DE4135369A1 - Testbarer piezoelektrischer beschleunigungssensor - Google Patents

Testbarer piezoelektrischer beschleunigungssensor

Info

Publication number
DE4135369A1
DE4135369A1 DE4135369A DE4135369A DE4135369A1 DE 4135369 A1 DE4135369 A1 DE 4135369A1 DE 4135369 A DE4135369 A DE 4135369A DE 4135369 A DE4135369 A DE 4135369A DE 4135369 A1 DE4135369 A1 DE 4135369A1
Authority
DE
Germany
Prior art keywords
piezo element
electrodes
acceleration sensor
sensor according
plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE4135369A
Other languages
German (de)
English (en)
Other versions
DE4135369C2 (https=
Inventor
Lothar Dipl Ing Gademann
Botho Dipl Phys Dr Ziegenbein
Ulrich Dipl Ing Kippelt
Bernd Dipl Ing Dr Maihoefer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE4135369A priority Critical patent/DE4135369A1/de
Priority to JP4285854A priority patent/JPH05215766A/ja
Priority to SE9203114A priority patent/SE9203114L/
Publication of DE4135369A1 publication Critical patent/DE4135369A1/de
Application granted granted Critical
Publication of DE4135369C2 publication Critical patent/DE4135369C2/de
Priority to US08/384,238 priority patent/US5473930A/en
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Air Bags (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
DE4135369A 1991-10-26 1991-10-26 Testbarer piezoelektrischer beschleunigungssensor Granted DE4135369A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE4135369A DE4135369A1 (de) 1991-10-26 1991-10-26 Testbarer piezoelektrischer beschleunigungssensor
JP4285854A JPH05215766A (ja) 1991-10-26 1992-10-23 検査可能な加速度センサ
SE9203114A SE9203114L (sv) 1991-10-26 1992-10-23 Testbar piezoelektrisk acceleratonssensor
US08/384,238 US5473930A (en) 1991-10-26 1995-02-06 Acceleration sensor with oppositely-polarized piezoelectric plates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4135369A DE4135369A1 (de) 1991-10-26 1991-10-26 Testbarer piezoelektrischer beschleunigungssensor

Publications (2)

Publication Number Publication Date
DE4135369A1 true DE4135369A1 (de) 1993-05-13
DE4135369C2 DE4135369C2 (https=) 1993-08-19

Family

ID=6443491

Family Applications (1)

Application Number Title Priority Date Filing Date
DE4135369A Granted DE4135369A1 (de) 1991-10-26 1991-10-26 Testbarer piezoelektrischer beschleunigungssensor

Country Status (4)

Country Link
US (1) US5473930A (https=)
JP (1) JPH05215766A (https=)
DE (1) DE4135369A1 (https=)
SE (1) SE9203114L (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19523984A1 (de) * 1994-09-09 1996-03-14 Murata Manufacturing Co Piezoelektrisches Element und Verfahren zum Herstellen desselben
DE4439297A1 (de) * 1994-11-07 1996-05-09 Pi Ceramic Gmbh Piezoelektrischer Sensor
DE4428124B4 (de) * 1994-08-09 2005-08-18 Robert Bosch Gmbh Beschleunigungssensor
EP2843421A1 (en) * 2013-08-29 2015-03-04 PGS Geophysical AS Piezoelectric accelerometer

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6111338A (en) * 1993-05-28 2000-08-29 Matsushita Electric Industrial Co., Ltd. Acceleration sensor and method for producing the same
DE4440078A1 (de) * 1994-11-10 1996-05-15 Telefunken Microelectron Piezoelektrischer Beschleunigungsaufnehmer
DE19601449A1 (de) * 1996-01-17 1997-07-24 Telefunken Microelectron Beschleunigungsfühler, insbesondere für Sicherheitssysteme in Fahrzeugen zur Personenbeförderung
US6050144A (en) * 1997-06-04 2000-04-18 Matsushita Electric Industrial Co., Ltd. Acceleration sensor
JP2000346865A (ja) * 1999-03-26 2000-12-15 Ngk Insulators Ltd 加速度センサ素子の感度調整方法
DE19919030A1 (de) * 1999-04-27 2000-11-16 Bosch Gmbh Robert Verfahren und Vorrichtung zur Bestimmung von Materialdaten von Mikrostrukturen
US20040215387A1 (en) 2002-02-14 2004-10-28 Matsushita Electric Industrial Co., Ltd. Method for transmitting location information on a digital map, apparatus for implementing the method, and traffic information provision/reception system
JP3481168B2 (ja) 1999-08-27 2003-12-22 松下電器産業株式会社 デジタル地図の位置情報伝達方法
JP5041638B2 (ja) 2000-12-08 2012-10-03 パナソニック株式会社 デジタル地図の位置情報伝達方法とそれに使用する装置
JP4663136B2 (ja) 2001-01-29 2011-03-30 パナソニック株式会社 デジタル地図の位置情報伝達方法と装置
US7051827B1 (en) 2001-03-13 2006-05-30 Thomas W Cardinal Cruise control safety disengagement system
JP4230132B2 (ja) 2001-05-01 2009-02-25 パナソニック株式会社 デジタル地図の形状ベクトルの符号化方法と位置情報伝達方法とそれを実施する装置
JP4637115B2 (ja) * 2003-12-10 2011-02-23 バイエリッシェ モートーレン ウエルケ アクチエンゲゼルシャフト 安全システム内のセンサを稼動するための方法
US8443672B2 (en) * 2007-01-12 2013-05-21 Lockheed Martin Corporation Low-power shock and vibration sensors and methods of making sensors
DE102008040529B4 (de) * 2008-07-18 2021-05-06 Robert Bosch Gmbh Fehlerkorrekturverfahren und Fehlerkorrekturvorrichtung für einen Beschleunigungssensor
DE102012002427A1 (de) * 2012-02-09 2013-08-14 Wolfgang Beyer System und Verfahren zur Auslösung von Alarmfunktionen
US20170205440A1 (en) * 2016-01-19 2017-07-20 Rosemount Aerospace Inc. Mems peizoelectric accelerometer with built-in self test
DE102016201152B4 (de) * 2016-01-27 2017-08-03 Adidas Ag Energie gewinnende Sohle

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3120622A (en) * 1960-03-29 1964-02-04 Gulton Ind Inc Self-calibrating accelerometer
US3479536A (en) * 1967-03-14 1969-11-18 Singer General Precision Piezoelectric force transducer
US3739202A (en) * 1970-08-28 1973-06-12 W Cady Instrument for responding to mechanical vibration of acceleration andfor converting the same into electric energy
DE2832762A1 (de) * 1977-10-25 1979-04-26 Kistler Instrumente Ag Beschleunigungsaufnehmer
GB2117115A (en) * 1982-03-23 1983-10-05 Standard Telephones Cables Ltd Surface acoustic wave accelerometer
GB2143326A (en) * 1983-07-14 1985-02-06 Standard Telephones Cables Ltd Surface acoustic wave accelerometer
DE3542397A1 (de) * 1985-11-30 1987-06-04 Philips Patentverwaltung Anordnung zur funktionspruefung von piezoelektrischen beschleunigungsaufnehmern
DE3817354A1 (de) * 1987-05-21 1988-12-01 Nissan Motor Sensor zur erfassung kinetischer energie, insbesondere piezoelektrischer sensor zur erfassung dynamischer oder kinetischer energie
WO1988010431A1 (en) * 1987-06-18 1988-12-29 Kellett Michael A Accelerometers and associated control circuits
EP0325674A1 (de) * 1988-01-29 1989-08-02 Kistler Instrumente AG Wandlerelement zur Messung einer Drehbeschleunigung
EP0351038A1 (en) * 1988-06-10 1990-01-17 Hewlett-Packard Company Improved accelerometer and method of manufacture
DE3843143A1 (de) * 1988-12-22 1990-06-28 Bosch Gmbh Robert Sensor zur bestimmung der winkelgeschwindigkeit

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4532450A (en) * 1983-12-19 1985-07-30 Litton Resources Systems, Inc. Compound piezoelectric accelerometer with residual voltage matching
DE3401404A1 (de) * 1984-01-17 1985-07-25 Robert Bosch Gmbh, 7000 Stuttgart Halbleiterbauelement
DE3736394A1 (de) * 1987-10-28 1989-05-11 Gerold Maschbau Gmbh Vorrichtung zum herstellen von traegern fuer bauzwecke und dergl.
US5083466A (en) * 1988-07-14 1992-01-28 University Of Hawaii Multidimensional force sensor
US5178012A (en) * 1991-05-31 1993-01-12 Rockwell International Corporation Twisting actuator accelerometer

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3120622A (en) * 1960-03-29 1964-02-04 Gulton Ind Inc Self-calibrating accelerometer
US3479536A (en) * 1967-03-14 1969-11-18 Singer General Precision Piezoelectric force transducer
US3739202A (en) * 1970-08-28 1973-06-12 W Cady Instrument for responding to mechanical vibration of acceleration andfor converting the same into electric energy
DE2832762A1 (de) * 1977-10-25 1979-04-26 Kistler Instrumente Ag Beschleunigungsaufnehmer
GB2117115A (en) * 1982-03-23 1983-10-05 Standard Telephones Cables Ltd Surface acoustic wave accelerometer
GB2143326A (en) * 1983-07-14 1985-02-06 Standard Telephones Cables Ltd Surface acoustic wave accelerometer
DE3542397A1 (de) * 1985-11-30 1987-06-04 Philips Patentverwaltung Anordnung zur funktionspruefung von piezoelektrischen beschleunigungsaufnehmern
DE3817354A1 (de) * 1987-05-21 1988-12-01 Nissan Motor Sensor zur erfassung kinetischer energie, insbesondere piezoelektrischer sensor zur erfassung dynamischer oder kinetischer energie
WO1988010431A1 (en) * 1987-06-18 1988-12-29 Kellett Michael A Accelerometers and associated control circuits
EP0325674A1 (de) * 1988-01-29 1989-08-02 Kistler Instrumente AG Wandlerelement zur Messung einer Drehbeschleunigung
US4996878A (en) * 1988-01-29 1991-03-05 Kistler Instruments Ag Transducer element for measuring angular and linear acceleration
EP0351038A1 (en) * 1988-06-10 1990-01-17 Hewlett-Packard Company Improved accelerometer and method of manufacture
DE3843143A1 (de) * 1988-12-22 1990-06-28 Bosch Gmbh Robert Sensor zur bestimmung der winkelgeschwindigkeit

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4428124B4 (de) * 1994-08-09 2005-08-18 Robert Bosch Gmbh Beschleunigungssensor
DE19523984A1 (de) * 1994-09-09 1996-03-14 Murata Manufacturing Co Piezoelektrisches Element und Verfahren zum Herstellen desselben
DE19523984C2 (de) * 1994-09-09 2001-02-22 Murata Manufacturing Co Piezoelektrisches Element und Verfahren zum Herstellen desselben
DE4439297A1 (de) * 1994-11-07 1996-05-09 Pi Ceramic Gmbh Piezoelektrischer Sensor
EP2843421A1 (en) * 2013-08-29 2015-03-04 PGS Geophysical AS Piezoelectric accelerometer
US9470806B2 (en) 2013-08-29 2016-10-18 Pgs Geophysical As Piezoelectric accelerometer
US9841317B2 (en) 2013-08-29 2017-12-12 Pgs Geophysical As Piezoelectric accelerometer
US10175095B2 (en) 2013-08-29 2019-01-08 Pgs Geophysical As Piezoelectric accelerometer
EP3511723A1 (en) * 2013-08-29 2019-07-17 PGS Geophysical AS Piezoelectric accelerometer

Also Published As

Publication number Publication date
JPH05215766A (ja) 1993-08-24
DE4135369C2 (https=) 1993-08-19
US5473930A (en) 1995-12-12
SE9203114L (sv) 1993-04-27
SE9203114D0 (sv) 1992-10-23

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee