DE60304637D1 - Kleiner kapazitiver Druck-Wandler mit Einsatz-Spritzen, beweglicher Elektrode und Membran - Google Patents

Kleiner kapazitiver Druck-Wandler mit Einsatz-Spritzen, beweglicher Elektrode und Membran

Info

Publication number
DE60304637D1
DE60304637D1 DE60304637T DE60304637T DE60304637D1 DE 60304637 D1 DE60304637 D1 DE 60304637D1 DE 60304637 T DE60304637 T DE 60304637T DE 60304637 T DE60304637 T DE 60304637T DE 60304637 D1 DE60304637 D1 DE 60304637D1
Authority
DE
Germany
Prior art keywords
membrane
pressure transducer
movable electrode
capacitive pressure
small capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60304637T
Other languages
English (en)
Other versions
DE60304637T8 (de
DE60304637T2 (de
Inventor
Yasushi Shimomoto
Kenji Shinohara
Osamu Kishimoto
Kazuhira Izawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Application granted granted Critical
Publication of DE60304637D1 publication Critical patent/DE60304637D1/de
Publication of DE60304637T2 publication Critical patent/DE60304637T2/de
Publication of DE60304637T8 publication Critical patent/DE60304637T8/de
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
DE60304637T 2002-08-07 2003-07-15 Kleiner kapazitiver Druck-Wandler mit Einsatz-Spritzen, beweglicher Elektrode und Membran Expired - Fee Related DE60304637T8 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002230248A JP2004069555A (ja) 2002-08-07 2002-08-07 圧力センサおよびその製造方法
JP2002230248 2002-08-07

Publications (3)

Publication Number Publication Date
DE60304637D1 true DE60304637D1 (de) 2006-05-24
DE60304637T2 DE60304637T2 (de) 2007-04-05
DE60304637T8 DE60304637T8 (de) 2007-07-12

Family

ID=31492323

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60304637T Expired - Fee Related DE60304637T8 (de) 2002-08-07 2003-07-15 Kleiner kapazitiver Druck-Wandler mit Einsatz-Spritzen, beweglicher Elektrode und Membran

Country Status (4)

Country Link
US (1) US6915698B2 (de)
EP (1) EP1394521B1 (de)
JP (1) JP2004069555A (de)
DE (1) DE60304637T8 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004132726A (ja) * 2002-10-08 2004-04-30 Denso Corp 圧力センサ
CN103302672A (zh) * 2012-03-16 2013-09-18 鸿富锦精密工业（深圳）有限公司 防爆机器人
WO2014049769A1 (ja) * 2012-09-27 2014-04-03 株式会社 エー・アンド・デイ 静電容量型圧力センサ
DE102014102973A1 (de) * 2014-03-06 2015-09-10 Endress + Hauser Gmbh + Co. Kg Drucksensor
JP7327247B2 (ja) * 2020-03-31 2023-08-16 株式会社デンソー 蒸発燃料漏れ検査装置の圧力センサ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5653031A (en) * 1979-10-05 1981-05-12 Omron Tateisi Electronics Co Multiple insert molding method
JPH07286925A (ja) 1994-04-19 1995-10-31 Omron Corp 圧力センサーとこの圧力センサーを用いたガス供給システム及びガス漏れ検出方法
EP0706038B1 (de) * 1994-10-07 1999-01-13 Omron Corporation Kapazitiver Druckwandler mit zwei Kammern
AU1333800A (en) * 1998-11-06 2000-05-29 Bausch & Lomb Surgical, Inc. Capacitive vacuum sensor
JP2001305000A (ja) * 2000-02-18 2001-10-31 Omron Corp 圧力センサ

Also Published As

Publication number Publication date
DE60304637T8 (de) 2007-07-12
EP1394521A1 (de) 2004-03-03
DE60304637T2 (de) 2007-04-05
US6915698B2 (en) 2005-07-12
JP2004069555A (ja) 2004-03-04
US20040079161A1 (en) 2004-04-29
EP1394521B1 (de) 2006-04-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8381 Inventor (new situation)

Inventor name: IZAWA, KAZUHIRA, KYOTO-SHI , KYOTO 600-8530, JP

Inventor name: KISHIMOTO, OSAMU, KYOTO-SHI , KYOTO 600-8530, JP

Inventor name: SHINOHARA, KENJI, KYOTO-SHI , KYOTO 600-8530, JP

Inventor name: SHIMOMOTO, YASUSHI, KYOTO-SHI , KYOTO 600-8530, JP

8339 Ceased/non-payment of the annual fee