DE69232814D1 - Elektronisch löschbare, direkt überschreibbare multibit-einzelzellen-speicherelemente und aus diesen hergestellte anordnungen - Google Patents

Elektronisch löschbare, direkt überschreibbare multibit-einzelzellen-speicherelemente und aus diesen hergestellte anordnungen

Info

Publication number
DE69232814D1
DE69232814D1 DE1992632814 DE69232814A DE69232814D1 DE 69232814 D1 DE69232814 D1 DE 69232814D1 DE 1992632814 DE1992632814 DE 1992632814 DE 69232814 A DE69232814 A DE 69232814A DE 69232814 D1 DE69232814 D1 DE 69232814D1
Authority
DE
Germany
Prior art keywords
arrangements
multi
made
memory elements
electronically erasable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1992632814
Other languages
English (en)
Other versions
DE69232814T2 (de
Inventor
R Ovshinsky
Wolodymyr Czubatyj
Qiuyi Ye
A Strand
J Hudgens
Jesus Gonzalez-Hernandez
Hellmut Fritzsche
A Kostylev
S Chao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Energy Conversion Devices Inc
Original Assignee
Energy Conversion Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US07/747,053 priority Critical patent/US5296716A/en
Priority to US07/768,139 priority patent/US5335219A/en
Priority to US07/789,234 priority patent/US5414271A/en
Priority to US07/880,763 priority patent/US5359205A/en
Priority to US07/898,635 priority patent/US5341328A/en
Priority to PCT/US1992/006876 priority patent/WO1993004506A1/en
Application filed by Energy Conversion Devices Inc filed Critical Energy Conversion Devices Inc
Application granted granted Critical
Publication of DE69232814D1 publication Critical patent/DE69232814D1/de
Anticipated expiration legal-status Critical
Application status is Expired - Fee Related legal-status Critical

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00 - G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00 - G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0004Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00 - G11C25/00 using resistive RAM [RRAM] elements comprising amorphous/crystalline phase transition cells
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/56Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/56Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
    • G11C11/5678Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using amorphous/crystalline phase transition storage elements
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/24Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including solid state components for rectifying, amplifying or switching without a potential-jump barrier or surface barrier, e.g. resistance switching non-volatile memory structures
    • H01L27/2409Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including solid state components for rectifying, amplifying or switching without a potential-jump barrier or surface barrier, e.g. resistance switching non-volatile memory structures comprising two-terminal selection components, e.g. diodes
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/24Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including solid state components for rectifying, amplifying or switching without a potential-jump barrier or surface barrier, e.g. resistance switching non-volatile memory structures
    • H01L27/2463Arrangements comprising multiple bistable or multistable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays, details of the horizontal layout
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L45/00Solid state devices adapted for rectifying, amplifying, oscillating or switching without a potential-jump barrier or surface barrier, e.g. dielectric triodes; Ovshinsky-effect devices; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L45/04Bistable or multistable switching devices, e.g. for resistance switching non-volatile memory
    • H01L45/06Bistable or multistable switching devices, e.g. for resistance switching non-volatile memory based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L45/00Solid state devices adapted for rectifying, amplifying, oscillating or switching without a potential-jump barrier or surface barrier, e.g. dielectric triodes; Ovshinsky-effect devices; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L45/04Bistable or multistable switching devices, e.g. for resistance switching non-volatile memory
    • H01L45/12Details
    • H01L45/122Device geometry
    • H01L45/1233Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L45/00Solid state devices adapted for rectifying, amplifying, oscillating or switching without a potential-jump barrier or surface barrier, e.g. dielectric triodes; Ovshinsky-effect devices; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L45/04Bistable or multistable switching devices, e.g. for resistance switching non-volatile memory
    • H01L45/12Details
    • H01L45/1253Electrodes
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L45/00Solid state devices adapted for rectifying, amplifying, oscillating or switching without a potential-jump barrier or surface barrier, e.g. dielectric triodes; Ovshinsky-effect devices; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L45/04Bistable or multistable switching devices, e.g. for resistance switching non-volatile memory
    • H01L45/14Selection of switching materials
    • H01L45/141Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
    • H01L45/144Tellurides, e.g. GeSbTe
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00 - G11C25/00
    • G11C13/04Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00 - G11C25/00 using optical elements using other beam accessed elements, e.g. electron, ion beam
DE1992632814 1991-01-18 1992-08-17 Elektronisch löschbare, direkt überschreibbare multibit-einzelzellen-speicherelemente und aus diesen hergestellte anordnungen Expired - Fee Related DE69232814D1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US07/747,053 US5296716A (en) 1991-01-18 1991-08-19 Electrically erasable, directly overwritable, multibit single cell memory elements and arrays fabricated therefrom
US07/768,139 US5335219A (en) 1991-01-18 1991-09-30 Homogeneous composition of microcrystalline semiconductor material, semiconductor devices and directly overwritable memory elements fabricated therefrom, and arrays fabricated from the memory elements
US07/789,234 US5414271A (en) 1991-01-18 1991-11-07 Electrically erasable memory elements having improved set resistance stability
US07/880,763 US5359205A (en) 1991-11-07 1992-05-08 Electrically erasable memory elements characterized by reduced current and improved thermal stability
US07/898,635 US5341328A (en) 1991-01-18 1992-06-15 Electrically erasable memory elements having reduced switching current requirements and increased write/erase cycle life
PCT/US1992/006876 WO1993004506A1 (en) 1991-08-19 1992-08-17 Electrically erasable, directly overwritable, multibit single cell memory elements and arrays fabricated therefrom

Publications (1)

Publication Number Publication Date
DE69232814D1 true DE69232814D1 (de) 2002-11-21

Family

ID=27542166

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1992632814 Expired - Fee Related DE69232814D1 (de) 1991-01-18 1992-08-17 Elektronisch löschbare, direkt überschreibbare multibit-einzelzellen-speicherelemente und aus diesen hergestellte anordnungen
DE1992632814 Expired - Lifetime DE69232814T2 (de) 1991-01-18 1992-08-17 Elektronisch löschbare, direkt überschreibbare multibit-einzelzellen-speicherelemente und aus diesen hergestellte anordnungen

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE1992632814 Expired - Lifetime DE69232814T2 (de) 1991-01-18 1992-08-17 Elektronisch löschbare, direkt überschreibbare multibit-einzelzellen-speicherelemente und aus diesen hergestellte anordnungen

Country Status (5)

Country Link
EP (1) EP0601068B1 (de)
JP (1) JP3454821B2 (de)
KR (1) KR100254246B1 (de)
DE (2) DE69232814D1 (de)
WO (1) WO1993004506A1 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
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US5406509A (en) * 1991-01-18 1995-04-11 Energy Conversion Devices, Inc. Electrically erasable, directly overwritable, multibit single cell memory elements and arrays fabricated therefrom
US5818749A (en) * 1993-08-20 1998-10-06 Micron Technology, Inc. Integrated circuit memory device
JPH0883855A (ja) * 1994-09-13 1996-03-26 Mitsubishi Electric Corp 不揮発性半導体記憶装置およびその製造方法
DE69614545D1 (de) * 1995-06-07 2001-09-20 Micron Technology Inc Gestapelte vergrabene diode zur verwendung mit einem mehrzustand-material in einer nichtflüchtigen speicherzelle
US6147395A (en) * 1996-10-02 2000-11-14 Micron Technology, Inc. Method for fabricating a small area of contact between electrodes
WO2002091496A2 (en) 2001-05-07 2002-11-14 Advanced Micro Devices, Inc. Reversible field-programmable electric interconnects
KR100895901B1 (ko) 2001-05-07 2009-05-04 어드밴스드 마이크로 디바이시즈, 인코포레이티드 메모리 효과를 갖는 스위치 요소
JP4514016B2 (ja) 2001-05-07 2010-07-28 アドバンスト・マイクロ・ディバイシズ・インコーポレイテッドAdvanced Micro Devices Incorporated 複合分子材料を使用したフローティングゲートメモリデバイス
WO2002091385A1 (en) 2001-05-07 2002-11-14 Advanced Micro Devices, Inc. Molecular memory cell
JP4886160B2 (ja) 2001-05-07 2012-02-29 アドバンスト・マイクロ・ディバイシズ・インコーポレイテッドAdvanced Micro Devices Incorporated セルフアセンブリによるポリマーフィルムを用いた記憶装置およびその製造方法
AU2002340793A1 (en) 2001-05-07 2002-11-18 Coatue Corporation Molecular memory device
US6838720B2 (en) 2001-08-13 2005-01-04 Advanced Micro Devices, Inc. Memory device with active passive layers
KR100860134B1 (ko) 2001-08-13 2008-09-25 어드밴스드 마이크로 디바이시즈, 인코포레이티드 메모리 셀
US6858481B2 (en) 2001-08-13 2005-02-22 Advanced Micro Devices, Inc. Memory device with active and passive layers
US6806526B2 (en) 2001-08-13 2004-10-19 Advanced Micro Devices, Inc. Memory device
US6768157B2 (en) 2001-08-13 2004-07-27 Advanced Micro Devices, Inc. Memory device
AU2003201760A1 (en) 2002-04-04 2003-10-20 Kabushiki Kaisha Toshiba Phase-change memory device
US7012276B2 (en) 2002-09-17 2006-03-14 Advanced Micro Devices, Inc. Organic thin film Zener diodes
US6813177B2 (en) * 2002-12-13 2004-11-02 Ovoynx, Inc. Method and system to store information
JP2004319587A (ja) * 2003-04-11 2004-11-11 Sharp Corp メモリセル、メモリ装置及びメモリセル製造方法
KR100773537B1 (ko) 2003-06-03 2007-11-07 삼성전자주식회사 한 개의 스위칭 소자와 한 개의 저항체를 포함하는비휘발성 메모리 장치 및 그 제조 방법
US7180767B2 (en) * 2003-06-18 2007-02-20 Macronix International Co., Ltd. Multi-level memory device and methods for programming and reading the same
US7471552B2 (en) * 2003-08-04 2008-12-30 Ovonyx, Inc. Analog phase change memory
US8513634B2 (en) 2003-12-17 2013-08-20 Samsung Electronics Co., Ltd. Nonvolatile data storage, semicoductor memory device including nonvolatile data storage and method of forming the same
CN1938781B (zh) * 2004-04-16 2011-09-21 松下电器产业株式会社 具有可变电阻的薄膜存储器件
CN101872319A (zh) 2004-11-05 2010-10-27 数据机器人技术公司 存储系统条件指示器及其使用方法
KR100682926B1 (ko) 2005-01-31 2007-02-15 삼성전자주식회사 저항체를 이용한 비휘발성 메모리 소자 및 그 제조방법
DE602005025323D1 (de) 2005-06-03 2011-01-27 St Microelectronics Srl Verfahren zum Programmieren von Phasenübergangsspeicherzellen mit mehrfachen Speicherniveaus mithilfe eines Perkolationsalgorithmus
JP5520484B2 (ja) * 2005-12-12 2014-06-11 オヴォニクス,インコーポレイテッド ゲルマニウムまたはテルル含有量の少ないカルコゲナイドデバイス及びカルコゲナイド材料
GB2433647B (en) * 2005-12-20 2008-05-28 Univ Southampton Phase change memory materials, devices and methods
US20070249116A1 (en) * 2006-04-19 2007-10-25 Philipp Jan B Transitioning the state of phase change material by annealing
US7414883B2 (en) * 2006-04-20 2008-08-19 Intel Corporation Programming a normally single phase chalcogenide material for use as a memory or FPLA
US8203872B2 (en) * 2008-02-26 2012-06-19 Ovonyx, Inc. Method and apparatus for accessing a multi-mode programmable resistance memory
US8252653B2 (en) 2008-10-21 2012-08-28 Applied Materials, Inc. Method of forming a non-volatile memory having a silicon nitride charge trap layer
US8198671B2 (en) 2009-04-22 2012-06-12 Applied Materials, Inc. Modification of charge trap silicon nitride with oxygen plasma
US8946666B2 (en) * 2011-06-23 2015-02-03 Macronix International Co., Ltd. Ge-Rich GST-212 phase change memory materials

Family Cites Families (7)

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Publication number Priority date Publication date Assignee Title
US4177475A (en) * 1977-10-31 1979-12-04 Burroughs Corporation High temperature amorphous memory device for an electrically alterable read-only memory
US4203123A (en) * 1977-12-12 1980-05-13 Burroughs Corporation Thin film memory device employing amorphous semiconductor materials
US4199692A (en) * 1978-05-16 1980-04-22 Harris Corporation Amorphous non-volatile ram
US4225946A (en) * 1979-01-24 1980-09-30 Harris Corporation Multilevel erase pulse for amorphous memory devices
IL61678A (en) * 1979-12-13 1984-04-30 Energy Conversion Devices Inc Programmable cell and programmable electronic arrays comprising such cells
US5159661A (en) * 1990-10-05 1992-10-27 Energy Conversion Devices, Inc. Vertically interconnected parallel distributed processor
US5166758A (en) * 1991-01-18 1992-11-24 Energy Conversion Devices, Inc. Electrically erasable phase change memory

Also Published As

Publication number Publication date
EP0601068A1 (de) 1994-06-15
JP3454821B2 (ja) 2003-10-06
WO1993004506A1 (en) 1993-03-04
EP0601068B1 (de) 2002-10-16
EP0601068A4 (en) 1996-11-13
DE69232814T2 (de) 2003-08-07
KR100254246B1 (ko) 2000-05-01
JPH06509909A (de) 1994-11-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee