DE69126381T2 - Halbleiterchip mit gyroskopischem wandler - Google Patents

Halbleiterchip mit gyroskopischem wandler

Info

Publication number
DE69126381T2
DE69126381T2 DE69126381T DE69126381T DE69126381T2 DE 69126381 T2 DE69126381 T2 DE 69126381T2 DE 69126381 T DE69126381 T DE 69126381T DE 69126381 T DE69126381 T DE 69126381T DE 69126381 T2 DE69126381 T2 DE 69126381T2
Authority
DE
Germany
Prior art keywords
flexure
supported
gyroscopic
frame
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69126381T
Other languages
English (en)
Other versions
DE69126381D1 (de
Inventor
Paul Greiff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Charles Stark Draper Laboratory Inc
Original Assignee
Charles Stark Draper Laboratory Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Charles Stark Draper Laboratory Inc filed Critical Charles Stark Draper Laboratory Inc
Application granted granted Critical
Publication of DE69126381D1 publication Critical patent/DE69126381D1/de
Publication of DE69126381T2 publication Critical patent/DE69126381T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
DE69126381T 1990-03-14 1991-03-14 Halbleiterchip mit gyroskopischem wandler Expired - Lifetime DE69126381T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/493,327 US5016072A (en) 1988-01-13 1990-03-14 Semiconductor chip gyroscopic transducer
PCT/US1991/001702 WO1991014285A1 (en) 1990-03-14 1991-03-14 Semiconductor chip gyroscopic transducer

Publications (2)

Publication Number Publication Date
DE69126381D1 DE69126381D1 (de) 1997-07-10
DE69126381T2 true DE69126381T2 (de) 1997-09-18

Family

ID=23959783

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69126381T Expired - Lifetime DE69126381T2 (de) 1990-03-14 1991-03-14 Halbleiterchip mit gyroskopischem wandler

Country Status (7)

Country Link
US (1) US5016072A (de)
EP (1) EP0472717B1 (de)
JP (1) JPH05502945A (de)
AT (1) ATE154166T1 (de)
CA (1) CA2057919C (de)
DE (1) DE69126381T2 (de)
WO (1) WO1991014285A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10046649C2 (de) * 1999-09-20 2003-09-18 Murata Manufacturing Co Vibrationsgyroskop
DE102006043388B3 (de) * 2006-09-08 2008-04-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Kompensation herstellungsbedingt auftretender Abweichungen bei der Herstellung mikromechanischer Elemente und deren Verwendung

Families Citing this family (129)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5216490A (en) * 1988-01-13 1993-06-01 Charles Stark Draper Laboratory, Inc. Bridge electrodes for microelectromechanical devices
DE4000903C1 (de) * 1990-01-15 1990-08-09 Robert Bosch Gmbh, 7000 Stuttgart, De
US5144184A (en) * 1990-01-26 1992-09-01 The Charles Stark Draper Laboratory, Inc. Micromechanical device with a trimmable resonant frequency structure and method of trimming same
US5126812A (en) * 1990-02-14 1992-06-30 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical accelerometer
US5473945A (en) 1990-02-14 1995-12-12 The Charles Stark Draper Laboratory, Inc. Micromechanical angular accelerometer with auxiliary linear accelerometer
DE69102590T2 (de) * 1990-05-18 1994-10-06 British Aerospace Trägheitssensoren.
US6729545B2 (en) * 1990-05-29 2004-05-04 Symbol Technologies, Inc. Integrated scanner on a common substrate having an omnidirectional mirror
WO1992003740A1 (en) * 1990-08-17 1992-03-05 Analog Devices, Inc. Monolithic accelerometer
US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
US5326726A (en) * 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5605598A (en) * 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5205171A (en) * 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
US5241861A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5121180A (en) * 1991-06-21 1992-06-09 Texas Instruments Incorporated Accelerometer with central mass in support
US5635639A (en) * 1991-09-11 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5313835A (en) * 1991-12-19 1994-05-24 Motorola, Inc. Integrated monolithic gyroscopes/accelerometers with logic circuits
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5270630A (en) * 1992-05-15 1993-12-14 Xerox Corporation Method and apparatus for antirotation encoder interfaces
US5353656A (en) * 1992-08-18 1994-10-11 Satcon Technology Corporation Electrostatically controlled micromechanical gyroscope
US5461916A (en) 1992-08-21 1995-10-31 Nippondenso Co., Ltd. Mechanical force sensing semiconductor device
US5734105A (en) * 1992-10-13 1998-03-31 Nippondenso Co., Ltd. Dynamic quantity sensor
JP2654602B2 (ja) * 1992-12-25 1997-09-17 日本電気株式会社 半導体力学量センサ
DE69420481T2 (de) * 1993-01-29 2000-05-18 Murata Manufacturing Co Winkelgeschwindigkeitsmessaufnehmer
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5673139A (en) * 1993-07-19 1997-09-30 Medcom, Inc. Microelectromechanical television scanning device and method for making the same
US6467345B1 (en) 1993-10-18 2002-10-22 Xros, Inc. Method of operating micromachined members coupled for relative rotation
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US6426013B1 (en) 1993-10-18 2002-07-30 Xros, Inc. Method for fabricating micromachined members coupled for relative rotation
US6044705A (en) * 1993-10-18 2000-04-04 Xros, Inc. Micromachined members coupled for relative rotation by torsion bars
US5488862A (en) * 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
US6059188A (en) 1993-10-25 2000-05-09 Symbol Technologies Packaged mirror including mirror travel stops
JP3385688B2 (ja) * 1993-12-13 2003-03-10 株式会社デンソー 半導体ヨーレートセンサおよびその製造方法
DE69413792T2 (de) * 1994-01-25 1999-03-04 Draper Lab Charles S Mikromechanischer Stimmgabelumdrehungsmesser mit kammförmigen Antriebselemente
JP3077077B2 (ja) * 1994-01-28 2000-08-14 ザ・チャールズ・スターク・ドレイパー・ラボラトリー・インコーポレイテッド 慣性レートセンサー
JP3555214B2 (ja) * 1994-03-15 2004-08-18 株式会社デンソー 半導体加速度センサ
US5987986A (en) * 1994-07-29 1999-11-23 Litton Systems, Inc. Navigation grade micromachined rotation sensor system
US5646348A (en) 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
US5581035A (en) 1994-08-29 1996-12-03 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode
US5725729A (en) * 1994-09-26 1998-03-10 The Charles Stark Draper Laboratory, Inc. Process for micromechanical fabrication
JP3412293B2 (ja) * 1994-11-17 2003-06-03 株式会社デンソー 半導体ヨーレートセンサおよびその製造方法
JPH08247768A (ja) * 1995-03-08 1996-09-27 Nippondenso Co Ltd 角速度センサ
KR100374803B1 (ko) * 1995-05-25 2003-05-12 삼성전자주식회사 튜닝포크형자이로스코프
DE19526903B4 (de) * 1995-07-22 2005-03-10 Bosch Gmbh Robert Drehratensensor
US5861549A (en) 1996-12-10 1999-01-19 Xros, Inc. Integrated Silicon profilometer and AFM head
US5638946A (en) * 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
EP0912883B1 (de) * 1996-01-22 2003-04-16 Xros, Inc. Aus Silizium mittels Mikromaterialbearbeitung hergestellter, flügelzellenartiger Mikrodurchflussmesser
US5817942A (en) * 1996-02-28 1998-10-06 The Charles Stark Draper Laboratory, Inc. Capacitive in-plane accelerometer
JPH1047971A (ja) * 1996-08-05 1998-02-20 Nippon Soken Inc 角速度センサ
US5914801A (en) * 1996-09-27 1999-06-22 Mcnc Microelectromechanical devices including rotating plates and related methods
US5892153A (en) * 1996-11-21 1999-04-06 The Charles Stark Draper Laboratory, Inc. Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
KR100233848B1 (ko) * 1996-12-21 1999-12-01 정선종 마이크로 자이로스코프 제조 방법
US5783973A (en) * 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
US5911156A (en) * 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
US5952574A (en) * 1997-04-29 1999-09-14 The Charles Stark Draper Laboratory, Inc. Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
DE69726718T2 (de) 1997-07-31 2004-10-07 St Microelectronics Srl Verfahren zum Herstellen hochempfindlicher integrierter Beschleunigungs- und Gyroskopsensoren und Sensoren, die derartig hergestellt werden
US6718605B2 (en) * 1997-09-08 2004-04-13 The Regents Of The University Of Michigan Single-side microelectromechanical capacitive accelerometer and method of making same
US5905201A (en) * 1997-10-28 1999-05-18 Alliedsignal Inc. Micromachined rate and acceleration sensor and method
US6230563B1 (en) 1998-06-09 2001-05-15 Integrated Micro Instruments, Inc. Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability
CA2340192A1 (en) 1998-09-02 2000-03-09 Armand P. Neukermans Micromachined members coupled for relative rotation by torsional flexure hinges
JP2000330067A (ja) * 1999-05-20 2000-11-30 Olympus Optical Co Ltd ねじり揺動体
US7051590B1 (en) 1999-06-15 2006-05-30 Analog Devices Imi, Inc. Structure for attenuation or cancellation of quadrature error
US6257059B1 (en) * 1999-09-24 2001-07-10 The Charles Stark Draper Laboratory, Inc. Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation
US6275320B1 (en) 1999-09-27 2001-08-14 Jds Uniphase, Inc. MEMS variable optical attenuator
JP2001133266A (ja) * 1999-11-01 2001-05-18 Mitsubishi Electric Corp 角速度センサ
US6373682B1 (en) 1999-12-15 2002-04-16 Mcnc Electrostatically controlled variable capacitor
US20020071169A1 (en) 2000-02-01 2002-06-13 Bowers John Edward Micro-electro-mechanical-system (MEMS) mirror device
US6753638B2 (en) * 2000-02-03 2004-06-22 Calient Networks, Inc. Electrostatic actuator for micromechanical systems
US6628041B2 (en) 2000-05-16 2003-09-30 Calient Networks, Inc. Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same
US6449098B1 (en) 2000-05-16 2002-09-10 Calient Networks, Inc. High uniformity lens arrays having lens correction and methods for fabricating the same
US6585383B2 (en) 2000-05-18 2003-07-01 Calient Networks, Inc. Micromachined apparatus for improved reflection of light
US6560384B1 (en) 2000-06-01 2003-05-06 Calient Networks, Inc. Optical switch having mirrors arranged to accommodate freedom of movement
US6668108B1 (en) 2000-06-02 2003-12-23 Calient Networks, Inc. Optical cross-connect switch with integrated optical signal tap
US6483961B1 (en) 2000-06-02 2002-11-19 Calient Networks, Inc. Dual refraction index collimator for an optical switch
US6615681B1 (en) * 2000-07-28 2003-09-09 The Charles Stark Draper Laboratory, Inc. Hybrid wafer gyroscope
US6643425B1 (en) 2000-08-17 2003-11-04 Calient Networks, Inc. Optical switch having switch mirror arrays controlled by scanning beams
DE10040537B4 (de) * 2000-08-18 2004-05-13 Eads Deutschland Gmbh Mikromechanischer Drehratensensor und Verfahren zu seiner Herstellung
US6485273B1 (en) 2000-09-01 2002-11-26 Mcnc Distributed MEMS electrostatic pumping devices
US6536280B1 (en) * 2000-09-12 2003-03-25 Ic Mechanics, Inc. Thin film MEMS sensors employing electrical sensing and force feedback
US6590267B1 (en) 2000-09-14 2003-07-08 Mcnc Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
US6825967B1 (en) 2000-09-29 2004-11-30 Calient Networks, Inc. Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same
US6377438B1 (en) 2000-10-23 2002-04-23 Mcnc Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
JP3646250B2 (ja) * 2000-11-15 2005-05-11 日本航空電子工業株式会社 光スイッチ
US6595056B2 (en) 2001-02-07 2003-07-22 Litton Systems, Inc Micromachined silicon gyro using tuned accelerometer
US6474160B1 (en) 2001-05-24 2002-11-05 Northrop Grumman Corporation Counterbalanced silicon tuned multiple accelerometer-gyro
US6715352B2 (en) 2001-06-26 2004-04-06 Microsensors, Inc. Method of designing a flexure system for tuning the modal response of a decoupled micromachined gyroscope and a gyroscoped designed according to the method
US6619121B1 (en) 2001-07-25 2003-09-16 Northrop Grumman Corporation Phase insensitive quadrature nulling method and apparatus for coriolis angular rate sensors
US6544863B1 (en) 2001-08-21 2003-04-08 Calient Networks, Inc. Method of fabricating semiconductor wafers having multiple height subsurface layers
US6597825B1 (en) 2001-10-30 2003-07-22 Calient Networks, Inc. Optical tap for an optical switch
US20040025591A1 (en) * 2001-11-19 2004-02-12 Eiji Yoshikawa Accleration sensor
US6955086B2 (en) 2001-11-19 2005-10-18 Mitsubishi Denki Kabushiki Kaisha Acceleration sensor
JP4392246B2 (ja) * 2002-02-06 2009-12-24 アナログ・デバイスズ・インク マイクロ加工されたジャイロスコープ
US7089792B2 (en) * 2002-02-06 2006-08-15 Analod Devices, Inc. Micromachined apparatus utilizing box suspensions
US6935759B1 (en) * 2002-02-19 2005-08-30 Glimmerglass Networks, Inc. Folded longitudinal torsional hinge for gimbaled MEMS mirror
JP4155775B2 (ja) * 2002-03-07 2008-09-24 アルプス電気株式会社 静電容量式センサ
JP2003329444A (ja) * 2002-03-07 2003-11-19 Alps Electric Co Ltd 静電容量式センサ
AU2003226083A1 (en) * 2002-03-26 2003-10-13 The Charles Stark Draper Laboratory, Inc. Microelectromechanical sensors having reduced signal bias errors and methods of manufacturing the same
US6641273B1 (en) * 2002-06-28 2003-11-04 Glimmerglass Networks, Inc. MEMS structure with mechanical overdeflection limiter
US6823733B2 (en) * 2002-11-04 2004-11-30 Matsushita Electric Industrial Co., Ltd. Z-axis vibration gyroscope
US6912902B2 (en) * 2003-03-26 2005-07-05 Honeywell International Inc. Bending beam accelerometer with differential capacitive pickoff
US7397097B2 (en) * 2003-11-25 2008-07-08 Stmicroelectronics, Inc. Integrated released beam layer structure fabricated in trenches and manufacturing method thereof
US20050172717A1 (en) * 2004-02-06 2005-08-11 General Electric Company Micromechanical device with thinned cantilever structure and related methods
JP4512636B2 (ja) * 2004-04-14 2010-07-28 アナログ デバイシス， インコーポレイテッド 直線的にアレイされたセンサエレメントを有する慣性センサ
US7753072B2 (en) * 2004-07-23 2010-07-13 Afa Controls Llc Valve assemblies including at least three chambers and related methods
EP1624284B1 (de) * 2004-07-29 2017-07-19 STMicroelectronics Srl Mikroelektromechanischer hochempfindlicher Inertialsensor und dessen Herstellungsverfahren
US7478557B2 (en) * 2004-10-01 2009-01-20 Analog Devices, Inc. Common centroid micromachine driver
US7179674B2 (en) * 2004-12-28 2007-02-20 Stmicroelectronics, Inc. Bi-directional released-beam sensor
US7353706B2 (en) * 2004-12-28 2008-04-08 Stmicroelectronics, Inc. Weighted released-beam sensor
US7421897B2 (en) 2005-04-14 2008-09-09 Analog Devices, Inc. Cross-quad and vertically coupled inertial sensors
JP2007033330A (ja) * 2005-07-28 2007-02-08 Fujitsu Media Device Kk 角速度センサ
JP4600344B2 (ja) * 2006-04-28 2010-12-15 パナソニック電工株式会社 静電容量式センサ
KR101012248B1 (ko) * 2006-04-28 2011-02-08 파나소닉 전공 주식회사 정전용량식 센서
FR2909736B1 (fr) * 2006-12-07 2012-08-17 Commissariat Energie Atomique Liaison annulaire lineaire sans entretien et dispositif comportant au moins une telle liaison
DE102007021920B8 (de) * 2007-05-10 2011-12-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zum Entwerfen eines mikromechanischen Bauelements mit angepasster Empfindlichkeit, Verfahren zur Herstellung eines mikromechanischen Bauelements und eines mikromechanischen Systems
DE102007054505B4 (de) 2007-11-15 2016-12-22 Robert Bosch Gmbh Drehratensensor
US8187902B2 (en) * 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
US8860455B2 (en) * 2010-12-24 2014-10-14 Intel Corporation Methods and systems to measure a signal on an integrated circuit die
US9335544B2 (en) * 2013-03-15 2016-05-10 Rit Wireless Ltd. Electrostatically steerable actuator
KR101540154B1 (ko) * 2013-10-04 2015-07-28 삼성전기주식회사 각속도 센서 및 그의 제조방법
DE102016215975A1 (de) * 2016-08-25 2018-03-01 Robert Bosch Gmbh Verfahren zum Betrieb eines mikromechanischen Bauelements
WO2021252364A1 (en) * 2020-06-08 2021-12-16 Analog Devices, Inc. Stress-relief mems gyroscope
WO2021252398A1 (en) 2020-06-08 2021-12-16 Analog Devices, Inc. Drive and sense stress relief apparatus
US11698257B2 (en) 2020-08-24 2023-07-11 Analog Devices, Inc. Isotropic attenuated motion gyroscope

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH359552A (de) * 1957-07-20 1962-01-15 Boelkow Entwicklungen Kg Mess- und Regeleinrichtung für sehr kleine Geschwindigkeiten
US4342227A (en) * 1980-12-24 1982-08-03 International Business Machines Corporation Planar semiconductor three direction acceleration detecting device and method of fabrication
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
US4522072A (en) * 1983-04-22 1985-06-11 Insouth Microsystems, Inc. Electromechanical transducer strain sensor arrangement and construction
US4628283A (en) * 1983-11-07 1986-12-09 The Narda Microwave Corporation Hermetically sealed oscillator with dielectric resonator tuned through dielectric window by adjusting screw
US4598585A (en) * 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
US4699006A (en) * 1984-03-19 1987-10-13 The Charles Stark Draper Laboratory, Inc. Vibratory digital integrating accelerometer
US4674180A (en) * 1984-05-01 1987-06-23 The Foxboro Company Method of making a micromechanical electric shunt
US4680606A (en) * 1984-06-04 1987-07-14 Tactile Perceptions, Inc. Semiconductor transducer
US4674319A (en) * 1985-03-20 1987-06-23 The Regents Of The University Of California Integrated circuit sensor
US4705659A (en) * 1985-04-01 1987-11-10 Motorola, Inc. Carbon film oxidation for free-standing film formation
US4764244A (en) * 1985-06-11 1988-08-16 The Foxboro Company Resonant sensor and method of making same
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
US4736629A (en) * 1985-12-20 1988-04-12 Silicon Designs, Inc. Micro-miniature accelerometer
US4670092A (en) * 1986-04-18 1987-06-02 Rockwell International Corporation Method of fabricating a cantilever beam for a monolithic accelerometer
ES2020769A6 (es) * 1990-02-23 1991-09-16 Bendix Espana Sistema hidraulico para una servodireccion de vehiculo automovil.

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10046649C2 (de) * 1999-09-20 2003-09-18 Murata Manufacturing Co Vibrationsgyroskop
DE102006043388B3 (de) * 2006-09-08 2008-04-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Kompensation herstellungsbedingt auftretender Abweichungen bei der Herstellung mikromechanischer Elemente und deren Verwendung
US7951635B2 (en) 2006-09-08 2011-05-31 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use

Also Published As

Publication number Publication date
CA2057919A1 (en) 1991-09-15
ATE154166T1 (de) 1997-06-15
EP0472717A1 (de) 1992-03-04
EP0472717A4 (en) 1992-08-19
US5016072A (en) 1991-05-14
CA2057919C (en) 2001-01-23
WO1991014285A1 (en) 1991-09-19
JPH05502945A (ja) 1993-05-20
EP0472717B1 (de) 1997-06-04
DE69126381D1 (de) 1997-07-10

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