DE4330747C1 - Ultrasonic transducer and method for producing it - Google Patents
Ultrasonic transducer and method for producing itInfo
- Publication number
- DE4330747C1 DE4330747C1 DE19934330747 DE4330747A DE4330747C1 DE 4330747 C1 DE4330747 C1 DE 4330747C1 DE 19934330747 DE19934330747 DE 19934330747 DE 4330747 A DE4330747 A DE 4330747A DE 4330747 C1 DE4330747 C1 DE 4330747C1
- Authority
- DE
- Germany
- Prior art keywords
- ultrasonic transducer
- piezo element
- housing
- shaped housing
- pot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000000463 material Substances 0.000 claims description 24
- 238000013016 damping Methods 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 239000004033 plastic Substances 0.000 claims description 3
- 229920003023 plastic Polymers 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 239000004793 Polystyrene Substances 0.000 claims description 2
- 229920002223 polystyrene Polymers 0.000 claims description 2
- 230000006978 adaptation Effects 0.000 abstract description 8
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 238000000926 separation method Methods 0.000 abstract description 2
- 230000010355 oscillation Effects 0.000 abstract 2
- 238000000034 method Methods 0.000 description 4
- 239000004964 aerogel Substances 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 229920005830 Polyurethane Foam Polymers 0.000 description 1
- 229920002323 Silicone foam Polymers 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- QXJJQWWVWRCVQT-UHFFFAOYSA-K calcium;sodium;phosphate Chemical compound [Na+].[Ca+2].[O-]P([O-])([O-])=O QXJJQWWVWRCVQT-UHFFFAOYSA-K 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 239000002991 molded plastic Substances 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- 239000011496 polyurethane foam Substances 0.000 description 1
- 239000004540 pour-on Substances 0.000 description 1
- 238000009420 retrofitting Methods 0.000 description 1
- 239000013514 silicone foam Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
- G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
- G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
- B06B1/0681—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface and a damping structure
- B06B1/0685—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface and a damping structure on the back only of piezoelectric elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
- G01F1/662—Constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
- G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
- G01F23/28—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
- G01F23/296—Acoustic waves
- G01F23/2968—Transducers specially adapted for acoustic level indicators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/24—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring the direct influence of the streaming fluid on the properties of a detecting acoustical wave
Abstract
Description
Die Erfindung betrifft einen Ultraschallwandler nach dem Oberbegriff des Patentanspruchs 1 sowie ein Verfahren zu dessen Herstellung. Ein derartiger Ultraschallwandler ist insbesondere geeignet für den Einsatz in Luftmassen- oder Gasdurchflußmessern.The invention relates to an ultrasonic transducer according to the The preamble of claim 1 and a method its manufacture. Such an ultrasonic transducer is particularly suitable for use in air mass or gas flow meters.
Zur Anpassung von piezoelektrischen Ultraschallwandlern an das Ausbreitungsmedium, wie beispielsweise Luft, ist ein Anpaßkör per mit einer akustischen Impedanz notwendig, die zwischen der des Materials des piezoelektrischen Elements und der des Aus breitungsmediums liegt. Die optimale akustische Impedanz des Anpaßkörpers wäre das geometrische Mittel der Impedanzen des Piezoelements und des Ausbreitungsmediums. Der Einsatzbereich des Ultraschallwandlers setzt weiterhin einen robusten mechani schen Aufbau voraus.To adapt piezoelectric ultrasonic transducers to the Propagation medium, such as air, is an adapter per with an acoustic impedance between the the material of the piezoelectric element and that of the off spreading medium lies. The optimal acoustic impedance of the Would be the geometric mean of the impedances of the Piezo element and the propagation medium. The area of application the ultrasonic transducer continues to use a robust mechani structure ahead.
Die DE 38 32 947 A1 beschreibt einen Ultraschallwandler der eingangs genannten Art, bei dem ein Kompromiß zwischen optimaler akustischer Impedanz und mechanischer Robustheit gewählt wurde. Ein topfförmiges Gehäu se, welches gleichzeitig den Anpaßkörper darstellt, umschließt das Piezoelement. Als Anpaßmaterial dient ein Gemisch aus einem organischen Harz, wie beispielsweise Epoxidharz und Hohlkugeln aus Glas oder Siliziumdioxid. Dessen akustische Impedanz liegt bei 1·10⁶ Ns/m³. Die optimale akustische Impedanz liegt bei 1·10⁵ Ns/m³. Die akustische Anpassung ist somit nicht optimal ge wählt. Weiterhin ist bei der bekannten Ausführungsform von Nachteil, daß das Anpaßmaterial teuer und die Herstellung eines exakten topfförmigen Gehäuses aus dem Anpaßmaterial aufwendig ist. Das obengenannte Gemisch ist außerdem nicht spritzgußfä hig.DE 38 32 947 A1 describes an ultrasonic transducer of the type mentioned at the beginning which is a compromise between optimal acoustic impedance and mechanical robustness was chosen. A pot-shaped casing se, which also represents the adapter body, encloses the piezo element. A mixture of a serves as a fitting material organic resin such as epoxy resin and hollow spheres made of glass or silicon dioxide. Whose acoustic impedance is at 1 · 10⁶ Ns / m³. The optimal acoustic impedance is included 1 · 10⁵ Ns / m³. The acoustic adjustment is therefore not optimal ge elects. Furthermore, in the known embodiment of Disadvantage that the adaptation material is expensive and the production of a exact cup-shaped housing made of the matching material is expensive is. The above mixture is also not injection molded hig.
Eine Aufgabe der Erfindung ist es, einen Ultraschallwandler an zugeben, der eine optimale Anpassung an das Ausbreitungsmedium und eine hohe mechanische Robustheit aufweist. Weiterhin soll die Herstellung und Montage des Ultraschallwandlers einfach und kostengünstig sein.An object of the invention is to provide an ultrasonic transducer admit that an optimal adaptation to the propagation medium and has a high mechanical robustness. Furthermore should the manufacture and assembly of the ultrasound transducer simply and be inexpensive.
Diese Aufgaben werden durch einen Ultraschallwandler gemäß dem Patentanspruch 1 gelöst.These tasks are performed by an ultrasonic transducer according to the Claim 1 solved.
Während die abhängigen Ansprüche weitere vorteilhafte Ausge staltungen des Ultraschallwandler betreffen, ist der Anspruch 5 auf ein Verfahren zu dessen Herstellung gerichtet.While the dependent claims further advantageous Ausge Events of the ultrasonic transducer relate to claim 5 directed to a process for its manufacture.
Die Erfindung beruht darauf, daß eine funktionelle Trennung zwischen der Umsetzung der radialen Schwingung des Piezoele ments in axiale Schwingungen einerseits und der Anpassung an das Ausbreitungsmedium andererseits erfolgt. Dies gelingt dadurch, daß das Gehäuse die Umsetzung von radia len Schwingungen in axiale Schwingungen übernimmt und ein zu sätzliches Element, welches auf das Gehäuse aufgebracht wird, die Funktion des Anpaßkörpers übernimmt.The invention is based on the fact that a functional separation between the implementation of the radial vibration of the piezoelectric axial vibrations on the one hand and the adaptation to the medium of propagation takes place on the other hand. This succeeds in that the housing the implementation of radia len vibrations in axial vibrations and one too additional element which is applied to the housing, the function of the adapter body takes over.
Die Erfindung wird im folgenden anhand der Figur näher erläu tert, die einen Querschnitt des Ultraschallwandlers zeigt.The invention is explained in more detail below with reference to the figure tert, which shows a cross section of the ultrasonic transducer.
Der Ultraschallwandler, wie in der Figur abgebildet, enthält eine vorzugsweise scheibenförmige Piezokeramik S, welche über die Anschlußdrähte D mit einer nicht dargestellten Ansteuerein heit verbunden ist. Das Piezoelement S, welches vorzugsweise eine Piezokeramik ist, wird von einem topfförmigen Gehäuse T, das beispielsweise aus Polystyrol besteht, umschlossen und fest mit diesem verbunden. Auf der dem Piezoelement S gegen überliegenden Außenseite des topfförmigen Gehäuses T ist ein Anpaßkörper aufgebracht, der aus einem Material besteht, dessen akustische Impedanz für die Anpassung der akustischen Impedanz des Piezoelements S an die akustische Impedanz des Ausbreitungsmediums optimiert ist. Für das Ausbreitungsmedium Luft eignet sich ein Gemisch aus einem organischen Harz, wie Epoxidharz und Hohlkugeln aus Glas oder Siliziumdioxid, die einen Durchmesser von 50-100 µm aufweisen. Auch Aerogele, wie sie aus GERLACH, R. et al.: Modified SiO₂ aerogels as accustic impedance matching layers in ultrasonic devices. In: Journal of Nou-Crystalline Solids 145 (1992), S. 227-232 bekannt sind, lassen sich als Anpaßmaterial verwenden. Das topfförmige Gehäuse T kann dahingehend optimiert werden, daß eine bestmögliche Umwandlung der vom Piezoelement S erzeugten radialen Schwingungen in axiale Schwingungen möglich wird.The ultrasonic transducer, as shown in the figure, contains a preferably disk-shaped piezoceramic S, which over the connecting wires D with a drive, not shown is connected. The piezo element S, which is preferably is a piezoceramic, is of a pot-shaped housing T, which consists for example of polystyrene, enclosed and firmly connected to this. On the piezo element S against overlying outside of the pot-shaped housing T is a Adaptation body applied, which consists of a material whose acoustic impedance for the adjustment of the acoustic impedance of the piezo element S to the acoustic impedance of the Propagation medium is optimized. For the propagation medium Air is a mixture of an organic resin, such as Epoxy resin and hollow spheres made of glass or silicon dioxide have a diameter of 50-100 µm. Even aerogels, like from GERLACH, R. et al .: Modified SiO₂ aerogels as accustic impedance matching layers in ultrasonic devices. In: Journal of Nou-Crystalline Solids 145 (1992), pp. 227-232 are known can be used as adaptation material. The Pot-shaped housing T can be optimized so that the best possible conversion of those generated by the piezo element S. radial vibrations in axial vibrations is possible.
Vorteilhaft für die Herstellung des Ultraschallwandlers ist, daß für das topfförmige Gehäuse T ein spritzgußfähiger Kunst stoff verwendbar ist.It is advantageous for the production of the ultrasonic transducer that for the pot-shaped housing T is an injection-moldable art fabric is usable.
Das Piezoelement S kann z. B. bereits bei der Herstellung des topfförmigen Gehäuses T in dieses integriert werden. Es ent fällt die nachträgliche Montage und die Verklebung des Pie zoelements S mit dem topfförmigen Gehäuse T.The piezo element S can e.g. B. already in the manufacture of Pot-shaped housing T can be integrated into this. It ent retrofitting and gluing the pie zoelements S with the pot-shaped housing T.
Das topfförmige Gehäuse T mit dem innenseitig angebrachten Pie zoelement S wird anschließend mit einem Dämpfungsmaterial V aufgefüllt.The pot-shaped housing T with the pie attached on the inside zoelement S is then covered with a damping material V replenished.
Man kann auch das Dämpfungsmaterial V zuerst mit dem Piezoele ment S verbinden und anschließend diese Elemente mit Kunststoff topfförmig ummanteln, so daß das Piezoelement und das Dämp fungsmaterial V fest im topfförmigen Gehäuse T eingeschlossen sind.You can also use the damping material V first with the Piezoele connect S and then these elements with plastic encase in a pot shape so that the piezo element and the damper tion material V firmly enclosed in the pot-shaped housing T. are.
Weiterhin ist bei dem erfindungsgemäßen Ultraschallwandler von Vorteil, daß der Materialverbrauch zur Herstellung der Anpaß schicht erheblich sinkt.Furthermore, in the ultrasonic transducer according to the invention from Advantage that the material consumption for the production of the adaptation layer drops significantly.
Als Dämpfungsmaterial V eignen sich schwere Stoffe mit hoher innerer Dämpfung. Für Ultraschallwandler, die hohen Temperaturen ausgesetzt sind, ist ein Silikonschaum und für Ultraschall wandler, die bei normalen Umgebungstemperaturen eingesetzt werden, ein Polyurethanschaum, der Bleioxid und Wolfram enthält, verwendbar.Heavy materials with a high volume are suitable as damping material V. internal damping. For ultrasonic transducers, the high temperatures is exposed to silicone foam and for ultrasound converter used at normal ambient temperatures be, a polyurethane foam, the lead oxide and tungsten contains, usable.
Ein erfindungsgemäßer Ultraschallwandler kann insbesondere durch fol gendes Verfahren hergestellt werdend:An ultrasonic transducer according to the invention can in particular by fol manufacturing process:
- 1. Kontaktierung der Piezokeramik mit Anschlußdrähten.1. Contacting the piezoceramic with connecting wires.
- 2. Herstellung der Anpaßschicht aus epoxidharzgebundenen Glashohlkugeln.2. Production of the matching layer from epoxy-bonded Hollow glass balls.
- 2. Guß des Topfes aus spritzgußfähigem Kunststoff mit geringer Dichte. Die Piezokeramik mit Anschlußdrähten ist Bestandteil der unteren Form und wird während des Gusses mit dem Topf verbunden. Die Anpaßschicht aus epoxidharzgebundenem Glashohlkugeln oder Aerogelen ist Be standteil der oberen Form.2. Cast the pot from injection-molded plastic with low density. The piezoceramic with connecting wires is Part of the lower mold and is used during casting connected to the pot. The matching layer out epoxy resin-bonded hollow glass spheres or aerogels is Be part of the upper form.
- 3. Guß des Dämpfungsmaterials wie bekannt. Es sind jedoch auch hierfür spritzgußfähige Materialien verwendbar.3. Cast the damping material as known. However, there are injection moldable materials can also be used for this.
Alternativ hierzu ist es auch möglich, das Dämpfungsmaterial zuerst auf die Keramik zu gießen und den Verbund aus Piezokera mik und Dämpfungsmaterial als Bestandteil der unteren Form in den Spritzguß des Topfes einzubringen.Alternatively, it is also possible to use the damping material first pour on the ceramic and the composite of piezokera mic and damping material as part of the lower form in the injection molding of the pot.
Der Vorteil des Verfahrens liegt zum einen in einer Materialer sparnis für das relativ teure Anpaßmaterial (die Materialer sparnis beträgt bei Haushaltsgaszählern etwa 70%) und zum ande ren darin, daß alle Verfahrensschritte mit Ausnahme der Kontak tierung und der Herstellung der Anpaßschicht in Spritzgußtech nik möglich sind. Besonders vorteilhaft ist ferner, daß die La ge der Anschlußdrähte keine Rolle mehr spielt, da sie mit ein gegossen werden.On the one hand, the advantage of the process lies in a material saving for the relatively expensive fitting material (the material savings in household gas meters is about 70%) and secondly ren that all process steps with the exception of contact tion and the production of the matching layer in injection molding technology are not possible. It is also particularly advantageous that the La ge of the connecting wires no longer plays a role, since it with a be poured.
Claims (5)
- - daß ein aus einem zweiten Material bestehender Anpaßkörper (AK) auf einer dem Piezoelement (S) gegenüberliegenden Fläche des Gehäusebodens aufgebracht ist und
- - daß das Gehäuseinnere mit einem das Piezoelement (S) bedec kenden Dämpfungsmaterial (V) aufgefüllt ist.
- - That a made of a second material adapter body (AK) is applied to a surface of the housing bottom opposite the piezo element (S) and
- - That the interior of the housing with a piezo element (S) bedec Kenden damping material (V) is filled.
- - daß der Anpaßkörper (AK) ein Gemisch aus organischem Harz und Hohlkugeln aus Glas oder Siliziumdioxid aufweist oder aus einem Aerogel besteht.
- - That the adapter body (AK) has a mixture of organic resin and hollow spheres made of glass or silicon dioxide or consists of an airgel.
- - daß das Dämpfungsmaterial (V) auf das kontaktierte Piezoelement aufgebracht wird,
- - daß um das kontaktierte Piezoelement und das Dämpfungs material (V) herum ein topfförmiges Gehäuse (T) aus Kunststoff hergestellt wird, und
- - daß auf den topfförmigen Gehäuseboden der Anpaßkörper (AK) aufgebracht wird.
- - That the damping material (V) is applied to the contacted piezo element,
- - That around the contacted piezo element and the damping material (V) around a cup-shaped housing (T) is made of plastic, and
- - That the adapter body (AK) is applied to the pot-shaped housing base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19934330747 DE4330747C1 (en) | 1993-09-10 | 1993-09-10 | Ultrasonic transducer and method for producing it |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19934330747 DE4330747C1 (en) | 1993-09-10 | 1993-09-10 | Ultrasonic transducer and method for producing it |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE4330747C1 true DE4330747C1 (en) | 1995-02-16 |
Family
ID=6497393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19934330747 Expired - Fee Related DE4330747C1 (en) | 1993-09-10 | 1993-09-10 | Ultrasonic transducer and method for producing it |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE4330747C1 (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE29611678U1 (en) * | 1996-07-04 | 1997-08-07 | Siemens Ag | Sound transducers, in particular ultrasound transducers |
| DE19725717A1 (en) * | 1997-06-18 | 1999-02-18 | Hydrometer Gmbh | Ultrasonic transducer for a liquid flowmeter |
| DE19750179A1 (en) * | 1997-08-23 | 1999-02-25 | Fraunhofer Ges Forschung | Sonic transducer e.g. for air |
| WO2003045586A1 (en) * | 2001-11-30 | 2003-06-05 | Siemens Flow Instruments A/S | Ultrasonic transducer and method of joining an ultrasonic transducer |
| DE10356114A1 (en) * | 2003-11-27 | 2005-06-23 | Endress + Hauser Flowtec Ag, Reinach | Device for determining and / or monitoring the volume and / or mass flow rate of a measuring medium |
| WO2008107246A1 (en) * | 2007-03-05 | 2008-09-12 | Robert Bosch Gmbh | Ultrasonic transducers with directly embedded piezo |
| DE102007047013A1 (en) * | 2007-10-01 | 2009-04-02 | Robert Bosch Gmbh | Reaction resin and two-component system for producing the same |
| WO2009086805A1 (en) * | 2008-01-09 | 2009-07-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Ultrasonic transducer for generating asymmetric sound fields |
| DE102009021680A1 (en) * | 2009-05-07 | 2010-11-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Matching layer for adjusting acoustic impedance in ultrasonic transducer, is arranged on surface of transducer and embedded with polymer resin in particle-like ceramic, where ceramic is provided in form of powder and granulate |
| WO2010130504A1 (en) * | 2009-05-11 | 2010-11-18 | Robert Bosch Gmbh | Diaphragm cup for an ultrasonic transducer and sensor therewith |
| DE102013109349A1 (en) * | 2013-08-29 | 2015-03-05 | Endress + Hauser Flowtec Ag | Ultrasonic transducer and ultrasonic flowmeter |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3832947A1 (en) * | 1988-09-28 | 1990-03-29 | Siemens Ag | Ultrasonic (ultrasound) transducer, in particular for airflow sensors (air volume meters) |
-
1993
- 1993-09-10 DE DE19934330747 patent/DE4330747C1/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3832947A1 (en) * | 1988-09-28 | 1990-03-29 | Siemens Ag | Ultrasonic (ultrasound) transducer, in particular for airflow sensors (air volume meters) |
Non-Patent Citations (2)
| Title |
|---|
| FRICKE, Jochen: Aerogele. In: Spektrum der Wissenschaft, Juli 1988, S.60-66 * |
| GERLACH, R. et al.: Modified SiO¶2¶ aerogels as acoustic impedance matching layers in ultrasonic devices. In: Journal of Non- Crystalline Solids 145 (1992), S.227-232 * |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE29611678U1 (en) * | 1996-07-04 | 1997-08-07 | Siemens Ag | Sound transducers, in particular ultrasound transducers |
| DE19725717A1 (en) * | 1997-06-18 | 1999-02-18 | Hydrometer Gmbh | Ultrasonic transducer for a liquid flowmeter |
| DE19725717C2 (en) * | 1997-06-18 | 2001-08-02 | Hydrometer Gmbh | Ultrasonic transducer for liquid flow meters |
| DE19750179A1 (en) * | 1997-08-23 | 1999-02-25 | Fraunhofer Ges Forschung | Sonic transducer e.g. for air |
| US7161280B2 (en) | 2001-11-30 | 2007-01-09 | Siemens Flow Instruments A/S | Ultrasonic transducer and method of joining an ultrasonic transducer |
| WO2003045586A1 (en) * | 2001-11-30 | 2003-06-05 | Siemens Flow Instruments A/S | Ultrasonic transducer and method of joining an ultrasonic transducer |
| DE10356114A1 (en) * | 2003-11-27 | 2005-06-23 | Endress + Hauser Flowtec Ag, Reinach | Device for determining and / or monitoring the volume and / or mass flow rate of a measuring medium |
| WO2008107246A1 (en) * | 2007-03-05 | 2008-09-12 | Robert Bosch Gmbh | Ultrasonic transducers with directly embedded piezo |
| DE102007047013A1 (en) * | 2007-10-01 | 2009-04-02 | Robert Bosch Gmbh | Reaction resin and two-component system for producing the same |
| WO2009086805A1 (en) * | 2008-01-09 | 2009-07-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Ultrasonic transducer for generating asymmetric sound fields |
| DE102009021680A1 (en) * | 2009-05-07 | 2010-11-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Matching layer for adjusting acoustic impedance in ultrasonic transducer, is arranged on surface of transducer and embedded with polymer resin in particle-like ceramic, where ceramic is provided in form of powder and granulate |
| DE102009021680B4 (en) * | 2009-05-07 | 2012-11-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method for producing an adaptation layer for ultrasonic transducers |
| WO2010130504A1 (en) * | 2009-05-11 | 2010-11-18 | Robert Bosch Gmbh | Diaphragm cup for an ultrasonic transducer and sensor therewith |
| DE102013109349A1 (en) * | 2013-08-29 | 2015-03-05 | Endress + Hauser Flowtec Ag | Ultrasonic transducer and ultrasonic flowmeter |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE4330747C1 (en) | Ultrasonic transducer and method for producing it | |
| DE102008055123B3 (en) | Ultrasonic transducer for use in a fluid medium | |
| EP1997100B1 (en) | Ultrasonic sensor | |
| DE3821368C2 (en) | ||
| DE19927797C1 (en) | Ultrasonic transducer for measurements in gases, employs cast elastomer between its sidewalls and an outer holder, to prevent undesirable wall coupling | |
| DE102007008560B4 (en) | Ultrasonic sensor with a mounted on a substrate vibration device | |
| EP1310942B1 (en) | Ultrasonic sensor having a pot-like housing and its method of manufacture | |
| DE102008055126A1 (en) | Ultrasonic transducer for use in a fluid medium | |
| WO2007036528A1 (en) | Arrangement comprising a vehicle component and at least one electroacoustic transducer, especially an ultrasonic transducer | |
| EP3213320A1 (en) | Arrangement for transmitting and/or receiving a useful ultrasound signal, and ultrasonic flow meter | |
| DE4330745C1 (en) | Ultrasonic transducer with adapter body | |
| DE3832947A1 (en) | Ultrasonic (ultrasound) transducer, in particular for airflow sensors (air volume meters) | |
| WO2001061375A1 (en) | Ultrasonic sensor | |
| DE10237721B4 (en) | Sensor installation device | |
| EP1038290B1 (en) | Ultrasonic transducer with a cup-shaped support | |
| EP3600698A1 (en) | Sound transducer, comprising a piezoceramic transducer element which is integrated in a diaphragm that can vibrate | |
| DE102006026674A1 (en) | Ultrasound sensor, particularly motor vehicle ultrasound sensor, has diaphragm with base movable in swinging by piezo ceramics, and piezo ceramic has metallic surface, which has element or connection | |
| DE102009040028A1 (en) | Ultrasonic transducer for use in distance warning device of motor vehicle, has electromechanical oscillation generator for vibration excitation of membrane and connected with membrane by mechanical connection in form-fit manner | |
| EP0276387B1 (en) | Mounting | |
| DE3431620A1 (en) | Material for adapting bodies for ultrasonic transducers | |
| DE19810756A1 (en) | Sensor arrangement for measuring pressure, force or measured variables which can be attributed to pressure or force, method for producing the sensor arrangement, sensor element and method for producing the sensor element | |
| DE4104179C2 (en) | ||
| EP0425716B1 (en) | Ultrasonic layered transducer with astigmatic sound lobe | |
| EP0465616A1 (en) | Ultrasonic motor with two rotors | |
| DE3234896C2 (en) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8100 | Publication of the examined application without publication of unexamined application | ||
| D1 | Grant (no unexamined application published) patent law 81 | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |