DE4190942T1 - - Google Patents

Info

Publication number
DE4190942T1
DE4190942T1 DE19914190942 DE4190942T DE4190942T1 DE 4190942 T1 DE4190942 T1 DE 4190942T1 DE 19914190942 DE19914190942 DE 19914190942 DE 4190942 T DE4190942 T DE 4190942T DE 4190942 T1 DE4190942 T1 DE 4190942T1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19914190942
Other languages
German (de)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of DE4190942T1 publication Critical patent/DE4190942T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C30B15/12—Double crucible methods
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
DE19914190942 1990-04-27 1991-04-24 Withdrawn DE4190942T1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2114519A JPH0412084A (ja) 1990-04-27 1990-04-27 シリコン単結晶の製造装置

Publications (1)

Publication Number Publication Date
DE4190942T1 true DE4190942T1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-05-14

Family

ID=14639784

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19914190942 Withdrawn DE4190942T1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-04-27 1991-04-24

Country Status (4)

Country Link
JP (1) JPH0412084A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR920702733A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE4190942T1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
WO (1) WO1991017289A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004023790B4 (de) * 2004-05-07 2016-02-18 Xylem Ip Holdings Llc Umwälzpumpe und Verfahren zur Flüssigkeitsschmierung eines sphärischen Lagers in einem Elektromotor
US9863062B2 (en) * 2013-03-14 2018-01-09 Corner Star Limited Czochralski crucible for controlling oxygen and related methods
TW201447057A (zh) * 2013-03-14 2014-12-16 Memc Electronic Materials 用於控制氧氣的坩堝總成及相關方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1194820B (de) * 1960-03-30 1965-06-16 Telefunken Patent Verfahren zum Ziehen von Einkristallen homogener Stoerstellenkonzentration und Vorrichtung zur Durchfuehrung des Verfahrens
JPH0733305B2 (ja) * 1987-03-20 1995-04-12 三菱マテリアル株式会社 石英製二重ルツボの製造方法

Also Published As

Publication number Publication date
JPH0412084A (ja) 1992-01-16
KR920702733A (ko) 1992-10-06
WO1991017289A1 (en) 1991-11-14

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee