DE69029104D1 - Polysiloxane und positiv arbeitende Resistmasse - Google Patents
Polysiloxane und positiv arbeitende ResistmasseInfo
- Publication number
- DE69029104D1 DE69029104D1 DE69029104T DE69029104T DE69029104D1 DE 69029104 D1 DE69029104 D1 DE 69029104D1 DE 69029104 T DE69029104 T DE 69029104T DE 69029104 T DE69029104 T DE 69029104T DE 69029104 D1 DE69029104 D1 DE 69029104D1
- Authority
- DE
- Germany
- Prior art keywords
- polysiloxanes
- positive working
- working resist
- resist
- positive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/22—Polysiloxanes containing silicon bound to organic groups containing atoms other than carbon, hydrogen and oxygen
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/38—Polysiloxanes modified by chemical after-treatment
- C08G77/382—Polysiloxanes modified by chemical after-treatment containing atoms other than carbon, hydrogen, oxygen or silicon
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/114—Initiator containing
- Y10S430/122—Sulfur compound containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/114—Initiator containing
- Y10S430/126—Halogen compound containing
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1179784A JP2598998B2 (ja) | 1989-07-12 | 1989-07-12 | 感光性組成物 |
JP1180738A JPH0344644A (ja) | 1989-07-13 | 1989-07-13 | 感光性組成物 |
JP18187889A JPH0346661A (ja) | 1989-07-14 | 1989-07-14 | 感光性組成物 |
JP18188089A JPH0346663A (ja) | 1989-07-14 | 1989-07-14 | 感光性組成物 |
JP18187989A JPH0346662A (ja) | 1989-07-14 | 1989-07-14 | 感光性組成物 |
JP179590A JPH03206460A (ja) | 1990-01-09 | 1990-01-09 | 感光性組成物 |
JP179690A JPH03206461A (ja) | 1990-01-09 | 1990-01-09 | 感光性組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69029104D1 true DE69029104D1 (de) | 1996-12-19 |
DE69029104T2 DE69029104T2 (de) | 1997-03-20 |
Family
ID=27563155
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69029104T Expired - Fee Related DE69029104T2 (de) | 1989-07-12 | 1990-07-11 | Polysiloxane und positiv arbeitende Resistmasse |
Country Status (3)
Country | Link |
---|---|
US (2) | US5216105A (de) |
EP (1) | EP0410606B1 (de) |
DE (1) | DE69029104T2 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0492254B1 (de) * | 1990-12-20 | 1999-03-17 | Siemens Aktiengesellschaft | Verfahren zur Herstellung von N-tert.-Butoxycarbonyl-maleinimid |
DE4124028A1 (de) * | 1991-07-19 | 1993-01-21 | Hoechst Ag | Verfahren zur herstellung von n-tert.-butoxycarbonyl-maleimid |
DE69700397T2 (de) | 1996-04-23 | 2000-04-13 | Kodak Polychrome Graphics Co | Vorläufer einer lithographischen druckform und ihre verwendung bei der bebilderung durch wärme |
US6117610A (en) * | 1997-08-08 | 2000-09-12 | Kodak Polychrome Graphics Llc | Infrared-sensitive diazonaphthoquinone imaging composition and element containing non-basic IR absorbing material and methods of use |
US6063544A (en) * | 1997-03-21 | 2000-05-16 | Kodak Polychrome Graphics Llc | Positive-working printing plate and method of providing a positive image therefrom using laser imaging |
US6090532A (en) * | 1997-03-21 | 2000-07-18 | Kodak Polychrome Graphics Llc | Positive-working infrared radiation sensitive composition and printing plate and imaging method |
DE69801363T2 (de) | 1997-07-05 | 2002-05-23 | Kodak Polychrome Graphics Llc | Bilderzeugungsverfahren |
CN1061365C (zh) * | 1997-07-18 | 2001-01-31 | 中国科学院化学研究所 | 一种梯形聚硅氧烷为基体的液晶定向膜及其制备方法和用途 |
US6060217A (en) * | 1997-09-02 | 2000-05-09 | Kodak Polychrome Graphics Llc | Thermal lithographic printing plates |
US6531260B2 (en) * | 2000-04-07 | 2003-03-11 | Jsr Corporation | Polysiloxane, method of manufacturing same, silicon-containing alicyclic compound, and radiation-sensitive resin composition |
WO2006137261A1 (ja) * | 2005-06-21 | 2006-12-28 | Konica Minolta Medical & Graphic, Inc. | 感光性組成物、感光性平版印刷版材料および平版印刷版材料の画像形成方法 |
DE102013003329A1 (de) | 2013-02-25 | 2014-08-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Silane, Hybridpolymere und Photolack mit Positiv-Resist Verhalten sowie Verfahren zur Herstellung |
Family Cites Families (96)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE508815A (de) | 1949-07-23 | |||
US3046121A (en) | 1949-07-23 | 1962-07-24 | Azoplate Corp | Process for the manufacture of printing plates and light-sensitive material suttablefor use therein |
US3046119A (en) | 1950-08-01 | 1962-07-24 | Azoplate Corp | Light sensitive material for printing and process for making printing plates |
BE506677A (de) | 1950-10-31 | |||
BE540601A (de) | 1950-12-06 | |||
NL78025C (de) | 1951-02-02 | |||
US2767092A (en) | 1951-12-06 | 1956-10-16 | Azoplate Corp | Light sensitive material for lithographic printing |
GB742557A (en) | 1952-10-01 | 1955-12-30 | Kalle & Co Ag | Light-sensitive material for photomechanical reproduction and process for the production of images |
DE938233C (de) | 1953-03-11 | 1956-01-26 | Kalle & Co Ag | Lichtempfindliches Material fuer die photomechanische Herstellung von Druckformen |
GB772517A (en) | 1954-02-06 | 1957-04-17 | Kalle & Co Ag | Improvements in or relating to photo-mechanical reproduction |
NL199728A (de) | 1954-08-20 | |||
US2807648A (en) | 1955-09-16 | 1957-09-24 | Stauffer Chemical Co | Process for making sulfonium compounds |
US2907665A (en) | 1956-12-17 | 1959-10-06 | Cons Electrodynamics Corp | Vitreous enamel |
NL247299A (de) | 1959-01-14 | |||
US2946638A (en) | 1959-03-31 | 1960-07-26 | Acme Visible Records Inc | Slidable shelf arrangement |
NL130471C (de) | 1959-08-05 | |||
NL267931A (de) | 1960-08-05 | 1900-01-01 | ||
US3247791A (en) | 1960-05-06 | 1966-04-26 | Litho Chemical And Supply Co I | Surface treated lithographic plates and production thereof |
US3307951A (en) | 1963-02-01 | 1967-03-07 | Lithoplate Inc | Lithographic plate |
US3181461A (en) | 1963-05-23 | 1965-05-04 | Howard A Fromson | Photographic plate |
DE1299661B (de) | 1964-02-27 | 1969-07-24 | Eastman Kodak Co | Verfahren zur Verbesserung der hydrophilen Eigenschaften der Traeger von fuer Flachdruckverfahren geeigneten Druckplatten |
US3635709A (en) | 1966-12-15 | 1972-01-18 | Polychrome Corp | Light-sensitive lithographic plate |
ZA6807938B (de) | 1967-12-04 | |||
US3658662A (en) | 1969-01-21 | 1972-04-25 | Durolith Corp | Corrosion resistant metallic plates particularly useful as support members for photo-lithographic plates and the like |
CA933791A (en) | 1969-06-13 | 1973-09-18 | Broyde Barret | Additives to positive photoresists which increase the sensitivity thereof |
US3647443A (en) | 1969-09-12 | 1972-03-07 | Eastman Kodak Co | Light-sensitive quinone diazide polymers and polymer compositions |
BE757124A (fr) | 1969-10-09 | 1971-04-06 | Kalle Ag | Plaques d'impression a plat composee de feuilles |
DE2150691C2 (de) | 1971-10-12 | 1982-09-09 | Basf Ag, 6700 Ludwigshafen | Lichtempfindliches Gemisch und Verwendung eines lichtempfindlichen Gemisches zur Herstellung einer Flachdruckplatte |
US3779778A (en) | 1972-02-09 | 1973-12-18 | Minnesota Mining & Mfg | Photosolubilizable compositions and elements |
JPS5148516B2 (de) | 1973-02-07 | 1976-12-21 | ||
DE2331377C2 (de) | 1973-06-20 | 1982-10-14 | Hoechst Ag, 6000 Frankfurt | Lichtempfindliches Kopiermaterial |
JPS5723253B2 (de) | 1974-03-25 | 1982-05-18 | ||
AU497960B2 (en) | 1974-04-11 | 1979-01-25 | Minnesota Mining And Manufacturing Company | Photopolymerizable compositions |
GB1516511A (en) | 1974-05-02 | 1978-07-05 | Gen Electric | Curable epoxide compositions |
GB1516352A (en) | 1974-05-02 | 1978-07-05 | Gen Electric | Halonium salts |
IE42085B1 (en) | 1974-09-18 | 1980-06-04 | Ici Ltd | Photopolymerisable compositions |
GB1539192A (en) | 1975-01-27 | 1979-01-31 | Ici Ltd | Photopolymerisable compositions |
CH621416A5 (de) | 1975-03-27 | 1981-01-30 | Hoechst Ag | |
US4009033A (en) | 1975-09-22 | 1977-02-22 | International Business Machines Corporation | High speed positive photoresist composition |
JPS5280022A (en) | 1975-12-26 | 1977-07-05 | Fuji Photo Film Co Ltd | Light solubilizable composition |
US4062686A (en) | 1976-04-21 | 1977-12-13 | Eastman Kodak Company | Sensitizers for photocrosslinkable polymers |
JPS538128A (en) | 1976-07-09 | 1978-01-25 | Fuji Photo Film Co Ltd | Photosolubilizable composition |
DE2641100A1 (de) | 1976-09-13 | 1978-03-16 | Hoechst Ag | Lichtempfindliche kopierschicht |
US4151175A (en) | 1976-12-09 | 1979-04-24 | General Electric Company | Method for making diarylhalonium salts |
DE2718254C3 (de) | 1977-04-25 | 1980-04-10 | Hoechst Ag, 6000 Frankfurt | Strahlungsempfindliche Kopiermasse |
JPS5474728A (en) | 1977-11-28 | 1979-06-15 | Fuji Photo Film Co Ltd | Photosensitive composition |
US4173476A (en) | 1978-02-08 | 1979-11-06 | Minnesota Mining And Manufacturing Company | Complex salt photoinitiator |
DE2829512A1 (de) | 1978-07-05 | 1980-01-17 | Hoechst Ag | Strahlungsempfindliches gemisch und verfahren zur herstellung von reliefbildern |
DE2829511A1 (de) | 1978-07-05 | 1980-01-24 | Hoechst Ag | Strahlungsempfindliches gemisch und verfahren zur herstellung von reliefbildern |
JPS5577742A (en) | 1978-12-08 | 1980-06-11 | Fuji Photo Film Co Ltd | Photosensitive composition |
US4250053A (en) | 1979-05-21 | 1981-02-10 | Minnesota Mining And Manufacturing Company | Sensitized aromatic iodonium or aromatic sulfonium salt photoinitiator systems |
DE2928636A1 (de) | 1979-07-16 | 1981-02-12 | Hoechst Ag | Strahlungsempfindliches gemisch und verfahren zur herstellung von reliefbildern |
US4247473A (en) | 1979-07-19 | 1981-01-27 | American Can Company | Method for producing bis-[4-(diphenylsulfonio)pheny] sulfide bis-M.X6 photoinitiator |
US4307173A (en) | 1980-06-23 | 1981-12-22 | American Hoechst Corporation | Light-sensitive composition comprising phthalic anhydride |
JPS57163234A (en) | 1981-04-01 | 1982-10-07 | Fuji Photo Film Co Ltd | Photosensitive composition |
US4551416A (en) * | 1981-05-22 | 1985-11-05 | At&T Bell Laboratories | Process for preparing semiconductors using photosensitive bodies |
DE3126626A1 (de) | 1981-07-06 | 1983-01-20 | Hoechst Ag, 6000 Frankfurt | Hydrophilierte traegermaterialien fuer offsetdruckplatten, ein verfahren zu ihrer herstellung und ihre verwendung |
DE3126636A1 (de) | 1981-07-06 | 1983-01-27 | Hoechst Ag, 6000 Frankfurt | Hydrophilierte traegermaterialien fuer offsetdruckplatten, ein verfahren zu ihrer herstellung und ihre verwendung |
US4442197A (en) | 1982-01-11 | 1984-04-10 | General Electric Company | Photocurable compositions |
US4491628A (en) | 1982-08-23 | 1985-01-01 | International Business Machines Corporation | Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone |
JPS59101651A (ja) | 1982-12-02 | 1984-06-12 | Fuji Photo Film Co Ltd | 感光性平版印刷版 |
US5073476A (en) | 1983-05-18 | 1991-12-17 | Ciba-Geigy Corporation | Curable composition and the use thereof |
JPH0617991B2 (ja) | 1983-06-22 | 1994-03-09 | 富士写真フイルム株式会社 | 光可溶化組成物 |
DE3473359D1 (de) * | 1983-06-29 | 1988-09-15 | Fuji Photo Film Co Ltd | Photosolubilizable composition |
JPS60121446A (ja) | 1983-12-06 | 1985-06-28 | Fuji Photo Film Co Ltd | 光可溶化組成物 |
JPS6037549A (ja) | 1983-08-10 | 1985-02-26 | Fuji Photo Film Co Ltd | 光可溶化組成物 |
JPS6010247A (ja) | 1983-06-29 | 1985-01-19 | Fuji Photo Film Co Ltd | 光可溶化組成物 |
US4603195A (en) * | 1983-12-30 | 1986-07-29 | International Business Machines Corporation | Organosilicon compound and use thereof in photolithography |
FR2570844B1 (fr) * | 1984-09-21 | 1986-11-14 | Commissariat Energie Atomique | Film photosensible a base de polymere silicie et son utilisation comme resine de masquage dans un procede de lithographie |
JPS61144639A (ja) | 1984-12-19 | 1986-07-02 | Hitachi Ltd | 放射線感応性組成物及びそれを用いたパタ−ン形成法 |
JPH07120044B2 (ja) | 1986-03-31 | 1995-12-20 | 株式会社東芝 | 感光性組成物およびそれを用いるパターン形成方法 |
JPS61256347A (ja) | 1985-05-10 | 1986-11-13 | Hitachi Ltd | アルカリ可溶性シロキサン重合体 |
JPS61267042A (ja) | 1985-05-21 | 1986-11-26 | Fuji Photo Film Co Ltd | 感光性組成物 |
JPH067263B2 (ja) * | 1985-08-19 | 1994-01-26 | 富士写真フイルム株式会社 | 光可溶化組成物 |
US4665006A (en) | 1985-12-09 | 1987-05-12 | International Business Machines Corporation | Positive resist system having high resistance to oxygen reactive ion etching |
US4822716A (en) * | 1985-12-27 | 1989-04-18 | Kabushiki Kaisha Toshiba | Polysilanes, Polysiloxanes and silicone resist materials containing these compounds |
JP2619358B2 (ja) | 1986-01-08 | 1997-06-11 | 株式会社日立製作所 | 感光性樹脂組成物 |
JPH083637B2 (ja) | 1986-03-24 | 1996-01-17 | 日本電信電話株式会社 | 感光性樹脂組成物 |
JPH061381B2 (ja) | 1986-02-18 | 1994-01-05 | 株式会社日立製作所 | 放射線感応性樹脂組成物 |
US4837124A (en) | 1986-02-24 | 1989-06-06 | Hoechst Celanese Corporation | High resolution photoresist of imide containing polymers |
US4689289A (en) * | 1986-04-30 | 1987-08-25 | General Electric Company | Block polymer compositions |
JPS6336240A (ja) | 1986-07-28 | 1988-02-16 | インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン | レジスト構造の作成方法 |
JPS6390534A (ja) | 1986-10-06 | 1988-04-21 | Hitachi Ltd | アルカリ可溶性ラダ−シリコ−ン重合体 |
JPH0769608B2 (ja) | 1986-10-06 | 1995-07-31 | 株式会社日立製作所 | 感光性樹脂組成物 |
JPH07120039B2 (ja) | 1986-11-14 | 1995-12-20 | 富士写真フイルム株式会社 | 感光性組成物 |
JPH0654382B2 (ja) | 1986-11-18 | 1994-07-20 | 富士写真フイルム株式会社 | 感光性組成物 |
JPS63146038A (ja) | 1986-12-10 | 1988-06-18 | Toshiba Corp | 感光性組成物 |
DE3735086C1 (de) * | 1987-10-16 | 1989-02-02 | Goldschmidt Ag Th | Organopolysiloxane mit Buntesalzgruppen |
KR910005771B1 (ko) * | 1988-03-22 | 1991-08-03 | 주식회사 럭키 | 아미드기를 함유하는 폴리실록산 및 그의 제조방법 |
DE3817011A1 (de) * | 1988-05-19 | 1989-11-30 | Basf Ag | Strahlungsempfindliches gemisch und verfahren zur herstellung von reliefmustern |
JP2547626B2 (ja) * | 1988-10-07 | 1996-10-23 | 富士写真フイルム株式会社 | モノマーの製造方法 |
DE3907954A1 (de) * | 1989-03-11 | 1990-09-13 | Hoechst Ag | Positiv arbeitendes strahlungsempfindliches gemisch und daraus hergestelltes strahlungsempfindliches aufzeichnungsmaterial fuer hochenergetische strahlung |
JP2648969B2 (ja) * | 1989-07-28 | 1997-09-03 | 富士写真フイルム株式会社 | 感光性組成物 |
JP2607162B2 (ja) * | 1990-02-02 | 1997-05-07 | 富士写真フイルム株式会社 | 感光性組成物 |
JP2632066B2 (ja) * | 1990-04-06 | 1997-07-16 | 富士写真フイルム株式会社 | ポジ画像の形成方法 |
US5225316A (en) * | 1990-11-26 | 1993-07-06 | Minnesota Mining And Manufacturing Company | An imagable article comprising a photosensitive composition comprising a polymer having acid labile pendant groups |
-
1990
- 1990-07-11 EP EP90307611A patent/EP0410606B1/de not_active Expired - Lifetime
- 1990-07-11 DE DE69029104T patent/DE69029104T2/de not_active Expired - Fee Related
-
1992
- 1992-07-10 US US07/550,446 patent/US5216105A/en not_active Expired - Lifetime
- 1992-08-28 US US07/936,788 patent/US5338640A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0410606A2 (de) | 1991-01-30 |
DE69029104T2 (de) | 1997-03-20 |
EP0410606A3 (en) | 1991-12-11 |
EP0410606B1 (de) | 1996-11-13 |
US5216105A (en) | 1993-06-01 |
US5338640A (en) | 1994-08-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |