69303127T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09111460A (ja) * 1995-10-11 1997-04-28 Anelva Corp チタン系導電性薄膜の作製方法
US5900289A (en) * 1995-11-29 1999-05-04 Antec Angewandte Neue Technologien Gmbh Method of producing a colorating coating
JP3679882B2 (ja) * 1997-02-07 2005-08-03 株式会社荏原製作所 研磨用クロスのドレッサー及びその製造方法
US6360423B1 (en) 1997-12-16 2002-03-26 Clad Metals Llc Stick resistant coating for cookware
US7093340B2 (en) 1997-12-16 2006-08-22 All-Clad Metalcrafters Llc Stick resistant ceramic coating for cookware
JP3417907B2 (ja) * 2000-07-13 2003-06-16 日立ツール株式会社 多層皮膜被覆工具
JP5432457B2 (ja) * 2008-01-28 2014-03-05 パナソニック株式会社 ダイヤモンド状炭素被膜の製造方法
JP5661513B2 (ja) * 2011-03-03 2015-01-28 東京エレクトロン株式会社 プラズマ処理装置
CN113943933B (zh) * 2020-07-16 2023-09-29 江苏菲沃泰纳米科技股份有限公司 多层结构的复合膜及其制备方法和产品

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3787223A (en) * 1968-10-16 1974-01-22 Texas Instruments Inc Chemical vapor deposition coatings on titanium
IL63802A (en) * 1981-09-11 1984-10-31 Iscar Ltd Sintered hard metal products having a multi-layer wear-resistant coating
JPS5925973A (ja) * 1982-08-04 1984-02-10 Hitachi Metals Ltd 多重被覆材料およびその製造法
NL8500645A (nl) * 1985-03-07 1986-10-01 Philips Nv Werkwijze voor het afzetten van een laag, die in hoofdzaak uit siliciumcarbide bestaat op een substraat.
DE3515919A1 (de) * 1985-05-03 1986-11-06 Fried. Krupp Gmbh, 4300 Essen Verschleissfester beschichteter hartmetallkoerper und verfahren zu seiner herstellung
JPS627267A (ja) * 1985-07-03 1987-01-14 Konishiroku Photo Ind Co Ltd 網点形成方法
JPS6240375A (ja) * 1985-08-14 1987-02-21 Kanegafuchi Chem Ind Co Ltd 硬質カ−ボン膜
US4895765A (en) * 1985-09-30 1990-01-23 Union Carbide Corporation Titanium nitride and zirconium nitride coating compositions, coated articles and methods of manufacture
US4686156A (en) * 1985-10-11 1987-08-11 Gte Service Corporation Coated cemented carbide cutting tool
DD243514B1 (de) * 1985-12-17 1989-04-26 Karl Marx Stadt Tech Hochschul Hartstoffschichten fuer mechanisch und korrosiv beanspruchte teile
FR2596775B1 (fr) * 1986-04-07 1992-11-13 Univ Limoges Revetement dur multicouches elabore par depot ionique de nitrure de titane, carbonitrure de titane et i-carbone
JPS63286576A (ja) * 1987-05-19 1988-11-24 Idemitsu Petrochem Co Ltd 硬質炭素膜の製造方法
JPS63145776A (ja) * 1987-09-12 1988-06-17 Semiconductor Energy Lab Co Ltd 被膜作成方法
US5223337A (en) * 1988-12-10 1993-06-29 Fried. Krupp Gmbh Tool produced by a plasma-activated CVD process
JPH02232304A (ja) * 1989-03-06 1990-09-14 Sanyo Special Steel Co Ltd 耐食耐熱耐摩部材の製造方法およびその製品部材
US5266409A (en) * 1989-04-28 1993-11-30 Digital Equipment Corporation Hydrogenated carbon compositions
SG48787A1 (en) * 1989-09-11 1998-05-18 Praxair Technology Inc Multilayer coating of a nitride-containing compound and its production
EP0446375B1 (de) * 1989-09-29 1994-04-27 Sumitomo Electric Industries, Ltd. Oberflächenbeschichtete hartwerkstoffe für schneidende und verschleissfeste werkzeuge
IT1241922B (it) * 1990-03-09 1994-02-01 Eniricerche Spa Procedimento per realizzare rivestimenti di carburo di silicio
JPH07109034B2 (ja) * 1991-04-08 1995-11-22 ワイケイケイ株式会社 硬質多層膜形成体およびその製造方法
US5185211A (en) * 1991-07-11 1993-02-09 Praxair S.T. Technology, Inc. Non-stoichiometric titanium nitride coating
US5249554A (en) * 1993-01-08 1993-10-05 Ford Motor Company Powertrain component with adherent film having a graded composition

Also Published As

Publication number Publication date
US5462775A (en) 1995-10-31
EP0585583B1 (de) 1996-06-12
JPH0649645A (ja) 1994-02-22
EP0585583A1 (de) 1994-03-09
DE69303127T2 (de) 1997-01-23
US5663000A (en) 1997-09-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee