DE60129992D1 - Mikrosensor zur messung von geschwindigkeit und richtungswinkel eines luftstroms - Google Patents
Mikrosensor zur messung von geschwindigkeit und richtungswinkel eines luftstromsInfo
- Publication number
- DE60129992D1 DE60129992D1 DE60129992T DE60129992T DE60129992D1 DE 60129992 D1 DE60129992 D1 DE 60129992D1 DE 60129992 T DE60129992 T DE 60129992T DE 60129992 T DE60129992 T DE 60129992T DE 60129992 D1 DE60129992 D1 DE 60129992D1
- Authority
- DE
- Germany
- Prior art keywords
- velocity
- microsensor
- air stream
- incoming air
- airflow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
- G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Aviation & Aerospace Engineering (AREA)
- Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US653399 | 2000-09-01 | ||
US09/653,399 US6502459B1 (en) | 2000-09-01 | 2000-09-01 | Microsensor for measuring velocity and angular direction of an incoming air stream |
PCT/US2001/027041 WO2002018884A2 (en) | 2000-09-01 | 2001-08-30 | Microsensor for measuring velocity and angular direction of an incoming air stream |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60129992D1 true DE60129992D1 (de) | 2007-09-27 |
DE60129992T2 DE60129992T2 (de) | 2008-05-15 |
Family
ID=24620710
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60129992T Expired - Lifetime DE60129992T2 (de) | 2000-09-01 | 2001-08-30 | Mikrosensor zur messung von geschwindigkeit und richtungswinkel eines luftstroms |
Country Status (7)
Country | Link |
---|---|
US (1) | US6502459B1 (de) |
EP (1) | EP1314042B1 (de) |
JP (1) | JP2004507753A (de) |
KR (1) | KR100825998B1 (de) |
AT (1) | ATE370418T1 (de) |
DE (1) | DE60129992T2 (de) |
WO (1) | WO2002018884A2 (de) |
Families Citing this family (42)
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US7248703B1 (en) | 2001-06-26 | 2007-07-24 | Bbn Technologies Corp. | Systems and methods for adaptive noise cancellation |
US6776817B2 (en) * | 2001-11-26 | 2004-08-17 | Honeywell International Inc. | Airflow sensor, system and method for detecting airflow within an air handling system |
EP1351039A1 (de) * | 2002-04-03 | 2003-10-08 | Sensirion AG | Strömungssensor und zugehöriges Herstellungsverfahren |
US7274621B1 (en) * | 2002-06-13 | 2007-09-25 | Bbn Technologies Corp. | Systems and methods for flow measurement |
US7255196B1 (en) | 2002-11-19 | 2007-08-14 | Bbn Technologies Corp. | Windshield and sound-barrier for seismic sensors |
US7284431B1 (en) | 2003-11-14 | 2007-10-23 | Bbn Technologies Corp. | Geophone |
US6871537B1 (en) | 2003-11-15 | 2005-03-29 | Honeywell International Inc. | Liquid flow sensor thermal interface methods and systems |
US7331224B2 (en) * | 2004-12-07 | 2008-02-19 | Honeywell International Inc. | Tilt-insensitive flow sensor |
DE102005023377B4 (de) * | 2005-05-17 | 2010-04-15 | Elbau Elektronik Bauelemente Gmbh Berlin | Flowsensor mit Sensorchipelement |
US7454968B2 (en) | 2005-06-08 | 2008-11-25 | Stein William M | Wind-powered wireless (RF) anemometer |
CA2557380C (en) * | 2005-08-27 | 2012-09-25 | Schlumberger Canada Limited | Time-of-flight stochastic correlation measurements |
US7278308B2 (en) | 2005-12-08 | 2007-10-09 | Honeywell International Inc. | Thermal isolation between heating and sensing for flow sensors |
US20070209433A1 (en) * | 2006-03-10 | 2007-09-13 | Honeywell International Inc. | Thermal mass gas flow sensor and method of forming same |
US7500392B1 (en) | 2007-10-11 | 2009-03-10 | Memsys, Inc. | Solid state microanemometer device and method of fabrication |
US10746901B2 (en) | 2008-06-12 | 2020-08-18 | Ophir Corporation | Systems and methods for predicting arrival of wind event at aeromechanical apparatus |
US7950286B2 (en) * | 2008-12-19 | 2011-05-31 | Honeywell International Inc. | Multi-range pressure sensor apparatus and method utilizing a single sense die and multiple signal paths |
US10330513B2 (en) * | 2009-05-27 | 2019-06-25 | Honeywell International Inc. | Multi-dynamic-range sensor |
US8656772B2 (en) | 2010-03-22 | 2014-02-25 | Honeywell International Inc. | Flow sensor with pressure output signal |
US8756990B2 (en) | 2010-04-09 | 2014-06-24 | Honeywell International Inc. | Molded flow restrictor |
US8418549B2 (en) | 2011-01-31 | 2013-04-16 | Honeywell International Inc. | Flow sensor assembly with integral bypass channel |
US8286478B2 (en) | 2010-12-15 | 2012-10-16 | Honeywell International Inc. | Sensor bridge with thermally isolating apertures |
EP2663886A2 (de) * | 2011-01-11 | 2013-11-20 | Ophir Corporation | Überwachung komplexer strömungsfelder für windturbinenanwendungen |
US8356514B2 (en) | 2011-01-13 | 2013-01-22 | Honeywell International Inc. | Sensor with improved thermal stability |
US8695417B2 (en) | 2011-01-31 | 2014-04-15 | Honeywell International Inc. | Flow sensor with enhanced flow range capability |
US8718981B2 (en) | 2011-05-09 | 2014-05-06 | Honeywell International Inc. | Modular sensor assembly including removable sensing module |
US8446220B2 (en) | 2011-05-09 | 2013-05-21 | Honeywell International Inc. | Method and apparatus for increasing the effective resolution of a sensor |
JP5696605B2 (ja) * | 2011-07-01 | 2015-04-08 | 東京エレクトロン株式会社 | 基板処理装置のデータ取得方法及び基板処理装置 |
US8770034B2 (en) | 2011-09-06 | 2014-07-08 | Honeywell International Inc. | Packaged sensor with multiple sensors elements |
JP5704129B2 (ja) * | 2012-06-22 | 2015-04-22 | 東京エレクトロン株式会社 | 基板処理装置のデータ取得方法及びセンサ用基板 |
JP2014016238A (ja) * | 2012-07-09 | 2014-01-30 | Azbil Corp | フローセンサ |
JP2014016237A (ja) * | 2012-07-09 | 2014-01-30 | Azbil Corp | フローセンサ |
US9052217B2 (en) | 2012-11-09 | 2015-06-09 | Honeywell International Inc. | Variable scale sensor |
US9612146B2 (en) | 2014-02-07 | 2017-04-04 | Honeywell International, Inc. | Airflow sensor with dust reduction |
US20160370809A1 (en) * | 2015-06-19 | 2016-12-22 | Hni Technologies Inc. | Fluid flow system |
CN108697353A (zh) * | 2016-02-04 | 2018-10-23 | 迈迪瑞股份公司 | 传感器装置和包括传感器装置的导管 |
US9758257B1 (en) * | 2016-04-07 | 2017-09-12 | Sunlight Photonics Inc. | Airflow sensing systems and apparatus |
EP3421947B1 (de) * | 2017-06-30 | 2019-08-07 | Sensirion AG | Betriebsverfahren für eine durchflusssensorvorrichtung |
IT201800000629A1 (it) | 2018-01-09 | 2019-07-09 | St Microelectronics Srl | Procedimento per rilevare flussi di fluido, dispositivo e prodotto informatico corrispondenti |
CA3036447A1 (en) | 2019-03-12 | 2020-09-12 | Motus Design Group Ltd. | Airspeed sensor, system and airspeed monitoring process digitally implemented thereby or in relation thereto |
DE102019132356A1 (de) * | 2019-11-28 | 2021-06-02 | Tdk Electronics Ag | Zweikanaliger Detektor |
JP2022139173A (ja) * | 2021-03-11 | 2022-09-26 | Mmiセミコンダクター株式会社 | フローセンサチップ |
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-
2000
- 2000-09-01 US US09/653,399 patent/US6502459B1/en not_active Expired - Lifetime
-
2001
- 2001-08-30 KR KR1020037003156A patent/KR100825998B1/ko not_active IP Right Cessation
- 2001-08-30 EP EP01968294A patent/EP1314042B1/de not_active Expired - Lifetime
- 2001-08-30 DE DE60129992T patent/DE60129992T2/de not_active Expired - Lifetime
- 2001-08-30 JP JP2002523561A patent/JP2004507753A/ja active Pending
- 2001-08-30 WO PCT/US2001/027041 patent/WO2002018884A2/en active IP Right Grant
- 2001-08-30 AT AT01968294T patent/ATE370418T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR100825998B1 (ko) | 2008-04-29 |
WO2002018884A3 (en) | 2002-06-20 |
EP1314042A2 (de) | 2003-05-28 |
ATE370418T1 (de) | 2007-09-15 |
DE60129992T2 (de) | 2008-05-15 |
WO2002018884A2 (en) | 2002-03-07 |
US6502459B1 (en) | 2003-01-07 |
EP1314042B1 (de) | 2007-08-15 |
JP2004507753A (ja) | 2004-03-11 |
KR20030064396A (ko) | 2003-07-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |