DE602004005145T2 - Verfahren zur Herstellung von Dünnschichtkondensatoren auf keramischem Substrat - Google Patents

Verfahren zur Herstellung von Dünnschichtkondensatoren auf keramischem Substrat Download PDF

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Publication number
DE602004005145T2
DE602004005145T2 DE602004005145T DE602004005145T DE602004005145T2 DE 602004005145 T2 DE602004005145 T2 DE 602004005145T2 DE 602004005145 T DE602004005145 T DE 602004005145T DE 602004005145 T DE602004005145 T DE 602004005145T DE 602004005145 T2 DE602004005145 T2 DE 602004005145T2
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Prior art keywords
dielectric
conductive layer
substrate
tempering
capacitors
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DE602004005145T
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DE602004005145D1 (de
Inventor
William J. Cary Borland
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EI Du Pont de Nemours and Co
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EI Du Pont de Nemours and Co
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Priority to US53319503P priority Critical
Priority to US533195P priority
Priority to US11/005,350 priority patent/US7256980B2/en
Priority to US5350 priority
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of DE602004005145D1 publication Critical patent/DE602004005145D1/de
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Publication of DE602004005145T2 publication Critical patent/DE602004005145T2/de
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