DE69225908T2 - Gelenkarm mit übergabevorrichtung - Google Patents

Gelenkarm mit übergabevorrichtung

Info

Publication number
DE69225908T2
DE69225908T2 DE1992625908 DE69225908T DE69225908T2 DE 69225908 T2 DE69225908 T2 DE 69225908T2 DE 1992625908 DE1992625908 DE 1992625908 DE 69225908 T DE69225908 T DE 69225908T DE 69225908 T2 DE69225908 T2 DE 69225908T2
Authority
DE
Grant status
Grant
Patent type
Prior art keywords
transfer device
articulated arm
arm transfer
articulated
device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1992625908
Other languages
English (en)
Other versions
DE69225908D1 (de )
Inventor
Ruth Hendrickson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brooks Automation Inc
Original Assignee
Brooks Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/10Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00Machine element or mechanism
    • Y10T74/18Mechanical movements
    • Y10T74/18856Oscillating to oscillating
    • Y10T74/1888Geared connections
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00Machine element or mechanism
    • Y10T74/18Mechanical movements
    • Y10T74/18888Reciprocating to or from oscillating
    • Y10T74/1892Lever and slide
    • Y10T74/18952Lever and slide toggle transmissions
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00Machine element or mechanism
    • Y10T74/20Control lever and linkage systems
    • Y10T74/20576Elements
    • Y10T74/20582Levers
    • Y10T74/20588Levers toggle
    • Y10T74/20594Lazy tongs
DE1992625908 1991-04-18 1992-12-30 Gelenkarm mit übergabevorrichtung Expired - Lifetime DE69225908T2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US07687288 US5180276A (en) 1991-04-18 1991-04-18 Articulated arm transfer device
PCT/US1992/011066 WO1994015760A1 (en) 1991-04-18 1992-12-30 Articulated arm transfer device

Publications (1)

Publication Number Publication Date
DE69225908T2 true DE69225908T2 (de) 1998-12-10

Family

ID=26785245

Family Applications (3)

Application Number Title Priority Date Filing Date
DE1992625908 Expired - Fee Related DE69225908D1 (de) 1991-04-18 1992-12-30 Gelenkarm mit übergabevorrichtung
DE1993901121 Pending DE631535T1 (de) 1991-04-18 1992-12-30 Gelenkarm mit übergabevorrichtung.
DE1992625908 Expired - Lifetime DE69225908T2 (de) 1991-04-18 1992-12-30 Gelenkarm mit übergabevorrichtung

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE1992625908 Expired - Fee Related DE69225908D1 (de) 1991-04-18 1992-12-30 Gelenkarm mit übergabevorrichtung
DE1993901121 Pending DE631535T1 (de) 1991-04-18 1992-12-30 Gelenkarm mit übergabevorrichtung.

Country Status (5)

Country Link
US (1) US5180276A (de)
EP (1) EP0631535B1 (de)
JP (1) JP3419457B2 (de)
DE (3) DE69225908D1 (de)
WO (1) WO1994015760A1 (de)

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US6450755B1 (en) * 1998-07-10 2002-09-17 Equipe Technologies Dual arm substrate handling robot with a batch loader
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US6120229A (en) * 1999-02-01 2000-09-19 Brooks Automation Inc. Substrate carrier as batchloader
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KR100471088B1 (ko) * 2003-02-07 2005-03-10 삼성전자주식회사 이송장치
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US8308151B2 (en) * 2008-11-03 2012-11-13 Comau Inc. Elevator assembly for robotic positioning of a workpiece
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Also Published As

Publication number Publication date Type
EP0631535A4 (de) 1995-04-26 application
JP3419457B2 (ja) 2003-06-23 grant
DE69225908D1 (de) 1998-07-16 grant
EP0631535B1 (de) 1998-06-10 grant
JPH07504128A (de) 1995-05-11 application
WO1994015760A1 (en) 1994-07-21 application
EP0631535A1 (de) 1995-01-04 application
DE631535T1 (de) 1995-08-24 grant
US5180276A (en) 1993-01-19 grant

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