DE4128382C1 - - Google Patents

Info

Publication number
DE4128382C1
DE4128382C1 DE4128382A DE4128382A DE4128382C1 DE 4128382 C1 DE4128382 C1 DE 4128382C1 DE 4128382 A DE4128382 A DE 4128382A DE 4128382 A DE4128382 A DE 4128382A DE 4128382 C1 DE4128382 C1 DE 4128382C1
Authority
DE
Germany
Prior art keywords
groove
evaporation
extending
recess
approximately
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE4128382A
Other languages
German (de)
English (en)
Inventor
Siegfried 6452 Hainburg De Kleyer
Jochen 6301 Leigestern De Heinz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE4128382A priority Critical patent/DE4128382C1/de
Priority to US07/770,854 priority patent/US5198032A/en
Application granted granted Critical
Publication of DE4128382C1 publication Critical patent/DE4128382C1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE4128382A 1991-08-27 1991-08-27 Expired - Fee Related DE4128382C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE4128382A DE4128382C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-27 1991-08-27
US07/770,854 US5198032A (en) 1991-08-27 1991-10-03 Apparatus for vapor depositing on tape having grooved evaporator cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4128382A DE4128382C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-27 1991-08-27

Publications (1)

Publication Number Publication Date
DE4128382C1 true DE4128382C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-02

Family

ID=6439215

Family Applications (1)

Application Number Title Priority Date Filing Date
DE4128382A Expired - Fee Related DE4128382C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-27 1991-08-27

Country Status (2)

Country Link
US (1) US5198032A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE4128382C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0652303A1 (en) * 1993-11-09 1995-05-10 General Vacuum Equipment Limited Evaporator for vacuum web coating
EP0756020A1 (de) * 1995-07-28 1997-01-29 Balzers und Leybold Deutschland Holding Aktiengesellschaft Verfahren und Vorrichtung zur Herstellung von metallfreien Streifen bei der Metallbedampfung
DE10200909A1 (de) * 2002-01-12 2003-07-24 Applied Films Gmbh & Co Kg Verdampferschiffchen für eine Vorrichtung zur Beschichtung von Substraten
WO2008025447A1 (de) * 2006-09-01 2008-03-06 Esk Ceramics Gmbh & Co. Kg Keramische verdampferschiffchen, verfahren zu ihrer herstellung und ihre verwendung
WO2009121700A1 (de) * 2008-04-01 2009-10-08 Kennametal Sintec Keramik Gmbh Verdampferkörper

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4222013A1 (de) * 1992-07-04 1994-01-05 Leybold Ag Vorrichtung zur Vakuumbeschichtung von Folien
DE19607400C2 (de) * 1996-02-28 1999-09-09 Leybold Ag Verdampferschiffchen für eine Vorrichtung zur Beschichtung von Substraten
EP1408135A1 (en) * 2002-10-08 2004-04-14 Galileo Vacuum Systems S.R.L. Apparatus for physical vapour deposition
BRPI0416831A (pt) * 2003-11-20 2007-02-13 Denki Kagaku Kogyo Kk elemento de aquecimento de evaporação de metal e método para evaporação de metal
WO2022038548A1 (en) * 2020-08-19 2022-02-24 3M Innovative Properties Company Evaporation boat for evaporation of metals

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2962538A (en) * 1958-01-30 1960-11-29 Continental Can Co Vaporizing heater for vacuum deposition and method of employing the same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3117887A (en) * 1961-11-13 1964-01-14 Republic Steel Corp Apparatus and procedure for evaporating metal in vacuum metalizing
EP0311302B1 (en) * 1987-10-07 1992-06-24 THORN EMI plc Apparatus and method for the production of a coating on a web

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2962538A (en) * 1958-01-30 1960-11-29 Continental Can Co Vaporizing heater for vacuum deposition and method of employing the same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0652303A1 (en) * 1993-11-09 1995-05-10 General Vacuum Equipment Limited Evaporator for vacuum web coating
EP0756020A1 (de) * 1995-07-28 1997-01-29 Balzers und Leybold Deutschland Holding Aktiengesellschaft Verfahren und Vorrichtung zur Herstellung von metallfreien Streifen bei der Metallbedampfung
DE10200909A1 (de) * 2002-01-12 2003-07-24 Applied Films Gmbh & Co Kg Verdampferschiffchen für eine Vorrichtung zur Beschichtung von Substraten
WO2008025447A1 (de) * 2006-09-01 2008-03-06 Esk Ceramics Gmbh & Co. Kg Keramische verdampferschiffchen, verfahren zu ihrer herstellung und ihre verwendung
WO2009121700A1 (de) * 2008-04-01 2009-10-08 Kennametal Sintec Keramik Gmbh Verdampferkörper
US10513771B2 (en) 2008-04-01 2019-12-24 Kennametal Sintec Keramik Gmbh Vaporizer body
US11473187B2 (en) 2008-04-01 2022-10-18 Kennametal Sintec Keramik Gmbh Vaporizer body

Also Published As

Publication number Publication date
US5198032A (en) 1993-03-30

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Legal Events

Date Code Title Description
8100 Publication of the examined application without publication of unexamined application
D1 Grant (no unexamined application published) patent law 81
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG, 63450

8339 Ceased/non-payment of the annual fee