DE69229493T2 - Verfahren und apparatur zur messung des taupunktes und/oder des frostpunktes eines gases geringen wassergehalts - Google Patents

Verfahren und apparatur zur messung des taupunktes und/oder des frostpunktes eines gases geringen wassergehalts

Info

Publication number
DE69229493T2
DE69229493T2 DE69229493T DE69229493T DE69229493T2 DE 69229493 T2 DE69229493 T2 DE 69229493T2 DE 69229493 T DE69229493 T DE 69229493T DE 69229493 T DE69229493 T DE 69229493T DE 69229493 T2 DE69229493 T2 DE 69229493T2
Authority
DE
Germany
Prior art keywords
mirror
temperature
point
light
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69229493T
Other languages
German (de)
English (en)
Other versions
DE69229493D1 (de
Inventor
Edward Ezell
Takahiko Kijima
Akira Makihara
Junichi Nishizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Oxygen Industries Ltd
Original Assignee
Osaka Oxygen Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP35740591A external-priority patent/JP2863662B2/ja
Priority claimed from JP3357406A external-priority patent/JPH05296927A/ja
Priority claimed from JP3357407A external-priority patent/JPH06109629A/ja
Application filed by Osaka Oxygen Industries Ltd filed Critical Osaka Oxygen Industries Ltd
Publication of DE69229493D1 publication Critical patent/DE69229493D1/de
Application granted granted Critical
Publication of DE69229493T2 publication Critical patent/DE69229493T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/56—Investigating or analyzing materials by the use of thermal means by investigating moisture content
    • G01N25/66—Investigating or analyzing materials by the use of thermal means by investigating moisture content by investigating dew-point
    • G01N25/68—Investigating or analyzing materials by the use of thermal means by investigating moisture content by investigating dew-point by varying the temperature of a condensing surface

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
DE69229493T 1991-04-18 1992-04-17 Verfahren und apparatur zur messung des taupunktes und/oder des frostpunktes eines gases geringen wassergehalts Expired - Lifetime DE69229493T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP8690691 1991-04-18
JP8690591 1991-04-18
JP35740591A JP2863662B2 (ja) 1991-11-30 1991-11-30 低水分含有量を持ったガスの露点及び／又は霜点を測定する方法
JP3357406A JPH05296927A (ja) 1991-04-18 1991-12-01 ガス中の微量水分測定装置
JP3357407A JPH06109629A (ja) 1991-04-18 1991-12-01 ガス中の微量水分測定装置
PCT/JP1992/000492 WO1992018854A1 (en) 1991-04-18 1992-04-17 Method of measuring the dew point and/or frost point of a gas having low water content and apparatus therefor

Publications (2)

Publication Number Publication Date
DE69229493D1 DE69229493D1 (de) 1999-08-05
DE69229493T2 true DE69229493T2 (de) 1999-10-28

Family

ID=27525244

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69229493T Expired - Lifetime DE69229493T2 (de) 1991-04-18 1992-04-17 Verfahren und apparatur zur messung des taupunktes und/oder des frostpunktes eines gases geringen wassergehalts

Country Status (6)

Country Link
EP (1) EP0535248B1 (https=)
KR (1) KR100205839B1 (https=)
CA (1) CA2085611A1 (https=)
DE (1) DE69229493T2 (https=)
TW (1) TW213979B (https=)
WO (1) WO1992018854A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2702049B1 (fr) * 1993-02-24 1995-03-31 Imra Europe Sa Procédé et dispositif pour déterminer un risque de condensation d'eau sur une surface se trouvant au contact d'un volume d'air humide.
US5971609A (en) * 1994-10-31 1999-10-26 Osaka Sanso Kogyo Ltd. Method of measuring the dew point or frost point of a gas having low water content
FR2753533B1 (fr) * 1996-09-17 1998-10-09 Commissariat Energie Atomique Procede et dispositif de caracterisation d'une modification au cours du temps de l'etat de condensation de gouttelettes sur une cible
CN108981799B (zh) * 2018-06-22 2023-09-22 中国矿业大学(北京) 一种便携式低温环境参数监测预警装置及方法
CN113865288B (zh) * 2021-10-14 2023-06-20 江苏鑫华半导体科技股份有限公司 评估袋装多晶硅干燥效果的方法
CN114353220A (zh) * 2021-12-28 2022-04-15 北京金茂人居环境科技有限公司 辐射空调环境监测方法、监测装置及电子设备

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3623356A (en) * 1969-12-18 1971-11-30 Eg & G Inc Dew point hygrometer
US4629333A (en) * 1984-10-19 1986-12-16 Eg&G, Inc. Chilled mirror hygrometer with performance monitoring
JPH07104304B2 (ja) * 1987-06-11 1995-11-13 大阪酸素工業株式会社 ガス中の微量水分量測定装置
CH676152A5 (https=) * 1988-06-03 1990-12-14 Arthur Mutter
JPH0323348U (https=) * 1989-07-17 1991-03-11

Also Published As

Publication number Publication date
WO1992018854A1 (en) 1992-10-29
KR100205839B1 (en) 1999-07-01
EP0535248A1 (en) 1993-04-07
KR930701737A (ko) 1993-06-12
TW213979B (https=) 1993-10-01
CA2085611A1 (en) 1992-10-19
DE69229493D1 (de) 1999-08-05
EP0535248B1 (en) 1999-06-30

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