DE3771831D1 - Verfahren zur herstellung piezoelektrischer multisensorelemente. - Google Patents

Verfahren zur herstellung piezoelektrischer multisensorelemente.

Info

Publication number
DE3771831D1
DE3771831D1 DE8787308529T DE3771831T DE3771831D1 DE 3771831 D1 DE3771831 D1 DE 3771831D1 DE 8787308529 T DE8787308529 T DE 8787308529T DE 3771831 T DE3771831 T DE 3771831T DE 3771831 D1 DE3771831 D1 DE 3771831D1
Authority
DE
Germany
Prior art keywords
multisensor
elements
producing piezoelectric
piezoelectric
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787308529T
Other languages
German (de)
English (en)
Inventor
Carol Z Rosen
Ernest C Wittke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Singer Co
Original Assignee
Singer Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Singer Co filed Critical Singer Co
Application granted granted Critical
Publication of DE3771831D1 publication Critical patent/DE3771831D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
DE8787308529T 1986-10-22 1987-09-25 Verfahren zur herstellung piezoelektrischer multisensorelemente. Expired - Fee Related DE3771831D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/921,520 US4769882A (en) 1986-10-22 1986-10-22 Method for making piezoelectric sensing elements with gold-germanium bonding layers

Publications (1)

Publication Number Publication Date
DE3771831D1 true DE3771831D1 (de) 1991-09-05

Family

ID=25445555

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787308529T Expired - Fee Related DE3771831D1 (de) 1986-10-22 1987-09-25 Verfahren zur herstellung piezoelektrischer multisensorelemente.

Country Status (8)

Country Link
US (1) US4769882A (https=)
EP (1) EP0265090B1 (https=)
JP (1) JPS63190391A (https=)
AU (1) AU595071B2 (https=)
CA (1) CA1317478C (https=)
DE (1) DE3771831D1 (https=)
IL (1) IL83901A (https=)
NO (1) NO178317C (https=)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1642962A3 (ru) * 1989-06-16 1991-04-15 Е.И.Новиков Пьезочастотный датчик силы
JP3039971B2 (ja) * 1989-09-19 2000-05-08 株式会社日立製作所 接合型圧電装置及び製造方法並びに接合型圧電素子
FR2693795B1 (fr) * 1992-07-15 1994-08-19 Commissariat Energie Atomique Jauge de contrainte sur support souple et capteur muni de ladite jauge.
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5755909A (en) * 1996-06-26 1998-05-26 Spectra, Inc. Electroding of ceramic piezoelectric transducers
US6164140A (en) * 1998-10-09 2000-12-26 Kalinoski; Richard W. Solid state transducer for Coriolis flowmeter
US6508129B1 (en) * 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
AU2629901A (en) 2000-01-06 2001-07-16 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (mems)
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
JP2002144239A (ja) * 2000-11-08 2002-05-21 Alps Engineering:Kk ノズル
US6672168B2 (en) 2001-09-24 2004-01-06 Andrew Braugh Multi-level machine vibration tester marker pen
US6848316B2 (en) 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
WO2004023572A1 (en) * 2002-08-30 2004-03-18 Usc Corporation Piezoelectric generator
EP1664705B1 (de) * 2003-09-17 2013-04-17 Kistler Holding AG Mehrschichtiges piezoelektrisches messelement und ein druck- oder kraftsensor umfassend ein solches messelement
JP3866258B2 (ja) * 2004-08-24 2007-01-10 太平洋セメント株式会社 圧電デバイスおよびこれを備える圧電スイッチ
CH701162B1 (de) * 2006-04-20 2010-12-15 Vectron International Inc Elektro-akustischer Sensor für Hochdruckumgebungen.
WO2011035147A2 (en) * 2009-09-18 2011-03-24 Delaware Capital Formation, Inc. Controlled compressional wave components of thickness shear mode multi-measurand sensors
WO2020194026A1 (en) * 2019-03-23 2020-10-01 Secretary, Department Of Atomic Energy Diffusion bonding of piezoelectric crystal to metal wear plate
CN110379916B (zh) * 2019-07-05 2020-10-27 中国科学院物理研究所 压电陶瓷元件的制备方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2709147A (en) * 1951-09-12 1955-05-24 Bell Telephone Labor Inc Methods for bonding silica bodies
US3179826A (en) * 1961-09-14 1965-04-20 Trott Winfield James Piezolelectric assembly
AT237930B (de) * 1962-09-12 1965-01-11 Hans Dipl Ing Dr Techn List Piezoelektrische Einrichtung, insbesondere zur Kraftmessung, und Verfahren zu ihrer Herstellung
US3590467A (en) * 1968-11-15 1971-07-06 Corning Glass Works Method for bonding a crystal to a solid delay medium
FR2182295A5 (https=) * 1972-04-25 1973-12-07 Thomson Csf
US3897628A (en) * 1973-11-19 1975-08-05 Rca Corp Method of forming a thin piezoelectric body metallically bonded to a propagation medium crystal
US3986251A (en) * 1974-10-03 1976-10-19 Motorola, Inc. Germanium doped light emitting diode bonding process
US4042951A (en) * 1975-09-25 1977-08-16 Texas Instruments Incorporated Gold-germanium alloy contacts for a semiconductor device
US4109031A (en) * 1976-12-27 1978-08-22 United Technologies Corporation Stress relief of metal-ceramic gas turbine seals
US4078711A (en) * 1977-04-14 1978-03-14 Rockwell International Corporation Metallurgical method for die attaching silicon on sapphire devices to obtain heat resistant bond
US4295373A (en) * 1980-04-03 1981-10-20 United Technologies Corporation Fluidic angular rate sensor with integrated impulse jet pump assembly
JPS59145583A (ja) * 1983-02-09 1984-08-21 Matsushita Electric Ind Co Ltd 積層型圧電変位素子

Also Published As

Publication number Publication date
JPH0346991B2 (https=) 1991-07-17
IL83901A (en) 1994-08-26
NO874390D0 (no) 1987-10-21
EP0265090A2 (en) 1988-04-27
NO178317C (no) 1996-02-28
EP0265090A3 (en) 1988-09-21
AU7944087A (en) 1988-04-28
JPS63190391A (ja) 1988-08-05
CA1317478C (en) 1993-05-11
AU595071B2 (en) 1990-03-22
US4769882A (en) 1988-09-13
NO874390L (no) 1988-04-25
EP0265090B1 (en) 1991-07-31
NO178317B (no) 1995-11-20

Similar Documents

Publication Publication Date Title
DE3770873D1 (de) Verfahren zur herstellung mesophaser peche.
DE3765836D1 (de) Verfahren zur herstellung mesophaser peche.
DE3771831D1 (de) Verfahren zur herstellung piezoelektrischer multisensorelemente.
DE3762745D1 (de) Verfahren zur herstellung von 2-chlor-5-chlormethylthiazol.
DE3763558D1 (de) Verfahren zur herstellung von 2-chlor-5-chlormethylpyridin.
DE3877558D1 (de) Verfahren zur herstellung polybromierter hoeherer alkylbenzole.
DE3773889D1 (de) Verfahren zur herstellung von merkaptomethylphenolen.
DE3865476D1 (de) Verfahren zur herstellung von aminopropylalkoxysilanen.
DE3853160D1 (de) Verfahren zur herstellung von elektrophotographien.
DE3780704D1 (de) Verfahren zur herstellung von n-acyltetrahydroisochinoline.
DE3860666D1 (de) Verfahren zur herstellung von hexabromcyclododekan.
DE3863586D1 (de) Verfahren zur herstellung von m-triflourmethylphenylacetonitril.
DE3861891D1 (de) Verfahren zur herstellung von epichlorhydrinen.
DE3861189D1 (de) Verfahren zur herstellung von polysilazanen.
DE3868798D1 (de) Verfahren zur herstellung von m-benzyltoluol.
DE3766910D1 (de) Verfahren zur herstellung von dihydrocyclocitral.
DE3769076D1 (de) Verfahren zur herstellung von fluorbenzaldehyden.
DE3863321D1 (de) Verfahren zur herstellung von naphthacenen.
DE3764316D1 (de) Verfahren zur herstellung von furfurylalkoholen.
DE3872100D1 (de) Verfahren zur herstellung von phenylaethanolaminotetralinen.
DE3769263D1 (de) Verfahren zur herstellung von bromfluoroethylhypofluorit.
DE3777475D1 (de) Verfahren zur herstellung von polyphenylen-ether-polyester-copolymeren.
DE3767948D1 (de) Verfahren zur herstellung von tertiaeren alkylphosphanen.
DE3783792D1 (de) Verfahren zur herstellung von inulase.
DE3780107D1 (de) Verfahren zur herstellung von hydroxynaphthalenen.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee