DE68929314D1 - Vorrichtung zur Detektion der Positionsrelation zwischen zwei Objekten - Google Patents

Vorrichtung zur Detektion der Positionsrelation zwischen zwei Objekten

Info

Publication number
DE68929314D1
DE68929314D1 DE68929314T DE68929314T DE68929314D1 DE 68929314 D1 DE68929314 D1 DE 68929314D1 DE 68929314 T DE68929314 T DE 68929314T DE 68929314 T DE68929314 T DE 68929314T DE 68929314 D1 DE68929314 D1 DE 68929314D1
Authority
DE
Germany
Prior art keywords
objects
detecting
positional relationship
positional
relationship
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68929314T
Other languages
English (en)
Other versions
DE68929314T2 (de
Inventor
Noriyuki Nose
Naoto Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1209928A external-priority patent/JP2581227B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE68929314D1 publication Critical patent/DE68929314D1/de
Publication of DE68929314T2 publication Critical patent/DE68929314T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
DE68929314T 1988-09-09 1989-09-07 Vorrichtung zur Detektion der Positionsrelation zwischen zwei Objekten Expired - Fee Related DE68929314T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP22600688 1988-09-09
JP22580988 1988-09-09
JP1209928A JP2581227B2 (ja) 1988-09-09 1989-08-14 位置検出装置

Publications (2)

Publication Number Publication Date
DE68929314D1 true DE68929314D1 (de) 2001-08-23
DE68929314T2 DE68929314T2 (de) 2002-05-02

Family

ID=27329069

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68929314T Expired - Fee Related DE68929314T2 (de) 1988-09-09 1989-09-07 Vorrichtung zur Detektion der Positionsrelation zwischen zwei Objekten

Country Status (3)

Country Link
US (1) US5148038A (de)
EP (1) EP0358511B1 (de)
DE (1) DE68929314T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0455443B1 (de) * 1990-05-01 1997-11-12 Canon Kabushiki Kaisha Verfahren und Apparat zur Detektion von Lageabweichungen
JPH0563909A (ja) * 1991-08-28 1993-03-12 Canon Inc カラー画像読取装置
JP3296239B2 (ja) * 1997-03-27 2002-06-24 ウシオ電機株式会社 間隙設定機構を備えたプロキシミティ露光装置
DE60123463T2 (de) * 2000-11-27 2007-08-02 The Procter & Gamble Company, Cincinnati Geschirrspülverfahren

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4037969A (en) * 1976-04-02 1977-07-26 Bell Telephone Laboratories, Incorporated Zone plate alignment marks
US4360273A (en) * 1980-02-14 1982-11-23 Sperry Corporation Optical alignment of masks for X-ray lithography
US4326805A (en) * 1980-04-11 1982-04-27 Bell Telephone Laboratories, Incorporated Method and apparatus for aligning mask and wafer members
US4539482A (en) * 1980-10-09 1985-09-03 Canon Kabushiki Kaisha Reading apparatus
US4398824A (en) * 1981-04-15 1983-08-16 Bell Telephone Laboratories, Incorporated Wafer tilt compensation in zone plate alignment system
US4629313A (en) * 1982-10-22 1986-12-16 Nippon Kogaku K.K. Exposure apparatus
US4636626A (en) * 1983-01-14 1987-01-13 Nippon Kogaku K.K. Apparatus for aligning mask and wafer used in semiconductor circuit element fabrication
US4545683A (en) * 1983-02-28 1985-10-08 The Perkin-Elmer Corporation Wafer alignment device
US4514858A (en) * 1983-03-15 1985-04-30 Micronix Partners Lithography system
US4656347A (en) * 1984-01-30 1987-04-07 Nippon Telegraph & Telephone Public Corporation Diffraction grating position adjuster using a grating and a reflector
JPS61111402A (ja) * 1984-11-06 1986-05-29 Nippon Kogaku Kk <Nikon> 位置検出装置

Also Published As

Publication number Publication date
US5148038A (en) 1992-09-15
EP0358511B1 (de) 2001-07-18
DE68929314T2 (de) 2002-05-02
EP0358511A2 (de) 1990-03-14
EP0358511A3 (de) 1990-12-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee