DE59407307D1 - SIMULTANEOUS DETERMINATION OF LAYER THICKNESS AND SUBSTRATE TEMPERATURE DURING COATING - Google Patents

SIMULTANEOUS DETERMINATION OF LAYER THICKNESS AND SUBSTRATE TEMPERATURE DURING COATING

Info

Publication number
DE59407307D1
DE59407307D1 DE59407307T DE59407307T DE59407307D1 DE 59407307 D1 DE59407307 D1 DE 59407307D1 DE 59407307 T DE59407307 T DE 59407307T DE 59407307 T DE59407307 T DE 59407307T DE 59407307 D1 DE59407307 D1 DE 59407307D1
Authority
DE
Germany
Prior art keywords
layer thickness
temperature during
substrate temperature
during coating
simultaneous determination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59407307T
Other languages
German (de)
Inventor
Friedrich Boebel
Norbert Bauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Application granted granted Critical
Publication of DE59407307D1 publication Critical patent/DE59407307D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
DE59407307T 1993-06-03 1994-02-16 SIMULTANEOUS DETERMINATION OF LAYER THICKNESS AND SUBSTRATE TEMPERATURE DURING COATING Expired - Lifetime DE59407307D1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4318520 1993-06-03
DE9400020 1994-01-11
PCT/DE1994/000168 WO1994029681A1 (en) 1993-06-03 1994-02-16 Simultaneous determination of layer thickness and substrate temperature during coating

Publications (1)

Publication Number Publication Date
DE59407307D1 true DE59407307D1 (en) 1998-12-24

Family

ID=25926479

Family Applications (1)

Application Number Title Priority Date Filing Date
DE59407307T Expired - Lifetime DE59407307D1 (en) 1993-06-03 1994-02-16 SIMULTANEOUS DETERMINATION OF LAYER THICKNESS AND SUBSTRATE TEMPERATURE DURING COATING

Country Status (2)

Country Link
DE (1) DE59407307D1 (en)
WO (1) WO1994029681A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19843891A1 (en) * 1998-09-24 2000-04-20 Wacker Chemie Gmbh Determining temperature profile of cylindrical rod of semiconductor material involves comparing frequency-dependent resistance with expected resistance and using iterative technique
US20120244290A1 (en) 2011-03-24 2012-09-27 United Technologies Corporation Deposition Substrate Temperature and Monitoring

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5029117A (en) * 1989-04-24 1991-07-02 Tektronix, Inc. Method and apparatus for active pyrometry
US5101111A (en) * 1989-07-13 1992-03-31 Dainippon Screen Mfg. Co., Ltd. Method of measuring thickness of film with a reference sample having a known reflectance
US5166080A (en) * 1991-04-29 1992-11-24 Luxtron Corporation Techniques for measuring the thickness of a film formed on a substrate
US5156461A (en) * 1991-05-17 1992-10-20 Texas Instruments Incorporated Multi-point pyrometry with real-time surface emissivity compensation
US5180226A (en) * 1991-10-30 1993-01-19 Texas Instruments Incorporated Method and apparatus for precise temperature measurement

Also Published As

Publication number Publication date
WO1994029681A1 (en) 1994-12-22

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Legal Events

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