DE602008002445D1 - Poliervorrichtung - Google Patents
PoliervorrichtungInfo
- Publication number
- DE602008002445D1 DE602008002445D1 DE602008002445T DE602008002445T DE602008002445D1 DE 602008002445 D1 DE602008002445 D1 DE 602008002445D1 DE 602008002445 T DE602008002445 T DE 602008002445T DE 602008002445 T DE602008002445 T DE 602008002445T DE 602008002445 D1 DE602008002445 D1 DE 602008002445D1
- Authority
- DE
- Germany
- Prior art keywords
- polisher
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/14—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the temperature during grinding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/18—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the presence of dressing tools
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007019634 | 2007-01-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602008002445D1 true DE602008002445D1 (de) | 2010-10-28 |
Family
ID=39323669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602008002445T Active DE602008002445D1 (de) | 2007-01-30 | 2008-01-29 | Poliervorrichtung |
Country Status (7)
Country | Link |
---|---|
US (1) | US8152594B2 (de) |
EP (1) | EP1952945B1 (de) |
JP (1) | JP5301840B2 (de) |
KR (1) | KR101095605B1 (de) |
CN (1) | CN101254586B (de) |
DE (1) | DE602008002445D1 (de) |
TW (1) | TWI451488B (de) |
Families Citing this family (49)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104044057B (zh) * | 2004-11-01 | 2017-05-17 | 株式会社荏原制作所 | 抛光设备 |
US20090239659A1 (en) * | 2008-03-24 | 2009-09-24 | Aruze Corp. | Gaming machine accepting side bet and gaming method |
US20100130107A1 (en) * | 2008-11-24 | 2010-05-27 | Applied Materials, Inc. | Method and apparatus for linear pad conditioning |
JP5306065B2 (ja) * | 2009-06-04 | 2013-10-02 | 株式会社荏原製作所 | ドレッシング装置およびドレッシング方法 |
KR20100134433A (ko) * | 2009-06-15 | 2010-12-23 | 엘지전자 주식회사 | 기능 제어부를 갖는 이동 단말기 |
TWI381904B (zh) * | 2009-12-03 | 2013-01-11 | Nat Univ Chung Cheng | The method of detecting the grinding characteristics and service life of the polishing pad |
US20170066104A9 (en) * | 2009-12-08 | 2017-03-09 | Allison Transmission Inc. | Method for Detecting And/Or Preventing Grind Burn |
JP5511600B2 (ja) * | 2010-09-09 | 2014-06-04 | 株式会社荏原製作所 | 研磨装置 |
US8545289B2 (en) * | 2011-04-13 | 2013-10-01 | Nanya Technology Corporation | Distance monitoring device |
JP5896625B2 (ja) | 2011-06-02 | 2016-03-30 | 株式会社荏原製作所 | 研磨装置に使用される研磨パッドの研磨面を監視する方法および装置 |
CN103029039B (zh) * | 2011-09-30 | 2016-01-06 | 鸿富锦精密工业(深圳)有限公司 | 压力检测装置及应用该压力检测装置的打磨设备 |
CN103084969B (zh) * | 2011-11-01 | 2015-09-09 | 中芯国际集成电路制造(上海)有限公司 | 一种化学机械研磨设备 |
CN103182681A (zh) * | 2011-12-28 | 2013-07-03 | 青岛嘉星晶电科技股份有限公司 | 一种双面研磨机研磨盘修整装置及其修整方法 |
CN103381575A (zh) * | 2012-05-03 | 2013-11-06 | 旺宏电子股份有限公司 | 平坦化修正臂、应用其的平坦化系统及平坦化方法 |
CN102672594A (zh) * | 2012-05-04 | 2012-09-19 | 上海华力微电子有限公司 | 一种精确控制cmp研磨盘温度的装置 |
US10702972B2 (en) | 2012-05-31 | 2020-07-07 | Ebara Corporation | Polishing apparatus |
JP5976522B2 (ja) * | 2012-05-31 | 2016-08-23 | 株式会社荏原製作所 | 研磨装置および研磨方法 |
JP5927083B2 (ja) | 2012-08-28 | 2016-05-25 | 株式会社荏原製作所 | ドレッシングプロセスの監視方法および研磨装置 |
JP5919157B2 (ja) * | 2012-10-01 | 2016-05-18 | 株式会社荏原製作所 | ドレッサー |
CN102941533B (zh) * | 2012-11-09 | 2016-08-03 | 佛山市业鹏机械有限公司 | 水钻抛光盘磨耗自动补偿检测装置 |
JP5973883B2 (ja) * | 2012-11-15 | 2016-08-23 | 株式会社荏原製作所 | 基板保持装置および研磨装置 |
JP6239354B2 (ja) * | 2012-12-04 | 2017-11-29 | 不二越機械工業株式会社 | ウェーハ研磨装置 |
US20140224766A1 (en) * | 2013-02-08 | 2014-08-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Groove Design for Retaining Ring |
JP6113552B2 (ja) * | 2013-03-29 | 2017-04-12 | 株式会社荏原製作所 | 研磨装置及び摩耗検知方法 |
JP6161999B2 (ja) | 2013-08-27 | 2017-07-12 | 株式会社荏原製作所 | 研磨方法および研磨装置 |
CN103506956B (zh) * | 2013-09-26 | 2016-04-27 | 中国电子科技集团公司第四十五研究所 | 一种用于晶圆化学机械平坦化设备中的抛光垫修整器 |
JP6313611B2 (ja) * | 2014-02-28 | 2018-04-18 | 株式会社荏原製作所 | 研磨装置 |
CN104002388B (zh) * | 2014-05-22 | 2016-03-30 | 袁子科 | 一种聚能式瓷砖刮平机 |
JP6327958B2 (ja) * | 2014-06-03 | 2018-05-23 | 株式会社荏原製作所 | 研磨装置 |
KR102173323B1 (ko) | 2014-06-23 | 2020-11-04 | 삼성전자주식회사 | 캐리어 헤드, 화학적 기계식 연마 장치 및 웨이퍼 연마 방법 |
JP6093741B2 (ja) * | 2014-10-21 | 2017-03-08 | 信越半導体株式会社 | 研磨装置及びウェーハの研磨方法 |
JP2017148931A (ja) * | 2016-02-19 | 2017-08-31 | 株式会社荏原製作所 | 研磨装置および研磨方法 |
JP6509766B2 (ja) * | 2016-03-08 | 2019-05-08 | 東芝メモリ株式会社 | 半導体製造装置および半導体装置の製造方法 |
US20180085891A1 (en) * | 2016-09-29 | 2018-03-29 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Apparatus for shaping the surface of chemical mechanical polishing pads |
TWI821887B (zh) * | 2016-11-29 | 2023-11-11 | 日商東京威力科創股份有限公司 | 基板處理裝置、基板處理方法及記錄媒體 |
JP6823541B2 (ja) | 2017-05-30 | 2021-02-03 | 株式会社荏原製作所 | キャリブレーション方法およびキャリブレーションプログラム |
JP7000054B2 (ja) * | 2017-07-12 | 2022-01-19 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
US11267099B2 (en) * | 2017-09-27 | 2022-03-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Chemical mechanical planarization membrane |
CN107650009B (zh) * | 2017-11-20 | 2023-08-25 | 山东省科学院新材料研究所 | 一种新型晶片研磨抛光机 |
CN107855900B (zh) * | 2017-12-27 | 2024-01-16 | 中原工学院 | 一种两工位聚晶金刚石复合片类抛光机 |
US11731232B2 (en) | 2018-10-30 | 2023-08-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Irregular mechanical motion detection systems and method |
CN110009333B (zh) | 2018-10-31 | 2020-10-27 | 创新先进技术有限公司 | 一种生成目标合同的方法及终端设备 |
CN111266993B (zh) * | 2018-12-05 | 2023-06-30 | 凯斯科技股份有限公司 | 化学机械式研磨装置用承载头的卡环及具备其的承载头 |
TWI695754B (zh) * | 2019-08-13 | 2020-06-11 | 大量科技股份有限公司 | 拋光墊即時整修方法 |
CN110977688B (zh) * | 2019-12-12 | 2021-09-14 | 王远志 | 一种植保无人机固定翼生产加工用打磨装置 |
CN111085931A (zh) * | 2019-12-31 | 2020-05-01 | 浙江芯晖装备技术有限公司 | 一种抛光头驱动装置及抛光设备 |
CN113649477B (zh) * | 2021-08-31 | 2023-09-26 | 浙江安胜科技股份有限公司 | 一种同步式快速换装的不锈钢容器成型模具 |
US20230390882A1 (en) * | 2022-06-06 | 2023-12-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | System, control method and apparatus for chemical mechanical polishing |
CN115533753B (zh) * | 2022-10-09 | 2024-06-14 | 湘潭大学 | 抛光装置和抛光装置在线修整方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100538540B1 (ko) * | 1997-04-08 | 2006-06-16 | 가부시키가이샤 에바라 세이사꾸쇼 | 폴리싱장치 |
US5975994A (en) * | 1997-06-11 | 1999-11-02 | Micron Technology, Inc. | Method and apparatus for selectively conditioning a polished pad used in planarizng substrates |
EP1043120A1 (de) * | 1999-03-31 | 2000-10-11 | Nippei Toyama Corporation | Verfahren und Vorrichtung zum Schleifen eines Werkstücks |
JP4911810B2 (ja) * | 2000-06-23 | 2012-04-04 | コマツNtc株式会社 | ワークの研削装置および研削方法 |
US6494765B2 (en) * | 2000-09-25 | 2002-12-17 | Center For Tribology, Inc. | Method and apparatus for controlled polishing |
US6257953B1 (en) * | 2000-09-25 | 2001-07-10 | Center For Tribology, Inc. | Method and apparatus for controlled polishing |
CN100513076C (zh) * | 2001-05-29 | 2009-07-15 | 株式会社荏原制作所 | 抛光装置与抛光方法 |
EP1270148A1 (de) * | 2001-06-22 | 2003-01-02 | Infineon Technologies SC300 GmbH & Co. KG | Verfahren und Vorrichtung zum Abrichten eines Poliertuches |
US7011566B2 (en) * | 2002-08-26 | 2006-03-14 | Micron Technology, Inc. | Methods and systems for conditioning planarizing pads used in planarizing substrates |
TWI238754B (en) * | 2002-11-07 | 2005-09-01 | Ebara Tech Inc | Vertically adjustable chemical mechanical polishing head having a pivot mechanism and method for use thereof |
JP2005011977A (ja) | 2003-06-18 | 2005-01-13 | Ebara Corp | 基板研磨装置および基板研磨方法 |
JP2005169593A (ja) * | 2003-12-15 | 2005-06-30 | Nikon Corp | 研磨装置、研磨方法、この研磨方法を用いた半導体デバイスの製造方法及びこの半導体デバイスの製造方法により製造された半導体デバイス |
JP4848770B2 (ja) * | 2004-01-28 | 2011-12-28 | 株式会社ニコン | 研磨パッド表面形状測定装置、研磨パッド表面形状測定装置の使用方法、研磨パッドの円錐頂角の測定方法、研磨パッドの溝深さ測定方法、cmp研磨装置、及び半導体デバイスの製造方法 |
JP2005347530A (ja) * | 2004-06-03 | 2005-12-15 | Tokyo Seimitsu Co Ltd | 研磨パッド調整方法及び化学機械研磨装置 |
JP2006021279A (ja) * | 2004-07-08 | 2006-01-26 | Olympus Corp | 光学素材の研削装置 |
JP4597634B2 (ja) * | 2004-11-01 | 2010-12-15 | 株式会社荏原製作所 | トップリング、基板の研磨装置及び研磨方法 |
CN104044057B (zh) | 2004-11-01 | 2017-05-17 | 株式会社荏原制作所 | 抛光设备 |
-
2008
- 2008-01-29 EP EP08001664A patent/EP1952945B1/de active Active
- 2008-01-29 DE DE602008002445T patent/DE602008002445D1/de active Active
- 2008-01-29 US US12/010,738 patent/US8152594B2/en active Active
- 2008-01-29 TW TW097103216A patent/TWI451488B/zh active
- 2008-01-30 KR KR1020080009793A patent/KR101095605B1/ko active IP Right Grant
- 2008-01-30 CN CN200810092011.1A patent/CN101254586B/zh active Active
- 2008-01-30 JP JP2008018658A patent/JP5301840B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
US8152594B2 (en) | 2012-04-10 |
JP5301840B2 (ja) | 2013-09-25 |
KR101095605B1 (ko) | 2011-12-19 |
CN101254586B (zh) | 2014-03-12 |
CN101254586A (zh) | 2008-09-03 |
TW200915407A (en) | 2009-04-01 |
KR20080071526A (ko) | 2008-08-04 |
US20080287043A1 (en) | 2008-11-20 |
EP1952945A3 (de) | 2008-08-27 |
EP1952945B1 (de) | 2010-09-15 |
EP1952945A2 (de) | 2008-08-06 |
TWI451488B (zh) | 2014-09-01 |
JP2008207320A (ja) | 2008-09-11 |
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