DE4132414A1 - Acceleration sensor with integrated sensitivity monitoring - contains piezoelectric element in one or more main axes, and operation is testable by stimulating flexural beam electrically or mechanically - Google Patents

Acceleration sensor with integrated sensitivity monitoring - contains piezoelectric element in one or more main axes, and operation is testable by stimulating flexural beam electrically or mechanically

Info

Publication number
DE4132414A1
DE4132414A1 DE19914132414 DE4132414A DE4132414A1 DE 4132414 A1 DE4132414 A1 DE 4132414A1 DE 19914132414 DE19914132414 DE 19914132414 DE 4132414 A DE4132414 A DE 4132414A DE 4132414 A1 DE4132414 A1 DE 4132414A1
Authority
DE
Germany
Prior art keywords
acceleration sensor
piezoelectric element
main axes
mechanically
stimulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19914132414
Other languages
German (de)
Inventor
Dieter Dipl Ing Naegele
Michael Dipl Ing Bischof
Manfred Dipl Ing Weinacht
Peter Ing Grad Hora
Hans Spies
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airbus Defence and Space GmbH
Original Assignee
Deutsche Aerospace AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Deutsche Aerospace AG filed Critical Deutsche Aerospace AG
Priority to DE9116730U priority Critical patent/DE9116730U1/en
Priority to DE19914132414 priority patent/DE4132414A1/en
Publication of DE4132414A1 publication Critical patent/DE4132414A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type

Abstract

The sensor has a piezoelectric element in one or more main axes sensitive to externally acting forces, esp. through dislocation of a flexible beam or similarly deflectable part. The sensitivity and functional monitoring are achieved by physical means. Testing involves using an electrical pulse to stimulate a flexural beam or mechanically stimulating a beam to vibrate. USE/ADVANTAGE - Sensor has integral sensitivity monitoring, i.e. physical sensor testing.

Description

Die Erfindung betrifft einen Beschleunigungssensor mit einem piezoelek­ trischen Element in einer oder mehreren Hauptachsen gegenüber auf ihn einwirkende äußere Kräfte empfindlich, insbesondere durch Dislozierung eines Biegebalkens oder ähnlichem auslenkbarem Teil.The invention relates to an acceleration sensor with a piezoelectric trical element in one or more major axes external forces are sensitive, especially due to displacement a bending beam or similar deflectable part.

Aufgabe der Erfindung ist es, eine integrierte Empfindlichkeitskontrolle (physikalische Prüfbarkeit des Sensors) zu schaffen.The object of the invention is an integrated sensitivity control (physical testability of the sensor).

Das System der integrierten Empfindlichkeitskontrolle bietet die Mög­ lichkeit, einen ein- oder mehrdimensionalen piezoelektrischen Beschleu­ nigungssensor mit Biegebalken physkalisch zu prüfen als Lösung gemäß An­ spruch 1.The system of integrated sensitivity control offers the poss a one- or multi-dimensional piezoelectric accelerator Physically check the inclination sensor with a bending beam as a solution according to An saying 1.

Das System besteht in der einfachsten Ausführungsform aus einem elektri­ schen Biegebalken, dessen Basisblock durch eine piezoelektrische Keramik derart gestaltet ist, daß die Systeme elektrisch getrennt und mechanisch so verbunden sind, daß durch Anlegen einer Spannung am Basisblock eine Dislozierung und/oder Verbiegung des Biegebalkens entsteht. Die daraus resultierende Beschleunigung und/oder Verbiegung kann so definiert wer­ den, daß eine Empfindlichkeits- und Funktionskontrolle entsteht. Durch geeignete Nutzung von z. B. Resonanzeffekten kann darüberhinaus über das genaue physikalische Verhalten des Aufnehmers eine definierte Aussage gemacht werden. Dies ist auf unterschiedliche Art und Weise möglich. Siehe dazu Ausführungsbeispiele in Fig. 1 und 2.The system consists in the simplest embodiment of an electrical bending beam's base block is designed by a piezoelectric ceramic such that the systems are electrically isolated and mechanically connected so that a displacement and / or bending of the bending beam arises by applying a voltage to the base block . The resulting acceleration and / or bending can be defined in such a way that a sensitivity and function control is created. By appropriate use of e.g. B. resonance effects can also make a defined statement about the exact physical behavior of the sensor. This can be done in different ways. See exemplary embodiments in FIGS. 1 and 2.

Bei weiteren Ausführungsformen wird nur ein Biegebalken elektrisch ange­ regt, es entsteht im anderen Biegebalken, dem eigentlichen Sensor, durch die mechanische Kopplung eine Ladung. Durch einen elektrischen Impuls auf einen Biegebalken läßt sich somit eine Beschleunigung simulieren, welche mit dem mechanisch gekoppelten Biegebalken gemessen werden kann. Siehe Fig. 3 bis 5. In further embodiments, only one bending beam is electrically excited, a charge is created in the other bending beam, the actual sensor, by the mechanical coupling. An acceleration that can be measured with the mechanically coupled bending beam can thus be simulated by an electrical impulse on a bending beam. See Figs. 3 to 5.

In allen Fällen sind die beiden Biegebalken sowie Vorverstärker und Testimpulsaufbereitung in einem TO3-ähnlichen Gehäuse untergebracht.In all cases, the two bending beams as well as preamplifiers and Test pulse processing housed in a TO3-like housing.

Ein ähnliches Verfahren ist auch für mikromechanische Beschleunigungs­ aufnehmer durchführbar.A similar procedure is also used for micromechanical acceleration transducer feasible.

Vorteile der Erfindung/Nachteile des Bekannten. Auf die oben beschriebene Art und Weise läßt sich die Empfindlichkeit des Beschleunigungssensors durch Ansteuerung des Stimulations-Piezos physikalisch (d. h. durch Auslenkung) testen. Bei Sensoren ohne inte­ grierte Empfindlichkeitskontrolle ist dies nicht möglich. Durch einen elektrischen Testimpuls läßt sich lediglich das Vorhandensein des Biege­ balkens feststellen, nicht aber die Empfindlichkeit.Advantages of the invention / disadvantages of the known. The sensitivity can be adjusted in the manner described above of the acceleration sensor by controlling the stimulation piezo test physically (i.e. by deflection). For sensors without inte This is not possible with the sensitivity control. Through a electrical test pulse can only be the presence of the bend bar, but not the sensitivity.

Anwendung: Für den Einsatz in der Kfz-Sicherheitselektronik, wie z. B. Airbag- und Gurtstraffersysteme, Unfall-Datenschreiber, Fahrwerksensoren und sonsti­ gen Anwendungen für Beschleunigungsaufnehmer.Application: For use in automotive safety electronics, such as B. Airbag and Belt tensioner systems, accident data recorders, chassis sensors and others applications for accelerometers.

Claims (3)

1. Beschleunigungssensor mit einem piezoelektrischen Element in ei­ ner oder mehreren Hauptachsen gegenüber auf ihn einwirkende äußere Kräf­ te empfindlich, insbesondere durch Dislozierung eines Biegebalkens oder ähnlichem auslenkbarem Teil, dadurch gekennzeichnet, daß die Empfind­ lichkeits- und Funktionskontrolle auf physikalischem Wege durchgeführt wird.1. Acceleration sensor with a piezoelectric element in egg ner or several main axes sensitive to external forces acting on it, in particular by dislocation of a bending beam or similar deflectable part, characterized in that the sensitivity and function control is carried out physically. 2. Beschleunigungssensor nach Anspruch 1, dadurch gekennzeichnet, daß die Prüfung durch einen elektrischen Impuls zur Anregung eines Bie­ gebalkens erfolgt.2. Acceleration sensor according to claim 1, characterized in that testing by an electrical pulse to excite a Bie beamed. 3. Beschleunigungssensor nach Anspruch 1, dadurch gekennzeichnet, daß die Prüfung durch mechanische Schwingungsanregung des gekoppelten Biegebalkens erfolgt.3. Acceleration sensor according to claim 1, characterized in that the test is coupled by mechanical vibration excitation Bending beam takes place.
DE19914132414 1991-09-28 1991-09-28 Acceleration sensor with integrated sensitivity monitoring - contains piezoelectric element in one or more main axes, and operation is testable by stimulating flexural beam electrically or mechanically Withdrawn DE4132414A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE9116730U DE9116730U1 (en) 1991-09-28 1991-09-28 Accelerometer with integrated sensitivity control
DE19914132414 DE4132414A1 (en) 1991-09-28 1991-09-28 Acceleration sensor with integrated sensitivity monitoring - contains piezoelectric element in one or more main axes, and operation is testable by stimulating flexural beam electrically or mechanically

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19914132414 DE4132414A1 (en) 1991-09-28 1991-09-28 Acceleration sensor with integrated sensitivity monitoring - contains piezoelectric element in one or more main axes, and operation is testable by stimulating flexural beam electrically or mechanically

Publications (1)

Publication Number Publication Date
DE4132414A1 true DE4132414A1 (en) 1993-04-08

Family

ID=6441740

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19914132414 Withdrawn DE4132414A1 (en) 1991-09-28 1991-09-28 Acceleration sensor with integrated sensitivity monitoring - contains piezoelectric element in one or more main axes, and operation is testable by stimulating flexural beam electrically or mechanically

Country Status (1)

Country Link
DE (1) DE4132414A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19919030A1 (en) * 1999-04-27 2000-11-16 Bosch Gmbh Robert Determination of material properties, such as Young's Modulus, of micro-structures with dimensions less than around 2 mm by deflection of a test element and measurement of a representative value before and during deflection
US6474134B1 (en) * 1999-03-26 2002-11-05 Ngk Insulators, Ltd. Method for adjusting sensitivity of acceleration sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3736294C2 (en) * 1987-10-27 1990-07-19 Messerschmitt-Boelkow-Blohm Gmbh, 8012 Ottobrunn, De

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3736294C2 (en) * 1987-10-27 1990-07-19 Messerschmitt-Boelkow-Blohm Gmbh, 8012 Ottobrunn, De

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6474134B1 (en) * 1999-03-26 2002-11-05 Ngk Insulators, Ltd. Method for adjusting sensitivity of acceleration sensor
DE19919030A1 (en) * 1999-04-27 2000-11-16 Bosch Gmbh Robert Determination of material properties, such as Young's Modulus, of micro-structures with dimensions less than around 2 mm by deflection of a test element and measurement of a representative value before and during deflection

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